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ENJET Catalog eNano System We aim to become innovative manufacturing solution provider based on printing and coating technologies. Our goal is to satisfy customers with our solution.

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Page 1: ENJET Catalog eNano System

ENJET Catalog

eNano SystemWe aim to become innovative manufacturing solutionprovider based on printing and coating technologies.

Our goal is to satisfy customers with our solution.

Page 2: ENJET Catalog eNano System

eNano System

Enjet inc. has developed the patented iEHD(Electrohydrodynamics) technology, which allows to discharge and spray functional inks and chemicals using an electric field and perform super-high resolution printing and uniform thin film coating. Compared with the conventional technologies, nanoscale high resolution characteristics can be realized, so that ultra-fine droplets and patterns can be formed.It has been actively applied to the mobile and display industries that require high precision and reproducibility, and is a next-generation technology that can be of great help in future industrial development.

iElectrohydrodynamics (EHD) Introduction

iElectrohydrodynamics[EHD]Jet Printing /Coating iEHD Jet

PrintingCoating

Continuous Jet Printing-High Viscosity lnk (up to 50,000cPs)-Line Fabrication

Drop-on-Demand (DOD) Jet Printing-Low Viscosity lnk-Electrode, Dielectric Layer Patterning

Spray Coating-Functional Materials-Thin Film Coating

Ar RF Plasma

Line Printing

eNanoJet Printer

Dot/Line Printing

eMicroJet Printer

JET Coating

Hydrophilic Surface TreatmentGlass Dry cleaningPre-treatment of SurfaceRe-Work of Functional CoatingIn-Line Plasma Treatment

02Ⅰ03

Display· OLED Repair (<1㎛)· LCD Repair (<5㎛)PCB · PCB Repairmicro-LED Bonder

Display· 3D Electrode · Sealant PatterningMobile· Camera PackagingSemiconductor· Underfill3D Printing

eNanoJet Coater

Mobile/Display· AF(Anti-Fingerprint)· AG(Anti-Glare)· AR[Anti-Reflection]· OC(Over Coating)· PI(Polyimide)Semiconductor· EMI ShieldingBio-Medical CoatingFlux CoatingAnti-Static Coating

Page 3: ENJET Catalog eNano System

eNano System

What is atmospheric plasma? It is one of the four fundamental states of matter, which is produced by an electromagnetic field in atmospheric condition. The ionized gases become increasingly electrically conductive and shows behaviors unlike those of other states. Argon RF plasma produces various chemical reactions byco-existing ions, electrons, neutral particles and active particles.

PLASMA Introduction

Solid

H2O (S) H2O (I) H2O (g) H, H2, H+,e-,H2

-,O,O2,O3,O-,O2

-

Liquid Gas Plasma

Add energy

Organic pollutant

ExhaustGas

CO2, H2O

ReactionGas

Ar, O2, N2 ETC

Bonding, Coating, Painting, Molding

Sample (Metal, Glass, Ceramics, Polymers ETC)

Page 4: ENJET Catalog eNano System

eNano System eNPL-Ar80s

eNPL-Ar80s

Plasma product

- Atmospheric pressure plasma generator consists of novel designed head, matcher, RF power generator.

- It is applied to enhance the performance of the washing / adhesion / coating / plating / evaporation etc. It is also applied to cleaning and surface treatment in many industries such as display, film, touch panel, battery, PCB, vehicle, semiconductor, etc.

- Plasma Module - Electrode Headset : 810mm x 90mm x 60mm- Scan Width: 800mm - Metal Body : Anodized Al- Gas : Ar/O2/He/C4F8

- Power Supply : 1,000W- Hydrophillic, Hydrophobic

- Display, Semiconductor, TSP, Film, Cleaning

* Specifications can be changed depending on the application.

