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EMRP JRP IND62 TIM: Use of on-board metrology systems for area-scanning on machine tools Author: doc. Ing. Vít Zelený, CSc. Co-authors: doc. Ing. Ivana Linkeová, Ph.D. Ing. Jakub Sýkora Pavel Skalník Jaromír Hynek

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Page 1: EMRP JRP IND62 TIM: Use of on-board metrology systems for … · 2016-05-24 · 12 On board metrology – in-process control May 18, 2016 Final workshop - PTB, Braunschweig, Germany

EMRP JRP IND62 –TIM: Use of on-board metrology

systems for area-scanning on machine tools

Author: doc. Ing. Vít Zelený, CSc. Co-authors: doc. Ing. Ivana Linkeová, Ph.D. Ing. Jakub Sýkora Pavel Skalník Jaromír Hynek

Page 2: EMRP JRP IND62 TIM: Use of on-board metrology systems for … · 2016-05-24 · 12 On board metrology – in-process control May 18, 2016 Final workshop - PTB, Braunschweig, Germany

2

Use of on-board metrology systems

for area-scanning on machine tools

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

• CNC MACHINE TOOL

• FREEFORM STANDARD

• SCANING

• ON-BOARD METROLOGY

• INTERCOMPARISON

• En CRITERION

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3

Kinematic scheme of CMM and CNC machine tool

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MODEL OF CNC MACHINE TOOL • CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

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4

Double-sine PTB freeform standard

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

y

x

z

yxyxz sinsin,

MATHEMATICAL MODEL

CAD MODEL

• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

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5

CMI Hyperbolic paraboloid freeform standard

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

yxyxz ,

MATHEMATICAL MODEL

CAD MODEL

• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

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6

Scanning

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

CONTACT SCANNING (e.g. ZEISS PRISMO with active scanning probe VAST)

• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

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7

Scanning

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

LASER SCANNING (e.g. based on autofocus)

• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

Page 8: EMRP JRP IND62 TIM: Use of on-board metrology systems for … · 2016-05-24 · 12 On board metrology – in-process control May 18, 2016 Final workshop - PTB, Braunschweig, Germany

8

Scanning

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

LASER SCANNING (e.g. based on autofocus)

• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

Page 9: EMRP JRP IND62 TIM: Use of on-board metrology systems for … · 2016-05-24 · 12 On board metrology – in-process control May 18, 2016 Final workshop - PTB, Braunschweig, Germany

9

Scanning

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

AREA SCANNING – PHOTOGRAMMETRY

VDI/VDE 2634 Part 2 - Optical 3-D measuring systems - Optical systems based on area scanning VDI/VDE 2634 Part 3 - VDI/VDE 2634 Part 3 Optical 3D-measuring systems - Multiple view systems based on area scanning

• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

Page 10: EMRP JRP IND62 TIM: Use of on-board metrology systems for … · 2016-05-24 · 12 On board metrology – in-process control May 18, 2016 Final workshop - PTB, Braunschweig, Germany

10

Scanning

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Fringe projection • CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

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11

Scanning

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY

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12

On board metrology – in-process control

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Productive Process PyramidTM (acc. Metrology solutions for productive process

control, Brochure of Renishaw)

In-process control is represented by active controls applied during metal cutting. The control is focused on inherent sources of errors caused during all machining processes, such as tool wear, part deflection and the impact of temperature and heat flows. The in-process control is carried out by on-machine probing module equipped by inspection cycles included in NC programs.

Demonstration – measurement of FF-MS on machine tool Deckel Maho DMU 50 with Renishaw probe OMP 400

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13 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Freeform

• WHY FREEFORM?

• WHY FREEFORM STANDARD?

• HOW TO USE FREEFORM STANDARD?

