e and dk - vts · e and dk rotary piston vacuum pumps single- and two-stage, oil-sealed, 200 - 250...

E and DKRotary Piston Vacuum Pumps

Single- and two-stage, oil-sealed, 200 - 250 m3 x h-1 (118 - 147 cfm)

172.01.02Excerpt from the Oerlikon Leybold Vacuum Full Line CatalogProduct Section C06Edition May 2007

C06

Contents

General

Applications and Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.03

Application and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.03

Products

Single-Stage Rotary Piston Vacuum Pump E 250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.04

Two-Stage Rotary Piston Vacuum Pump DK 200. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.06

Accessories

Global Versions

Valves. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.08

Exhaust Filter Box AFK 2 with Oil Return Line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.09

Oil Filter Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.10

Oil Control Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.10

Condensate Separator AK 100-250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.11

Exhaust Filter AF 100-250 A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.12

Dust Filter FS 100-250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.13

Dust Separator AS 100-250. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.14

Versions for the North and South American Continents

Oil Filtering System OF1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.16

Vibration Absorber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.19

Oil Filtering System OF3000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.20

Condensate Separator AK 100-250 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.22

Exhaust Filter AF 100-250 A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.23

Vacuum Pump Oils. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.24

Miscellaneous

60 Hz Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C06.30

02 Oerlikon Leybold Vacuum Full Line Catalog

Contents

C0603Oerlikon Leybold Vacuum Full Line Catalog

Advantages to the User

- Gas ballast facility

- Easy maintenance

- Good ultimate pressure with andwithout gas ballast

- High pumping speed at low intakepressures

- Compact design with flange moun-ted motor

- High water vapor tolerance

- Reliable continuous operation

- Tolerant and rugged, due to non-contact rotary piston within thepump chamber

- Very smooth operation due to dyna-mically balanced masses

- Separate oil filling for the gear pro-tects the gear against contaminatedpump oil

- Oil is used for sealing, lubricationand cooling

- A built-in anti-reverse lock preventsincorrect rotation of the piston andalso stops it being pulled backwhen the pump is switched offwhile under vacuum

- Air cooling makes the pumpenvironmentally-friendly andeconomic

- Clear design and service-friendlydue to the modular design

Technical Note

- By installing a filter, the oil may becleaned simultaneously

Applications and Operation

Balancing the masses within a rotary piston vacuumpump: Eccentric shaft, 2 pistons and toothed wheel

Functional diagram of a rotary piston vacuum pump

Oil level glass

Exhaust box

Dirt trap

Intake port

Sliding vane

Hinge bar

Cooling fins

Housing

Gas ballastactuator

Exhaust valve

Shaft

Eccentric

Oil channel

Rotary piston

General

Manufacture of semiconductors ■ ■

Coating ■ ■

Chemistry ■ ■

Metallurgy ■ ■

Electrical engineering ■ ■

Mechanical engineering ■ ■

Backing pump for a Roots vacuum pumpin diffusion pump systems ■ ■

AFK Exhaust Filter Box C06.09 ■ ■

Oil Filter Unit C06.10 ■ ■

Oil Control Unit C06.10 ■ ■

AK Condensate Seperator C06.11/22 ■ ■

AF Exhaust Filter C06.12/23 ■ ■

FS Dust Filter C06.13 ■ ■

AS Dust Separator C06.14 ■ ■

Oil Filtering System OF1000 C06.16 ■ ■

Oil Filtering System OF3000 C06.20 ■ ■

Vibration Absorber C06.19 ■ ■

Accessories

Pumps

E 250

DK 200

Page

Application

C06

Single-Stage Rotary Piston Vacuum Pump E 250


Typical Applications

- Chemical, metallurgical and electronic vacuum processes

- Impregnating, degassing and drying processes in experimentationsystems, in drying cabinets, ex-trusion etc.

minTime

mbar Torr

Pre

ssur

e

0

2

468

1 2 3 4 5 6 7 8 10

Without gas ballast

With gas ballast

100

10-1

101

102

103

10-1

100

101

102

750

E 250

Pumpdown characteristic of a 1000 l vessel forthe E 250 rotary piston vacuum pump (60 Hz curves at the end of the section)

Pum

ping

spe

ed

m3 x h-1

without gas ballast

2 4 68

864

2

with gas ballast

10-2

10310-2 10-1 100 101 102 103 Torr

cfm

75000

102

101

100

100 101 102mbar

Pressure103 10510-1

500

50

5

1

10

100

E 250

DN

d

h3

h1

gDN1

h2

aa1

a2

lkf

e b2 b3

bb1 30

h

Pumping speed characteristic of the E 250 rotarypiston vacuum pump (60 Hz curves at the end of the section)

Dimensional drawing for the single-stage rotary piston vacuum pump E 250

DN DN1 a 1) a1 a2 b b1 b2 b3

mm 63 ISO-K 63 ISO-K 1190 780 30 340 140 202 52in. 63 ISO-K 63 ISO-K 4.17 2.73 1.05 1.19 0.49 0.71 0.18

Pump flanges to DIN 2501 with sealing disc and collar flange for the connection of ISO-K (KF) components1) Only for the motor which is supplied as standard

- Pressure range down to 4 x 10-2 mbar (2.4 x 10-2 Torr) without gas ballast or to 5 x 10-1 mbar (3 x 10-1 Torr) with gas ballast

- Backing pump for Roots vacuumpumps at intake pressure down to10-3 mbar (0.75 x 10-3 Torr)

l d e f g h h1 h2 h3 k l

mm 14 777 750 65 740 475 636 295 337 290in. 0.05 2.72 2.63 0.23 2.59 1.66 2.23 1.03 1.78 1.02

Products

Supplied Equipment

- With DN 65 DIN flanges on the in-take and exhaust sides for direct connection of DN 63 ISO-K flangecomponents

- Ready for operation, complete withoil filling

- Special models for different motor voltages, motor frequencies andother protection class ratings areavailable. Details on these upon request.


Technical Data E 25050 Hz 60 Hz

290 (170.8) 290 (170.8)

250 (147.3) 250 (147.3)

< 4x 10-2 (< 2.4 x 10-2) < 4x 10-2 (< 2.4 x 10-2)

60 (45) 60 (45)

< 76 < 76

230/400 208-230/460

5.5 (7.5) 5.5 (7.5)

5.5 (7.5) 5.5 (7.5)

5.5 (7.5) 5.5 (7.5)

1500 1800

540 540

54 54

8.4 (8.9) 8.4 (8.9)

375 (827) 375 (827)

63 ISO-K 3" ANSI

63 ISO-K 3" ANSI

Ordering Information

Single-stage rotary piston vacuum pump

E 250, with 50 Hz-motor 3)

(220 / 380 V +/- 10%)

E 250, with 460 V/50 Hz motor 3)

(220-230 V / 460 V +/- 10%)

E 250, with 460 V/60 Hz motor 3), 4), 5)

(200-230 V / 460 V +/- 10%) USA version

E 250, without motor, with 50 Hz gear 3), 6)

Sealing kit, pump

Vibration absorbing metal feet

SECUVAC valve

200-230 V, 50/60 Hz

100 - 115 V, 50/60 Hz

ANSI adaptor

E 25050 Hz 60 Hz

Part No. 105 36 –

Part No. 895 08 –

– Part No. 895 09

Part No. 166 37 –

Part No. 192 63 Part No. 192 63

Part No. 101 55 Part No. 101 55

Part No. 215 207 Part No. 215 207

Part No. 215 206 Part No. 215 206

Upon request Upon request

1) To DIN 28 400 and following numbers2) Operated at ultimate pressure without gas ballast, free field measurement at a distance of 1 m (3.5 ft).

