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NNT602 Nano Yapılarının Karakterizasyonu
POLYMER NANOCOMPOSITES/
CERAMICS SYSTEMS
Dr. Mehmet Çopuroğlu
Beytepe, Aralık 2011
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MEHMET ÇOPUROĞLU
BSc: Chemistry, Hacettepe University
MSc: Chemistry, Hacettepe University; Supervisor: Asst. Prof. Murat Şen
• Ageing characteristics of ethylene-vinyl acetate copolymer and ethylene-
vinyl acetate/carbon black mixture
PhD: Microelectronic Engineering, Tyndall National Institute at National
University of Ireland, Cork (aka UCC); Supervisors: Prof. Gabriel Crean, Dr.
Shane O’Brien
• Development of polymer/nanocomposite thin films
Post-doc: Tyndall National Institute at UCC
• Development of lead-magnesium-niobium titanate-based material systems
for ultra-high-value capacitor applications
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PHD-SUMMARY
Developed two material systems
• Inorganic-organic hybrids for potential short-range
photonic interconnect/optical waveguiding
applications
• Ceramics for transparent conducting oxide (TCO)
applications
Sol-gel synthesis
Thin-film deposition and processing
Characterisation
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THE SOL-GEL METHOD
Production of materials
• ceramics
• inorganic/organic hybrid materials (e.g.
organically modified silicates (ORMOSILs or
CERAMERs))
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THE SOL-GEL METHOD-ADVANTAGES
Low cost
Relatively low-temperature synthesis
Precise control over microstructure and material
properties
Ease of doping
No need for sophisticated instrumentation
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THE SOL-GEL METHOD
Involves
• preparation of a colloidal dispersion system (sol)
• gelation of the sol
• removal of the solvent
The sol may
• be produced from inorganic or organic precursors
(e.g. alkoxides, acetates, nitrates)
• consist of dense oxide particles of polymeric
clusters
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THE SOL-GEL METHOD
Si OR + H2O Si OH + ROH
hydrolysis
esterification
Si OR + Si O Si + ROH
alcohol condensation
alcoholysis
SiHO
Si OH + Si O Si + H2O
water condensation
hydrolysis
SiHO
Metal Alkoxides:
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THE SOL-GEL METHOD
Many parameters:
• H2O:Si ratio
• Other precursor/s and/or metal/s
• type and concentration of the catalyst
• alcohol
• temperature
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ORMOSILs
Structural elements of ORMOSILs.
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POLYMER NANOCOMPOSITES/ORMOSILs
Structure of nanocomposite. (O. Soppera, C. Croutxé-Barghorn, D. J.
Lougnot, New J. Chem. 25 (2001) 1006.)
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POLYMER NANOCOMPOSITES/ORMOSILs
Model of ZrO2–methacrylic acid–methacryloxysilane system. (A. D.
Pomogailo, Colloid Journal 67 (2005) 726.)
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POLYMER NANOCOMPOSITES/ORMOSILs
Various requirements
simultaneously met
• thermal/mechanical stability
• transparency
• biocompatibility, etc.
Combine desired properties of the individual
constituents.
Invaluable for various interdisciplinary
applications
• optoelectronics-waveguides
• coating industry-protective coating
• biotechnology-dental restorative materials
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PHD-OUTLINE
Zinc oxide-
dopedZinc oxide-
undopedORMOSIL with
aryl groups
ORMOSIL with
transition metal
Materials
Inorganic/organic
hybridCeramic
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STUDY
Investigated parameters:
• refractive index modifier, Zr
• UV light
• sol ageing
Characterised properties:
• structural
• morphological
• optical
• spectroscopical
• thermal
• reliability
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SYNTHESIS
Skeletal formulae of the chemicals used, and outline of the synthesis. GDPTMS: (3-
glycidyloxypropyl)trimethoxysilane; DMDMOS: dimethyldimethoxysilane; Zr(OPrn)4: zirconium(IV) n-
propoxide; MAA: methacrylic acid; IPA: isopropanol.
IPA
Zr(OPrn)4 + MAA
Stirring @ room-temperaturefor 30 min
Stirring @ room-temperaturefor 1h
Photo-initiator
Stirring @ room-temperaturefor 1h
H2O + HCl
Sol ageing @room-temperature
GDPTMS + DMDMOS
Zr(OPrn)4
ZrO
O O
O
IPA
HO
O
HO
MAA
Si
O
O
OOO
GDPTMSDMDMOS
Si
O
O
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FILM PREPARATION AND PROCESSING
Outline of the film preparation and processing, and waveguide fabrication.
Heating @ 75 °C for 30 min
Heating @ 75 °C for 30 min
UV irradiation
Sol-gel mixture
Filtration
Spin-coating @ 800 rpmfor 30 s
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Cross-sectional scanning electron microscopy (SEM) image (a) of the films; optical microscopy (OM)
image of the waveguide structures (b); and near-field (NF) image (c) of the guided light output from the
waveguide.
