IEEE SF Bay Area MEMS & Sensors

http://sites.ieee.org/scv-mems/meetings/

January 22, 2014

Emergence of

Trillion Sensors Movement

Dr. Janusz Bryzek

Chair, TSensors Summit

Vice President, MEMS and Sensing Solutions, Fairchild Semiconductor

IEEE MEMSSanta Clara, CA, January 22, 2014

2

NovaSensorSelected MEMS Devices from my Companies

Acceleration sensor Catheter tip pressure sensor

Microwave power meterFirst DRIE based

hydrophone

First fusion bonded pressure sensor.Shipped billions

units

First DRIE pressure sensor

Pressure Sensor

2 Axis Acceleration

Sensor

ASIC

Tire pressure sensor

Tire pressure sensor moduleEnergy scavenger

1200 fiber block with lens arrayIntegrated 2D mirror Million pixel optical

position detector

1000x1000 port optical switchConsumer inertial sensors

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Introduction to Abundance*

• Abundance* movement forecasts elimination in one

generation (20 to 30 years) of major global problems:

• Hunger

• Lack of medical care

• Lack of clean water and air

• Lack of energy

• Abundance forecasts the need for (among others) 45

trillion sensors, many not yet developed.

• Historical sensor development cycles from prototypes

in academic labs to volume production were 30

years.

• Left to historical cycles, slow new sensor

commercialization would delay the Abundance.

• TSensors (Trillion Sensors) Movement aims at

acceleration of new sensors development cycle.

2013 2023 2033 2043

Global Goods and Services

Demand

Supply

* http://www.abundancethebook.com/

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Bill Gates: No Poor Countries by 2035

http://qz.com/168341/bill-gates-predicts-there-will-be-almost-no-poor-countries-by-2035/

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Abundance Enablers• Exponential technologies:

– Biotechnology and bioinformatics

– Medicine

– Nanomaterials and nanotechnology

– Networks and sensors (45 trillion networked sensors in 20 years).

– Digital manufacturing (3D printing) and infinite computing

– Computational systems

– Artificial intelligence

– Robotics

• DIY (Do-it-Yourself) revolution:– Power of individual innovators capable of “impossibles”.

– E.g., flying into space (Burt Rattan) and sequencing human genome (Craig Venter), building

electric car (Elon Musk), etc.

• Unrivaled in history technophilanthropic force:– Funded by billionaires (Gates, Zuckenberg, Omidyars, etc.).

• The rising billion:– Billion of the very poorest of the poor on earth is being plugged into global economy through a

global transportation network, Internet, microfinance and wireless communication.

• Abundance becomes possible as a result of multiple emerging global economic

tides, such as IoT and Digital Health.

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Abundance Aftershock*

• Rapid market evolution is expected to replace 40% of current Fortune 500

companies within 10 years…

• By companies we didn‟t hear about yet.

* Peter Diamandis, November 2013

7

Period Estimate MEMS SEMI MEMS+SEMI

2013-2018

Low 15%/y 3%/y 3.6%/y

High 30%/y 3%/y 5.9%/y

2018-2023

Low 20%/y 6%/y 6.7%/y

High 50%/y 6%/y 12.3%/y

MEMS Migration into Mainstream

Growth Assumptions:

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Trillion Sensors (TSensors) Visions

• Mobile sensor market for volumes not

envisioned by leading market research

organizations in 2007, grew exponentially

212%/y between 2007 and 2012.

• Several organizations created visions for a

continued growth to trillion(s).• Most market research companies don‟t yet see it.

• Explosion to trillion(s) is likely to be driven by new

applications not yet envisioned by leading market

research organization.

• Forecasting thus needs visionaries!

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TSensors Acceleration Approach

• Invite visionaries to predict many of the new ultrahigh volume sensor based

applications (TApps) to generate an upfront development focus. – Ultrahigh volumes are required to enable global impact.

