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Enabling Technology for a Better World KJLC Confidential
Solid-state Thin Film Batteries in 3D
J.R. Gaines, Jr.,
Technical Director of Education
21 February 2018
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Enabling Technology for a Better World KJLC Confidential
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Enabling Technology for a Better World KJLC Confidential
Solid-state Thin Film Batteries
• How a thin film battery works
• Some examples in 2D
• Some history on the current technology
• New Processes
• New Architectures
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Enabling Technology for a Better World KJLC Confidential
Solid-State Thin Film Battery (Dudney, ORNL)
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Enabling Technology for a Better World KJLC Confidential
“Thin” means battery @ 20 microns but the substrate is 170 microns!!
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Enabling Technology for a Better World KJLC Confidential
• Unique Technical Features• ‘Perpetually’ rechargeable +75,000 cycles demonstrated by ORNL and
Manufacturers
• Operating temp range -40 to +200 C
• Nominal 4 volts (next gen 5 volts?)
• Self discharge <1% per year (studied over 6 years – rates nearly unmeasurable)
• Fast recharge to 90% in less than 10 min
• Highly embeddable and safe
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Enabling Technology for a Better World KJLC Confidential
• Thin AND flexible (Kapton, SS, thin silicon)
Front Edge Technology’s Flexible TFB in action
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Enabling Technology for a Better World KJLC Confidential
Lithium ion Vs Electrons
• Size of a Lithium Ion = 182 pico meters
• Size of an electron = 0.00281 pico meters
• A Lithium Ion is nominally 65,000 x larger
than an electron – so the anode doubles!!
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Enabling Technology for a Better World KJLC Confidential
Battery doubles or triples in thickness on charging
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Enabling Technology for a Better World KJLC Confidential
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Enabling Technology for a Better World KJLC Confidential
• Development and Commercialization of Thin Film Batteries
• ORNL developed the technology and nucleated the commercialization process
• Companies formed specifically to manufacture and commercialize TFB
• Existing companies have added TFB manufacturing and commercialization to their product line
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Enabling Technology for a Better World KJLC Confidential
TFB Manufacturing Process
• Deposit metal electrode on substrate (DC sputter)
• Deposit cathode, LiCoO2 (DC sputter)
• Break vacuum and anneal
• Deposit electrolyte, Li3PO4 (Rf sputter)
• Deposit anode layer, Li or other, (evaporation)
• Deposit top metal electrode (DC sputter)
• Encapsulate the battery
• Dice the substrate
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Enabling Technology for a Better World KJLC Confidential
Creating Ions to Ablate the Target
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Enabling Technology for a Better World KJLC Confidential
• Thin Film cathode of LiCoO2 has microstructure that is oriented and dense
Lithium cobalt oxide after high temp anneal
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Enabling Technology for a Better World KJLC Confidential
Unique Electrolyte that is VERY THIN and pore-free to promote ion transport
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Enabling Technology for a Better World KJLC Confidential
Why is there a market
for Solid-State Thin Film Batteries?
• The perpetually shrinking wireless gizmo
• Limits on the ‘shrink-ability’ of conventional energy storage technologies
- Safety concerns with flammable (liquid) electrolytes
• ‘Green Battery’ where device life < battery life
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Enabling Technology for a Better World KJLC Confidential
Range of Mobile Devices
• “Big Energy Users ” = Mobile Cellular phones
• “Small Energy Users” = Active RFID tags, or IoT, Real time clocks
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Enabling Technology for a Better World KJLC Confidential
ST Micro’s ‘EnFilm’ – available for sale now
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Enabling Technology for a Better World KJLC Confidential
iPhone 7 Battery Specs
1960 mAh capacity
• Operating draw of 200 mAh
• About 8 hours of talk time
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Enabling Technology for a Better World KJLC Confidential
Planar TFB for Smart Phones?
• ST Micro’s battery at 1 x 1” = 700 microAh
• Will need about 2,800 sqin of TFB to replace existing technology (53 x 53”)
•Tough to fit into a 5 x 2.5” package !
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Enabling Technology for a Better World KJLC Confidential
MEM’s based generator for re-charge
MicroGen Systems
uses vibration, coupled
with Cymbet EnerChip
Thin Film Battery
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Enabling Technology for a Better World KJLC Confidential
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Enabling Technology for a Better World KJLC Confidential
• Near term applications include• Real-Time Clocks for PC’s, Tablets, Laptops
• Wireless sensors
• CMOS back-up
• SRAM back-up
• ‘Energy Harvesting’ systems
• Smart Card
• Active RFID tags
• Therapy delivery systems
• Internet of Things, smart clothing, wearables
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Enabling Technology for a Better World KJLC Confidential
SIZE of Real-Time Clocks
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Enabling Technology for a Better World KJLC Confidential
An Industry develops to make Thin Film Batteries
• For the original ‘Bates’ battery:
• ST Micro (France) enters• AMAT builds tools to manufacture TFB’s• Apple may have eaten IPS• Cymbet on life support• ITN Energy Systems on hiatus• Schmidt slows• GS Nanotech slows• Johnson Research, Front Edge
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Enabling Technology for a Better World KJLC Confidential
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Enabling Technology for a Better World KJLC Confidential
What’s Next for Thin Film Batteries?
• Commercialization of the ‘Bates’ battery has shown that a battery can be
• Perfect
• Permanent
These attributes must be scaled for more capacity
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Enabling Technology for a Better World KJLC Confidential
•The Bad News:
No Moore’s Law For Batteries
(electrons are tiny, Li – ions are 16,000 time larger!)