IMAGING
200 µm
(b)
100 µm
(c)
(a)
10 µm
Air
Substrate
Film
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Representative UV/vis (a) and IR spectra (b) of the films.
SPECTROSCOPY
200 300 400 500 600 700 8000
20
40
60
80
Ref
lect
ance
(%
)
Wavelength (nm)
(a)
4000 3500 3000 2500 2000 1500 1000 5000.0
0.2
0.4
0.6
0.8
1.0
Ab
sorb
an
ce
Wavenumber (cm-1)
(b)
Epoxy
ring
Si-O
Si-CH3
O-H
C-H
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A prism coupling curve.
REFRACTOMETRY
Modes
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Variation of refractive index (633 nm) and Δn with Zr content. (Un: Unexposed, Ex: UV-exposed)
EFFECT OF ZR AND UV LIGHT
0 10 20 30 40 501.485
1.500
1.515
1.530
Un
Ex
Refr
acti
ve I
nd
ex
at
63
3 n
m
Zr Content (mol %)
0.0 0.5 1.0 1.5 2.0
1.490
1.495
1.500
1.505
1.510
Un
Ex
Ref
ract
ive
Ind
ex a
t 6
33
nm
Zr Content (mol %)
Zr Content (mol %)
0.00 0.35 0.70 1.2 1.7 3.4 6.6 11 17 28 45
Δn @
633 nm0.017 0.010 0.009 0.008 0.005 0.004 0.003 0.000 0.001 0.000 0.001
M. Çopuroğlu, S. O’Brien, and G. M. Crean, Journal of Sol-Gel Science and Technology 40 (2006) 75.
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Variation of thickness with Zr content.
EFFECT OF ZR AND UV LIGHT
0 10 20 30 40 503
4
5
6
7
8
9
10
Un
Ex
Th
ick
ness
(m
)
Zr Content (mol %)
0.0 0.5 1.0 1.5 2.03
4
5
6
7
8
9
10
Un
Ex
Th
ick
ness
(m
)
Zr Content (mol %)
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Dynamic thermograms of the unexposed (a) and the UV-exposed (b) materials in air, and their 1st
derivative curves ((c) and (d), respectively).
100 200 300 400 500 600
40
50
60
70
80
90
100 0.00 mol % Zr
0.70 mol % Zr
1.7 mol % Zr
6.6 mol % Zr
11 mol % Zr
17 mol % Zr
45 mol % Zr
Mass
(%
)
Temperature (oC)
(a)
100 200 300 400 500 600
40
50
60
70
80
90
100 0.00 mol % Zr
0.70 mol % Zr
1.7 mol % Zr
6.6 mol % Zr
11 mol % Zr
17 mol % Zr
45 mol % Zr
Mass
(%
)
Temperature (oC)
(b)
100 200 300 400 500 600
Deri
vati
ve M
ass
(%
/oC
)
(No
t to
Scale
)
45
17
11
6.6
0.70
1.7
0.00
Temperature (oC)
(c)
100 200 300 400 500 600
Deri
vati
ve M
ass
(%
/oC
)
(No
t to
Scale
)
0.00
0.70
1.7
6.6
11
17
45
Temperature (oC)
(d)
EFFECT OF ZR AND UV LIGHT
M. Çopuroğlu, S. O’Brien, G. M. Crean, Thermochimica Acta 452 (2007) 7.
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Variation of refractive index (at 633 nm) (a) and thickness (b) with sol ageing, for the system with 11 mol
% Zr content.
EFFECT OF AGEING
0 50 100 150 200 2501.494
1.497
1.500
1.503
1.506
1.509
1.512
Un
Ex
Refr
acti
ve I
nd
ex
at
63
3 n
m
Sol Ageing (h)
(a)
0 50 100 150 200 250
6
8
10
12
14
16
Un
Ex
Th
ick
nes
s (
m)
Sol Ageing (h)
(b)
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Dynamic thermograms of the unexposed (a) and the UV-exposed (b) materials in air, and their 1st
derivative curves ((c) and (d), respectively).
EFFECT OF AGEING
100 200 300 400 500 600
40
50
60
70
80
90
100
0 h
24 h
48 h
96 h
144 h
240 h
Mass
(%
)
Temperature (oC)
(a)
100 200 300 400 500 600
40
50
60
70
80
90
100
0 h
24 h
48 h
96 h
144 h
240 h
Mass
(%
)
Temperature (oC)
(b)
100 200 300 400 500 600
Deri
vati
ve
Mass
(%
/oC
)
(No
t to
Sca
le)
0
24
48
96
144
240
Temperature (oC)
(c)
100 200 300 400 500 600
Deri
vati
ve M
ass
(%
/oC
)
(No
t to
Scale
)
0
24
48
96
144
240
Temperature (oC)
(d)
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OPTICAL LOSS MEASUREMENT
Optical waveguides
Insertion loss
0
log10P
PossInsertionL
200 µm 100 µm
Near-field imageOptical microscopy
image
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OPTICAL LOSS MEASUREMENT
Optical waveguides
Insertion loss
0
log10P
PossInsertionL
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OM images of the waveguide structures ((a)-(c)), and NF images of the guided light output from the
waveguides ((d)-(f)) with no Zr, subjected to a temperature cycling treatment between: none (a) and (d); 4
and 38 C (b) and (e); -40 and 65 C (c) and (f) (100 cycles in both cases).