– 2013 TSensors Summit at Stanford collected the first set of such visions.

– Next TSensor Summits:

• Japan February 20-21, 2014

• China August 2014

• Germany September 16-17, 2014

• San Diego, November 2014

• Convert visionary TApps into a limited number of TSensing Platforms.– This will be a first step towards potential process standardization, maximizing the number of

supported applications for each platform.

• Open the development challenges to crowd genius (global development

community)• Perhaps form dedicated development organizations (startups) with Board or Advisory Board

including entrepreneurs with scars in sensor technology commercialization.

• Facilitate funding the development of TSensing Platforms• Potentially include target customers, supply chain companies, crowdfunding, techno-philanthropic

organizations, Governments, academia-Government-industry consortia, Cooptition and Incentive

Competition (similar to XPrize Foundation‟s in multiple health sensing areas).

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TApps from TSensors Summit at Stanford

• About 300 presented ultrahigh volume emerging sensor based applications

were grouped into the following TApps:

• Education: sensors and IoT

• Noninvasive fitness-wellness-health monitoring (expandable to animal health)

• Noninvasive chronic disease monitoring

• Minimally invasive fitness-wellness-health monitoring (expandable to animal health)

• Personal imaging

• Computer senses

• Environment sensing

• Sensors for food production

• Smart grid/Energy/Harsh environment sensors

• Energy harvesting

• Ultralow power wireless communication

• Network infrastructure for Internet of Things

• Next step: search for sensing technology platforms with largest applicability to

TApps

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Global Tides Driving Demand for Sensors

• Global (somewhat overlapping) tides driving demand for smart

systems include:

• Internet of Things

• Connecting devices around us through new network architecture to

enable low latency control.

• Mobile market

• Transitioning to unPad like infrastructure.

• Wearable market

• Bringing fitness, wellness and health monitoring to all of us.

• Digital Health

• Improving health diagnostics and therapeutics while reducing cost.

• Context Computing

• Deriving information about us (such as feelings) and around us.

• CeNSE, Central Nervous System for the Earth, building global

environment monitoring.

• 5-in-5

• Five senses for computers in five years

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13

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Internet of Everything (IoE)

• Boldest forecast for IoE was made by John Chambers, CEO of Cisco, at 2014

CES Show in Las Vegas:

• $19 trillion by 2020.

• This represents over 20% of the global 2020 GDP !!!

• Flavio Bononi, while VP and Fellow of Cisco, delivered a forecast for networked

sensors:

• $1 trillion by 2020

• $1/networked sensor

• Recent $3.2B acquisition of Nest by Google validates market growth.

• First $multibillion hardware startup acquisition in a long time; New Era for startups?

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Global Tides will Ride on Smart Systems

• Smart Systems are defined by Harbor

Research* as a fusion of computing,

communication and sensing.

• This enables “Smart Business”, thus:

• Truly connected world of machines,

people, video streams, maps, newsfeeds,

and sensors.

• Convergence of physical & virtual worlds,

thus enabling collective awareness,

creativity, and better decision making

capabilities.

• Many observers believe that this

phenomenon will drive the largest growth

opportunity in the history of business.

• Largest bull market over the next 20

years?

* http://harborresearch.com/

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Jobs, Jobs, Jobs…

• Assuming an average revenue per employee in developed countries at:

– $200,000/year for component companies

– $500,000/year (equal to 2011 NASDAQ 100 average) for smart system companies.

• Assuming further, based on Cisco forecast:

– Average selling price of the wireless smart sensor at $1.

– Smart system selling price $15.

• Trillion smart system would thus represent in 2023:

– 5 million new direct jobs in component industries.

– 30 million new direct jobs in system industries.

• Assuming indirect jobs multiplier of 3, this would result in 105 million additional

jobs, for a total of 140 million jobs.

– Indirect job multiplier for knowledge workers has been between 2 and 4 (depending

on region).

