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Prof. Jin-Heong Yim
Functional Polymer/1st Semester, 2006_________________________________________
Part II. Functional Polymers for Semiconductor Applications
Outline of PartPolymeric Insulator for Semiconductor Applications
Introduction of Silicone ChemistryTheory of Sol-Gel ChemistryOrganic-Inorganic Hybrid PolymerSemiconductor Insulating MaterialsNanoporous Polysiloxane MaterialsSummary of Future Trends
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Prof. Jin-Heong Yim
History of Silicone Chemstry*1824년 규소의 발견 – 최초의 염화규소화합물 SiCl4의 합성
*1864년 최초의 유기규소화합물의 합성
SiCl4 + Zn(CH2CH3)2 Si(CH2CH3)4
*1938년 최초의 페닐실리콘 개발 (Corning Glass)
*1940년 메틸클로로실란의 직접합성법 개발 (GE)
*1943년 Dow Corning사 설립
*1965년 Union Carbide사 실리콘 사업시작
*1950년 반도체 실리콘용 고순도 규소생산
*1970년 광섬유용 SiCl4 정제
*1980년 실리콘 농약 개발
*1990년 Silsesquioxane 개발
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Prof. Jin-Heong Yim
Abundances of ElementsAtomic No. Symbol (%) Atomic No. Symbol (%)
1 H 0.90000 37 Rb 0.030000
6 C 0.08000 38 Sr 0.030000
7 N 0.03000 39 Y 0.003000
8 O 49.50000 40 Zr 0.020000
9 F 0.03000 42 Mo 0.000800
11 Na 2.60000 46 Pd 0.000001
12 Mg 1.90000 47 Ag 0.000010
13 Al 7.50000 48 Cd 0.000020
14 Si 25.70000 49 In 0.000010
15 P 0.10000 50 Sn 0.000100
16 S 0.06000 51 Sb 0.000300
17 Cl 0.20000 53 I 0.000030
19 K 2.40000 55 Cs 0.000700
20 Ca 3.40000 56 Ba 0.030000
22 Ti 0.60000 58 Ce 0.005000
23 V 0.02000 59 Pr 0.000600
24 Cr 0.02000 60 Nd 0.002000
25 Mn 0.10000 63 Eu 0.000100
26 Fe 4.70000 74 W 0.003000
27 Co 0.00200 78 Pt 0.000005
28 Ni 0.00800 79 Au 0.000005
29 Cu 0.00700 80 Hg 0.000300
30 Zn 0.01000 81 Tl 0.000200
31 Ga 0.00200 82 Pb 0.002000
32 Ge 0.00070 83 Bi 0.000200
35 Br 0.00002 92 U 0.000400
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Prof. Jin-Heong Yim
Silicon
규소원소 (silicon)는 지표면에 가장 많은 산소 다음으로 두번째 많은 원소(25.7%)이지만, 자연속에 유리되어 존재하지 않고, 주로 산소와 결합된산화물이나 규산염 상태로 존재한다. 광물질의 형태로는 다양하며, 예를들어 SiO2는 순도와 결정상태에 따라서 모래 , 석영, 수정, 규석, 부싯돌그리고 단백석, 더 나아가 귀금속 마노, 벽옥등의 다양한 형태로 존재한다
◆ 반짝인다고반짝인다고 다다 금은금은 아니다아니다. . -- 미국속담미국속담
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Prof. Jin-Heong Yim
Bond Energies
Si Bonds Energy (Kcal/mole) C Bonds Energy (Kcal/mole)
Si-Si
Si-C
Si-H
Si-O
Si-N
Si-F
Si-Cl
Si-Br
Si-I
C-Si
C-C
C-H
C-O
C-N
C-F
C-Cl
C-Br
C-I
53
76
76
108
77
135
91
74
56
76
82
98
85
73
116
81
68
51
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Prof. Jin-Heong Yim
Silicon Based Polymer
Si O
O
Si O
O
Si
O
O Si
O
O
Si
R
O
R
Si
R
O
R
Si
R
R
O Si
R
R
O
Si O Si O Si O Si On
n
Silica
Silicone Oil
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Prof. Jin-Heong Yim
SiO
R
R'O
R
R'nR = -Me, -Ph, -CH=CH2, -CH2CH2CF3
R' = H, SiMe3
Silicone Gums Molecular Structures ASTM Crassification
Dimethyl Polysiloxane
Methyl Phenyl Polysiloxane
Methyl Vinyl Polysiloxane
Methyl Phenyl Vinyl Polysiloxane
Methyl Trifluoropropyl Polysiloxane
Si
Me
O O
Me
Si
Me
Me
O Si
Me
Me
O Si
Me
Me
O
Si
Me
O O
Me
Si
Ph
Ph
O Si
Me
Me
O Si
Ph
Me
O
Si
Me
O O
Me
Si
CH=CH2
Me
O Si
Me
Me
O Si
CH=CH2
Me
O
Si
Me
O O
Me
Si
Ph
Ph
O Si
Me
Me
O Si
CH=CH2
Me
O
Si
Me
O O
Me
Si
(CH2)2CF3
Me
O SiMe
Me
O Si
(CH2)2CF3
Me
O
Si
P Si
V Si
PV Si
F Si
Polsiloxane
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Prof. Jin-Heong Yim
Characteristics of Si based Compounds
* 내열성 (+315 oC)
* 내한성 (절연온도특성 –125 oC)
* 내 약품성 (무독성)
* 전기적인 절연성 (내 아크성)
* 내후성 (내 자외선, 내 오존성, 내 방사능성)
* 발수성
* 난연성
* 압축특성
* 화학적 불활성
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Prof. Jin-Heong Yim
Water Repellent & Softner
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Prof. Jin-Heong Yim
Silicone Resin vs Organic Resin
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Prof. Jin-Heong Yim
Moisture Resistant Surface Treatment
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Prof. Jin-Heong Yim
Silicon Resin for Motor
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Prof. Jin-Heong Yim
Oil Seals
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Prof. Jin-Heong Yim
Silicone Rubber Coated Cable
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Prof. Jin-Heong Yim
Optical Fiber Cable
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Prof. Jin-Heong Yim
Potting Electric and Electronic Appliances
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Prof. Jin-Heong Yim
Sol-Gel Chemistry
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Prof. Jin-Heong Yim
Sol-Gel Chemistry
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Prof. Jin-Heong Yim
Sol? Gel?
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Prof. Jin-Heong Yim
Sol? Gel?
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Prof. Jin-Heong Yim
General Mechanism
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Prof. Jin-Heong Yim
General MechanismGeneral Mechanism
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Prof. Jin-Heong Yim
Chemical Reactivity
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Prof. Jin-Heong Yim
Chemical Reactivity
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Prof. Jin-Heong Yim
Chemical Reactivity
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Prof. Jin-Heong Yim
Reactivity of Si
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Prof. Jin-Heong Yim
Reactivity of Si
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Prof. Jin-Heong Yim
GelationAcid Catalyzed Polymerization Base Catalyzed Polymerization
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Prof. Jin-Heong Yim
AgingAging
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Prof. Jin-Heong Yim
DryingDrying
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Prof. Jin-Heong Yim
Stress Formation
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Prof. Jin-Heong Yim
Drying
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Prof. Jin-Heong Yim
Firing
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Prof. Jin-Heong Yim
Summary
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Prof. Jin-Heong Yim
Spin Coating
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Prof. Jin-Heong Yim
Dip Coating
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Prof. Jin-Heong Yim
Dip Coating Process
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Prof. Jin-Heong Yim
Coating Applications