ece 3450 m. a. jupina, vu, 2014 metal-oxide-semiconductor field-effect transistor digital logic...
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ECE 3450 M. A. Jupina, VU, 2014
Metal-Oxide-Semiconductor Field-Effect Transistor
Digital Logic Technology
CMOS Fabrication MOS Device Structure and Operation NMOS Circuits CMOS Circuits The Future of CMOS Technology BiCMOS Circuits
Some Key Lecture Objectives A basic understanding of the layout and structure of MOS
devices and circuits A basic understanding of the electrical operation of MOSFETs How logic functions can be synthesized in CMOS and why
CMOS is the dominate digital technology today A more fundamental understanding of power dissipation and
propagation delay in CMOS technologies The future of CMOS technology (FinFETs and TFETs) When should BiCMOS technology be used and why
Reference:Fundamentals of Digital Logic, Chapter 3 and references at course website.
ECE 3450 M. A. Jupina, VU, 2014
CMOS Fabrication Processes
IC built on silicon substrate:– some structures diffused into substrate;
– other structures built on top of substrate.
Substrate regions are doped with n-type and p-type impurities. (n+ = heavily doped)
Wires made of polycrystalline silicon (poly), multiple layers of aluminum/copper (metal).
Silicon dioxide (SiO2) is an insulator.
ECE 3450 M. A. Jupina, VU, 2014
Simple Cross Section of a MOS Integrated Circuit
substraten+ n+p
substrate
metal1
poly
SiO2
metal2
metal3
transistorvia
ECE 3450 M. A. Jupina, VU, 2014
Example: Cross Section of Intel 0.25 Micron Process
ECE 3450 M. A. Jupina, VU, 2014
CMOS Fabrication Processing Steps
First place tubs or wells to provide properly-doped substrate for nmos and pmos transistors:
p-tub n-tub
substrate
ECE 3450 M. A. Jupina, VU, 2014
Processing Steps, Cont’d.
Pattern polysilicon before diffusion regions:
p-tub n-tub
poly polygate oxide
ECE 3450 M. A. Jupina, VU, 2014
Processing Steps, Cont’d
Add diffusions (self-aligned source and drain)
p-tub n-tub
poly poly
n+n+ p+ p+
ECE 3450 M. A. Jupina, VU, 2014
Processing Steps, Cont’d
Start adding metal layers:
p-tub n-tub
poly poly
n+n+ p+ p+
metal 1 metal 1
vias
ECE 3450 M. A. Jupina, VU, 2014
Processing Steps, Cont’d
Add other metal interconnect layers:
p-tub n-tub
poly poly
n+n+ p+ p+
metal 1 metal 1
vias
metal 2
ECE 3450 M. A. Jupina, VU, 2014
MOS Transistor Layout
NMOS FET: PMOS FET:
w
L
w
L
ECE 3450 M. A. Jupina, VU, 2014
NMOS Transistor Structure
nmos transistor:
ECE 3450 M. A. Jupina, VU, 2014
+
(a) Small transistor
L
W 1
L
W 2
(b) Larger transistor
Transistor Sizes
ECE 3450 M. A. Jupina, VU, 2014
++++++++++ ++++++ +++ ++++++++++++ ++++++ ++++++
+++++++++ +++++++++ +++++++++++ +++++++++++
Drain (type n)Source (type n)
Substrate (type p)
SiO 2
When V GS < VT, the transistor is off
V S
0 V =
V G
0 V =
V D
++++++
++++++++++++++++++
0DI