When fitting accessories, for example AFK2, the noise level may change by 2 to 3 dB(A)3) For operation at a different frequency, the gear will have to be exchanged. Please state the main frequency and connection (star or delta) in your order4) Continuous operation from 60 mbar (45 Torr)5) USA version supplied with 3" ANSI flanges6) The maximum speed must not exceed 1,500 rpm at 50 Hz. The motor rating must be at least 5 kW (6.8 hp)

Nominal pumping speed 1) m3 x h-1 (cfm)

Pumping speed 1) m3 x h-1 (cfm)

Ultimate partial pressure

without gas ballast 1) mbar (Torr)

Water vapor tolerance 1) mbar (Torr)

Average noise level to DIN 45 635 2) dB(A)

Mains voltage 3-ph. V

Motor power at

220 / 380 V, 50 Hz kW (hp)

220-230 / 460 V, 50 Hz kW (hp)

200-230 V / 460 V, 60 Hz kW (hp)

Nominal motor speed rpm

Speed of the pump rpm

Motor protection IP

Oil filling l (qt)

Weight kg (lbs)

Intake port DN

Exhaust port DN

C06

200 m3 x h-1 (117.8 cfm)


Two-stage Rotary Piston Vacuum Pump DK 200

Typical Applications

- For particularly low ultimate pressures

- High vacuum stage with degassedoil from a separate oil reservoir

- For all chemical, metallurgical andelectronic vacuum processes in thepressure range down to 5 x 10-4 mbar (3 x 10-4 Torr) without gas ballast and

4 x 10-3 mbar (2.4 x 10-3 Torr) withgas ballast

- Backing pump for Roots vacuumpumps

- Use as backing pump in pumpsystems in connection with diffusi-on, booster-type diffusion and vaporpumps

Supplied Equipment

- With DN 65 DIN flanges on the in-take and exhaust sides for directconnection of DN 63 ISO-K flangecomponents

- Ready for operation, complete withoil filling

- Special models for different motorvoltages, motor frequencies andother protection class ratings areavailable

minTime

mbar Torr

Pre

ssur

e

0

2468

1 2 3 4 5 6 7 8 10

Without gas ballast

With gas ballast

10-3 10-3

10-2

100

10-1

101

10-2

100

10-1

101

750103

DK 200

Pumpdown characteritics of a 1000 l vessel forthe DK type rotary piston vacuum pump (60 Hz curves at the end of the section)

DK 200

Pum

ping

spe

ed

m3 x h-1

without gas ballast

2 4 68

864

2

with gas ballast

10-4

10310-4 10-3 10-2 10-1 100 101 Torr

cfm

750

102

101

100

10-2 10-1 100mbar

Pressure101 10310-3

500

50

5

1

10

100

DNDN

d

g

h

h3

h1

1

h2

k lf

e b2 b3

a1a2

a b 1

30b

Pumping speed characteristic of the DK rotarypiston vacuum pump (60 Hz curves at the end ofthe section)

Dimensional drawing for the DK 200 two-stage rotary piston vacuum pump

Pump flanges to DIN 2501 with sealing disc and collar flange for the connection of ISO-K (KF) components1) Only for the motor which is supplied as standard

DN DN1 a 1) a1 a2 b b1 b2 b3

mm 63 ISO-K 63 ISO-K 1190 780 30 340 140 202 52in. 63 ISO-K 63 ISO-K 4.17 2.73 1.05 1.19 0.49 0.71 0.18

l d e f g h h1 h2 h3 k l

mm 14 777 750 65 740 475 636 295 337 290in. 0.05 2.72 2.63 0.23 2.59 1.66 2.23 1.03 1.78 1.02



Technical Data DK 200

50 Hz 60 Hz

Nominal pumping speed 1) m3 x h-1 (cfm)

Pumping speed 1) m3 x h-1 (cfm)

Ultimate partial pressure

without gas ballast 1) mbar (Torr)

Water vapor tolerance 1) mbar (Torr)

Average noise level to DIN 45 635 2) dB(A)

Main voltage 3-ph. V

Motor power at

220 / 380 V, 50 Hz kW (hp)

200-230 V / 380 V, 60 Hz kW (hp)

Nominal motor speed rpm

Speed of the pump rpm

Motor protection IP

Oil filling l (qt)

Weight kg (lbs)

Intake port DN

Exhaust port DN

225 (132.5) 225 (132.5)

200 (117.8) 200 (117.8)

< 5 x 10-4 (< 3 x 10-4) < 5 x 10-4 (< 3 x 10-4)

26 (19.5) 26 (19.5)

< 76 < 76

230/400 208-230/460

5.5 (7.5) 5.5 (7.5)

5.5 (7.5) 5.5 (7.5)

1500 1800

540 540

54 54

4.4 (4.6) 4.4 (4.6)

375 (827) 375 (827)

63 ISO-K 3" ANSI

63 ISO-K 3" ANSI

Two-stage rotary piston vacuum pump

DK 200, with 50 Hz motor 3)

(220 / 380 V +/- 10%)

DK 200, with 60 Hz motor 3), 4), 5)

(200-230 V / 460 V +/- 10%) USA version

DK 200, without motor, 50 Hz gear 3), 6)

Sealing kit, pump

Vibration absorbing metal feet

SECUVAC valve

200-230 V, 50/60 Hz

100 - 115 V, 50/60 Hz

ANSI adaptor

1) To DIN 28 400 and following numbers2) Operated at ultimate pressure without gas ballast, free field measurement at a distance of 1 m (3.5 ft). When fitting accessories, for example AFK 2,

the noise level may change by 2 to 3 dB(A)3) For operation at a different frequency, the gear will have to be exchanged. Please state the main frequency in your order4) Continuous operation from 30 mbar (22.5 Torr)5) USA version supplied with 3" ANSI flanges6) The maximum speed must not exceed 1,500 rpm at 50 Hz. The motor rating must be at least 5 kW (6.8 hp)

Part No. 111 16 –

– Part No. 895 10

Part No. 166 17 –

Part No. 192 63 Part No. 192 63

Part No. 101 55 Part No. 101 55

Part No. 215 207 Part No. 215 207

Part No. 215 206 Part No. 215 206

Upon request Upon request

DK 200

50 Hz 60 Hz

Accessories

Oerlikon Leybold Vacuum Full Line CatalogC06 08

Valves


- The pump may warm up while theintake line is isolated

- Energy-conserving and environ-mentally friendly operation at ultima-te pressure

- The pump may continue to operatewhile the vacuum chamber is ven-ted for brief periods

- After completion of a process thepump may continue to operate soas to regenerate the oil


Two valve functions in one:

- Fast-closing high vacuum isolationvalve for separating the vacuumchamber or a vapor jet pump (a diffusion pump, for example) fromthe backing pump

- Venting valve for venting of thevalve’s chamber and thus the pump(backing pump)

- Immediate closing action uponpower failure

- Opening action only after the intake line has been evacuated

- Delayed isolation of the vacuumchamber and venting the vacuumpump (negligible “gulp”)

The flange components which are required for installation of the accessories tothe pump must be ordered separately. For flange components and valves pleaserefer to the corresponding Product Sections C13 and C14.