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Enabling Technology for a Better World KJLC Confidential
Next Generation Strategies
• Alternative materials coupling• Some examples
• Ongoing search
• New architectures and substrates
• Ongoing exploration of novel deposition techniques
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Enabling Technology for a Better World KJLC Confidential
Alternative Cathode Materials
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Enabling Technology for a Better World KJLC Confidential
Morphology and Thickness
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Enabling Technology for a Better World KJLC Confidential
Diffusion Lengths for Lithium Ions
• Limits of a few microns, at low discharge rates?
• Arbitrarily thick cathodes subject to extreme stresses, defects, miss-orientation, etc.
• Much of the Cathode is Along for the Ride
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Enabling Technology for a Better World KJLC Confidential
‘Thick Cathode’ Capacity Far from Theoretical
About 81% of theoretical About 52% of theoretical
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Enabling Technology for a Better World KJLC Confidential
Two-sided architecture
Extended architecture
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Enabling Technology for a Better World KJLC Confidential
Increase surface area for interfaces (Sakti3)
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Enabling Technology for a Better World KJLC Confidential
Advanced Gate Structure
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Enabling Technology for a Better World KJLC Confidential
ALD - Sequential, Self-Saturating, Process
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Enabling Technology for a Better World KJLC Confidential
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Enabling Technology for a Better World KJLC Confidential
o Inactive Gas Flow Distribution Focuses Precursor Onto Substrate Surface During Precursor Pulse Steps*
o Helps Protect Ports and Chamber Walls From Unwanted Precursor Exposure
o PFTTM Enables Efficient Precursor Utilization, Purging, & Eliminates Need for Particulate-Generating Gate Valves
*KJLC Precursor Focusing TechnologyTM (PFTTM) – Patent Pending
Engineered Gas Flows
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Enabling Technology for a Better World KJLC Confidential
Highly Conformal, Deep trench, AR = 30:1
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Enabling Technology for a Better World KJLC Confidential
Atomic Layer Deposition of Electrolytes (two stage process)
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Enabling Technology for a Better World KJLC Confidential
Batteries “More-than-Moore”
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Enabling Technology for a Better World KJLC Confidential
Planar Vs 3D Architecture Structures
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Enabling Technology for a Better World KJLC Confidential
Ion Milling for Substrate Prep
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Enabling Technology for a Better World KJLC Confidential
Pillars Vs Pores – AEF Advantage?
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Enabling Technology for a Better World KJLC Confidential
Glancing angle deposition of oriented structures
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Enabling Technology for a Better World KJLC Confidential
Lithium anode volume expansion
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Enabling Technology for a Better World KJLC Confidential
Area Enhancement Factor (AEF)
• Pillars Vs Pores – still need about 30x to break even with Planar architecture
• Smartphone requires AEF of 400!
• Current demonstrations at AEF = 50
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Enabling Technology for a Better World KJLC Confidential
Demonstrated Capacity Scales with AEF
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Enabling Technology for a Better World KJLC Confidential
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Enabling Technology for a Better World KJLC Confidential
500 W Ar/O2 plasma
Cylindrical quartz
plasma tube w/ helical
inductive coil geometry
13.56 MHz frequency
Remote Inductively Coupled Plasma (ICP)
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Enabling Technology for a Better World KJLC Confidential
2017 NNCI ALD/MOCVD Symposium
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Enabling Technology for a Better World KJLC Confidential
Gas/Solid Interactions are Classic
• Physiosorption
• Desorption
• Chemisorption
• Effected by –• Incident angle
• Precursor density
• ‘energy’ (temp, plasma)
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Enabling Technology for a Better World KJLC Confidential
Recombination of Hydrogen
• Plasma cracks about 50% of H2 into H
• (Atomic) H quickly recombines, over a few cm’s, to become H2 again
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Enabling Technology for a Better World KJLC Confidential
Recombination of Ions in Trenches
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Enabling Technology for a Better World KJLC Confidential
Example of Steric Hindrance
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Enabling Technology for a Better World KJLC Confidential
Growth per cycle Less than 1 mono layer
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Enabling Technology for a Better World KJLC Confidential
Random Growth Mode
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Enabling Technology for a Better World KJLC Confidential
Modeling of ALD Film Growth
• Add Univ of Alberta data on ALD in deep vias.
• Modification of pulse times to fully occupy all available functionalized sites
• Alternative pulsing patterns to optimize growth-per-cycle
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Enabling Technology for a Better World KJLC Confidential
ALD Capping Layers for TFB’s
Water Vapor Transmission Rate
(WVTR) <10−6 g/m2 day
demonstrated
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Enabling Technology for a Better World KJLC Confidential
•Other substrates and architectures
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Enabling Technology for a Better World KJLC Confidential
Micro-thin substrates Lithium ion conductor - Ohara
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Enabling Technology for a Better World KJLC Confidential
Ultra thin glass – 25 microns - Schott Optical
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Enabling Technology for a Better World KJLC Confidential
Foam and Aerogel Electrodes
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Enabling Technology for a Better World KJLC Confidential
• Summary
• More than 20 years in the making
• Showed the way toward a perfect, permanent battery and re-energized battery research
• Convergence of electronic device design (smaller, more energy efficient) & solid-state secondary microbatteries= commercialization
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Enabling Technology for a Better World KJLC Confidential
KURT J. LESKERCOMPANY
J.R. Gaines, Technical Director of Education
614-446-2202