free margin masking of capacitor film by flash evaporation · free margin masking of capacitor film...

Free Margin Masking of Capacitor Film by Flash Evaporation

Dr. Anye Chifen Leybold Optics Alzenau, Germany

20/10/08: 4:30 pm: AIMCAL FALL 2008: Free Margin Masking of Capacitor Film by Flash Evaporation

2

Motivation - conventional Free Margin Evaporator

Requirements of the new FME

Technology – Principle of Operation of new FME

Experiments & Results

Advantages of the new FME for Customers

Cost Savings Calculation

Summary

Outline


3

Motivation: Disadvantages of Conventional FME

The Cylindrical Evaporator Tube

1. Oil, 2. Oil vapor, 3. Nozzle, 4. Substrate (web), and web direction

Large, excess amount of oil heated Degradation of excess oil during processing Unable to regulate oil temperature during process Temperature regulation dependent upon oil level Laborious refill Unable to refill during web coating Oil evaporation before start of web coating = contamination of chamber and waste of oil

1

2

3

4


4

Requirements:

Requirements of a new Free Margin Evaporator (FME)

Fast start, & stop of masking

Optimum, constant amount of masking oil on film

Fast regulation of oil thickness on film during process

Minimum oil consumption (only amount needed for masking)

No excess oil heated in machine (No degradation, No waste oil)

Free margin edge steepness can be controlled

No contamination of chamber & rollers during start & stop

Easy refill of oil during process


5

Level Sensor

Principle of Operation

The Set-up: Schematic of the new FME Design

Nozzle Plate

Gas Generator

Web

Oil reservoir & pumping system

Evaporator boat


6

Level Sensor

In process: Evaporation

Nozzle Plate

Gas Generator

Web


Evaporator boat

Technology: Principle of Operation


7

Level Sensor

Technology: Principle of Operation

Increase Evaporation Rate

Nozzle Plate

Evaporator boat

Gas Generator

Web



8

Motivation - conventional Free Margin Evaporator

Requirements of the new FME

Technology – Principle of Operation: new FME

Experiments & Results

Advantages of new FME for Customer


Conclusion

Outline


9

EXPERIMENTS – The Main Parameters

Oil Consumption & Free Margin Quality mainly depend on three parameters:

Web Speed v [m/s]

Resistivity R [Ω/]

Nozzle Area A [mm2]

Oil Thickness on Web D [nm]


10

Experiment: Oil masking thickness on web

Conventional FME

The New FME

How can the Doil be determined for all the variables?

doil > 0 nmCD

deposition boatoil on web

DoilCD

doil = 0 nm

deposition boatoil on web


11

Experiment: Oil masking thickness on web

)t(flow.

oil FV ≈

wv

F D

flow)t(oil ⋅≈

(t)

(t)

[s]. duration coatingt [m/s], speed webv [m], widthnozzlew

],[m consumed oil total V

[l/s], rate flow oil F

[m], webon thickness oilDwhereby;

3oil

lowf.oil

====

=

=

Calculations are based on web speed, & volumetric flow rate and are not valid for the conventional FME ( because flow rate cannot be regulated and slow heating rate during coating process)


12

Experiments – Parameters

Web Speed

5 – 18 m/s

Resistivity – Al, Al/Zn

1.5 – 7.5 Ohm /sqr

Nozzle types

[% Free Margin]

4.5%, 6%, 25%


13

Results – Oil flow rate vs. Web speed

Total oil for a defined process required increases with nozzle area and CD speed

Oil flow rate is controlled during process (e.g. change in web speed)

A

B

C 5

15

25

35

45

55

65

75

2 5 8 11 14 17 20coating drum speed [m/s]

volu

met

ric p

ump

perfo

rman

ce [%

]

SM-3 nozzle

ST2 - nozzle

AT1 - nozzle

Oil

flow

rate

/ %

A B C


14

Results: Free Margin Width vs. Nozzle position

Oil flow rate optimized at different web speeds

Area Nozzle A: 3.9 x 2 mm2

Oil amount influences the FM width [8 m/s @ 10 %, 12 %]

Uniform FM width distribution for 54 & 64 nozzle openings (B&C)

3,80

3,85

3,90

3,95

4,00

4,05

4,10

4,15

0 1 2 3 4 5 6 7 8 9 10

Nozzle position /-

Free

Mar

gin

wid

th /

mm

18 m/s 45 % 8 m/s, 12 % low limit specification

15 m/s, 30 % 8 m/s, 10 % high limit specification

10 m/s, 20 %


15

Oil flow rate vs. Resistivity for Nozzle A

Web speed: 8 m/s

Oil thickness on web decreases with resistivity (for all other nozzles)