Dimensional drawing for the right-angle valve, bellows-sealed, manually operated

DN 63 ISO-KA mm 266

in. 1.05B mm 124

in. 0.49C mm 150

in. 0.59D mm 88

in. 0.35E mm 20

in. 0.08


Right angle valve DN 63 ISO-K, Aluminium,

manually operated

Right Angle Valve

Part No. 107 80

h

D

h2

a

a

h1

b

Dimensional drawing for the SECUVAC valves with ISO-K clamp flanges


SECUVAC valve DN 63 ISO-K

24 V DC

100 - 115 V AC

200 - 230 V AC

SECUVAC Valve

Part No. 215 205Part No. 215 206Part No. 215 207

DN 63 ISO-Ka mm 88

in. 0.35b mm 150

in. 0.59D mm 124

in. 0.49h mm 220.5

in. 0.87h1 mm 150

in. 0.59h2 mm 18.2

in. 0.07

Exhaust Filter Box AFK 2Ordering Information

Weight kg (lbs)

Connection for collar flange DN

Oerlikon Leybold Vacuum Full Line Catalog C0609


- At intake pressures below 100 mbar (75 Torr) this is a spacesaving alternative to the separateexhaust filter

- Almost oil-free exhaust gas, over 99 % effective

- Exchangeable filter elements

- Built-in over-pressure valves

- Low oil consumption due to theintegrated oil return line

Technical Notes

In case of toxic or hazardous gasesand vapors the exhaust lines mustcomply with the safety regulations.

The oil mists entrained in the exhaustgas from the pump are cleaned in theexhaust filter box.

The exhaust filter box is installedinstead of the standard filter box onthe rotary piston vacuum pump.

Exhaust Filter Box AFK 2 with Oil Return Line

DN 65 DIN

a

h1

h

c b1 b2

DN 63 ISO-K

Dimensional drawing for the exhaust filter box AFK 2 with oil return line

AFK 2 a b1 b2 c h h1mm 337 170 52 593 665 761in. 1.18 0.60 0.18 2.08 2.33 2.66

Technical Data Exhaust Filter Box AFK 2

10 (22.1)

63 ISO-K

Exhaust filter box AFK 2

for E 250, DK 200

Replacement filter element (FE)

(2 are required)

Part No. 189 47

Part No. 390 26 144

C06 10 Oerlikon Leybold Vacuum Full Line Catalog

Mechanical oil filters are required whena severe contamination of the pump’soil can be expected due to solid par-ticles like dust, for example.


- Protection of the pump against contamination of its oil

- Longer service life for the oil

- Easy to fit without having to disassemble the pump

Mechanical Oil Filter Unit

- Automatic oil circulation from the oilreservoir on the exhaust side via thefilter to the intake chamber

- Filter insert which is easy to exchan-ge (bypass filter)

- Particulate retention to 3 microns

Technical Notes

Increases the required quantity of oil byabout 1.3 liters (1.37 qt).

When using the oil filter, the pumpmust be vented when shut down inorder to prevent the oil from rising intothe intake line; for this we suggest youinstall a SECUVAC valve.

Oil Filter Unit Oil Control Unit

Adding the oil can be automatedthrough the oil control unit withouthaving to interrupt operation. For thispurpose, an additional oil reservoirholding 7 liters (7.4 qt) is connected tothe pump.


- Optimum oil level over long periods of operation

- Reduction of oil losses

- Visual function check (transparentconnecting hose)

- Simple installation of the unit without the need to disassemble thepump

- Closed circuit by connection of oilreservoir, vessel and pump

- Built-in filter insert separatesmechanical contamination

Technical Notes

You must under all circumstances usea SECUVAC valve, otherwise the oilreservoir will be emptied by the pumpas soon as it is switched off.

aød1

l1

ødl

l2

Dimensional drawing for the oil filter unit

l2

ød

ød1

a

l1

l

Dimensional drawing for the oil control unit


Mechanical oil filter unit with special filter

insert, complete with adaptor screw and

mount for attachment to the pump

Replacement filter

Oil Filter Unit

Part No. 101 31

Part No. 101 32


Oil control unit

Replacement filter

Oil Control Unit

Part No. 101 37

Part No. 101 32

a l d l d1 l l1 l2mm 310 204 235 390 490 270in. 1.09 0.71 0.82 1.37 1.72 0.95

a l d l d1 l l1 l2mm 230 115 127 290 465 270in. 0.81 0.40 0.44 1.02 1.63 0.95

Condensate Separator

AK 100-250




- May be used either on the intake orthe exhaust side

- Corrosion-protected

- Condensate level glass

- Protects the pump against condensate which collects in theexhaust line and the intake line

- Effect independent of the directionof flow

Technical Notes

When used on the intake side the draincock must provide a vacuum-tightseal.

Half of the quantity of required clamping screws is provided.

Condensate Separator AK 100-250

DN

h2h1

h

a1

a

ød

Dimensional drawing for the condensate separatorAK 100-250

Technical Data Condensate Separator

AK 100-250Capacity for condensate l (qt)

Weight kg (lbs)

Connection DN

10 (10.57)

12 (26.5)

63 ISO-K

Condensate separator AK 100-250

Drain cock, vacuum-tight

Connection components

Connection to the intake side of the

E 250, DK 200

Elbow

Centering ring

Part No. 188 45

Part No. 190 90

Part No. 887 25

Part No. 268 05

Welded condensate collecting vessels.

DN a a1 l d h h1 h263 ISO-K mm 182.5 333 280 342 162 10863 ISO-K in. 0.64 1.17 0.98 1.20 0.57 0.38

AF 100-250 AOrdering Information

Accessories


Exhaust Filter AF 100-250 A


- Over 99% effective

- Optimally matched to our rotarypiston vacuum pumps

- Exchangeable filter insert


- Sight glass for checking the amountof separated oil

- Solvent-resistant, helium-tight

- Cast aluminium housing

- Oil return (optional)

h12)

h1

h3

h

aDN

ød1)

Dimensional drawing for the exhaust filter AF 100-250 A

1) 3 feet around the circumference2) Clearance required for exchanging the

filter elements

Technical Data AF 100-250 A

Weight kg (lbs)

Connection DN

12 (26.5)

63 ISO-K

Exhaust filter AF 100-250 A

Replacement filter element (2 are required)

Drain cock, vacuum-tight


Connection to the E 250, DK 200

Bellows

Centering ring ISO-K

Part No. 189 45

Part No. 390-261-44

Part No. 190 90

Part No. 887 70

Part No. 268 05

To remove oil mists entrained in theexhaust gas.

