high temperature gradient micro-sensors for flow ... · integration of 12 mems sensors in a flap...
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High temperature gradient micro-sensors for flow separation control
Cecile GHOUILA-HOURIa,b
Romain VIARD c, Quentin GALLAS b, Eric GARNIER b, Alain MERLENa,b, Abdelkrim TALBIa, Philippe PERNOD a
aUniv. Lille, CNRS, Centrale Lille, Univ. Valenciennes, ISEN, UMR 8520 - IEMN, LIA LICS/LEMAC, F-59000 Lille, FrancebONERA, Chemin de la Hunière 91123 Palaiseau, France
cFluiditech, Thurmelec, 68840 Pulversheim, France
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Flow separation control
2
• Adverse pressure gradient
• Sharp edges geometry
Flow separation
• Re-attaching a separated flow
• Avoiding / Delayingseparation
Flow separation control
• Real-time adaptation
• Energy saving
Closed loop
Gad-el-Hak
Journal of Aircraft 38 [2001]
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Wall shear stress sensors
3
Need for:
• Time-average values: global state of the flow
• Time-resolved values: unsteady structures in the flow
• Direction of the wall shear-stress vector
Several technologies have been developed
• Floating-element sensors
• Optical sensors, micro-fences
• Thermal sensors (hot-film sensors)
J.J. Miau et al.
Sensors and
Actuators A: Physical
[2015]
T. Von Papen et al.
Sensors and
Actuators A: Physical
[2004]
Chandrasekharan et
al.
Journal of MEMS
[2011]
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Thermal sensors
4
Hot-films are commonly used in aerodynamics
Calorimetric sensors:
• Another type of thermal sensor
• Use for mass-flow measurement
• Applications for medical domain, home-
appliance,…
Löfdahl and Gad-el-Hak
Meas. Sci. Technol.10 [1999]
Advantages
• Commercially available (Dantec Glue-on-Probe)
• Easy to implement at the wall
• Commercially available electronics
Well known disadvantages
• Insensitive to flow direction
• Substrate effects impact the dynamic response
Kuo et al
Micromachines [2012]
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Outline
I. Design of the wall shear stress micro-sensors
II. Calibration in flat plate
III. Flow separation detection on a step-like obstacle
IV. Preliminary results on active flow control on a flap model
V. Preliminary results on a pressure thermal micro-sensor
VI. Conclusion & Perspectives
5
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Design of the wall shear stress micro-sensors
I. Design of the wall shear stress micro-sensors
II. Calibration in flat plate
III. Flow separation detection on a step-like obstacle
IV. Preliminary results on active flow control on a flap model
V. Preliminary results on a pressure thermal micro-sensor
VI. Conclusion & Perspectives
6
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Design of the wall shear stress micro-sensors
7
• Calorimetric wall shear stress sensor
• Metallic wires: 1 mm x 3 µm x 730 nm (central)/330 nm (lateral)
• Periodic SiO2 micro-bridges for mechanical support
• Uncoupled heater and measurement wires
• Patent by IEMN LICS/LEMAC
R. Viard, A. Talbi, P. Pernod, A. Merlen, and V. Preobrazhensky, “MiniaturisedSensor Comprising A Heating Element, AndAssociated Production Method,” 2013. FR2977886 (A1) 2013-01-18 WO2013008203 (A2) 2013-01-17 WO2013008203 (A3)2013-03-07 CN103717526 (A) 2014-04-09 EP2731908 (A2)2014-05-21 US2014157887 (A1) 2014-06-12 EP2731908 (B1)2015-09-09 DK2731908 (T3) 2015-12-21.