RELIABILITY ANALYSIS
Temperature Range (ºC) Optical Propagation Loss (dB cm-1)
None 0.8
4-38 2.4
-40-65 5.2
200 µm
(a)
200 µm
(b)
200 µm
(c)
100 µm
(d)
100 µm
(e) (f)
100 µm
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OUTLINE
Zinc oxide-
dopedZinc oxide-
undopedORMOSIL with
aryl groups
ORMOSIL with
transition metal
Materials
Inorganic/organic
hybridCeramic
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STUDY
Investigated parameters:
• refractive index modifier, DPDMS
• UV light
• sol ageing
Characterised properties:
• structural
• morphological
• optical
• spectroscopical
• thermal
• reliability
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SYNTHESIS
Skeletal formulae of the chemicals used, and outline of the synthesis. DPDMS: diphenyldimethoxysilane.
IPA
Stirring @ room-temperaturefor 30 min
Stirring @ room-temperaturefor 1h
Photo-initiator
Stirring @ room-temperaturefor 1h
H2O + HCl
Sol ageing @room-temperature
GDPTMS + DMDMOS
DPDMS
DPDMS
Si
O
O
Si
O
O
OOO
GDPTMS
IPA
HO
DMDMOS
Si
O
O
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FILM PREPARATION AND PROCESSING
Outline of the film preparation and processing.
Sol-gel mixture
Filtration
Spin-coating @ 800 rpmfor 30 s
Heating @ 95 °C for 30 min
UV irradiation
Heating @ 95 °C for 2 h
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Representative cross-sectional SEM image (a) and IR spectrum (b) of the UV-exposed films.
IMAGING AND SPECTROSCOPY
4000 3500 3000 2500 2000 1500 1000 5000.0
0.2
0.4
0.6
0.8
1.0
Ab
sorb
ance
Wavenumber (cm -1)
(b)
Epoxy
ring
Si-O
Si-CH3
Overtones
O-H
C-H
10 µm
(a)
Air
Substrate
Film
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Variation of refractive index (at 633 nm) and thickness with DPDMS content.
EFFECT OF DPDMS AND UV LIGHT
0 2 4 6 8 10 121.485
1.490
1.495
1.500
1.505
Ex
Refr
acti
ve I
nd
ex
at
63
3 n
m
DPDMS Content (mol %)
DPDMS Content (mol %)
0.00 1.7 6.6 11
Thickness (μm) 9.2 6.9 8.7 6.5
S. O’Brien, M. Çopuroğlu, G. M. Crean, Thin Solid Films 515 (2007) 5439.
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Dynamic thermograms of the unexposed (a) and the UV-exposed (b) materials in air, and their 1st
derivative curves ((c) and (d), respectively).
EFFECT OF DPDMS AND UV LIGHT
100 200 300 400 500 600
40
50
60
70
80
90
100
0.00 mol % DPDMS
1.7 mol % DPDMS
3.4 mol % DPDMS
6.6 mol % DPDMS
11 mol % DPDMS
Mas
s (%
)
Temperature (oC)
(a)
100 200 300 400 500 600
40
50
60
70
80
90
100
0.00 mol % DPDMS
1.7 mol % DPDMS
3.4 mol % DPDMS
6.6 mol % DPDMS
11 mol % DPDMS
Mass
(%
)
Temperature (oC)
(b)
100 200 300 400 500 600
Der
ivat
ive
Mas
s (%
/oC
)
(No
t to
Sca
le)
0
1.7
3.4
6.6
11
Temperature (oC)
(c)
100 200 300 400 500 600
Der
ivat
ive
Mas
s (%
/oC
)
(No
t to
Sca
le)
6.6
3.4
1.7
0
11
Temperature (oC)
(d)
M. Çopuroğlu, S. O’Brien, G. M. Crean, Polymer Degradation and Stability 91 (2006) 3185.
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Dynamic thermograms of the unexposed (a) and the UV-exposed (b) materials in air, and their 1st
derivative curves ((c) and (d), respectively).