NMOS Transistor When Turned Off
ECE 3450 M. A. Jupina, VU, 2014
++++++++++ +++ ++++++++++++ ++++++
+++++++++ +++++++++++++++++++++ +++++++++++++++++
Channel (type n)
SiO 2
V DD
When V GS > VT, the transistor is on
+++++++++
V D
V G 5 V =
V S 0 V =
0DI
NMOS Transistor When Turned On
ECE 3450 M. A. Jupina, VU, 2014
Drain Source
in = "low" in = "high"
(a) A simple switch controlled by the input
V D V S
(b) NMOS transistor
Gate
(c) Simplified symbol for an NMOS transistor
V G
Substrate (Body)
NMOS Transistor as a Switch
ECE 3450 M. A. Jupina, VU, 2014
Gate
in = "high" in = "low"
(a) A switch with the opposite behavior
V G
V D V S
(b) PMOS transistor
(c) Simplified symbol for an PMOS transistor
V DD
Drain Source
Substrate (Body)
PMOS Transistor as a Switch
ECE 3450 M. A. Jupina, VU, 2014
(a) NMOS transistor
V G
V D
V S = 0 V
V S = V DD
V D
V G
Closed switch whenV G =V DD
V D = 0 V
Open switch whenV G = 0 V
V D
Open switch whenV G =V DD
V D
V DD
Closed switch whenV G = 0 V
V D =V DD
V DD
(b) PMOS transistor
NMOS and PMOS Transistors in Logic Circuits
ECE 3450 M. A. Jupina, VU, 2014
0
Linear or
Triode
V DS
Saturation
I D
V GS V T > ID,SAT
The Current-Voltage Relationship of a NMOS Transistor
VDS,SAT = VGS - VT
ECE 3450 M. A. Jupina, VU, 2014
NMOS Drain Current Characteristics
Sub-Threshold (ID=0)
ECE 3450 M. A. Jupina, VU, 2014
Drain Current Equations
For VGS > VT,
Linear region (VDS < VGS - VT)
Saturation region (VDS >= VGS - VT)
For VGS < VT, ID = 0 (Sub-Threshold region)
21D GS T DS DS2I = k (W/L)[(V - V )V - V ]
21D GS T2I = k (W/L) (V - V )
ECE 3450 M. A. Jupina, VU, 2014
NMOS and PMOS I-V Characteristics
ECE 3450 M. A. Jupina, VU, 2014
(b) Simplified circuit diagram
V x
V f
V DD
x f
(c) Graphical symbols
x f
R
V x
V f
R +
-
(a) Circuit diagram
5 V
An Inverter (NOT gate) Circuit for NMOS Technology
ECE 3450 M. A. Jupina, VU, 2014
V DD
(b) V x = VDD=5V
I stat
R
R DS
V f V OL=
(a) NMOS NOT gate
V f
V DD
V x
Voltage Levels in an NMOS Inverter
212
stat
For 5V
1' range
I
GS X DD
DS DSDS
D n GS T DS DS n GS T
fDS DDf OL DD
DS DS DS
V V V
V VR K s
W WI k V V V V k V VL LVR V
V V VR R R R R
-1/RVOL VOH=VDD
Load Line Analysis
V DD
(c) V x = 0
R
R DS
V f V OH=
Istat
ECE 3450 M. A. Jupina, VU, 2014
~
V f
V DD
(a) Circuit
(c) Graphical symbols
(b) Truth table
f f
0 0 1 1
0 1 0 1
1 1 1 0
x 1 x 2 f
V x 2
V x 1
x 1
x 2
x 1
x 2
NMOS Realization of a NAND Gate
ECE 3450 M. A. Jupina, VU, 2014
V x 1 V x 2
V f
V DD
(a) Circuit
(c) Graphical symbols
(b) Truth table
f
0
0
1
1
0
1
0
1
1
0
0
0
x 1 x 2 f
f x 1
x 2
x 1
x 2
NMOS Realization of a NOR Gate
ECE 3450 M. A. Jupina, VU, 2014
V f
V DD
Pull-down network
V x 1
V x n
(PDN)
Structure of an NMOS Circuit
ECE 3450 M. A. Jupina, VU, 2014
Open Collector Examples
High Current External Loads
Wire-Anding
Open Drain logic devices are also available in MOS technologies.
