MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS
Apple uses an accelerometer to reorient the iPhone's screen
also used inalso used in notebook, CE
ink-jet head
MEMS in phones:3-axis MEMS accelerometer motion sensors in phones include power management and shake modes for control f k i i h dof tracks in music phones, context awareness and
pedometers. Others: microphones, BAW duplexers and filters, MEMS autofocus actuators, pressure sensors, pico-projectors and gyroscopes
MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS
MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS
http://www.europhysicsnews.com/full/19/article1/article1.html
laterallateral
Vaddressaddress
Google (DLP Chip)
3*DLP chips
3*DLP chips
MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS
Accelerometer
17 June 2006 http://www.planetanalog.com/showArticle.jhtml?articleID=189400178HDD camcorder teardown: MEMS, gyros keep things steady
MEMSMEMS• Overview• Making MEMSMaking MEMS• Using MEMS• Integrating MEMS• NEMSNEMS
Self-assembly of orthogonal three-axis sensorsJ. H. Cho, S. Hu, and D. H. Gracias
APPLIED PHYSICS LETTERS 93, 043505 (2008)
state-of-the-art: 2011ADIS16407: TEN DEGREES OF FREEDOM INERTIAL SENSOR
23 mm × 23 mm × 23 mm module$444 per 1k units
Applications:Emergency first responders, unmanned vehicles, and precision autonomous instruments often require the merging of multiple sensors to accurately track location in office buildings, warehouses, tunnels, caves, mines, ‘urban canyons’ and other GPS-denied environments., , y
Recommended: http://www.analog.com/en/mems-sensors/products/index.html