EFFECT OF AGEING
100 200 300 400 500 600
40
50
60
70
80
90
100
0 h
24 h
48 h
96 h
144 h
240 h
Mass
(%
)
Temperature (oC)
(a)
100 200 300 400 500 600
40
50
60
70
80
90
100
0 h
24 h
48 h
96 h
144 h
240 h
Mass
(%
)
Temperature (oC)
(b)
100 200 300 400 500 600
Deri
vati
ve M
ass
(%
/oC
)
(No
t to
Scale
)
0
24
48
96
144
240
Temperature (oC)
(c)
100 200 300 400 500 600
Der
ivat
ive
Mas
s (%
/oC
)
(No
t to
Sca
le)
0
24
48
96
144
240
Temperature (oC)
(d)
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CONCLUSIONS-ORMOSILS
Two novel ORMOSIL systems synthesised by the
sol-gel method, and their thin-films deposited by the
spin-coating technique
Comparative effects of refractive index modifiers,
UV light and sol ageing on microstructure and
functional properties, and their tunability detailed for
the first time
Planar optical waveguide structures with reasonable
optical propagation loss and reliability obtained for
the Zr-doped system, at its low concentrations
S. O’Brien, M. Çopuroğlu, G. M. Crean, Applied Surface Science 253 (2007) 7969.
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OUTLINE
Zinc oxide-
dopedZinc oxide-
undopedORMOSIL with
aryl groups
ORMOSIL with
transition metal
Materials
Inorganic/organic
hybridCeramic
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STUDY
Investigated parameters:
• single-/multi-step coating
• Al-doping
Characterised properties:
• structural
• morphological
• optical
• spectroscopical
• thermal
• reproducibility
• reliability
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SYNTHESIS
IPA + MEA
IPA
Zn(C2H3O2)2·2H2O
Sol ageing @ room-temperature for 1 day
Dissolving @ 60 °Cfor 1 h while stirring
Sol of [Zn] + [Al] =[MEA] = 0.7 M
0.2 M ethanolicAl(NO3)3·9H2O
Zn2+
2-
2O-
O
2H2O
Zinc acetate dihydrate
Aluminium nitrate nonahydrate
Al3+9H2ON+
O-
O-O
3-
3
HONH2
MEA
HO
Ethanol
Skeletal formulae of the chemicals used, and outline of the synthesis. MEA: 2-aminoethanol.
M. Çopuroğlu, L. H. K. Koh, S. O’Brien, G. M. Crean, Journal of Sol-Gel Science and Technology 52 (2009) 432.
S. O'Brien, M. Nolan, M. Çopuroglu, J. A. Hamilton, I. Povey, L. Pereira, R. Martins, E. Fortunato, M. Pemble, Thin Solid
Films 518 (2010) 4515.
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FILM PREPARATION AND PROCESSING
Outline of the film preparation and processing.
Sol-gel mixture
Spin-coating @ 3000 rpmfor 20 s
Multi-layer
Heating @ 275 °C for 10 min
Annealing @ 550 °C for 1 h
Forming gas process (FGP)@ 500-550 °C for 1 h
S. O’Brien, L. H. K. Koh, M. Çopuroğlu, and G. M. Crean, Mat. Res. Soc. Symp. Proc. 1035E (2008) L05-09.
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IMAGING
Top-view ((a) and (b)), and cross-sectional SEM images ((c) and (d)) of the single- ((a) and (c)), and
multi-layer ((b) and (d)) films.
500 nm
(a)
500 nm
(b)
(c)
500 nm
(d)
500 nm
113 nm325 nm
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SPECTROSCOPY
UV/vis spectra (a), and their 1st derivatives (b) of the single- and multi-layer films. The table shows the
data obtained from these spectra.
Property
Film Type% Transmittance
at 550 nm
First Derivative
Maximum (nm)
Band Gap
Energy (eV)
Single-layer 99 376 3.30
Multi-layer 96 380 3.27
300 400 500 600 700 8000
20
40
60
80
100
Single-layer
Multi-layerTra
nsm
itta
nce (
%)
Wavelength (nm)
(a)
340 360 380 400 420
0.0
1.5
3.0
4.5
6.0
Der
ivat
ive
Tra
nsm
itta
nce
(%
/nm
)
Wavelength (nm)
(b)
Single-layer
Multi-layer
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X-ray diffraction patterns of the undoped single- (a) and multi-layer (b) films. The table shows the data
obtained from these patterns.
DIFFRACTOMETRY
Property
Film TypeRelative Intensity of (002)
Crystal OrientationAverage Crystallite Size (nm)
Single-layer 0.62 37
Multi-layer 0.94 46
25 30 35 40 45 50
0
100
200
300
400
500
(10
1)
(10
0)
(00
2)
Inte
nsi
ty
2 (o)
(a)
25 30 35 40 45 50
0
2
4
6
8
10
Inte
nsi
ty x
10
-3
2 (o)
(b)
(00
2)
(10
0)
(10
1)
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Crystallite size calculation
DIFFRACTOMETRY
Scherrer’s equation:
BBt
cos
9.0
t: thickness of the crystal,
B: actual full width at half maximum of the peak centred at 2θB.
λ: wavelength of the incident light (X-ray)
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Current-voltage plots of the single-layer film before and after FGP. The table shows the data obtained
from these plots.