Film thickness decreases with increasing resistivity

Less oil required for the new FME (process regulated)

25

27

29

31

33

35

37

39

41

0 1 2 3 4 5 6 7 8

Resistivity [Ohm/sqr]

Volu

met

ric p

ump

perf

orm

ance

[%]

Nozzle A: 25 % Free Margin

Oil

flow

rate

/ %


16

Free Margin Width: Film uniformity across Web

Optimized oil flow rate for nozzle C (0.5 mm) Excellent uniformity of free margin at different resistivity across the web,

due to optimized oil flow rate

0,44

0,46

0,48

0,50

0,52

0,54

0,56

1 4 7 10 13 16 19 22 25 28 31 34 37 40 43 46 49 52

Free Margin Position / -

Free

Mar

gin

Wid

th /

mm

1,7 Ohm/sqr2.4 Ohm/sqr4.5 Ohm/sqr7.5 Ohm/sqrLow Limit SpecificationHigh Limit Specification


17

Free Margin Width: Edge Steepness

0

50

100

150

200

250

800 850 900 950 1000 1050 1100 1150 1200

Steepness width / µm

Inte

nsity

/ -

1.7 Ohm/sqr

2.4 Ohm/sqr

4.5 Ohm/sqr

Metallized Film Free Margin Area

Transmission measurements Free Margin Measuring System (FMMS)

Optimized pump performance for Nozzle C (0.5 mm)

Oil thickness on web: 16 nm, CD speed: 8 m/s, performance: 10 %


18

Free Margin Evaporator built in CAP-M


19

Oil Reservoir: outside the Winding Chamber

Oil Reservoir

Oil Level Sensor

Pumping Unit


20

Advantages for the customer:

Cost savings No wasted oil during start and stop

No degraded excess oil waste

Reduced time for cleaning and maintenance (No shutters)

Constant, Improved Product Quality Optimum, regulated amount of masking oil on web

FM width steepness can be regulated

No thermally degraded oil used in process

Amount of oil can be adjusted quickly and precisely during process


21

Advantages for the customer:

Ease of operation Oil reservoir in atmosphere (Easy refill any time)

No machine contamination during start and stop

Constant process temperatures

Future proof technology Backwards compatible to existing machines

Patented technology by Leybold Optics


22

Cost Savings Calculation for the FME

Web length 40 000 m

Consumption per run 17.3 ml

Oil thickness on web 16 nm

Cost saving / year 60 %

Calculations based on: NO OIL REFILL

NO WASTE OIL

Consumption per run for conventional FME (26.7 ml)

Optimized Oil thickness on Web, conventional FME (23 nm)

Excellent Quality of Free Margin and Oil


23

Conclusion

The key advantages of this development for the web coating customer are:

short start & stop times: (no oil waste and chamber contamination),

optimum thickness of oil for each product, even at varying web

speeds, through closed loop regulation,

better free margins, sharper, steeper edges of masked areas,

constant product quality by use of 100 % of fresh masking oil,

ease of operation (easy refill of oil reservoir in atmosphere even during

process),

no oil waste due to degraded oil and

significant cost savings: thanks to regulated minimum applied oil film

thickness and zero oil waste design.


24

THANK YOU FOR YOUR ATTENTION

THANK YOU

Photo: PET Film & Nozzle Free Margin Width: 0.5 mm 2.0 Ohm/sqr


25


Parameter unit STANDARD NEWWeb length m 40 000 40 000Price/liter € 250 250Consumption/run ml 26,7 17,3Filling ml 500 0Refills before oil change 30 0Runs/day 18 18Consumption/day ml 480,6 311,4Waste/day ml 300 0Cost of masking/day € 120,15 77,85Cost of waste/day € 75 0Working days/year 320 320Cost of masking/year € 38 448 24 912Cost of waste/year € 24 000 0Oil thickness nm 23 16Less consumption (regulator) 0,00% 5,00%

Total cost per year € 62 448 24 912

Saving/year € 37 536 significant cost savings


26

Film Uniformity versus oil flow rate and nozzle area

5

10

15

20

25

30

35

40

45

0 1 2 3 4 5 6 7 8Film uniformity [Ohm/sqr.]

volu

met

ric p

ump

perfo

rman

ce [%

]

SM-3 nozzle

ST2-nozzle

AT1-nozzle

Oil thickness on web decreases with resistivity (film thickness

increases)

A

B

C

Resistivity


27

Free Margin Width: edge steepness profile

4.0 mm

Schematic illustration: optimal masking oil thickness

Free Margin Profile oil thickness on film: 16 nm

free margin masking of capacitor film by flash evaporation · free margin masking of capacitor film...

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