DN a l d h h1 h263 ISO-K mm 380 200 650-690 47.5 45063 ISO-K in. 1.33 0.7 2.28-2.42 0.17 1.58

Technical Notes


FS 100-250Ordering Information


Dust Filter FS 100-250


- Easy to disassemble

- Vacuum-tight cast housing

- Replacement filters

- Separates dust from a grain size of1 µm

Technical Notes

Install horizontally so that the filter in-sert may be removed from below.

In case of very large quantities of dustuse a dust separator.

Only throttles the pumping speed sig-nificantly at very low intake pressures.

Supplied Equipment


DN

h1

h

a ød

h2

b

Dimensional drawing for the dust filter FS 100-250

Technical Data FS 100-250

Connection to pump

Throttling of pumping speed

at an intake pressure of 13 mbar (9.8 Torr) approx. %

at an intake pressure of 1.3 mbar (0.98 Torr) approx. %

Weight kg (lbs)

Connection DN

E 250, DK 200

28

38

11 (24.3)

63 ISO-K

Dust filter FS 100-250

Filter insert

Replacement cotton wadding cartridges (1 set = 10 pieces)


Connection to the E 250, DK 200

Elbow

Centering ring

ANSI adaptor

Part No. 278 17

Part No. 178 37

Part No. 178 27

Part No. 887 25

Part No. 268 05

Upon request

Dust filters protect the pumps againstthe intake of dust.

a b l d h h1 h2mm 255 175 170 ≈ 340 85 ≈ 265in. 0.89 0.61 0.60 ≈ 1.19 0.30 ≈ 0.93

AS 100-250Ordering Information

Accessories


Dust Separator AS 100-250

Advantages to the user

- Dust separator for large quantitiesof dust

- Dual-stage, thus low throttling effect

- Cyclone and wet filter

- Replacement inserts for both filters

- Dust of a grain size of 2 µm andmore are separated in a cyclone

- Finer dust is separated in an insertmoistened with oil

Technical Notes

Dust separator filters throttle thepumping speed only at low intakepressures.

Supplied Equipment


DN 40 KF

DN 40 KF

l

DN 63 ISO-K

DN 63 ISO-K

a1

a2 h1

h2

ød

ød1

h

a

Dimensional drawing for the dust separator AS 100-250

Technical Data AS 100-250

Connection to pump

Throttling of pumping speed

at an intake pressure of 13 mbar (9.8 Torr) approx. %

at an intake pressure of 1.3 (0.98 Torr) mbar approx. %

Capacity for dust l

Weight kg (lbs)

Connection DN

E 250, DK 200

3.5

7

4.0

27 (59.5)

63 ISO-K

Dust separator AS 100-250

Filter insert

Part No. 178 02

Part No. 178 06

Dust separators protect the pumpsagainst being contaminated by dust.

a a1 a2 l dmm 220 385 115 285in. 8.66 15.16 4.53 11.22

l d1 h h1 h2mm 330 530 685 240in. 12.99 20.87 26.97 9.45


Notes

C06

Only available for purchase in North and South America

OF1000 Oil Filtering Systems are desi-gned to remove acids and particulatesfrom the lubricating fluid used inOerlikon Leybold Vacuum mechanicalvacuum pumps. The systems are loca-ted externally from the vacuum pump,and utilize their own integral gearpump in conjunction with a bypass tocontinuously recycle fluid through a fil-tering medium; the medium is housedin an element/canister assembly whichadditionally serves to absorb heat, andthus reduce the operating temperatureof the vacuum pump.

OF1000 Systems are available in bothsingle- and dual-canister designs. Bothtypes are highly compact and reliable,and can be supplied in models forstandard or chemically severe applica-tions.

Single-canister OF1000 models aredistinguished by their smaller footprintwhile dual-canister configurationsafford the advantages of multi-mediafiltration and increased oil capacity.Dual-canister models are designed forseries flow through two side-by-side

mounted canisters, and thus can beused to filter oil through two differentmedia on the same pass or for doublefiltration through elements containingthe same medium. The models alsoenable the vacuum pump to operate atsomewhat lower temperatures, whileproviding it with a larger supply ofclean, filtered oil.

All OF1000 models are supplied with achoice of four filtering elements. TheFullers Earth element provides highcapacity for standard acids and can beused to trap particulates down to 10 micron in size. Hydrophilic, activa-ted alumina and fiberglass particulateelements are also available. The hydro-philic element is particularly effectivefor hydrolized acids, and can also beused to trap particles as small as 1 micron. The activated alumina ele-ment provides 10 micron particulateretention and is extremely effective forLewis acids and polar compounds.The fiberglass element is suitable forparticulate removal down to 10 micron.

The element/canister assembly ofOF1000 systems is easy to install,extremely easy to remove and replace.The recessed lid and oil level of theassembly safeguards against the pos-sibility of spillage. Dripless quick dis-connects are also provided for easycanister removal and safer disposal ofthe filtering element and oil.

OF1000 Systems also come equippedwith flexible Teflon hoses designed toresist dielectric breakdown. The sys-tems thus ward against the possibilityof oil leaks due to pinholing or staticburning of the hose.


Oil Filtering System OF1000

Oil filtering system OF1000

C06


- Choice of single- and dual-canistermodels for standard or chemicallysevere applications

- Compact design

- Reliable operation

- Choice of four filtering elements

- Dripless quick disconnects for easyremoval and replacement of filterelements

- Recessed lid and oil level – no oilspillage

- Conductive teflon hoses for staticcharge dissipation – no oil leakagedue to static burning

- Integral gear pump with built-inbypass

- Fluid sight glass and flow monitor

- Pressure gauge

- Small precharge fluid volume

- Single phase 50/60 Hz motors standard

Applications

Standard series models are widelyused in silicon production processes,including LPCVD, low-pressure epitaxy,ion implantation, reactive ion etchingand several plasma processes. Suchprocesses employ a variety of gaseswhich can react with pump fluid,resulting in the formation of sludge,particulates and acids. The standardOF1000 model has proven effective atextending maintenance intervals insuch applications.

Similarly, chemically resistant OF1000Cmodels have proven successful in alu-minum etching and other processeswhere boron trichloride and other highly toxic gases are employed. Thecanister, gear pump, fittings and quickdisconnects of the corrosive-servicemodel have been specially treated witha fluorocarbon material that substan-tially increases the life of these com-ponents.