ELECTRICAL CHARACTERISATION
Measurement Stage Minimum Electrical Resistivity (Ω m)
Before FGP 4.5
After FGP 0.14
-60 -40 -20 0 20 40 60-100
-80
-60
-40
-20
0
20
40
60
80
100
Before FGP
After FGP
Cu
rren
t (
A)
Voltage (V)
Measured by 4-point
probe method
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IMAGING
SEM images of the single- (1st and 3rd row) and multi-layer (2nd and 4th row) films. (From left to right: Day-1 to Day-5; the
width of the scale bars corresponds to 500 nm)
Av.
106 nm
Av.
307 nm
M. Çopuroğlu, S. O’Brien, G. M. Crean, Applied Surface Science 256 (2009) 737.
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SPECTROSCOPY
UV/vis spectra of the single- (a) and multi-layer (b) films and their first derivatives ((c) and (d),
respectively).
300 400 500 600 700 80040
50
60
70
80
90
100
Day-1
Day-2
Day-3
Day-4
Day-5Tra
nsm
itta
nce (
%)
Wavelength (nm)
(a)
300 400 500 600 700 8000
20
40
60
80
100
Day-1
Day-2
Day-3
Day-4
Day-5Tra
nsm
itta
nce (
%)
Wavelength (nm)
(b)
340 360 380 400 420
0
1
2
3
4
Wavelength (nm)
(c)
Day-1
Day-2
Day-3
Day-4
Day-5
Der
ivat
ive
Tra
nsm
itta
nce
(%
/nm
)
340 360 380 400 420
0
1
2
3
4
5
6
Wavelength (nm)
(d)
Day-1
Day-2
Day-3
Day-4
Day-5
Der
ivat
ive
Tra
nsm
itta
nce
(%
/nm
)
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X-ray diffraction patterns of the single- (a) and multi-layer (b) films.
25 30 35 40 45 50
Day-4
Day-1
Day-2
Day-3
Day-5
Inte
nsi
ty (
No
t to
Scale
)
(10
1)(0
02
)
(10
0)
2 (o)
(a)
25 30 35 40 45 50
Day-1
Day-2
Day-3
Day-4
Day-5
Inte
nsi
ty (
No
t to
Scale
)
(10
1)
(10
0)
(00
2)
2 (o)
(b)
DIFFRACTOMETRY
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Current-voltage plots of the single-layer film before and after FGP. (From (a) to (b): Day-1 to Day-5)
ELECTRICAL CHARACTERISATION
-60 -40 -20 0 20 40 60-150
-100
-50
0
50
100
150
Before FGP
After FGP
Curr
ent
(A
)
Voltage (V)
(a)
-60 -40 -20 0 20 40 60-150
-100
-50
0
50
100
150
Before FGP
After FGP
Curr
ent
(A
)Voltage (V)
(b)
-60 -40 -20 0 20 40 60-150
-100
-50
0
50
100
150
Before FGP
After FGP
Cu
rren
t (
A)
Voltage (V)
(c)
-60 -40 -20 0 20 40 60-150
-100
-50
0
50
100
150
Before FGP
After FGP
Cu
rren
t (
A)
Voltage (V)
(d)
-60 -40 -20 0 20 40 60-150
-100
-50
0
50
100
150
Before FGP
After FGP
Cu
rren
t (
A)
Voltage (V)
(e)
Average Electrical
Resistivity (Ω m)
23 18
1.5 1.3
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OUTLINE
Zinc oxide-
dopedZinc oxide-
undopedORMOSIL with
aryl groups
ORMOSIL with
transition metal
Materials
Inorganic/organic
hybridCeramic
![Page 51: POLYMER NANOCOMPOSITES/ CERAMICS SYSTEMS · Variation of refractive index (633 nm) and Δn with Zr content. (Un: Unexposed, Ex: UV-exposed) EFFECT OF Z R AND UV LIGHT 0 10 20 30 40](https://reader035.vdocuments.mx/reader035/viewer/2022070800/5f021ec97e708231d402abd3/html5/thumbnails/51.jpg)
25 30 35 40 45 50
Inte
nsi
ty (
No
t to
Scale
)
Undoped
Al-doped
2 (o)
(a)
(00
2)
(10
0)
(10
1)
25 30 35 40 45 50
Inte
nsi
ty (
No
t to
Sca
le)
Al-doped
Undoped
2 (o)
(b)
(00
2)
(10
0)
(10
1)
DIFFRACTOMETRY
Property
Film TypeRelative Intensity of (002)
Crystal OrientationAverage Crystallite Size (nm)
Single-layer 1 24
Multi-layer 1 22
X-ray diffraction patterns of the single- (a) and multi-layer (b) films. The table shows the data obtained from these patterns.
M. Çopuroğlu, S. O’Brien, G. M. Crean, Thin Solid Films 517 (2009) 6323.
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IMAGING
Top-view ((a) and (b)) and cross-sectional ((c) and (d)) SEM images of the Al-doped single- ((a) and (c))
and multi-layer ((b) and (d)) films.