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Micro-fabrication of the sensors
8
4mm30µm
• TCR: 2380 ppm/°C
• Elevation of temperature: 9°C/mW
Electrical and thermal characteristics
Flexible packagingApplied Physics Letters,
DOI 10.1063/1.4972402
[2016]
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Calibration in flat plate
I. Design of the wall shear stress micro-sensors
II. Calibration in flat plate
III. Flow separation detection on a step-like obstacle
IV. Preliminary results on active flow control on a flap model
V. Preliminary results on a pressure thermal micro-sensor
VI. Conclusion & Perspectives
9
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Wind tunnel
Wind tunnel characteristics• 30 cm x 30 cm test section
• Flow velocity up to 40 m/s
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Wall shear stress evaluation
• Relation of Coles-Fernholz:
– 𝐶𝑓 = 2 ∙1
𝑘∙ ln 𝑅𝑒𝜃 + 𝐶
−2
– 𝑘 = 0.384
– 𝐶 = 4.127
– 𝑅𝑒𝜃 = Τ(𝜃 ∙ 𝑈∞) 𝜈
• Wall shear stress and skin friction coefficient
– 𝜏 =1
2∙ 𝜌 ∙ 𝑈∞
2 ∙ 𝐶𝑓
• Hot-wire probe measurements from 0.3 mm to 35 mm to provide the velocityprofile in the boundary layer and the experimental momentum thickness ϴ
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Calibration on a flat plate
2 modes of operation: constant current and constant temperature modes
Calibration curves fitting 4th order polynomial
Sensibility to the flow direction
12
C. Ghouila-Houri et al. Applied Physics Letters, DOI 10.1063/1.4972402 [2016] & Sensors and Actuators A DOI10.1016/j.sna.2017.09.030 [2017]
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Flow separation detection on a step-like obstacle
I. Design of the wall shear stress micro-sensors
II. Calibration in flat plate
III. Flow separation detection on a step-like obstacle
IV. Preliminary results on active flow control on a flap model
V. Preliminary results on a pressure thermal micro-sensor
VI. Conclusion & Perspectives
13
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Flow separation due to sharp edges geometry
Experiment setup
• Obstacles of different heights• 38 mm
• 19 mm
14
Sensor location in the
recirculation region
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Flow separation detection
15
MEMS response
Deduced wall
shear stress
variations
C. Ghouila-Houri et al.
Sensors and Actuators A
DOI10.1016/j.sna.2017.09.030
[2017]
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Flow separation detection
16
• Obstacle 38 mm x 38 mm
• Varying distance between the sensor and the obstacle
• Upstream flow velocity: 25 m/s
• ReH = 61.103
H 𝑥
Small eddy near
the obstacle
Separation length
Reattachment
Reattached flow
Work in progress…
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Preliminary results on active flow control on a flap model
I. Design of the wall shear stress micro-sensors
II. Calibration in flat plate
III. Flow separation detection on a step-like obstacle
IV. Preliminary results on active flow control on a flap model
V. Preliminary results on a pressure thermal micro-sensor
VI. Conclusion & Perspectives
17
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Integration of the sensors in a flap model
18
12 micro-sensors integrated in the flapmodel
L1 wind tunnel in ONERA Lille (2.40 m of test section diameter)
Miniaturized electronics
Flow control with pulsed jets (Festo MHE2)
Work in progress…
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First results of active flow control
19
Sensor near the leading edge
Control by Festo actuators MHE2 (20 g/s;
60 Hz for pulsed mode)
Efficiency to re-attach a separated flow
Separated flow
Attached flow
Thèse T. Charbert, ONERA
Thèse T. Charbert, ONERA
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Preliminary results on a pressure thermal micro-sensor
I. Design of the wall shear stress micro-sensors
II. Calibration in flat plate
III. Flow separation detection on a step-like obstacle
IV. Preliminary results on active flow control on a flap model
V. Preliminary results on a pressure thermal micro-sensor
VI. Conclusion & Perspectives
20
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Preliminary results on a pressure thermal micro-sensor
21
Pressure sensing based on Pirani effect, exploiting the pressure-dependent thermal conductivity of a gas at the molecular range
Dimensions Wires: 1 mm x 3 µm x 730 nm Bridges: 20 µm x 2 µm x 500 nm
Cavity reduced to 170 nm for maximum sensitivity at atmospheric pressure
C. Ghouila-Houri et al
Applied Physics Letters, vol. 111, issue 12 [2017]
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Conclusion & Perspectives
I. Design of the wall shear stress micro-sensors
II. Calibration in flat plate
III. Flow separation detection on a step-like obstacle
IV. Preliminary results on active flow control on a flap model
V. Preliminary results on a pressure thermal micro-sensor
VI. Conclusion & Perspectives
22
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Conclusion & Perspectives
Wall shear stress MEMS sensor designed for flow control
Fabrication using micro-machining techniques
High temperature gradient for low power
Low-cost mass production
Wind tunnel experiments
Wall shear stress static calibrations in CC and CT modes
Detection of flow separation due to a step-like obstacle
Integration of 12 MEMS sensors in a flap model and 1st results of active flow control
Introduction of a thermal based pressure sensor
Pirani principle
Maximum of sensitivity at atmospheric pressure
Perspectives
Improvement of the CT electronics
Dynamical calibration of the micro-sensors (wall shear stress and pressure)
Integration of a micro-sensor inside a synthetic jet slot
Closed-loop active flow separation control using the micro-sensors
23
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Acknowledgments
Thank you for your attention !
Questions ?
24
Partners:
French National Research Agency (ANR) in the frame of the ANR ASTRID “CAMELOTT” project for financial support
ELSAT 2020 – CONTRAERO
RENATECH the French national nanofabrication network