Introduction

Configuration

Application

SpecificationITEM Specification

Dimension (mm) Approx. 2500 x1400 x 1600mm

Glass Size(mm) 800 x 700mm

Process Gas Ar/O2/He/C4F8

Process Speed 10~80mm/s(30mm/s)

AP Plasma Unit

- AP Plasma Module Electrode Headset : 810mm x 90mm x 60mm Scan Width: 800mm Metal Body : Anodized Al Gas : Ar/O2/He/C4F8

- Power Supply: 1,000W

Z Axis Unit manual height control(0~30mm)

Machine Weight Approx. 400 Kg

Power Specification 220V, single phase, 25A (grounded)

04Ⅰ05

Page 5: ENJET Catalog eNano System

Air Spray Ultrasonic Spray eNano Jet Coating

ADV

- High throuhgput (High Flowrate / 20㎖ / min) - Drop diameter : 10~25㎛

- Drop Dia.:200nm~5㎛

- Highest Uniformity

- Viscosity : ~500cPs

- High Throughput

(High Flowrate /20㎖/min)

- Save Materials :

Low reflectivity, inducing

electric fields

DISADV

- Drop diameter : 10~100㎛- High pressure & much vounce- Viscosity : ~50cPs- Stain due to Non-uniformity

- Low Throughput (Low Flowrate / Max. 100㎕/min) Viscosity : ~100cPs

eNano System eNano Coater Technology

eNano Coater Technology

DN-Series BN-Series SN-Series VN-Series

Image

TYPE Internal Atomization External Atomization

Flow Rate 0.8~25mL/min

Nozzle InnerDiameter(ID)

0.3, 0.5mm 0.3, 0.5, 0.8mm

High Voltage 0~20 kV

Application AF Coating / AS Coating / Ultra Thin CoatingHard CoatingPR Coating

Flux Coating

Material savings: 30-50% reduction compared to conventional air spray nozzle.The various nozzle can be optimized for specific coating and material characteristics. The nozzle can be customized and designed according to the customer needs.

ENJET eNanoJet Coating Nozzle

Page 6: ENJET Catalog eNano System

eNano System eNC-350eNano Coater

- Optimized for PCB Flux Coating- EHD nozzles (3ea)- Spraying nano materials- Saving materials by improving delivery rate- Improvement of material adhesion- User Friendly programmed GUI, convenient operation, production history management- Available for various materials- Easy nozzle replacement- Automatic inspection of coating weight- Customized design and equipment production according to material characteristics- Qualified by global display manufacturing company

- 3 Nozzles, Reliable Chemical Supply System(CSS)- Coating materials weight measurement system.- Sorting system.- Plasma unit (optional)

Configuration

* The specification can be changed according to Application.

SpecificationDescription

Nozzle 3ea

Mask Size 800 x 700mm

HV Unit Up to 25 kV CTRL by Micro-Controller

Plasma Module N/A

Dimension 3500 x 3500 x 1950mm

Weight 4,800kg

- PCB Flux CoatingApplication

06Ⅰ07

eNC-350Introduction

Page 7: ENJET Catalog eNano System

eNano System eNC-500eNano Coater

- Optimized for Anti-Glare Coating with heated stage- EHD nozzles (3ea)- Dual stages system- Spraying nano materials- Saving materials by improving delivery rate- Improvement of material adhesion- User Friendly programmed GUI, convenient operation, production history management.- Available for various materials- Uniformly heating stage unit- Easy nozzle replacement- Customized design and equipment production according to material characteristics.- Qualified by global display manufacturing company.

* The specification can be changed according to Application.

SpecificationDescription

Nozzle 3ea

Mask Size 560x550mm(Dual)

HV Unit Up to 25 kV CTRL by Micro-Controller

Plasma Module RF Plasma(Ar,O2)

Dimension 4300 x 2700 x 2050mm

Weight 7,500kg

- Anti-Glare Coating(Heating Method)Application

eNC-500Introduction

Page 8: ENJET Catalog eNano System

eNano System eNC-800eNano Coater

- Optimized for Anti-fingerprint and anti-smudge Coating- EHD nozzles (3ea)- Spraying nano materials- Saving materials by improving delivery rate- Improvement of material adhesion- User Friendly programmed GUI, convenient operation, production history management.- Available for various materials- Easy nozzle replacement- Customized design and equipment production according to material characteristics.- Qualified by global display manufacturing company.