ECE 3450 M. A. Jupina, VU, 2014
Static Complementary CMOS Circuits
high noise margins - full rail to rail swing (VOH and VOL are at VDD and GND, respectively)
low output impedance, high input impedance no steady state path between VDD and GND (no static
power consumption) delay is a function of load capacitance and transistor
resistance comparable propagation delay times (under the
appropriate transistor sizing conditions) logic levels not dependent upon the relative device
sizes; ratioless
ECE 3450 M. A. Jupina, VU, 2014
Static Complementary Gate Structure
pullupnetwork
pulldownnetwork
VDD
VSS
outinin out
+
Drain
ECE 3450 M. A. Jupina, VU, 2014
Switch Models of CMOS Inverter
VDD
Rn
Vout = 0
Vin = V DD
VDD
Rp
Vout = VDD
Vin = 0
ECE 3450 M. A. Jupina, VU, 2014
VDD
Vf
Vx
IDVx
Vf
ID
(a) Current flow when input Vx
changes from 0 V to 5 V
(b) Current flow when input Vx
changes from 5 V to 0 V
Dynamic Current Flow in CMOS Circuits
ECE 3450 M. A. Jupina, VU, 2014
ECE 3450 M. A. Jupina, VU, 2014
CMOS Power Dissipation
2
1( )
AVER LEAKAGE
TOTAL STATIC DYNAMIC
LEAKAGE DD LOAD DD
I I i t dtT
P P P
I V fC V
IAVER
OFF
ON
Ways to Reduce CMOS Power Dissipation Lower VDD – Hardware steps down supply voltage when system’s activity decreases (DVS)
Reduce Capacitance in logic circuits (minimize the size of transistors)
Lower fCLK – Hardware steps down clock frequency when system’s activity decreases (DFS)
Use Gated-Clock Circuits to power-off logic circuits when not being used
Clock
Clock
DisableSignal
Gatedclock
Can insert clock gating at multiple levels in clock treeCan shut off entire subtree if all gating conditions are satisfied
ECE 3450 M. A. Jupina, VU, 2014
CMOS Propagation Delay
, ,
GS in DD DS out DD
GS
212
in DD DS out DD
1, 2
212
saturatio
2
at t = 0 V =V =V , V =V =V ( )
at t = V =V =V linear
2
, V =V =V / 2 (
n
)
2
DDpHL
D AVG D AVG
pHL
D A DDDD T DD DV n D TG V V V V
C
V V
V CVt
I I
t
WI k L
2.43 1.7 2.43
Also, 0.69 thus Similarly, and pHL n n pLH p
n DD p DD p DD
Ct R C R t R
W W Wk V k V k VL L L
OFF
ON
tpHL tpHL
tpLH
21
T DD , DD5
1.7Assuming V = V , 0.298 V thus D AVG n pHL
n DD
CWI k tL Wk VL
ECE 3450 M. A. Jupina, VU, 2014
Examples of MOSFET Electrical Parameters
L 1 m 0.25 m
VDD (V) 5 2.5
kn’(A/V2) 120 115
VTn (V) 0.8 0.43
kp’(A/V2) 40 30
VTp (V) -0.9 -0.4
ECE 3450 M. A. Jupina, VU, 2014
CMOS NAND
A
B
A • B
A BA B M1 M2 M3 M4
F
0 0 on on off off 1
0 1 on off off on 1
1 0 off on on off 1
1 1 off off on on 0
A
B
M1
M2
M3
M4
F
ECE 3450 M. A. Jupina, VU, 2014
CMOS NOR
A + B
A
B
A B
AB
A B M1 M2 M3 M4F
0 0
0 1
1 0
1 1
M1
M2
M3
M4
F
on on off off 1
on off off on 0
off on on off 0
off off on on 0
ECE 3450 M. A. Jupina, VU, 2014
CMOS Realization of an AND Gate
A
B
F = A • B
ECE 3450 M. A. Jupina, VU, 2014
Static Complementary CMOS
VDD
F(In1,In2,…InN)
In1
In2
InN
In1
In2
InN
PUN
PDN
PUN and PDN are dual logic networks
……
Pull-up network (PUN) and pull-down network (PDN)
PMOS transistors only
pull-up: make a connection from VDD to F when F(In1,In2,…InN) = 1
NMOS transistors only
pull-down: make a connection from F to GND when F(In1,In2,…InN) = 0
ECE 3450 M. A. Jupina, VU, 2014
Construction of PDN NMOS devices in series implement a NAND function
NMOS devices in parallel implement a NOR function
A
B
A • B
A B
A + B
ECE 3450 M. A. Jupina, VU, 2014
Dual PUN and PDN PUN and PDN are dual networks
DeMorgan’s theorems
a parallel connection of transistors in the PUN corresponds to a series connection of the PDN
Complementary gate is naturally inverting (NAND, NOR, AOI, OAI)
Number of transistors for an N-input logic gate is 2N
A + B = A • B
A • B = A + B
ECE 3450 M. A. Jupina, VU, 2014
Complex CMOS Gate
D
A
B C
D
A
B
C
OUT = (D+A•(B+C))
ECE 3450 M. A. Jupina, VU, 2014
V f
V DD
V x 1
V x 2
V x 3
Examples 3.1 and 3.2 in Textbook
V f
V DD
V x 1
V x 2
V x 3
V x 4
1 2 3 1 2 3f x x x x x x 1 2 3 4 1 2 3 4f x x x x x x x x ECE 3450 M. A. Jupina, VU, 2014
F
V DD
A
B
C
D
Given the PUN of a CMOS Circuit, Sketch the PDN.What is Logic Expression for F?
