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Integrated pulsed laser scanning microscope
system at NTU, Singapore
Samuel CHEF1, Chung Tah CHUA1,2, Philippe Perdu1,3, Chee Lip Gan1,2
1Temasek Laboratories@NTU, Nanyang Technological University, Singapore
2School of Materials Science & Engineering, NTU, Singapore
3CNES, Toulouse, France
09 Oct 2017
Temasek Laboratories@NTU
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Space industry landscape in Singapore
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COTS Devices in Space Applications
• Small satellites (micro, nano, pico, etc) => Shorter
Development Time/Lower cost => COTS?
• COTS Devices for space applications:
– High volume manufacturing => Cost/performance ratio
optimization
– Most advanced technologies => Higher payload capacity
– Not designed nor qualified for space applications
– Essentially a Black-Box
• Laser testing of COTS:
– No information on design => Is the area under test relevant?
– No international standard procedure => Is the test procedure
relevant?
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Strategies for laser SEE testing setup
Type of System SEE Custom/DIY SEE Commercial
Development Time
Development Cost
Flexibility/Evolutivity
Maintenance
Legacy
• SEE testing => Small market
• FA System:
• Long Legacy
• Various analysis capabilities
• Typical Optical FA system:
• Microscope (Bright field or CLSM)
• Laser Sources
• NIR Sensor
Why not integrate SEE capabilities
to standard FA system?
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NTU Pulsed Laser SEE setup
8GHz oscilloscope
1064nm PulsedSMU/PSU/FG
SIL lens
120 nm resolution
1340nm CW
OBIRCH, TIVA
P. Perdu, D. Lewis (2004)
1319nm CW
LTP
InGaAs camera
PEM
1064nm CW
OBIC, LIVA
E.I. Cole (1994)
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NTU Pulsed Laser SEE setup
Parameter Description
Wavelength 1064 nm
Pulse width (FWHM) 10 ps
Pulse energy Up to 11 nJ (at source)
Repetition rate Single shot to 50 MHz
Sync Possible with DUT clk
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System Evaluation: Test Replication
DUT: LM124 bipolar op amp
Localizing SET-
sensitive area
1.51 nJ
+ve
SET
-ve
SET
Single point
irradiation
SET duration (µs)
Heavy ion test
NTU Pulsed laser
SE
T a
mp
litu
de (
V)
SE
T a
mp
litu
de (
V)
Q9
Q20
0.12 nJ
2.14 nJ
DUT?
Test Board?
Measurement setup?
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EXAMPLE OF APPLICATIONS
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Test of LVDS Buffer
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Test of LVDS Buffer: Laser vs heavy ion
Heavy
ion
results
Negative SETPositive SET (long)Positive SET (short)
8.2 MeVcm2
/mg 43.6 MeVcm2
/mg 65.5 MeVcm2
/mg
1.39 nJ 1.51 nJ 3.51 nJPulsed
laser
results
0 20 40 60 80 100
Time (ns)
0 20 40 60 80 100
Time (ns)
0 20 40 60 80 100
Time (ns)
0 20 40 60 80 100
Time (ns)
0 20 40 60 80 100
Time (ns)
0 20 40 60 80 100
Time (ns)
2.5
2.0
1.5
1.0
0.5
0
Am
plit
ude (
V)
2.5
2.0
1.5
1.0
0.5
0
Am
plit
ude (
V)
2.5
2.0
1.5
1.0
0.5
0
Am
plit
ude (
V)
2.5
2.0
1.5
1.0
0.5
0
Am
plit
ude (
V)
2.5
2.0
1.5
1.0
0.5
0
Am
plit
ude (
V)
2.5
2.0
1.5
1.0
0.5
0
Am
plit
ude (
V)
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Test of LVDS Buffer
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SYNERGY BETWEEN
TECHNIQUES
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Synergy of techniques : SEL Analysis
InGaAs camera
Intense
photon
emission
Laser Timing Probe
Intense 20
MHz
signal
[S.Chef, C.L.Gan, et al, to be presented at ISTFA 2017]
• Latch-up triggered at 90 pJ with scan at 10 kHz
• Seems to be maintained by sinking from the
function generator
• Lower suceptibility with internal oscillator
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Synergy of Techniques: Identification
of areas of interest
Scanning
application
???
• Laser probing helps in identifying areas of interest
• Bring additional information about test procedure
Bit 0
Laser Probing
Single Bit
Irradiation
Irradiation at 2 nJIrradiation at 480 pJ
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Summary and conclusion
• SEE laser test system in NTU
– Customization of a standard FA system
– Brings multiple analysis capability
• FA optical analysis techniques can be used for
– Additional information on the DUT
– Perform FA during laser generated fault (SEE)
– Improve knowledge on the way to perform laser SEE
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