• INTERCOMPARISON

• En CRITERION

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14 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Basic geometrical elements

S(u,v)

v

u

x

y

z

xS

yS

zS

α

β

Plane Sphere

S(u,v)

zS

xS yS

x

y

z

α

β

u

v

𝑥2 + 𝑦2 = 𝑟2 𝑎𝑥 + 𝑏𝑦 + 𝑐𝑧 + 𝑑 = 0

Gauge block Step gauge

S(u,v)

zS

xS yS

x y

z

α

β

u

v

Cylinder

𝑥2 + 𝑦2 + 𝑧2 = 𝑟2

Hole bar Hole plate

Ball Ball bar

Ball plate

• WHY FREEFORM? • WHY FREEFORM

STANDARD? • HOW TO USE

FREEFORM STANDARD?

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15 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Cylinder as a basic

geometrical element

Cylinder as a freeform geometry (represented in NURBS)

𝑥2 + 𝑦2 = 𝑟2

Freeform shape (modified cylinder)

Freeform metrology – what is a freeform geometry?

• WHY FREEFORM? • WHY FREEFORM

STANDARD? • HOW TO USE

FREEFORM STANDARD?

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16

Freeform metrology – what is a freeform geometry?

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

α

S(α, β)

β

y (α, β)

x (α, β)

z (α, β)

y β

α 0 u

v

x

z

O

FREE-FORM SURFACE 𝐒 𝑢, 𝑣 = 𝑥 𝑢, 𝑣 , 𝑦 𝑢, 𝑣 , 𝑧 𝑢, 𝑣

SURFACE POINT 𝐒 𝛼, 𝛽 = 𝑥 𝛼, 𝛽 , 𝑦 𝛼, 𝛽 , 𝑧 𝛼, 𝛽

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17

Freeform metrology

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

FREE-FORM SURFACE

PARAMETRIC (u,v) AND CARTESIAN (x,y,z) COORDINATES

z

x

y

O 0 u

v

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18

Freeform material standard (FF-MS)

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Hyperbolic paraboloid

Mathematical model CAD model

Explicit equation 𝑧 𝑥, 𝑦 = 𝑝 + 𝑘 𝑥 − 𝑚 𝑦 − 𝑛 ,

where 𝑚, 𝑛, 𝑝 are Cartesan coordinates of vertex and 𝑘 is a shape coefficient

Exact NURBS representation

𝐒 𝑢, 𝑣 = 𝐏𝑖,𝑗𝑁𝑖,1 𝑢 𝑁𝑗,1 𝑣

1

𝑗=0

1

𝑖=0

,

where 𝐏𝑖,𝑗 are control points,

𝑁𝑖,1 𝑢 and 𝑁𝑗,1 𝑣 are linear B-spline basis

functions

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19

Freeform standard Hyperbolic paraboloid

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

FF-MS Hyperbolic paraboloid

in procedures for ensuring reliable measurements on machine tools,

demonstration and integration focused on end-user needs

• HOW TO USE FREEFORM STANDARD?

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20 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

En criterion in in-process measurement

FREEFORM MEASUREMENT UNCERTAINTY EVALUATION

𝐸𝑛 =𝑋𝑅 − 𝑋𝐿

𝑈𝑅2 + 𝑈𝐿

2, 𝐸𝑛 ≤ 1

𝑋𝑅 reference value

measured on CMM

𝑋𝐿 measured value on

a tested CNC machine

𝑈𝑅 reference measurement

uncertainty of CMM

𝑈𝐿 measurement uncertainty

of a tested CNC machine

𝑈𝐿 … UNKNOWN VALUE

𝑈𝐿 = ±𝑋𝑅 − 𝑋𝐿

2

𝐸𝑛2 − 𝑈𝑅

2,𝑋𝑅 − 𝑋𝐿

2

𝐸𝑛2 ≥ 𝑈𝑅

2.