– As a reference, the US created only 1.3M new jobs between 2002 and 2012, primarily

in Government and medical sectors.

– Note: total US employment in December 2013 was 144M.

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Jobs Where?

• Sensor based systems require a high-tech work force.

• Majority of created jobs will likely be for knowledge workers.

• An example of a sensor based system could be Apple‟s iPhone 4s, which had

the following breakdown of 2011 selling price:

– 3% ($14) cost of assembly (China)

– 32% ($178) cost of components (global)

– 66% ($368) Apple‟s share (US)

100% ($560) selling price

• Most of “sensor and smart systems” jobs will likely be in industrialized countries.

Fortune Magazine 2011

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Challenges for TSensors

• User adoption.

• Cycle time for commercialization.

• Bleeding edge technologies.

• Standardization.

• Development of algorithms

enabling derivation of useful

information.

• Bandwidth sharing wireless

communication.

• Battery/scavenger sources

enabling power for life.

• Network architecture enabling low

latency control.

• Scaling network size enabling

processing of sensor generated

data at the level of Brontobytes.

• Available funding.

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Software for TSensors

• Sensors fusion

– E.g., Kalman filter merging data from acceleration, rate, magnetic and pressure

sensors. to improve accuracy and lower processing power.

• Data fusion

– E.g., merging data from inertial sensors, GPS and weather service.

• Sensing services

– E.g., providing oil location and its quantity based of underground explosions

monitored by millions sensors.

• Big data

– E.g., collecting and processing 16 bit data from all sensors (e.g., 12) in all cellphones

(e.g., 5 billion) with 100 Hz data rate (3 ZettaBytes/year)

• Small data

– Processed big data, e.g., you just exceeded your calorie intake for the day; stop

eating.

Multiple startups popped to address sensor generated data.

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Incentives for TSensors Adoption

• Cost reduction of medical care, currently growing out of control.– Insurance companies are already funding development of new technologies potentially reducing

health care cost.

• E.g., IBM‟s Dr. Watson, http://www.sbwire.com/press-releases/2019-telemedicine-and-m-health-

convergence-market-shares-strategies-and-forecasts-worldwide-347599.htm).

– Governments will be doing their share as well.

• A recent example could be Massachusetts Life Science Commission funding projects across the state of

Massachusetts universities at $240M, including Personalized Health Monitoring at UMass Amherst at $95M.

• Improved quality of medical care and prevention.• We will be personally monitoring our health, enabling us not only to do a better job based on

measured data than doctor‟s office, but also able to detect many problems very early.

• This will be a strong incentive for users‟ adoption.

• Energy savings.• For example, some estimate about 30% of office building HVAC energy cost reduction when smart

HVAC systems are installed, a very short ROI.

• Fun

• As Intel presented last year, about 30% of trillion sensors will be changing our

lifestyles, giving us more fun, thus easy adoption.

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Incentives for TSensors Adoption

• Government policies

• Many countries already have mandated reduction of pollution of air, water, food,

reduction of energy use, etc.

• E.g., past Governments regulations in automotive industry, drove massive adoption of

sensors improving fuel economy (pressure, flow, exhaust) and safety (acceleration, gyro) and

pollution (pressure, flow, exhaust).

– The compliance will require deployment of smart systems.

• Motivations for academia, Governments and industry:

– Emergence of very large market.

– Challenging problems to solve.

– Creation of new jobs.

– Acceleration of Abundance.

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Accelerating Development through Competition

• $2.25M Nokia Sensing XChallenge

• Nanobiosym Health Radar won $525,000 Grand Prize award in 2013.

• Enables testing of a drop of blood or saliva with a nanochip inserted into a mobile device. It

detects the presence (or absence) of selected disease's pathogen in real-time, with gold

standard accuracy.

• $120,000 Distinguished Award winners demonstrated game-changing technology:

• Elfi-Tech - Using advanced optics in a device smaller than a penny, non-invasively measures

skin blood flow, velocity, coagulation and vascular health.