D
C
B
A
F
F = (A+B)•(C+D)ECE 3450 M. A. Jupina, VU, 2014
(a) Circuit
f x
(b) Truth table
Hi-Z x
0 1
f s
s
s
s 0 =
s 1 =
x
x
f = Hi-Z
f = x
(c) Equivalent circuit (d) Graphical symbol
f x
s
s
A Transmission Gate
ECE 3450 M. A. Jupina, VU, 2014
(b) Graphical symbol(a) Truth table
0 0 1 1
0 1 0 1
0 1 1 0
A B
A
B
f A B =
f A B =
(c) Sum-of-products implementation
f A B =
A
B
Exclusive-OR Gate Example
ECE 3450 M. A. Jupina, VU, 2014
A
B
F A B =
Exclusive-OR (XOR) Gate Implementation with Transmission Gates
0
on1
off
B
1
off
on0
B
ECE 3450 M. A. Jupina, VU, 2014
(b) Equivalent circuit
(c) Truth table
x f
e
(a) A tri-state buffer
0 0 1 1
0 1 0 1
Hi-Z Hi-Z 0 1
f e x
x f
e = 0
e = 1x f
f x
e
(d) Implementation
Tri-State Buffer using TGs
ECE 3450 M. A. Jupina, VU, 2014
x 1
x 2 f
s
A 2-to-1 Multiplexer using TGs
ECE 3450 M. A. Jupina, VU, 2014
F
A
B
What is the Logic Function of This Circuit?
0
1
on
=B
A B F
0 0
0 1
1 0
1 1off
10
1
0
off
B1
0
XOR F A B
off
ECE 3450 M. A. Jupina, VU, 2014
Standard Cell Frame Layout of CMOS Circuits
NMOS Transistors
PMOS Transistors
ECE 3450 M. A. Jupina, VU, 2014
A Simplified Floor Plan of a Standard Cell Design
VDD
GND
BU
SPads
StandardCells
RoutingChannels
forWires
ECE 3450 M. A. Jupina, VU, 2014
Standard Cell Layout Methodology
Routingchannel
VDD
GND
x x
x x
xx
xx
x
f
f
a
b
a b
x x“Stick Diagram”
Routingchannel
ECE 3450 M. A. Jupina, VU, 2014
Standard Cell Layout Methodology
Routingchannel
VDD
GND
x x
xx
xx
f a b
D S
G
D S
G
x
S D
G
D S
G
f a
b
D S
G
D S
G
x xx x
Routingchannel
ECE 3450 M. A. Jupina, VU, 2014
Final Circuit Schematic of the Standard Cell
a
b
f = a • b
ECE 3450 M. A. Jupina, VU, 2014
Standard Cell Layout of a CMOS Circuit
Microwind CAD Generated Drawing “Stick” Drawing in Power Point
ECE 3450 M. A. Jupina, VU, 2014
Nanoscale MOS Technology
ECE 3450 M. A. Jupina, VU, 2014
Power Supply, Threshold Voltage, & Oxide Thickness
Scaling with Channel Length
Reduction
ECE 3450 M. A. Jupina, VU, 2014
Trends in MOS Device Scaling
ECE 3450 M. A. Jupina, VU, 2014
Constant Electric Field Scaling Example
ECE 3450 M. A. Jupina, VU, 2014
The Future (L 10 nm) To improve performance, silicon will be mixed with
a semiconductor like germanium to produce a more spacious, strained crystalline structure that lets electric charge carriers move faster.