17Oerlikon Leybold Vacuum Full Line Catalog

Single-Canister Dual-Canister

Systems Systems


C06 18 Oerlikon Leybold Vacuum Full Line Catalog

Technical Data Single-Canister Dual-Canister

Systems SystemsGear pump motor

Gear pump

Pressure gauge

Pump fluid capacity

Flexible hoses

Dimensions in. (mm)

Flow arrangement

Weight (Dry) lbs (kg)

1/6 HP, 115/208/220 V, single phase, 50/60 Hz, 1/6 HP, 115/208/220 V, single phase, 50/60 Hz,wired for 115 V, with on/off switch 1) wired for 115 V, with on/off switch 1)

0.7 gpm @ 1800 RPM 0.7 gpm @ 1800 RPM

0 to 100 psig (0 to 70 kPa) 0 to 100 psig (0 to 70 kPa)

15 lb perfluorinated polyether 29 lb perfluorinated polyetheror 3.75 qt hydrocarbon oil or 7.25 qt hydrocarbon oil

3/8 in. l.D. teflon/carbon black with 3/8 in. l.D. teflon/carbon black with stainless steel braid – 4 ft lengths 2) stainless steel braid – 4 ft lengths 2)

16 x 14 x 11 (406 x 356 x 279) 23 x 14 x 11 (585 x 356 x 279)

– series 3)

45 (20.39) 60 (27.18)

Oil filtering systemOF1000 less filtering element and oilOF1000 prepared for PFPE, less filtering element and oilOF1000C chemically severe service, prepared for PFPE fluid

Accessories

Spare filter canister assemblywith quick disconnectprepared for PFPE, with quick disconnectchemically severe service

Filtering Elements

Aluminum Oxide High capacity for reagent grade HCI;removes lewis acids and polar compounds; 10 micron particulate retention

Fullers Earth Acid and particulate filter with capacity of 34 ml reagent grade HCI; 10 micron particulate retention

Hydrophilic Water and HCI acid absorbing capabilities; 1 micron particulate retention

Particulate Fiberglass element with 10 micron particulate retention

1) Hazardous duty models and special voltages also available2) Optional 6, 10 and 15 feet hoses available 3) 0ptional parallel flow arrangement also available

Part No. 898 550 Part No. 898 552

Part No. 898 551 Part No. 898 553

Part No. 898 561 Part No. 898 554

Part No. 898 555 Part No. 898 557 (front), Part No. 898 555 (rear)



Part No. 898 504 Part No. 898 504

Part No. 898 505 Part No. 898 505

Part No. 898 506 Part No. 898 506

Part No. 898 507 Part No. 898 507

C06

Accessories


- Reduce transmitted vibration by60%

- Rubber vibration-absorbent varies inhardness for pumps of differentweights

19Oerlikon Leybold Vacuum Full Line Catalog

Vibration Absorber

ød1

h1

h

ød

E and DK series rotary piston mechanical pumps are dynamicallybalanced for vibration-free performan-ce in normal. In applications wherepumps must be installed on light frames or wooden flooring, however,excess vibration can result from thelack of solid support.

Dimensional drawing for the vibration absorber

l d l d1 h h1mm 337 1/2" 13NC 665 761in. 2.95 1/2" 13NC 1.57 0.43


Vibration absorber (set of 4)

(for E 250, DK 200)

Vibration Absorber

Part No. 101 55-1

- Tapped holes provided in absorbersfor attaching to frame or floor

- Shipped complete with all necessary mounting hardware


C06

Accessories

Operation

Contaminated oil is removed from thedrain location on the vacuum pumpand is cycled to the element assembly.Clean oil is subsequently circulatedback to the oil fill port of the vacuumpump.

The tangential flow inlet port to the oilfilter canister allows full oil flow whileutilizing the entire filter capability of theelement. This translates into longer fil-ter life, fewer element changes, andless oil loss.

Similarly, chemically severe OF3000models have proven successful in alu-minum etching and other processeswhere boron tricloride and other highlytoxic gases are employed. The cani-ster, gear pump, fittings and quick dis-connects of the corrosive-servicemodel have been specially treated witha fluorocarbon material that subtantiallyincreases the life of these components.


- Compact, mobile design

- Choice of five filter elements

- Dripless quick disconnects for easyremoval and replacement of filterelements

- No spillage - recessed lid and oillevel

- Conductive teflon hoses for staticcharge dissipation

- Integral gear pump with built-inbypass

- Pressure gauge

- Oil sight glass

- Single phase 50/60 Hz motor standard

- Tangential flow inlets - improves oilflow

- Canister drain valve

Filtering Elements

Fullers Earth - Provides high capacityfor standard acids and can be used totrap particulates down to 10 micronsize.

Hydrophylic - Effective for hydrolizedacids and particulates as low as onemicron.

Activated Alumina - Effective onLewis acids and polar compounds.Can be used to trap particulates downto 10 microns.

Particulate (Paper) - Suitable for parti-culate removal down to 10 microns.

Particulate (Fiberglass) - Suitable forparticulate removal down to 10 microns.


Oil Filtering System OF3000

The OF3000 is a compact, highlymobile filtering system designed foruse with mechanical pumps in appli-cations generating large volumes ofheavy particulate filtration.

A positive feed gear pump and checkvalve assembly protect against exces-sive backpressure in the canistershould the filter element become clog-ged. Flexible hoses and matched dri-pless connectors ensure easy maneu-verability of the OF3000’s rollaroundcart, while also eliminating the possibi-lity of oil spills.

Oil filtering system OF3000


OF3000Ordering Information


Technical Data OF3000

Gear pump motor

Gear pump

Pressure gauge

Fluid capacity (approx.) gal

Flexible hoses in. I.D.

Dimensions in. (mm)

Weight (dry) lbs (kg)

1/6 HP, 115/208/220 V, single phase, 50/60 Hz, wired for 115 V, with on/off switch

0.7 gpm @ 1800 rpm

0 to 100 psig (0 to 70 kPa)

3

78 teflon/carbon black with stainless steel braid - 6 ft lenghts

18 x 14 x 26 (457 x 355 x 661)

65 (29.4)

Oil filtering system

OF3000, less element and oil (standard)

OF3000C, coated, prepared for PFPE

OF3000, prepared for PFPE

Accessories

Aluminum Oxide

Hydrophilic

Fullers Earth

Particulate (paper)

Particulate (fiberglass)

Part No. 898 625

Part No. 898 450

Part No. 898 455

Part No. 898 523

Part No. 898 525

Part No. 99 171 159

Part No. 898 599

Part No. 99 171 158

Condensate Separator AK 100-250Ordering Information

C06

Accessories

Condensate Separator AK 100-250



- May be used either on the intake orthe exhaust side

- Corrosion-protected

- Condensate level glass

- Protects the pump against conden-sate which collects in the exhaustline and the intake line

- Effect independent of the directionof flow

Technical Notes

When used on the intake side the draincock must provide a vacuum-tightseal.