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21

CALIBRATED FF-MS, CALIBRATED CAD

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

PILOT MEASUREMENT

SIP CMM 5

PILOT LABORATORY SPECIFICATION

Measurement system

Tactile

Max. perm. error (0.5 + 0.8L) µm

Measurement

uncertainty 1.6 µm

Maximal

measurement

dimensions

Length 720 mm

Width 720 mm

Heigth: 550 mm

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22

Measurement of 3D line on machine tool

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

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23 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 1.1

Measured standard HP PA

Output data format TXT Points along

curves and lines on

freeform surface

Evaluation SW Geomagic

Comparison method Bestfit alignment

against the CAD model

Measurand definition Deviation between the

actual and nominal

data, form error

Results

representation

Colour map of

deviations

Form error [-8.1, 6.8] µm

Average deviation

(one-sigma limits) 2.3, -2.2 µm

Standard deviation 2.8 µm

Reliable measurements on machine tools

HP PA

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24 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 1.1

Measurand XL Deviation of each measured point obtained by Measurement 1.1 from reference CAD model

Limits of evaluation Two-sigma limits

UR ± 1.6 µm

En criterion in in-process measurement

HP PA

𝑈𝐿 = ±3.7 𝜇m

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25 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Reliable measurements on machine tools

HP TIM HP TIM

Coordinate system determination

Curves on freeform surface measurement

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26 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 1.2

Measured standard HP TIM

Output data format TXT Points along

curves and lines on

freeform surface

Evaluation SW Geomagic

Comparison method Bestfit alignment

against the CAD model

Measurand definition Deviation between the

actual and nominal

data, form error

Results

representation

Colour map of

deviations

Form error [-24.7, 6.6] µm

Average deviation

(one-sigma limits) 1.6, -1.8

Standard deviation 2.8 µm

Reliable measurements on machine tools

HP TIM

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27 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 2.2

Measurand XL Deviation of each measured point obtained by Measurement 1.2 from reference CAD model

Limits of evaluation Two-sigma limits

UR ± 1.6 µm

En criterion in in-process measurement

HP TIM

𝑈𝐿 = ± 1.5 𝜇m

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28

Reliable measurements on machine tools

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

LABORATORY 2

ATOS Triple Scan

LABORATORY 2 SPECIFICATION

Measurement system 3D optical

Maximal measurement

dimensions 170 x 130 - 810 x 610 mm²

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29 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 2

Measured standard HP PA

Output data format STL – 3D point cloud

Evaluation SW Geomagic

Comparison method Bestfit alignment

against the pilot data

Measurand definition Deviation between the

actual and pilot data

Results representation Colour map of

deviations

Form error [-6.5, 8.4] µm

Average deviation

(one-sigma limits) 1.2 µm, -1.3 µm

Standard deviation 1.6 µm

Reliable measurements on machine tools

HP PA

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30 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Reliable measurements on machine tools

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31 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 2

Measurand XL Deviation of point corresponding to SIP point obtained by Measurement 2 from reference CAD model

Limits of evaluation Two-sigma limits

UR ± 1.6 µm

En criterion in in-process measurement

HP PA

𝑈𝐿 = ±2.8 𝜇m

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32

Reliable measurements on machine tools

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

LABORATORY 3

WERTH TOMOSCOPE HV 500

LABORATORY 3 SPECIFICATION

Measurement system

Multisensor + tactile scanning probe

Max. perm. error (4.5 + L/75) µm

Maximum X-ray

voltage 300 kV

Maximum X-ray

performance 300 W

Resolution (2048 × 2048) pix.

Sensor area (400 × 400) mm

Maximal

measurement

dimensions

Length 710 mm

Diameter 500 mm

Maximal workpiece

weight 75 kg

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33 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 3

Measured standard HP PA

Output data format STL – 3D point cloud

Evaluation SW Geomagic

Comparison method Bestfit alignment

against the pilot data

Measurand definition Deviation between

the actual and pilot

data

Results

representation

Colour map of

deviations

Form error [-7.6, 12.4] µm

Average deviation

(one-sigma limits) 1.8 µm, -1.6 µm

Standard deviation 2.2 µm

Reliable measurements on machine tools

HP PA

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34 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 3