• InSilixa - Using blood, saliva or urine, created a single CMOS chip that analyzes proteins

and nucleic acids to detect diseases and health status.

• MoboSens - Water and biofluids can be analyzed rapidly with smartphone-based sensor that

reports on the presence of chemical contaminants and bacteria.

• Owlstone - Using a "digital nose" sensor, can detect the presence of chemicals in

concentrations down to parts per trillion. identifying disease from user's breath or body fluids.

• Silicon BioDevices - Using blood drawn from a small finger stick, sensor diagnoses and

transmits results to mobile devices or electronic medical record (EMR) systems.

• Qualcomm‟s $10M Xprize competition to detect 15 most common diseases and

2014 Nokia competitions are still open.

• 32 teams from 9 countries are competing.

2424

The Amazing Word of

Sensor Based Products

25

Yole 2012

MEMS Studded Mobile Devices$CAGR: 35%/year!

Samsung Galaxy S4: MEMS usage

leader. Additionally, it has:

• 3 microphones

• Over 30 FBARs filters

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Startup Studded Emerging Market

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Amazing Sensor Based Products

Breast lumps self-exams

(mammogram) sensor from Eclipse

Breast Health Technologies

Smart sock from Owlet Baby Care

monitors infant‟s quality of sleep, blood

oxygenation levels, and skin temperature

iSonea personal asthma

wheeze monitor

Hexoskin‟s sensor-packed T-

shirt analyzing movement,

breathing and heart activitySmartOne infant monitor measures

temperature, baby orientation and breathing

http://www.omsignal.com/

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Wrist based Sensor Systems

Wellograph Wellness Watch

9DOF + Heart monitor Netatmo’s June bracelet with UV sensor

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More Sensor Variety

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FitBark pet activity trackerhttp://www.cbsnews.com/pictures/wearable-technology-ces-2014/9/

http://www.cbsnews.com/pictures/wearable-technology-ces-2014/5/

YEI Technology virtual reality sensors capture

player movement

Smart diapers will monitor urinary tract infection,

prolonged dehydration, developing kidney problems.http://www.indiegogo.com/projects/pixie-scientific-smart-diapers

MTM RAD watch includes integrated Geiger-

Müller tube for measuring ionizing radiation

http://www.gizmag.com/mtm-rad-watch-geiger-counter/28389/pictures

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Sporting Along

Sensor based tennis racket from Babolat

Zepp sensors, available for golf, baseball and tennis, analyze 1,000 data points per second to create 3D representations

of a player's swing

Onewheel: the self-balancing electric skateboard that gives you the feeling of flying

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Amazing Sensor Based Products

Nike‟s smart shoe insert with

8 sensors

Shake stabilized spoon for

Parkinson disease patients from

Lift Labs

Mobile Xray station from

Tribogenics

Tatooed sensors from UCSD

Breast cancer killing chip from

Northwestern University

Ultrasound scanner from

Mobisante

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Amazing Sensor Based Products

EKG monitor from AliveCor

Uchek (MIT) detects 25 diseases,

such as diabetes, urinary tract

infections, and pre-clampsia, levels of

glucose, proteins, ketones, and more.

Preventice „s smart bandage

constantly tracks cardiac ECG and

rhythm monitoring

EKG monitor from Quardio

Lapka can detect radiation and

organicity of food.

Fraunhofer‟s glucose, lactate and

cholesterol sensors, pulse oximeter,

and a fluorescence sensor for

detecting biomarkers

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Brain Activity Sensing by InterXon

• Brain-controlled interface (BCI)

technology harnesses various types of

electrical waves that the brain neurons

produce.

• When you‟re asleep, your brain emits

„delta‟ waves.

• When you‟re calm and relaxed, you create

more „alpha‟ and „theta‟ waves.

• When you‟re concentrating on something,

your brain creates either „beta‟ or 'gamma'

waves.

