Single Crystal Silicon for MEMS

Single Crystal Silicon for MEMS

Mechanical Material SILICON?

Stiff => Thinning is required for appreciable strainSingle Crystal Silicon for MEMS

Single Crystal Silicon for MEMS

Structure of Single Crystal Silicon

Miller Indices for Single Crystal Silicon

Miller Indices for Single Crystal Silicon

SCS has anisotropic properties:Electrical, Thermal, Mechanical, ChemicalETCHING for BULK MICROMACHINING(Isotropic/Anisotropic)

ETCHING for BULK MICROMACHINING(Isotropic/Anisotropic)

ETCHING for BULK MICROMACHINING(Cavity/Cantilever Anisotropic)