Measurand XL Deviation of each calibrated point obtained by pilot tactile measurement from 3D point cloud obtained by Measurement 3

Limits of evaluation Two-sigma limits

UR ± 1.6 µm

En criterion in in-process measurement

HP PA

𝑈𝐿 = ±4.1 𝜇m

0

0,5

1

1,5

2

2,5

3

1 101 201 301 401 501 601 701 801

E n

Number of point

En criterion evaluation

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35

CALIBRATED FF-MS, CALIBRATED CAD

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Original mathematical CAD model

Primary measurement with respect to the original CAD

Original control mesh refinement

Input data for primary measurement definition

1st stage calibrated CAD model

Bicubic B-spline surface given by finer control mesh

where the theoretical control points are replaced

by measured points

2nd stage calibrated CAD model

Bilinear B-spline surface given by finer control mesh of 1st stage calibrated CAD

model where the theoretical control points are replaced

by measured points

Control mesh of 1st stage calibrated CAD model

refinement

Input data for secondary measurement definition

Secondary measurement with respect to the 1st stage

calibrated CAD model

2nd stage calibrated CAD model verification Input 1: set of 225 points independent on control mesh Reference CAD: 2nd stage calibrated CAD model Form error: [-1.2, 1.4] µm Input 2: set of 4644 points independent on control mesh Reference CAD: 2nd stage calibrated CAD model Form error: [-1.5, 1.4] µm

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36

VERIFICATION

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

LABORATORY 5

ZEISS PRISMO

LABORATORY 5 SPECIFICATION

Measurement system

Active scanning probe VAST

Max. perm. error (1.0+L/330) µm

Maximal

measurement

dimensions

Length 1200 mm

Width 850 mm

Height 700 mm

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37 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 5

Measured standard HP TIM

Output data format TXT Points obtained by

scanning probe

Evaluation SW Geomagic

Comparison method Bestfit alignment

against the calibrated

CAD model

Measurand definition Deviation between the

actual and nominal

data, form error

Results

representation

Colour map of

deviations

Form error [-7.6, 2.6] µm

Average deviation

(one-sigma limits) ± 0.4 µm

Standard deviation 0.5 µm

Reliable measurements on machine tools

HP TIM

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38 May 18, 2016 Final workshop - PTB, Braunschweig, Germany

MEASUREMET LAB 5

Measurand XL Deviation of each measured point obtained by Measurement 5 from reference calibrated CAD model

Limits of evaluation Two-sigma limits

UR ± 1.6 µm

En criterion in in-process measurement

HP TIM

𝑈𝐿 = ±1.0 𝜇m

-0,008

-0,006

-0,004

-0,002

0

0,002

0,004

1

21

1

42

1

63

1

84

1

10

51

12

61

14

71

16

81

18

91

21

01

23

11

25

21

27

31

29

41

31

51

33

61

35

71

37

81

39

91

42

01

44

11

46

21

48

31

50

41

52

51

54

61

56

71

58

81

De

via

tio

n/ m

m

serial number of point

Deviations of Measurement 1.2 from calibrated CAD model HP TIM

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39

INTERCOMPARISON

May 18, 2016 Final workshop - PTB, Braunschweig, Germany

Meas.

technology

Measuring

machine Measurand Measuremen uncertainty

PILOT Tactile

on CMM SIP

Deviation of surface point from

reference model UL = ± 1.6 µm

LAB 1 Tactile on

CNC Resnishaw

Deviations of measured points from

CAD

UL = ± 3.7 µm

UL = ± 1.5 µm

LAB 2 Optical 3D

scanner

ATOS Triple

Scan Deviation of pilot data from STL UL = ± 2.8 µm

LAB 3 Laser scanner FARO Arm Deviation of pilot data from STL UL = ± 40 µm

LAB 4 Computer

tomography Werth CT Deviation of pilot data from STL UL = ± 4.1 µm

LAB 5

Tactile active

scanning

probe

ZEISS Deviations of measured points from

calibrated CAD UL = ± 1.0 µm

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