domain structures in monoclinic pb[(znl/3nb2/3)o.91tio.09

5
Jpn. J. Appl. Phys. Vol. 41 (2002) pp. 3846-3850 Part 1, No. 6A, June 2002 cg2002 The Japan Society of Applied Physics Domain Structures in Monoclinic Pb[(Znl/3Nb2/3)O.91Tio.09]O3 Poled Single Crystals Alexandra-Evelyne RENAULTl,2, Hichem DAMMAKl*, Gilbert CALVARINl, Mai PHAM THI2t and Philippe GAUCHER2 1 Laboratoire Structures, Propriétés et Modélisation des Solides UMR 8580 CNRS, Ecole Centrale de Paris, 92295 Châtenay-Malabry, France 2THALES RESEARCH & TECHNOWGY FRANCE, 91404 Orsay Cedex, France (Received January 7, 2002; accepted for publication March 12,2002) A tetragonal (T) ++ monoclinic (M) phase transition characterized by a wide thermal hysteresis is observed in Pb(Znl/3Nb2/3)O3-PbTiO3 (PZN-PT) single crystals close to the morphotropic composition PZN-9%PT. The domain structure of crystal s, determined by X-ray diffraction and optical observations, is dependent on the poling crystallographic direction. A monoclinic quasi-single domain structure is obtained by poling along the pseudocubic [101] direction whereas an unexpected monoclinic multidomain state with macroscopic 2mm symmetry cao be obtained for [001] poled crystals. Finally it is shown that the largest piezoelectric response corresponds to the monoclinic multidomain state of [001] poled crystals. [DOI: 10.1143/JJAP.41.3846] KEYWORDS: PZN-9%PT single crystal, X-ray diffraction, monoclinic phase, piezoelectricity, domain engineering crystal was approximate1y 10 x 10 x 8 rnrn3. Crysta1s were cut and po1ished,wi~h orientations [!00]/J010]/[001] (A and A'), [101]/[010]/[101] (B) and [112]/[110]/[111] (C). The size of single crysta1swere 2.6 x 2.6 x 1.8 (A), 1.7 x 1.7 x 3.6 (A'), 1.6 x 2.9 x 1.6 (B) and 4.2 x 1.9 x 0.9 (C) mm3. Thin films of Cr/Au e1ectrodes (rv 1300 A) were sputtered on the (001), (10Ï) or (Ill) faces. The homogeneity of the samp1es was contro11ed by die1ectric susceptibi1ity measure- ments as a fonction of temperature using a LF impedance analyzer (HP-4192A). The Curie temperature Tc measured during the zero-fie1d-coo1ing runs (ZFC) was equa1 to 449 ::1:: 0.5 K. Samp1es were then po1ed either under a dc field at room temperature (RT) or during field coo1ing (FC). The piezoe1ectric properties were determined according to the IRE standard methods. X-Tay diffraction experiments were performed on a high-accuracy two-axes diffractometer using Cu-K,B monochromatic radiation issued from a Rigaku rotating anode (RU300, 18 kW). Single crystals were fixed on a coppeT samp1e ho1der mounted on a HUBER goniometric head. ln the Bragg-Brentano geometry, the diffraction angles were measured with a precision re1ative1y better than 0.002° (2e). Two-dimensional maps. of the diffracted intensity were a1so constructed by rotating step by step the crystal around the w-axis. Such 2(}-W mappings al10wed disc10sure and characterization of the domain structure of crysta1s. 3. Results 3.1 Dielectric properties Figure l(a) shows the temperaturedependence of the piezoelect~c permittivity eI3/eO along [001] for crystal A, along [101] for crystal B and along [111] for crystal C, at 10kHz and for a 100kV/m appliedfield in FC. For crystals A and B, two anomalies are observed at 451K and 300K, corresponding respectively to the cubic (C) -+ tetragonal (T) and to the tetragonal (T) to monoclinic6)(M) (or orthor- hombic7)(0)) phasetransitions. The low value of eI3/eO ("'1800) along [001] in the 300-450K temperature rangeis due to the formation of a tetragonal singledomainunderthe dc bias field. On the other hand, when the electric field is applied along [101], the formation of adjacent 90° domains (2T state)leadsto a larger value of eI3/eo ("'15000) in the same temperature range. An opposite effect is observed below 300K and eI3/eOalong [10Ï] is strongly reduced 1. Introduction The ultrahigh piezoelectricity of single crystals Pb[(Znl/3Nb2/3)O.91 Tio.O9]O3 (PZN-90/0PT) close to the morphotropic phase boundary (MPB) has been reported.I-3) The material undergoes two successive phase transitions during a zero-field-heating-after-field-cooling fUn (ZFHaFC)2) (i) from cubic m3m to tetragonal 4 mm near 451 K and (ii) from tetragonal to rhombohedral 3m near 341 K. Furthermore, Fujishiro et al.,4) using a (Ill) crystal plate under a polarizing microscope at the spontaneous state, observed a lower symmetry phase (monoclinic or triclinic) at the phase boundary between the tetragonal and rhombohe- dral phases. Fu et Cohen5) reported that the high piezo- electric response in the rhombohedral composition PZN-PT close to the MPB is due to the polarization rotation, between the rhombohedral and tetragonal phases via the monoclinic phase, during poling under an electric field applied along the pseudocubic [001] direction. Later Noheda et al.6) showed that in PZN-80/0PT the spontaneous rhombohedral phase is irreversibly transformed into the monoclinic phase during an electric field increase and the crystal comprises four domain variants corresponding to a macroscopic 4 mm symmetry. Recently, Cox et al.7) showed that the phase of PZN-90/0PT (grounding of a poled crystal) is orthorhombic. ln this paper, we report new results for the domain structures and phases of PZN-90/0PT single crystal~ poled along the two pseudocubic directions [001] and [101]. 2. Experimental PZN-90/0PT single crystals were grown by the self flux method using a PbO flUX.l,2.8-10) The flux and thePZN-PT raw materials were mixed at a PZN-90/0PT: flux ratio of 45/ 55 (mol%). A total amount of 550 g of materials was placed in a 133cm3 platinum crucible. The crucible was covered with a lid after two pre-melts at 1173 K for 2 h and then placed in a 346 cm3 Al2O3 crucible. The A1203 crucible was covered with a lid, to prevent bath lead evaporation and damage to the electric furnace. The crucible was then placed in a computer-controlled electric furnace. The temperature was increased to 1463 K and maintained there for 2h. It was reduced to 1173 K at 1 K/h. The sile of the largest as-grown "E-mail address: [email protected] tE-mail address: [email protected] 3846