* The specification can be changed according to Application.

SpecificationDescription

Nozzle 3ea

Mask Size 800 x1100mm

HV Unit Up to 25 kV CTRL by Micro-Controller

Plasma Module RF Plasma(Ar,O2)

Dimension 1800 x 3700 x 1750mm

Weight 1,500kg

- AF Coating, AS Coating, AR CoatingApplication

08Ⅰ09

eNC-800Introduction

Page 9: ENJET Catalog eNano System

eNano System eNC-G100eNano Coater

- Specially designed and optimized for Anti-glare coating (non-heated)- EHD nozzles (3ea)- 2D/3D glasses available- Spraying nano materials- Saving materials by improving delivery rate- Improvement of material adhesion- User Friendly programmed GUI, convenient operation, production history management.- Available for various materials- Easy nozzle replacement- Customized design and equipment production according to material characteristics.- Qualified by global display manufacturing company.

* The specification can be changed according to Application.

SpecificationDescription

Nozzle 3ea

Mask Size 600 x 1180 mm

HV Unit Up to 25 kV CTRL by Micro-Controller

Plasma Module RF Plasma(Ar,O2)

Dimension 6000 x 2300 x 3250mm

Weight 9,500kg

- AF Coating, AS Coating, AG Coating, AR CoatingApplication

eNC-G100Introduction

Page 10: ENJET Catalog eNano System

eNano System eNC-V80TeNano Coater

- Specially designed and optimized for functional coating with minimized contamination and particles- EHD nozzles (3ea)- Spraying nano materials- Reliable chemical supply system (CSS)- Saving materials by improving delivery rate- Improvement of material adhesion- User Friendly programmed GUI, convenient operation, production history management.- Available for various materials- Easy nozzle replacement- Optimized ventilation system- Customized design and equipment production according to material characteristics.- Qualified by global display manufacturing company.

* The specification can be changed according to Application.

SpecificationDescription

Nozzle 3ea

Mask Size 800 x 1100 mm

HV Unit Up to 25 kV CTRL by Micro-Controller

Plasma Module RF Plasma(Ar,O2)

Dimension 4650 x 2000 x 1800mm

Weight 2,000kg

- Hard Coating, Barrier CoatingApplication

10Ⅰ11

eNC-V80TIntroduction

Page 11: ENJET Catalog eNano System

eNano System eNC-200

eNC-200

eNC-CSS ModuleeNano Coater

- R&D purpose equipment- EHD nozzle and uniform ink supply pump- Functional nano materials coating- Material adhesion improvement- Suitable for material testing- User Friendly programmed GUI, convenient operation, production history management.- Available for various materials- Easy nozzle replacement

Introduction

* The specification can be changed according to Application.

SpecificationDescription

Nozzle 1ea

Mask Size 200 x 200 mm

HV Unit Up to 25 kV CTRL by Micro-Controller

Plasma Module RF Plasma(Ar,O2)

Dimension 900 x 940 x 1750mm

Weight 400kg

- AF Coating, AS Coating, AG Coating, AR Coating, EMI Shield Coating, Nano Particles Coating, Cover Coating

eNC-CSS Module - Very stable and reliable chemical supply system- Improve the efficiency of the spray- Material supply, Pneumatics, Bubble remover, Uniform pump.- Professional solution for manufacturing- convenient operation- customizable

Introduction

* The specification can be changed according to Application.