500 nm
(a)
500 nm
(b)
500 nm
(c) (d)
500 nm
92 nm 266 nm
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SPECTROSCOPY
UV/vis spectra of the single- (a) and multi-layer (b) films, and their first derivatives ((c) and (d),
respectively).
300 400 500 600 700 80040
50
60
70
80
90
100T
ran
smit
tan
ce (
%)
Wavelength (nm)
(a)
Undoped
Al-doped
300 400 500 600 700 8000
15
30
45
60
75
90
105
Tra
nsm
itta
nce (
%)
Wavelength (nm)
(b)
Undoped
Al-doped
340 360 380 400 420
0
1
2
3
4
Deri
vati
ve T
ran
smit
tan
ce (
%/n
m)
Wavelength (nm)
(c)
Undoped
Al-doped
340 360 380 400 420
0
1
2
3
4
5
6
Der
ivat
ive
Tra
nsm
itta
nce
(%
/nm
)
Wavelength (nm)
(d)
Undoped
Al-doped
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Current-voltage plots of the undoped and the Al-doped single-layer films.
ELECTRICAL CHARACTERISATION
-60 -40 -20 0 20 40 60
-60
-40
-20
0
20
40
60
Cu
rren
t (
A)
Voltage (V)
Undoped
Al-doped
Measurement Stage Minimum Electrical Resistivity (Ω m)
Undoped 4.5
Al-doped 0.34
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RELIABILITY ANALYSIS
Top-view ((a), (b) and (e)) and cross-sectional ((c), (d) and (f)) SEM images of the undoped single- ((a)
and (c)) and multi-layer ((b) and (d)), and the Al-doped multi-layer ((e) and (f)) films after the temperature
cycling test (-40-65 C) (100 cycles).
500 nm
(e)
(f)
500 nm
500 nm
(a)
500 nm
(b)
500 nm
(c)
500 nm
(d)
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CONCLUSIONS-ZINC OXIDE
Both undoped and Al-doped ZnO systems
synthesised by the sol-gel method
Thin-films deposited by the spin-coating technique
Reproducible desired properties obtained
Electrical conductivity improved by Al-doping
High degree of reliability demonstrated
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POSTDOC-SUMMARY
Development of perovskite-type lead-magnesium-niobium titanate
(PMNT)-based material systems for monolithic above-IC ultra-high-
value capacitors for mobile and wireless communication systems.
Involves
• sol-gel synthesis under controlled environment (atmosphere,
temperature, etc.)
• nanoparticle seeding
• various thin-film processing techniques including rapid
thermal annealing (RTA), UV-irradiation, and laser-activation
• characterisation
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Mg(C2H5O)2 + Nb(C2H5O)5
in 2ME
Ti(n-C3H7O)4in 2ME
Pb(C2H3O2)2
in 2ME
Refluxing @ 125-126 °Cfor ~15 h under N2
Refluxing @ 125-126 °Cfor ~4 h under N2
Mg-Nb-Ti complex
Formamide
Refluxing and distillationunder N2
PMNT sol
SYNTHESIS
Flowchart of synthesis. (2ME: 2-Methoxyethanol)
M. Çopuroğlu, S. O’Brien, B. Malič, B. Kužnik, M. Kosec, X. Zhu, E. Defaÿ, R. Winfield, IOP Con. Ser.: Mat. Sci. Eng. 8
(2010) 012007.
W. Chen, K. G. McCarthy, M. Çopuroğlu, H. Doyle, B. Malic, B. Kuznik, M. Kosec, S. O’Brien, R. Winfield, A. Mathewson,
Thin Solid Films (2011), doi:10.1016/j.tsf.2010.12.194.
W. Chen, K. G. McCarthy, A. Mathewson, M. Çopuroğlu, S. O’Brien, R. Winfield, IEEE Electron Device Letters 31 (2010)
996.
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FILM PREPARATION AND PROCESSING
Outline of film preparation and processing, and RTA time-temperature profile and conditions.
λ = 222 nm
0-3 times
PreparedPMNT sol
Spin-coating@ 3000 rpm for 30 s
Heating@ 300 °C for ~1 min
RTA
1HPK
UV-irradiation@ RT for 4 min
Substrate:Pt/TiO2/SiO2/Si
RTA t ime- temperature pro f ile:
X = 350-750 in O2; 750 in N2
RT RT
1 min ~10 min
X °C, 5 min
M. Çopuroğlu, S. O’Brien, B. Malič, B. Kužnik, M. Kosec, X. Zhu, E. Defaÿ, H. Doyle, R. Winfield, Physica Status Solidi
A, under review.
W. Chen, K. G. McCarthy, M. Çopuroğlu, S. O’Brien, R. Winfield, A. Mathewson, IOP Con. Ser.: Mat. Sci. Eng. 8 (2010)
012020.
W. Chen, K. G. McCarthy, M. Çopuroğlu, S. O’Brien, R. Winfield, A. Mathewson, IEEE Int. Con. Microelec. Test Struc.
(2010) 98.
