Title: Monolithic Wafer-level Rectangular Waveguide and Its Transition to CPW lines Team: Mojgan Daneshmand, Nahid Vahabisani (University of Alberta)

MNT Facility: Nanofab - University of Alberta

Reference: IEEE Trans. Compon. Packag. Manuf. Technol., vol.4, no.1, Jan 2014[Link]

Wafer

CPW line

Waveguide

Metal Post

B. Fabrication (dielectric-filled RWG)

The Proposed monolithic on-wafer RWG and CPW to RWG transition:

B. Fabrication (air-filled RWG) C. The measurement

A. The Design