SpecificationDescription

Nozzle 3ea

Coating Area TBD

HV Unit Up to 25 kV CTRL by Micro-Controller

Dimension 940 x 860 x 1500mm

Weight 300kg

- Conversion of the existing spray equipment. (Saving materials, improving efficiency)Application

Application

Page 12: ENJET Catalog eNano System

eNano System iEHD Jet Printer

Various lnk Viscosity : 1~50,000 cPsResolution : 1㎛ ~2 Types of Pattern Mode (Dot, Line)

Limitied lnk Viscosity : ~20 cPsResolution : 20㎛

Only Dotting

ENJET has developed novel iEHD(electrohydrodynamics) valve, nozzle manufacturing, and electrical pulse control technology, which enable to generate femtoliter (nanoscale diameter) droplets. iEHD Jet Printer includes high precision nozzle, motion, dual nozzles, automatic focusing, stable ink supply, laser, optics technologies, which allows super-fine patterns less than 1㎛ structures (line, dot, and complex shapes).iEHD Jet Printer has been qualified for repairing solution of open defect in display, TSP and PCB.

eNano Printer Inkjet Printer

Resolution

1 ㎛

1 cPs10 cPs

1,000 cPs

50 cPs

50,000 cPs

20 ㎛ 100 ㎛ 300 ㎛

Visc

osity

eNanojetPrinter

eMicrojetPrinter

D = 10㎛ V = 1 pl

D < 1㎛ V < 1 fl

Dispenser

InkjetPrinter

12Ⅰ13

Page 13: ENJET Catalog eNano System

iEHD Jet PrintereNano System

eNanoJet Printer - Conventional inkjet printer has drawbacks such as

limited droplet diameter and ink viscosity.

- Patented eNanojet Printer is based on iEHD jetting

control and novel nozzle design and allows

nanoscale droplets and ultra-fine patterns

- High resolution patterning technology can be

applied in many applications such as display, PCB,

semiconductor, and bio-medical devices

- Line Width : 1 ~ 100㎛

- Viscosity : 1 ~ 1,000cPs

eMicroJet Printer - Conventional dispensers have drawbacks such as

pattern size with high viscous material

- Patented eMicrojet Printer can overcome these

drawbacks based on iEHD jetting technology and

novel nozzle and valve design

- eMicrojet printer allows high precision dispensing

and high resolution patterning, which is able to be

applied in many areas.

- Mode : Line, Dotting

- Line Width : 100 ~ 1,000㎛

- Viscosity : 1 ~ 50,000 cPs

Module based Platform: MXII Printer

The Module based platform supports customers with

powerful tools, which are easily replaced. Customers,

who want to manufacture small scale with various

tools such as printing, coating, cutting, marking, or

sintering, can use this solution. And researchers in a

lab can use multiple functions in one system.

- Standard EHD Module (STD Module)

- High Resolution EHD Module (HR Module)

- Pressure EHD Module (PRS Module)

eNanoJet Printer eMicroJet Printer MXII Printer

Page 14: ENJET Catalog eNano System

Electrode patterning

Electrode patterning

- Products: eNanoJet Printer, eMicroJet Printer

- Based on the innovative iEHD Jet Printing technology, it allows to fabricate super-fine electrode

- Excellent step-coverage and control of ink spreading

- Good adhesion and electrical performance

- Pattern width: 1㎛ ~ hundreds ㎛

7.0 Ohm, ρ=1.37 x 10-3 Ohm.cm

7.0 Ohm, ρ=1.37 x 10-4 Ohm.cm

Examples

Resistance

14Ⅰ15

eNano System iEHD Jet Printer

Page 15: ENJET Catalog eNano System

- Products: eNanoJet Printer, eMicroJet Printer

- based on the iEHD technology, it can enhance

much penetration performance of underill

material into the gap of semiconductor chip.

- It can prevent from forming the void in a gap.

- Product: OLED TFT Ink Repair System (6Gen.)

