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Precision GEM Production in Korea
Chonbuk National Univ.Hyunsoo Kim, Min Sang Ryu
University of SeoulMinkyoo Choi, Younggun Jeng, Inkyu Park
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Hyunsoo Kim/MPGD2013-RD51 Session 22013.07.05-06
Work presented here has been done before the signing of technology transfer agreement with CERN on GEM production.
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Hyunsoo Kim/MPGD2013-RD51 Session 3
GEM Detector for CMS Upgrade
• Triple GEM foil detectors for CMS detector upgrade in LS2• for GE1/1 project, we need total 250~290 m2 of GEM foils.
2013.07.05-06
Location of GE1/1
Full size GEM foil
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Hyunsoo Kim/MPGD2013-RD51 Session 4
GEM Fabrication
2013.07.05-06
50 mm thick PI (kapton)5 mm thick Cu
FCCL
Double maskPhotolithographyChemical etching
PI etching
~70 mm
~25 mm
Cu hole etching
Chemical etching
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Hyunsoo Kim/MPGD2013-RD51 Session 5
Players• Academic Institutions– Univ. of Seoul and Chonbuk National Univ.
• 3~4 more Universities to join.
– R&D on PI (kapton) etching with Mecharonics.• Saehan Micro Tech Co., Ltd.– Copper hole etching
• Mecharonics– PI hole etching
• And … CERN – provided GEM patterns– technical assistance (in the future)
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 6
Mecharonics
2013.07.05-06
Head Quarter & Production FacilityClean room : 1000 m2
R&D and Production FacilityClean room : 1300 m2
R&D for GEM foil fabrication done here
Semiconductor parts manufacturer in Korea.Products: Heater block, Chemical Precursor, etc.
(www.mecharonics.com)
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Hyunsoo Kim/MPGD2013-RD51 Session 7
Copper Etching• Saehan Micro Tech Co., Ltd. is solely responsible
for copper hole etching– Outsourcing is cheaper in the R&D phase– Mecharonics will take over in the full scale GEM foil
production
• Double Masking• Full sized holes (ø~70 mm) are etched• Hole size can be controlled at ~2 mm level
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 8
What We Have Done for PI Etching• Tried a couple of home brew etchant
admixtures.• Varied etchant temperature, etching time, and
tried nitrogen bubbling to study for various effects.
• Mainly worked on 10 x 10 cm2 GEM foils cut from a 3M produced FCCL roll.– We are trying other brand FCCLs.
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 9
10 x 10 cm2 GEM Foils
2013.07.05-06
Produced six 10 x 10 cm2 foils from a “cheap” 3M FCCL sample.
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Hyunsoo Kim/MPGD2013-RD51 Session 10
Top View (SEM Images)
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 11
Cross Section View
2013.07.05-06
What we had earlier this year with a different etchant
What we can do now
Cu layer
PI layer
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Hyunsoo Kim/MPGD2013-RD51 Session 12
PI Hole Size Control
2013.07.05-06
2 min 10 min 20 min
Size of PI hole depends on the etching time.
We do not have enough data yet to get the size of the hole as a function of etching time.
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Hyunsoo Kim/MPGD2013-RD51 Session 13
Hole Sizes
2013.07.05-06
Preliminary hole size measurements: using an optical microscope (eyeballing).
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Hyunsoo Kim/MPGD2013-RD51 Session 14
Hole Size Measurement
2013.07.05-06
0 10 20 30 50 706040 80Diameter (mm)
sample 1
sample 2
sample 3
sample 4
sample 5
sample 6
PI hole
Cu holeø=73.9 mmΔø= 2.3 mm
ø=73.1 mmΔø= 1.7 mm
ø=28.7 mmΔø= 1.8 mm
ø=73.2 mmΔø= 1.0 mm
ø=27.0 mmΔø= 1.9 mm
ø=72.0 mmΔø= 1.4 mm
ø=28.9 mmΔø= 1.5 mm
ø=27.6 mmΔø= 1.2 mm
ø=72.0 mmΔø= 1.3 mm
ø=25.9 mmΔø= 1.4 mm
ø=72.3 mmΔø= 1.5 mm
ø=27.8 mmΔø= 1.4 mm
Six 10x10 cm2 samples prepared under the same condition.
Random sampling of 100~150 points in each sample.
This includes systematic variance by eyeballing…
We are looking for better ways to do this.
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Hyunsoo Kim/MPGD2013-RD51 Session 15
Defects Observed
2013.07.05-06
back lighting front+back lighting
Samples from a “cheap” 3M FCCL roll showed spots missing kapton layer between Cu layers. Identified as a white spot under a back light by naked eyes.
Thought to be due to pre-existing defects in FCCL. We need to use better quality FCCLs.
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Hyunsoo Kim/MPGD2013-RD51 Session 16
Post-PI Etching Cleaning• We observed a film like residue after PI etching (Ni-Cr seed layer)
• We have tried ultra-sonic cleaning in Deionized Water.– De-lamination of copper layers occurred.
• Chemical cleaning as per CERN will used in the future, instead.– Chromic acid treatment
2013.07.05-06
Cu layer
PI layer
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Hyunsoo Kim/MPGD2013-RD51 Session 17
History
2013.07.05-06
CERN
New Flex
2013
2011
Mecharonics
single mask
single mask
double mask
Tech transfer from CERN
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Hyunsoo Kim/MPGD2013-RD51 Session 18
Numbers I do not have yet• Production Capacity– how much do we invest in the production facility?
• Production costs– size of orders.– yields– quality of FCCL required.
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 19
Plans
2013.07.05-06
action items
current test/optical inspection
signed
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Hyunsoo Kim/MPGD2013-RD51 Session 20
Summary• We are in R&D stage– tweaking PI etching conditions and cleaning options.– searching for optimal FCCL
• We have produced 10x10 cm2 GEM foils with well defined shaped holes without technology transfer from CERN
• With the tech transfer, we expect improvements in GEM foil qualities and manufacturing procedures.
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 21
Backup Slides
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 22
Cross Section View (3M FCCL)
2013.07.05-06
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Hyunsoo Kim/MPGD2013-RD51 Session 23
Hole sizes
2013.07.05-06
Sample PI Hole Cu Hole
Diameter (mm)
Width (mm) Diameter (mm) Width (mm)
1 28.9 1.5 73.9 2.3
2 28.7 1.8 73.1 1.7
3 27.0 1.9 73.2 1.0
4 27.6 1.2 72.0 1.4
5 25.9 1.4 72.0 1.3
6 27.8 1.4 72.3 1.5
all 27.5 1.8 72.6 1.5
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Hyunsoo Kim/MPGD2013-RD51 Session 24
Failure in Etching
2013.07.05-06
Copper Etching PI Etching
Observed failure in etching on FCCL produced by GP Tech (PI by Ube)
We are investigating the possible causes.