DN

h2h1

h

a1

a

ød

Dimensional drawing for the condensate separator AK 100-250

Technical Data Condensate Separator AK 100-250

Capacity for condensate l (qt)

Weight kg (lbs)

Connection DN

10 (9.46)

12 (26.5)

63 ISO-K

Condensate separator AK 100-250

DN 63 ISO-K

ASA

Vacuum-tight draining tap (pump inlet)

Inlet position (E 150, E 250, DK 100, DK 200)

3" elbow (1 is required)

3" ANSI rotatable flanges (2 are required)

3" ANSI seal disc (2 are required)

Exhaust position (E 250, DK 200)

3" ANSI seal disc (2 are required)

Part No. 188 45

Part No. 188 45-M

Part No. 190 90

Part No. 982-780-347

Part No. 982 780-700

Part No. 910-181-605

Part No. 910-181-605

Welded condensate collecting vessels.

DN a a1 l d3" ANSI / 63 ISO-K mm 182,5 333 2803" ANSI / 63 ISO-K in. 0.64 1.17 0.98

DN h h1 h23" ANSI / 63 ISO-K mm 342 162 1083" ANSI / 63 ISO-K in. 1.20 0.57 0.38


Exhaust Filter AF 100-250 AOrdering Information


Exhaust Filter AF 100-250 A


- Over 99% effective

- Optimally matched to our rotarypiston vacuum pumps

- Exchangeable filter insert


- Sight glass for checking the amountof separated oil

- Solvent-resistant, helium-tight

- Cast aluminium housing

- Oil return (optional)

h12)

h1

h3

h

aDN

ød1)

Dimensional drawing for the exhaust filter AF 100-250 A

1) 3 feet around the circumference2) Clearance required for exchanging the

filter elements

Technical Data Exhaust Filter AF 100-250 A

Weight kg (lbs)

Connection DN

12 (26.5)

63 ISO-K

Exhaust filter AF 100-250 A

DN 63 ISO-K

ASA

Kit includes

Exhaust filter

ANSI bellows

ANSI sealing disc (2 are required)

ANSI rotatable flange

Spare filter elements for E 250, DK 200

(2 are required)

Drain tap

Note: Fittings will adapt filter only to exhaust port of pump. Kit does not include fittings to adapt exit port of filter. Please refer to section C13 “Vacuum Fittings and Feedthroughs” for aditional options

Part No. 189 45

Part No. 189 45 V001

Part No. 189 45

Part No. 991-051-013

Part No. 910-181-605

Part No. 982-780-700

Part No. 390-261-44

Part No. 188 90

To remove oil mists entrained in theexhaust gas.

DN a l d h h1 h263 ISO-K mm 380 200 650-690 47.5 45063 ISO-K in. 1.33 0.7 2.28-2.42 0.17 1.58

Technical Notes



C06

Accessories


Vacuum Pump Oils

Lubricating oils for rotary vacuumpumps need to fulfil demanding requi-rements. Their vapor pressure must below also at high temperatures, watercontent and water uptake must beminimal. Their viscosity characteristicsneed to be flat, lubricating propertiesneed to be excellent and they mustresist cracking upon being mechanical-ly stressed.

All the vacuum pump oils listed in thefollowing have been subjected in ourfactory laboratories to very compre-hensive tests closely resembling theconditions encountered in practice bythe pumps from the E + DK series.

We therefore recommend the exclusiveuse of vacuum pump oils fully qualifiedby Oerlikon Leybold Vacuum so as toensure optimum performance of theOerlikon Leybold Vacuum pumps andalso to ensure optimum oil changeintervals.

Under vacuum conditions lubricatingoils, especially those with additivesmay behave quite differently than ex-pected. Additives may adversely affectthe attainable ultimate pressure andmay react with the media being pump-ed.

When using not suitably qualified thirdparty oils, the oil change intervals andthe performance of the vacuum pumpmay be reduced. Also unwanted depo-sits may occur which may even causesevere damage to the vacuum pump.For these reasons please understandthat we must make our warranty com-mitment dependent on the use of oilswhich have been qualified by us.Damages caused by the use of notsuitably qualified lubricating oils are notcovered by our warranty.

In order to adapt the pumps to the different applications of our customers,different types of oil are used in theE + DK pumps.

Please note that owing to differing pro-perties not all types of oil may be usedin all pumps of the E + DK series. Ifyou can not find the combination ofpump and oil you require please askus for a quotation.

Accessories


Lubricant Types

Mineral Oils

Mineral oils are products distilled andrefined from crude oil. These do notconsist of precisely defined com-pounds but rather consist of a com-plex mixture. The way in which themineral oil is pre-treated and its com-position are decisive as to the applica-tions it will be suited for. Depending onthe distribution of the hydrocarbonsand the dominance of certain pro-perties, mineral oils are grouped accor-ding to paraffin-base, naphthenic andaromatic. For the purpose of attainingespecially low ultimate pressures,mineral oils must be selected on thebasis of a core fraction.

The thermal and chemical resistance ofmineral oils has been found to be ade-quate in the majority of applications.They offer a high degree of compatibili-ty with elastomers and resistance tohydrolysis.

Perfluorinated polyether(PFPE)

These are oils which are only com-posed of carbon (C), fluorine (F) andoxygen atoms (O). The existing C-Oand C-F bonds are highly stable. Forthis reason PFPE oils are practicallyinert against all chemical and oxidisinginfluences.

Perfluorinated polyether will not poly-merise under the influence of highenergy radiation.

PFPE is non-flammable. OerlikonLeybold Vacuum NC 1/14 has theapproval of BAM (Federal Institute forMaterials Research and Testing) forpumping of pure oxygen.

Perfluorinated polyether are used whenpumping strongly reactive substanceslike oxygen (O2), fluorine (F2) and urani-um hexafluoride (UF6). RegardingLewis acids (for example, boron trifluo-ride (BF3), aluminum trichloride (AlCl3)they are not completely inert. Herereactions may take place at temperatu-res over 100 °C (212 °F).

Perfluorinated polyether are thermallyhighly stable. Thermal decompositionmay only take place at temperatures ofover 290 °C (554 °F). Caution: Perfluorinated polyether will –when decomposed – release toxic andcorrosive gases: hydrogen fluoride(HF), carbonyl difluoride (COF2). Forthis reason open fires must be avoidedin the workspace where PFPE is beingused. Do not smoke in the workspacewhere PFPE is being used.

Only suitably prepared pumps must beused in connection with perfluorinatedpolyether, since it is essential that thepumps be free of hydrocarbons.

Changing from one basic type of oil toPFPE must be left exclusively to autho-rised Service Centers. The pump willhave to be fully disassembled andcarefully cleaned. Gaskets and filterswill have to be exchanged and suitablegreases will have to be used.

Material safety data sheets are available upon request for professional users from: Email „[email protected]“ or from the Internet „www.oerlikon.com“.


