Download - X-ray Diffraction (XRD) - HTSKOREA 홈페이지에 오신걸 환영합니다! · 2003-01-03 · X-ray Diffraction (XRD) Written by Sung Yong An 1. X-선의 발견 X-선은 1985년

X-ray Diffraction (XRD)

Written by Sung Yong An

1. X-

X- 1985 Roentgen() . X- () , -ray . X- X-

10-1 cm (resolution) 'Radiography'

(10-10 m) "X-ray diffraction(XRD)" Laue X- X- . Laue X- Bragg Laue

Bragg's Law( ) X- .

2. X-

. 1 X -

1 / 14XRD

2001-03-05http://phys.kookmin.ac.kr/~xray/xrd/xrd.html

X- . filament . eV .

(1)

(2)

(e : , m : , v : , V : ) 1 % X- . Target Material() Cr, Fe, Co, Ni, Cu, Mo, W . coulomb . X-. X- X- X-(bremsstrahlung) . . X- , X- . , X-ray X- . coulomb E x X- .

(3)

(4)

(5)

. Duane-Hunt . X- X- . 2 . X- , X- .

2. X- X-.

X- K, L, M . X-

2 / 14XRD


3 .

. 3 X- .

, , . , X- . K X- K . , L, M , . K L X- K, M X- K . K K . , L L, L, L, M M, M, M, M, M . K K1, K2 , K1 L , K2 L . 2:1 K1, K2 . X- (6) .

(6)

I , V , Vk . n2.

3. X-

1. , . , , , , , , , , , , , thin film .

2. .

3 / 14XRD


. , (JCPDS card) .

3. . d () .

4. . 50-200 .

5. . .

6. . 7. . 8. .

. , BaCo3 TiO2 BaTiO3 , .

9. . , .

10. . , . .

11. . .

12. .

4. X-

1) X- (GENERATOR)

(1) X-

l X- (Sealed type) : 1KW-3KW.

l X- (Rotating anode) : . 12KW . tube .

(2) , , , . X- 35

4 / 14XRD


.

2) (GONIOMETER) :

(1) X- . . 4 X- X , . X- X- (line focus) , X- .(. 5) (sollar slit) (divergence slit) X- , (receiving slit) (scattering slit) . 1/6 , 1/4 , 1/2 , 1 , 2 , 4 1 . 0.15 mm 0.3, 0.6 mm .

. 4 Layout of X -ray diffractometer

F: X- A : P : R :

D : RP : S : SS :

5 / 14XRD


. 5

(2) (Filter) X- target X-. Cu X- 6 3 peak, Ka1(1.54056 ), Ka2(1.5443 ), Kb(1.392 ) . 100 : 50 : 20 , X- Kb peak .( . 7) K target Ka Kb . target 1-2 Cu target Ni , Mo Zr, Fe Mn, Cr V .

. 6 Cu X-

6 / 14XRD


. 7 Primary spectrum and absorption by a b-filter.

(3) (Monochromator) (. 8) monochromator Ka Kb , background X- X-, X- . , Cu X- Fe K X- . monochromator CuKa FeKa, FeKb background 0 .

7 / 14XRD


. 8 The diffraction beam monochromator.

3) (Electronic circuit panel) (1) : Xe, Kr, Ar (proportional counter) . (2) X- (PHA) .

5. X-

1) (1) (2) , , (3) X- (4) : Cu X- , X- (Ka1=1.5406 ) . X- X- X- background . X- . CuKa Fe Co Cu Fe Co . Fe Co . , Fe Co , X- Cu .

8 / 14XRD


2) (1) , 10 - 30 mm . . . .

(2) . polishing .

(3) 55 mm . 40 mm X--- plate 2 . : data . X--- . , data .

3)

(1) (Scan axis) /2 : X- , 2 2 : () 2 ( 0.5-3 ) X- X- . : Rocking-curve , 2 ( )

(2) (Scan type) (Continuous scan) : . . (Step scan) :

9 / 14XRD


. , .

(3) (Scan range) , . JCPDS Card (2=5-140 ) , peak peak (2-3 ) . Wide angle goniometer 2=3-145 .

(4) (Scan speed) , 4-5/min . 0.25-5/min , (8/min) . background .

(5) (Sampling interval) (Step width) . 0.05 . 0.05 1 20 data .

(6) (Power) X- , 4-5 . . Cu 30-50 kV , background . X-ray 40 kV, 40 mA , . peak background , .

4) X- X- X- . X- . X- , , , . X- . X- . X- (window) , . X- , . , X- . 1 , 2 . , . X- X- , . 1 2 , 1 . X- , X- power X- . X- X- . X- , X- ,

10 / 14XRD


.

6. X-

1) - 2

. 9 - 2

, . 9 X- , X- 2 . 2 2 1/2 . 2=20- 60 , 10 1 11 , 2 20 2 22 , 30

2 60 . Bragg's law( ) .

. 10

(1) . 10

11 / 14XRD


. (2) Si wafer . 11 .

. 11

(3) , , . . . 12 (100) .

. 12 (100)

2) 2 (Fixed - scan)

12 / 14XRD


. 13 2

. 13 X- X- , 2 . =2, 2=20- 60 , 2 20 60 . . 14 X- , . peak .

. 14 2

3) (Fixed -2 scan, Rocking-curve) . 15 X- 2 . . 16 Rocking curve . Crystal M(. 15) X- , X-ray M X- . epitaxial , Pole-figure .

13 / 14XRD


. 15

. 16

4) - - 2 . , . 17 X- - . , .

. 17 -

14 / 14XRD


Download - X-ray Diffraction (XRD) - HTSKOREA 홈페이지에 오신걸 환영합니다! · 2003-01-03 · X-ray Diffraction (XRD) Written by Sung Yong An 1. X-선의 발견 X-선은 1985년

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