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(a) (b)
FILM CHARACTERISATION-SEM
Planar (a) and cross-sectional (b) SEM images of two representative films annealed at 750 (unexposed) and 550 (UV-exposed) C, respectively.
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750/1/O2 750/2/O2 750/3/O2 750/4/O20
50
100
150
200
250
300
350
400
Thic
kn
ess (
nm
)
Annealing temperature (°C)/No of layer/Annealing atmosphere
(a)
550/4/O2 650/4/O2 700/4/O2 750/4/O2 750/4/N20
100
200
300
400
500
Thic
kness (
nm
)
Annealing temperature (°C)/No of layer/Annealing atmposphere
(b)
FILM CHARACTERISATION-THICKNESS EVALN.
Thickness profiles of the films.
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350
400
450
500
550
650 700550 750
Th
ickn
ess (
nm
)
Annealing Temperature (°C)
Unexposed
UV-exposed
FILM CHARACTERISATION-THICKNESS EVALN.
Thickness values of the films.
M. Çopuroğlu, S. O’Brien, B. Malič, B. Kužnik, M. Kosec, X. Zhu, E. Defaÿ, R. Winfield, Thin Solid Films 518 (2010)
4503.
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10 20 30 40 50 60
x
2 (o)
(a)
750 °C
700 °C
650 °C
550 °C
Inte
nsity (
Arb
itra
ry u
nits)
x o x s x
o
s o x
o: perovskite
x: pyrochlore
s: substrate
10 20 30 40 50 60
750 °C
700 °C
650 °C
550 °C
2 (o)
(b)
Inte
nsity (
Arb
itra
ry u
nits)
x o
x
os
x
o
s o x x
o: perovskite
x: pyrochlore
s: substrate
FILM CHARACTERISATION-XRD
XRD patterns of the unexposed (a) and the UV-exposed (b) films that were annealed at various temperatures.
% perovskite phase = 97 (750 C) % perovskite phase = 61 (750 °C)
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-10 -8 -6 -4 -2 0 2 4 6 8 10200
400
600
800
1000
1200
1400
1600
k
tan
DC bias voltage (V)
(a)
k
0.00
0.04
0.08
0.12
0.16
0.20
tan
k = 1425!
-10 -8 -6 -4 -2 0 2 4 6 8 10
81.2
81.6
82.0
82.4
82.8
k
tan
DC bias voltage (V)
(b)
k
0.00
0.04
0.08
0.12
0.16
0.20
tan
k = 82.66
FILM CHARACTERISATION-ELECTRICAL MEAS.
DC bias dependence of k and tan δ of the films composed of 4-layer, and annealed at 750 C in O2 (a) and (c), and N2 (b) atmosphere. (a) and (b) unexposed, (c) UV-exposed.
-10 -8 -6 -4 -2 0 2 4 6 8 10
48
50
52
54
56 k
tan
DC bias voltage (V)
(c)
k
0.025
0.030
0.035
0.040
tan
k = 55.71
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-10 -8 -6 -4 -2 0 2 4 6 8 10-30
-20
-10
0
10
20
P (
C/c
m2)
DC bias voltage (V)
2.5 V
4 V
5 V
6 V
7.5 V
10 V
Remnant polarisation = 7 μC cm-2 Coercive field = 35.8 kV cm-1
FILM CHARACTERISATION-ELECTRICAL MEAS.
Polarisation (P) hysteresis loops of the film composed of 4-layer, and annealed at 750 C in O2
atmosphere.
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Delamination upon Cr/Au electrode deposition (by
sputtering)
Observed even if cleaning step (H2O2/NH3 aq. soln.)
skipped
Rows mJ/cm2
1 57
2 47
3 38
4 28
5 19
6 9
Columns No of shots
1 2 3 4 5 6 7 8 9
100 80 65 50 35 25 10 5 1
LASER PROCESSING
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Crack-free films with tunable thickness obtained
Unexposed film annealed at 750 °C in O2 atm (4-
layer) exhibited a considerably high k value (1425)
Use of gentle-UV-irradiation could facilitate the
lattice formation-initiation at lower temperatures, and
play a role in modifying the microstructure
This PMNT thin film system appeared potentially
suitable for ultrahigh-value capacitor applications
CONCLUSION
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Synthesis and preparation:
Avail of
• sol-gel method-based approaches
• polymerisation/crosslinking regimes
Employ combinations of precursors
• polyfunctional silicon and/or metal alkoxides
• optionally containing polymerisable/crosslinkable functional moieties
• other oligomers/polymers
Make use of various techniques
• thermal processing
• photon-assisted processing
Tailor desired properties
DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Si
O O
OO
TEOS Ti(OPr)4
O
Ti
OO
O
O
OH
MAA
GDPTMS
O OSi
OO
O
Si
O
O
DMDEOS
Foto-basla tici
S S+S+ SbF6-SbF6
- S S+ SbF6-
Skeletal formulae of the chemicals used, and outline of the synthesis. GDPTMS: (3-
glycidyloxypropyl)trimethoxysilane; DMDEOS: dimethyldiethoxysilane; Ti(OPrn)4: titanium(IV) iso-
propoxide; MAA: methacrylic acid.