Application Data Special Oil N62 NC 1/14

Type of oil

Examples of areas of application and

process media

Remarks

Elastomer compatibility

FPM (Viton)

NBR (Perbunan) 1)

EPDM

1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR

Overwiew Oils

Paraffin-base mineral oil, core faction, Perfluorinated polyether PFPE

free of additives

Standard oil For pumping strong oxidants like oxygen,

O2, ozone O3, nitrogen oxides NOx and

For pumping air, chemically inert permanent sulphur oxides (SO2, SO3) as well as

gases (noble gases, for example), reactive substances like halogens

water vapor, solvent vapors in the case of (for example fluorine F2, chlorine Cl2),

laboratory pumps operated with cold traps hydrogen halides (for example hydrogen

chloride HCl, hydrogen bromide HBr),

uranium hexafluoride UF6, and conditionally.

Lewis acids (for example boron

trichloride BCl3)

Use only in pumps modified for PTFE

The ultimate pressures stated in our Avoid pumping water vapor,

catalogs are based on operation of the in particular in connection with

pump with N62 (except for the corrosive media (see above)

PFPE pumps) In ingress of water vapor must

be avoided

Service life may be extended through the The use of an oil filter

use of an oil filter is strongly recommended

Suited Suited

Conditionally suited Suited

Not suited Suited

Special Oil N62 NC 1/14Ordering Information


Technical Data

Viscosity

at 040 °C mm2/s

at 100 °C mm2/s

Flash point °C (°F)

Vapor pressure

at 020 °C mbar (Torr)

at 100 °C mbar (Torr)

Density at 20 °C (68 °F) g/ml

Pour point °C (°F)

Middle molecular weight g/mol

Special Oil N62 NC 1/14

90 47

10 5

> 255 (> 491) – 1)

< 1 x 10-5 (< 0.75 x 10-5) 3 x 10-7 (2.25 x 10-7)

< 3 x 10-3 (< 2.25 x 10-3) 6 x 10-4 (4.5 x 10-4)

0.88 1.89

< -9 (< -16) -40 (40)

550 2500

01 litre (1.06 qt)

05 litres (5.29 qt)

20 litres (21.14 qt)

180 kg (397.4 lbs)

Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected. The technical data stated here can not be taken as assured properties

1) Caution: Perfluorinated polyether will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases.For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used

Part No. 177 01 Part No. 177 38

Part No. 177 02 –

Part No. 177 03 –

Part No. 177 05 –

C06



Application Data HE-200 HE-2700

Type of oil

Examples of areas of application and

process media

Remarks

Elastomer compatibility

FPM (Viton)

NBR (Perbunan) 1)

EPDM

1) Resistance to decomposing is very much dependent on the share of acrylonitrile in the NBR

Paraffin-base mineral oil, core faction, Perfluorinated polyether PFPE

free of additives

Standard oil for Oerlikon Leybold Vacuum USA For pumping strong oxidants like oxygen,

O2, ozone O3, nitrogen oxides NOx and

For pumping air, chemically inert permanent sulphur oxides (SO2, SO3) as well as

gases (noble gases, for example), reactive substances like halogens

water vapor, solvent vapors in the case of (for example fluorine F2, chlorine Cl2),

laboratory pumps operated with cold traps hydrogen halides (for example hydrogen

chloride HCl, hydrogen bromide HBr),

uranium hexafluoride UF6, and conditionally.

Lewis acids (for example boron

trichloride BCl3)

The ultimate pressures stated in our Use only correspondingly modified pumps

catalogs are based on operation of the

pump with HE-200 (except for the Mixing with other types of oil must

DOT and PFPE pumps) be absolutely avoided

Service life may be extended through the The uptake of water vapor must be avoided

use of an oil filter

The use of an oil filter

is strongly recommended

Suited Suited

Conditionally suited Suited

Not suited Suited


Technical Data

Viscosity

at 020 °C (068 °F) mm2/s (= cSt)

at 040 °C (104 °F) mm2/s (= cSt)

at 100 °C (212 °F) mm2/s (= cSt)

Flash point °C (°F)

Vapor pressure

at 020 °C (068 °F) mbar (Torr)



Density at 20 °C (68 °F) g/ml

Pour point °C (°F)

Molecular weight

HE-200 HE-2700

–

58

9.1

224 (435)

–

4.7 x 10-6 (3.5 x 10-6)

3.9 x 10-4 (2.9 x 10-4)

0.88

- 10 (14)

480


01 qt (1 l)

01 gal (3.8 l)

05 gal (18.9 l)

55 gal (208 l)

Bottle 02 lb (0.91 kg)



Please note that the technical data stated are only typical data. Slight variations from batch to batch must be expected. The technical data stated here can not be taken as assured properties

1) Caution: Perfluorinated polyether will, when being decomposed at temperatures over 290 °C (554 °F), release toxic and corrosive gases.For this reason open fires must be avoided in the workspace where PFPE is being used. Do not smoke in the workspace where PFPE is being used

HE-200 HE-2700

Part No. 98 198 006 –

Part No. 98 198 007 –

Part No. 98 198 008 –

Part No. 98 198 010 –

– Part No. E 190 999 051

– Part No. 898 565-2

– Part No. E 190 999 052

250

–

10

– 1)

6.7 x 10-7 (5 x 10-7)

–

6.7 x 10-5 (5 x 10-5)

1.89

- 34 (- 30)

4600

C06



0 8 12 16 20 24 28 32 404 minTime

2

468

0.01

0.1

10,000

1000

10

1

100

Pre

ssur

e

E250

Torr

ATM

Pumpdown characteristic of a 1000 l vessel for the E type rotary piston vacuum pump (60 Hz)

2 4 6 810-2 10-1 100 101 102 103

TorrInlet Pressure

E 250

2

4

68

100

103

102

101Pum

ping

spe

edwithout gas ballast

with gas ballast

cfm

Pumping speed characteristic of the E type rotary piston vacuum pump (60 Hz)

0 20 30 40 50 60 70 80 10010 minTime

2468

0.01

0.001

0.0001

0.1

10,000

10

1

100

Pre

ssur

e

DK200

Torr

ATM

Pumpdown characteristic of a 1000 l vessel for the DK type rotary pistonvacuum pump (60 Hz)

2 4 6810-5 10-3 10-2 10-1 100 101 10310-4

TorrInlet Pressure

2

4

68

100

103

102

101Pum

ping

spe

ed

without gas ballast

with gas ballast

cfm

DK200

Pumping speed characteristic of the DK type rotary piston vacuum pump (60 Hz)

60 Hz Curves


Notes

OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 0Fax: +49-(0)221-347 [email protected]

P.R. China

Oerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Beichen EconomicDevelopment Area (BEDA),Shanghai RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]@oerlikon.com

Oerlikon Leybold Vacuum (Tianjin) Co. Ltd.Beichen EconomicDevelopment Area (BEDA),Shanghai RoadTianjin 300400ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]@oerlikon.com

Oerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Shanghai Branch:Add: No.3376 Futedong San Rd.Waigaoqiao FTZShanghai 200131ChinaSales and Service:Phone: +86-21-5064-4666Fax: [email protected]@oerlikon.com

Oerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Guangzhou Office and Service Center1st F, Main BuildingScience City Plaza,No.111 Science Revenue,Guangzhou Science City (GZSC) 510663, Guangzhou,ChinaSales:Phone: +86-20-8723-7873Phone: +86-20-8723-7597Fax: [email protected]@oerlikon.com

Oerlikon Leybold Vacuum (Tianjin)International Trade Co. Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004ChinaSales:Phone: +86-10-6590-7622Fax: [email protected]

India

Oerlikon Leybold Vacuum India Pvt Ltd.EL-22, J BlockMIDC BhosariPune 411026IndiaSales and Service:Phone: +91-20-3061 60000Fax: +91-20-2712 [email protected]@oerlikon.com

Netherlands

Oerlikon Leybold Vacuum Nederland B.V.Proostwetering 24NNL-3543 AE UtrechtSales and Service: Phone: +31-(30) 242 6330Fax: +31-(30) 242 [email protected]@oerlikon.com

Spain

Oerlikon Leybold Vacuum Spain, S.A.C/. Huelva, 7E-08940 Cornellà de Llobregat(Barcelona)Sales:Phone: +34-93-666 46 16Fax: +34-93-666 43 [email protected]:Phone: +34-93-666 49 51Fax: +34-93-685 40 [email protected]

Sweden

Oerlikon Leybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service:Phone: +46-31-68 84 70Fax: +46-31-68 39 [email protected]/delivery address:Datavägen 57BSE-43632 Askim

Switzerland

Oerlikon Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales:Phone: +41-044-308 40 50Fax: +41-044-302 43 [email protected]: Phone: +41-044-308 40 62Fax: +41-044-308 40 [email protected]

USA

Oerlikon Leybold Vacuum USA Inc.5700 Mellon RoadUSA-Export, PA 15632Phone: +1-724-327-5700Fax: [email protected]:Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-333-1217Pacific, Mountain, Alaskan &Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service:Phone: +1-724-327-5700Fax: +1-724-325-3577

Belgium

Oerlikon Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales:Phone: +32-2-711 00 83Fax: +32-2-720 83 [email protected]:Phone: +32-2-711 00 82Fax: +32-2-720 83 [email protected]

France

Oerlikon Leybold Vacuum France S.A.7, Avenue du QuébecZ.A. Courtaboeuf 1 - B.P. 42F-91942 Courtaboeuf CedexSales and Service:Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected]

Oerlikon Leybold Vacuum France S.A.Valence Factory640, Rue A. Bergès - B.P. 107F-26501 Bourg-lès-Valence CedexPhone: +33-4-75 82 33 00Fax: +33-4-75 82 92 [email protected]

Great Britain

Oerlikon Leybold Vacuum UK Ltd.Unit 2Silverglade Business ParkLeatherhead RoadUK-Chessington, Surrey KT9 2QLSales:Phone: +44-13-7273 7300Fax: +44-13-7273 [email protected]:Phone: +44-20-8971 7030Fax: +44-20-8971 [email protected]

Italy

Oerlikon Leybold Vacuum Italia S.p.A.8, Via TrasimenoI-20128 MilanoSales:Phone: +39-02-27 22 31Fax: +39-02-27 20 96 [email protected]:Phone: +39-02-27 22 31Fax: +39-02-27 22 32 [email protected]

Oerlikon Leybold Vacuum Italia S.p.A.Field Service BaseZ.I. Le CapanneI-05021 Acquasparta (TR)Phone: +39-0744-93 03 93Fax: +39-0744-94 42 [email protected]

Oerlikon Leybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1234Fax: +49-(0)221-347 [email protected]

Oerlikon Leybold Vacuum GmbHSales Area North/NortheastBranch Office BerlinBuschkrugallee 331. ObergeschossD-12359 BerlinPhone: +49-(0)30-435 609 0Fax: +49-(0)30-435 609 [email protected]

Oerlikon Leybold Vacuum GmbHSales Area South/SouthwestBranch Office MunichSendlinger Strasse 7D-80331 MunichPhone: +49-(0)89-357 33 9-10Fax: +49-(0)89-357 33 [email protected]@oerlikon.com

Oerlikon Leybold Vacuum GmbHSales Area West & BeneluxBranch Office CologneBonner Strasse 498D-50968 ColognePhone: +49-(0)221-347 1270Fax: +49-(0)221-347 [email protected]

Oerlikon Leybold Vacuum GmbHService Competence CenterEmil-Hoffmann-Strasse 43D-50996 Cologne-SuerthPhone: +49-(0)221-347 1439Fax: +49-(0)221-347 [email protected]

OerlikonLeybold Vacuum GmbHMobil Customer ServiceEmil-Hoffmann-Strasse 43D-50996 Cologne-Suerth Phone: +49-(0)221-347 1765Fax: +49-(0)221-347 [email protected]

Oerlikon Leybold Vacuum GmbH,DresdenZur Wetterwarte 50, Haus 304D-01109 DresdenService:Phone: +49-(0)351-88 55 00Fax: +49-(0)351-88 55 [email protected]

Japan

Oerlikon Leybold VacuumJapan Co., Ltd.Headquarter23-3, Shin-Yokohama3-chomeTobu A.K. Bldg. 4th FloorKohoku-kuYokohama-shi 222-0033Sales:Phone: +81-45-471-3330Fax: [email protected]@oerlikon.com

Oerlikon Leybold VacuumJapan Co., Ltd.Osaka Sales Office5-13, Kawagishi-machiSuita-chiOsaka 564-0037Phone: +81-6-6393-5211Fax: [email protected]@oerlikon.com

Oerlikon Leybold VacuumJapan Co., Ltd.Tsukuba Technical Service CenterKogyo Danchi21, Kasuminosato,Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298 89 2841Fax: +81-298 89 [email protected]@oerlikon.com

Korea

Oerlikon Leybold Vacuum Korea Ltd.3F. Jellzone 2 Tower, 159-4Jeongja-Dong, Bundang-GuSungnam-Si, Gyeonggi-DoKorea 463-384Sales:Phone: +82-31 785 1367Fax: +82-31 785 1359

623-7, Upsung-DongCheonan-SiChungcheongnam-DoKorea 330-290Service:Phone: +82-41 589 3035Fax: +82-41 588 0166

Singapore

Oerlikon Leybold VacuumSingapore Pte Ltd.No.1, International Business ParkB1-20B, The SynergySingapore 609917

Sales and Service:Phone: +65-6303 7000Fax: +65-67730 [email protected]@oerlikon.com

Taiwan

Oerlikon Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-500 1688Fax: +886-3-583 [email protected]@oerlikon.com

Germany Europe Asia

Sales and Service

America

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OerlikonLeybold Vacuum USA Inc.5700 Mellon RoadUSA-Export, PA 15632Phone: +1-724-327-5700Fax: [email protected]

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