• EEG sensors read and interpret these

waves, and software converts brainwaves

into digital signals that various apps can

understand.

• But, BCI can‟t (yet):

• Read your mind.

• Record your dreams.

• Reveal your secrets.

• Control your thoughts.

http://interaxon.ca/

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Emotiv EPOC: Brain Measurement System

• Revolutionary personal interface for human -

computer interaction.

• High resolution, multi-channel, wireless

neuroheadset based on 14 sensors plus 2

references to detect from brainwaves the user‟s

thoughts, feelings and expressions in real time.

• Enables a fantasy of controlling and influencing

the virtual environment with your mind.

• Amazing range of advanced algorithms allow

these headsets to detect :

• Subconscious emotional states

• Facial expressions

• User-trained mental commands which can control

existing and custom applications and games as if by

magic.

• Allows computers to react to your moods and

deliberate commands in a more natural way. http://www.emotiv.com/epoc/

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Emotion Expression and Control

Brainwaves driven ears and tail from Necomimi

($69) express your emotional state before you

start talking.

Smart Bra concept is aimed at helping people

ward off emotional eating (Image: Microsoft)

using EKG and EDA, an electrodermal activity

sensor measuring skin conductance (moisture)

and movement (respiration rate).http://www.necomimi.com/ http://www.telegraph.co.uk/technology/microsoft/10499811/Microsoft-developing-smart-bra.html

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Cuffless Blood Pressure Measurement

Sotera Wireless‟ non-invasive

measures continuous blood

pressure, along with pulse

rate, skin temperature,

electrocardiogram, blood

oxygenation and respiration

rate and temperature.

Cnoga‟s device spectrometrically

measures noninvasively blood

pressure, blood oxygen, and

pulse.

HealthStats watch measures blood

pressure using applanation

tonometry.

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Noninvasive Glucose Monitoring

Integrity Applications‟

employs a combination

of ultrasound,

electromagnetic, and

thermal technologies to

obtain blood glucose

readings

Biosensors „ approach is

based on electromagnetic

impedance spectroscopy

(EIS) and electromagnetic

impedance tomography

(EIT).

Cnoga‟s device measuresglucose, heartbeat, skin

resistance, quality of skin collagen, skin health and identifies nervous people based of color change of

RGB lights passing through skin.

C8 MediSensors developed

Raman spectroscopy based

glucose sensor, raised $120M

($43M in 2012) and closed in

2013 after finding measurement

instability. Apple hired several of

former employees

Echo launched a non-

invasive continuous

glucose monitoring

system based on

proprietary skin

permeation

Google measures glucose level in tears through contact lenses

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Printed Paper Microfluidics

• Lab-on-Chip can be multilayer printed

on paper.

• Is low-cost, easy-to-use, disposable,

and equipment-free.

• Promising technology particularly

relevant to improving the healthcare and

disease screening in the no- or low

infrastructure developing world.

• Applications:

Health diagnostics (e.g., urinalysis, saliva

analysis, sputum analysis, pregnancy test, blood

type)

Biochemical analysis (e.g., enzyme activity)

Environment monitoring

Food quality control

Forensic (e.g., detection of blood)

http://www.ncbi.nlm.nih.gov/pmc/articles/PMC3365319/#c19

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Blood Testing based on Lab on Chip

Palo Alto startup Theranos rolled out blood testing

(starting with Walgreens in Palo Alto) after

$100M+ funding:

– 1000x reduced blood volume for about 200

blood tests.

• Likely enabled by Lab on Chip with fluorescent

tags.

– Providing results in 4 hours

– With increased accuracy.

– At a fraction of lab cost.

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Intelligent Pills

Swallowable capsule includes:

– Pump

– Drug reservoir

– Wireless radio.

– Imaging chips.

– µController.

– Temperature sensor.

– Battery.

Delivery of drugs to treat

digestive tract disorders

directly to the location of the

illness, enables smaller dose,

reducing side effects.