- Based on the innovative iEHD Jet Printing technology, it can repair the open defects in

the thin-film-transistor

- With novel laser technology, it can repair short defects

OPEN DEFECT

Print (Conductive ink)

Laser Curing

Examples

OLED TFT Ink Repair

Underfill Solution for Semiconductor Chip Packaging

iEHD Jet PrintereNano System OLED TFT Ink Repair Underfill Solution for Semiconductor Chip Packaging

Page 16: ENJET Catalog eNano System

- Products: eMicroJet Printer, MXII Printer

- With innovative iEHD Jet Printing technology and 3D surface scanning technology, it can print

and manufacture on the 3D curved surfaces

Examples

16Ⅰ17

3D Surface PrintingeNano System iEHD Jet Printer

3D Surface Printing

Page 17: ENJET Catalog eNano System

- eNanoJet Printer

- Micro LED display has been paid much attention due to its excellent performances. On the

other hand, it suffers from lack of perfect transfer technology and repair solutions.

- eNanojet printer can produce pad electrodes with conductive glue whose size is around 10㎛

and is able to be solution for repair.

Process

- Ink Model : RS Ag Conductive Precursor Ink

- Viscosity : 50 cPs

- Resistivity : 5 ⅹ10̂ (−5) Ω·cm (@180 °C / 30 min)

- It is developed for micro-LED chip bonding.

It has high performance of bonding and

electrical characteristics

Ag(Silver) ink foreNanojet Printer

iEHD Jet PrintereNano System μLED Chip Bonder

μLED Display Solution

Page 18: ENJET Catalog eNano System

- Development of super-fine patterning technology based on iEHD printing technology

- World champion for high resolution printing solution with innovative nozzle, system

integration, vision, laser, and optics technologies based on patents.

- Enjet has also Ag and Cu ink optimized for eNano-Jet printer.

- Industrial experiences to apply the iElectrohydrodynamic Jet printing.

01

02

0304

05

- Femto-liter Droplet- Direct Ink Repair Module - Easy Maintenance - Automatic Alignment

01. Nozzle- Ag Ink- Life-time - Adhesion- Jetting Performance

02. Material

- Process Recipe- Repeatability- DOE-Optimization

05. Process

- Direct Ink Repair - Module & Laser System Integration- 6G OLED Repair Machine- Motion Stage & Driver- Ink Supply Unit

03. System Integration

- CW Laser for Curing- Optics- Femto-sec Laser

04. Laser

TOTALSOLUTION

18Ⅰ19

ENJET Technology SummaryeNano System iEHD Jet Printer

Page 19: ENJET Catalog eNano System

- Anti-Finger Coatings- Anti-Glare Coatings- Anti-Smudge Coatings- Optical Coatings- Electrochromic coatings- Photochromic coatings- Photoresist- Etc...

- RFID - OLED Display Cathode- EMI Shielding- Flexible Electronics

- EMI Shielding Coatings- RFI Shielding Coatings- Graphene Coatings

- Photovoltaic Cell- Silicon based Solar Cell- Fuel Cell

- En-Capsulation- Bio-Fuel Cell

- PCT- OGS- Flexible TSP

eNano System eNano System Applications

Glass

  Electronics

Electronics

Energy

  Bio-Medical

- Flux Coatings- Anti-Static Coatings

PCB

Touch Panel

- Reagent Coatings- Medical Diagnostic Device Coatings(Stent Coating)- Antimicrobial Coatings

MedicalCoating Application

Printing Application

Page 20: ENJET Catalog eNano System

Enjet is innovative manufacturing solution provider based on high resolution printer,

dispenser, coater, and atmospheric plasma. Enjet is developing and providing world best

solutions of novel manufacturing processes, replacing semi-conductor vacuum process

such as the sputtering, photo-lithography, and etching.

45, Saneop-ro 92beon-gil, Gwonseon-gu, Suwon-si, Gyeonggi-do, Republic of KoreaTel. 070-4892-8111 Fax. 070-4892-8121 E-mail. [email protected] homepage. www.enjet.co.kr

www.enjet.co.kr