fabrication process for the annular phase groove mask...
TRANSCRIPT
Ernesto Vargas, Caltech, 2016-08-15
Fabrication process for the annular phase groove mask
(AGPM)
Ernesto Vargas Catalán, Mikael Karlsson Uppsala University, Sweden
Ernesto Vargas, Caltech, 2016-08-15
Content
• The AGPM
• Nano-replication
• Diamond etching
• Optical evaluation
• Tuning
• Fabricated/installed components
2
Ernesto Vargas, Caltech, 2016-08-15
The AGPM
3 Polycrystalline chemically vapor deposited diamond 300 µm thick and 1 cm in diameter
A circular sub-wavelength grating
Ernesto Vargas, Caltech, 2016-08-15
Nano-replication
4
Mask pattern transfer
Ernesto Vargas, Caltech, 2016-08-15
Nano-replication
5
Metal mask pattern transfer
Metal mask prior to diamond etching Anisotropic etching
Ernesto Vargas, Caltech, 2016-08-15
Diamond etching
6
The hard part
Ernesto Vargas, Caltech, 2016-08-15
Optical evaluation
7
Re-measured grating parameters vs RCWA simulations and Rejection ratio using YACADIRE
Colorbar represents Rejection ratio (1/null depth)
Ernesto Vargas, Caltech, 2016-08-15
Optical evaluation
8
Re-measured grating parameters vs RCWA simulations and Rejection ratio using YACADIRE
L9 estimate: d = 5.10±0.05 µm & w = 750±10 nm
Ernesto Vargas, Caltech, 2016-08-15
Tuning
9
Optimizing depth to reach better performance
Ernesto Vargas, Caltech, 2016-08-15
Tuning the AGPM
10
Facetting Higher angle Original
Deeper or shallower
Ernesto Vargas, Caltech, 2016-08-15
RCWA and measurements (L+M filters)
11
Pinpointing probable parameters using experimental data
Improvement due to tuning Towards better perfomance
Ernesto Vargas, Caltech, 2016-08-15
Finished components
• We have successfully manufactured AGPMs for N-, L- and K-band.
• 4 N-band
• 11 L-band
• 1 K-band
• We have successfully tuned L- and K-band AGPMs by etching deeper and shallower.
• 4 L-band
• 1 K-band 12
Ernesto Vargas, Caltech, 2016-08-15
Finished components
VVC Rejection ratio Location
AGPM-N4 VLT(VISIR)
AGPM-L3 VLT(NACO)
AGPM-L4 630 LBTI(MIRC)
AGPM-L6 150 KECK(NIRC2)
AGPM-L7 550 KECK(NIRC2)
AGPM-L9r2 400 Ulg
AGPM-L11r 910 Ulg
AGPM-L12r 465 Ulg
AGPM-L14 370 LBTI(MIRC)
AGPM-K1r 200 Ulg 13