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Chemical Sensors: the Next Revolution

42

Spectrometer: the Next Gyro-like Tornado?

Testing Sweetness of AAPL?

Source: nanoLambda

fresh milk vs. old milk

2 alcohol samplesfresh

4 days

6 days

Tellspec food quality monitor based on spectrometer processing sensor data in the Cloud (Indigogo)

http://www.indiegogo.com/projects/tellspec-what-s-in-your-food

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Hyperspectral Imaging

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Breath Diagnostics

• Dogs are trained to detect medical problems based on breath due to their extreme smell sensitivity:

• Low sugar level in diabetics or cancer.

• What can be smelled with chemical sensors:

• Cancer

• Cholesterol

• Asthma

• Lipid peroxidation

• Metabolism

• Neonatal jaundice, intestinal distress

• Cystic fibrosis/bronchitis

• Periodontal disease

• Infectious disease (flu)

• Etc.

• Stony Brook University in New York have developed a breath analyzer (right)

• Technology utilizes single crystal nanowires that are created by electrospinning.

• Configuration of metal and oxygen atoms in the nanowires defines which molecules are captured by the chip

Source: Dr. J. Stetter, SRI

45

Breathometer

$49 accessory plugs into the base of the iPhone

and functions like a field sobriety test.

https://www.breathometer.com/

46

TI‟s IR Vein Viewer

Displays location of veins for nurses.

MEMS mirror controlled infrared light is converted to visible image through the foil.

47

THz Imaging

Skin tumor and breast cancer detection

1

0

THz image

4 mm

Wallace et. al, Faraday Discuss. 126 (2004) Arnone et. al, Physics World, April (2000)

Tooth decay detection

Mona Jarrahi , Berkeley Sensor and Actuator Center

Terahertz radiation penetrates fabric, wood, plastic, and even clouds, but not metal or water.

48

Finding a Bacteria in Blood

• LoC separates bacteria (grey) from human blood

cells (red) for quick identification, while keeping both

sets of cells alive.

• Red blood cells and bacteria separate as they are

deflected to different extents by liquid introduced

from a side channel.

• The cells' deflection can be tuned to direct particles

of a certain size to specific collection chambers.

• LOC isolates bacteria directly without first needing

to culture the samples, a time consuming process.

Red blood cells and bacteria (grey) separate as they are deflected to different extents by liquid introduced from a side channel

Soft inertial microfluidics for high throughput separation of bacteria from human blood cellsZhigang Wu, Ben Willing, Joakim Bjerketorp, Janet K. Jansson and Klas Hjort, Lab Chip, 2009

49

New Material for Sensors: Graphene

• Discovered in 2004, Nobel Prize in 2010.

• Unique properties:

• Available in a single atom sheets

• 100x stronger than steel, but 3x lighter

• 1000x higher light sensitivity than Si

• Transparent

• Superconductive at room temperature

• Thermally conductive

• Flexible and 30% stretchable

• Chemically functionalisable, yet totally impermeable

• Bio-compatible

• Seems to be ideal for biological applications, ranging from disinfecting hospitals

to detecting tumors to delivering drugs to sequencing DNA.

• Highly sensitive to its environment, and has the potential to sense even single-

molecule interactions.

• Large impact on Life Sciences is expected.

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Summary

• Future will be more amazing than shown products sampler.

• Creating New Future will trigger multiple market Tornados, redefining global

economies and providing room for many new companies.

• The room is $19T big…

• Byproducts of these Tornados:

Abundance, eliminating major global problems.

Medical diagnostic will become faster, cheaper, portable, wireless… personal.

We will start curing diseases rather than alleviate symptoms.

All of us will live longer and healthier, in less polluted and more energy efficient world.

We will have more fun than ever.

We will enjoy the biggest bull market in history?

The first MEMS/NEMS/Bio Billionaires may have emerged (Nest)…

Thank you