To reduce the leakage of current that drives up power consumption, gate oxides will be made of materials with more than eight times the dielectric constant (k) of today’s silicon dioxide.
For better control of the transistor’s on and off states, gates will be of metal, instead of polysilicon.
For better control and (again) to reduce power consumption, gates themselves will be doubled up so that two will do the job a single gate does now.
ECE 3450 M. A. Jupina, VU, 2014
Higher Mobilities in Strained Si
ECE 3450 M. A. Jupina, VU, 2014
MOSFETs vs. FinFETs
ECE 3450 M. A. Jupina, VU, 2014
The FinFET
ECE 3450 M. A. Jupina, VU, 2014
Multi-Gate FinFETsTriGate
-Gate QuadGate
Double Gate/
FinFET
ECE 3450 M. A. Jupina, VU, 2014
Multi-Gate FinFETs
FinFETTriGate
-Gate QuadGate
Double-gate/
ECE 3450 M. A. Jupina, VU, 2014
FinFET Advantages Excellent control of short channel effects in the deep
submicron regime exists and transistors are still scalable. Due to this reason, the small-length transistor can have a larger intrinsic gain (transconductance) compared to MOSFETs.
Much lower off-state current compared to MOSFETs. 22 nm Tri-Gate FinFETs have a 37% performance
increase and a 50% power reduction compared to 22 nm planar MOSFET technology at low voltages (< 1 V).
Allows MOS technology to stay on track with Moore’s Law.
ECE 3450 M. A. Jupina, VU, 2014
Intel Device Technology
ECE 3450 M. A. Jupina, VU, 2014
Intel’s Ivy Bridge: 3D ICs with FinFETs and TSVs
ECE 3450 M. A. Jupina, VU, 2014
ECE 3450 M. A. Jupina, VU, 2014
After FinFETs, What Is Next?
p-type TFET
A Comparison of ID Versus VG in Various Devices
ECE 3450 M. A. Jupina, VU, 2014
TFET Advantages
■ Extends silicon-based CMOS technology possibly below 10 nm by enabling a new generation of device topologies while allowing the use of current manufacturing processes.
■ Steep sub-threshold slopes (below 60mV/decade) are possible, and therefore, even less leakage current in the "off" state
ECE 3450 M. A. Jupina, VU, 2014
BiCMOS BiCMOS stands for Bipolar Complementary Metal-Oxide Semiconductor.
BJTs and MOSFETs are used to construct logic gates.
Additional fabrication steps are required (increased cost).
BiCMOS advantages: Better switching speed than CMOS and lower power consumption than BJT logic circuits.
p
pp
pppp+p+
ECE 3450 M. A. Jupina, VU, 2014
NPN Bipolar Junction Transistor (BJT): Physical Layout, Circuit Symbol, & Simplified Model
ECE 3450 M. A. Jupina, VU, 2014
Charge Storage in the Base of a NPN
n(x
)
x
EMITTER BASE COLLECTOR
Cutoff
Forward Active
Saturation
( )BQ n x dx
p
QC t RC
V
ECE 3450 M. A. Jupina, VU, 2014
Operation of a BiCMOS Inverter
ECE 3450 M. A. Jupina, VU, 2014
Propagation Delay
ECE 3450 M. A. Jupina, VU, 2014
tp
CLOADCX
CMOS
BiCMOS
Propagation Delay of BiCMOS and CMOS Gates as a function of CL
ECE 3450 M. A. Jupina, VU, 2014
Applications of BiCMOS Circuits
BiCMOS (Tri-State) buffers to drive off-chip loads
Data BusOn-Chip Clock Distribution Network
Composed of BiCMOS Inverters
ECE 3450 M. A. Jupina, VU, 2014