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Takip edilen sentez rotasının şeması.
(damla damla)H2O/H3O+
GDPTMS + DMDEOS + TEOS
IPA
Ti:MAA
15 dakika oda sicakligindakaristirma
5 dakika oda sicakligindakaristirma
1 saat oda sicakligindakaristirma
Sol yaslanmasi
Foto-baslatici
2.5 saat oda sicakligindakaristirma
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Takip edilen işlem rotasının şeması.
Kaliplama
60 °C'de 30 dakikakurutma
Sol-jel karisimi
UV-kür islemi
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Örneklerin isimlendirilmesinde kullanılan kodlama sistemi.
Kod Ti bileşimi (mol %) Sol yaşlanma süresi Kür süresi (dakika)
Ti0 0 0 saat 0
Ti1 5 1 saat 1
Ti2 10 3 saat 2
Ti3 15 6 saat 5
Ti4 20 12 saat 10
Ti5 25 1 gün 20
Ti6 30 2 gün 30
Ti7 40 3 gün 60
Ti8 50 6 gün 120
Ti9 75 10 gün 300
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
1400 1200 1000 800 600
Ab
sorb
ance
(A
rbit
rary
un
its) Ti09
Ti00
Ti07
Ti06
Ti02
Ti01
Ti05
Ti03
Wavenumber (cm-1
)
(a)
Ti08
Si-O-Si
Epoxy ring
1400 1200 1000 800 600
Ab
sorb
ance
(A
rbit
rary
un
its)
Ti59
Ti50
Ti57
Ti56
Ti52
Ti51
Ti55
Ti53
Wavenumber (cm-1
)
(b)
Ti58
Si-O-Si
Epoxy ring
Polyether
Si-O-Ti
Molce % 0 (a) ve 25 (b) Ti başlangıç maddesi içeren örnekler için sol yaşlanma süresi FT-IR profili.
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Molce % 0 (a) ve 25 (b) Ti başlangıç maddesi içeren örnekler için UV kür süresi FT-IR profili.
1400 1200 1000 800 600
Ab
sorb
ance
(A
rbit
rary
un
its)
Ti050
Ti056
Ti055
Ti052
Ti051
Ti054
Ti053
Wavenumber (cm-1
)
(a)
Ti057
Si-O-Si
Epoxy ring
Polyether
1400 1200 1000 800 600
Si-O-SiSi-O-Ti
Ab
sorb
ance
(A
rbit
rary
un
its)
Ti550
Epoxy ring
Polyether
Ti556
Ti555
Ti552
Ti551
Ti554
Ti553
Wavenumber (cm-1
)
(b)
Ti557
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Molce % 0 (a) ve 25 (b) Ti başlangıç maddesi içeren örnekler için UV kür süresi TGA profili.
100 200 300 400 500 600
40
50
60
70
80
90
100 Ti550
Ti551
Ti552
Ti553
Ti557
Mass
(%
)
Temperature (°C)
(b)
100 200 300 400 500 600
40
50
60
70
80
90
100 Ti050
Ti051
Ti054
Ti057
Mass
(%
)
Temperature (°C)
(a)
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Polimer nanokompozitler ve potansiyel uygulamaları. (Sertlik testi ve hesaplamaları)
Shore-A hardness & elastic modulus
t: sample thickness;
r: radius of truncated cone of the indenter of device;
d: depth of penetration;
d’: corrected depth of penetration;
s: Shore hardness
E: elastik (Young’s) modulus
• Siddiqui, A., Braden, M., Patel, M. P., Parker, S., “An experimental and theoretical study of the effect of
sample thickness on the Shore hardness of elastomers.” Dent. Mater. 26 (2010) 560.
• Meththananda, I. M., Parker, S., Patel, M. P., Braden, M., “The relationship between Shore hardness of
elastomeric dental materials and Young’s modulus.” Dent. Mater. 25 (2009) 956.
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Polimer nanokompozitler ve potansiyel uygulamaları. (Sertlik testi ve hesaplamaları-sonuçlar)
Shore-A hardness & elastic modulus:
Shore-A hardness and elastic (Young’s) modulus (E) values for particular samples.
Sample
0 mol % Ti
UV-irrad. 10 min. 0 mol % Ti
UV-irrad. 60 min. 25 mol % Ti
UV-irrad. 10 min. 25 mol % Ti
UV-irrad. 60 min.
Shore-A hardness 46 70 71 81
E (MPa) ~ 0 0.5 4 3
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DİŞ DOLGU MALZEMELERİ İÇİN YENİ POLİMER
NANOKOMPOZİTLERİN GELİŞTİRİLMESİ (AKRONİM: “DİP”)
Polimer nanokompozitler ve potansiyel uygulamaları (adesiv). (Mekanik test)