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Testing an Inkjet Printer for Use in MEMS
FabricationMarvin Cruz
Home Institution: University of California, Santa Cruz
Principal Investigator: Joel Kubby, Ph.DResearch Mentor: Oscar Azucena
Center for Adaptive OpticsUniversity of California, Santa Cruz
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Outline
1. Introduction to MEMS2. Project Description3. Process and General Workflow4. Data Analysis and Results
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Introduction to MEMS MEMS are micro-electro-
mechanical-systems Various applications include
sensors, actuators, and (RF) switches
Fabricated through surface micromachining processes deposit layers of material on a
substrate perform photolithography and
etching to remove unwanted material
*image courtesy of http://www.stanford.edugroupquate_groupMemsFrame.html
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Project Description Use special inkjet printer to deposit thin films of
material (layer by layer) on a substrate
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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter
device in convection oven4. Characterize device using various lab tools
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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter
device in convection oven4. Characterize device using various lab tools
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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter
device in convection oven4. Characterize device using various lab tools
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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter
device in convection oven4. Characterize device using various lab tools
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Substrate Cleaning
Anemometer designno cleaning
Anemometer designcleaned with alcohol and pre-baked
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Resolution Improvements with Cartridge Size
Anemometer design10pL cartridge
Anemometer design1pL cartridge
700µm 700µm
100µm 100µm
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Resolution Improvements with Cartridge Size cont.
Anemometer design10pL cartridge
Anemometer design1pL cartridge
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Conductivity and Sintering Temperature
3,000,000
4,000,000
5,000,000
6,000,000
7,000,000
8,000,000
9,000,000
10,000,000
11,000,000
180 200 220 240 260 280 300 320
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Future Work Continue testing other substrates and observe relevant
topography characteristics and measure conductivity Extend printing to include more complex, multi-layered
devices
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Acknowledgements Joel Kubby Oscar Azucena Bautista Fernández Darwin Fernandez Lynne Raschke Hilary O’Bryan Lisa Hunter faculty, friends, and fellow interns from the CfAO
This project is supported by the National Science Foundation Science and Technology Center for Adaptive Optics, managed by the University of California at Santa Cruz under cooperative agreement No. AST - 9876783