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Jpn. J. Appl. Phys. Vol. 41 (2002) pp. 3846-3850

Part 1, No. 6A, June 2002cg2002 The Japan Society of Applied Physics

Domain Structures in Monoclinic Pb[(Znl/3Nb2/3)O.91Tio.09]O3 Poled Single CrystalsAlexandra-Evelyne RENAULTl,2, Hichem DAMMAKl*, Gilbert CALVARINl, Mai PHAM THI2t and Philippe GAUCHER21 Laboratoire Structures, Propriétés et Modélisation des Solides UMR 8580 CNRS, Ecole Centrale de Paris, 92295 Châtenay-Malabry, France

2THALES RESEARCH & TECHNOWGY FRANCE, 91404 Orsay Cedex, France

(Received January 7, 2002; accepted for publication March 12,2002)

A tetragonal (T) ++ monoclinic (M) phase transition characterized by a wide thermal hysteresis is observed inPb(Znl/3Nb2/3)O3-PbTiO3 (PZN-PT) single crystals close to the morphotropic composition PZN-9%PT. The domainstructure of crystal s, determined by X-ray diffraction and optical observations, is dependent on the poling crystallographicdirection. A monoclinic quasi-single domain structure is obtained by poling along the pseudocubic [101] direction whereas anunexpected monoclinic multidomain state with macroscopic 2mm symmetry cao be obtained for [001] poled crystals. Finallyit is shown that the largest piezoelectric response corresponds to the monoclinic multidomain state of [001] poled

crystals. [DOI: 10.1143/JJAP.41.3846]

KEYWORDS: PZN-9%PT single crystal, X-ray diffraction, monoclinic phase, piezoelectricity, domain engineering

crystal was approximate1y 10 x 10 x 8 rnrn3. Crysta1s werecut and po1ished, wi~h orientations [!00]/J010]/[001] (A andA'), [101]/[010]/[101] (B) and [112]/[110]/[111] (C). Thesize of single crysta1s were 2.6 x 2.6 x 1.8 (A), 1.7 x 1.7 x3.6 (A'), 1.6 x 2.9 x 1.6 (B) and 4.2 x 1.9 x 0.9 (C) mm3.Thin films of Cr/Au e1ectrodes (rv 1300 A) were sputtered onthe (001), (10Ï) or (Ill) faces. The homogeneity of thesamp1es was contro11ed by die1ectric susceptibi1ity measure-ments as a fonction of temperature using a LF impedanceanalyzer (HP-4192A). The Curie temperature Tc measuredduring the zero-fie1d-coo1ing runs (ZFC) was equa1 to449 ::1:: 0.5 K. Samp1es were then po1ed either under a dcfield at room temperature (RT) or during field coo1ing (FC).The piezoe1ectric properties were determined according tothe IRE standard methods. X-Tay diffraction experimentswere performed on a high-accuracy two-axes diffractometerusing Cu-K,B monochromatic radiation issued from a Rigakurotating anode (RU300, 18 kW). Single crystals were fixedon a coppeT samp1e ho1der mounted on a HUBERgoniometric head. ln the Bragg-Brentano geometry, thediffraction angles were measured with a precision re1ative1ybetter than 0.002° (2e). Two-dimensional maps. of thediffracted intensity were a1so constructed by rotating step bystep the crystal around the w-axis. Such 2(}-W mappingsal10wed disc10sure and characterization of the domainstructure of crysta1s.

3. Results3.1 Dielectric properties

Figure l(a) shows the temperature dependence of thepiezoelect~c permittivity eI3/eO along [001] for crystal A,along [101] for crystal B and along [111] for crystal C, at10kHz and for a 100kV/m applied field in FC. For crystalsA and B, two anomalies are observed at 451 K and 300 K,corresponding respectively to the cubic (C) -+ tetragonal (T)and to the tetragonal (T) to monoclinic6) (M) (or orthor-hombic7) (0)) phase transitions. The low value of eI3/eO

("'1800) along [001] in the 300-450K temperature range isdue to the formation of a tetragonal single domain under thedc bias field. On the other hand, when the electric field isapplied along [101], the formation of adjacent 90° domains(2T state) leads to a larger value of eI3/eo ("'15000) in thesame temperature range. An opposite effect is observedbelow 300K and eI3/eO along [10Ï] is strongly reduced

1. Introduction

The ultrahigh piezoelectricity of single crystalsPb[(Znl/3Nb2/3)O.91 Tio.O9]O3 (PZN-90/0PT) close to themorphotropic phase boundary (MPB) has been reported.I-3)The material undergoes two successive phase transitionsduring a zero-field-heating-after-field-cooling fUn(ZFHaFC)2) (i) from cubic m3m to tetragonal 4 mm near451 K and (ii) from tetragonal to rhombohedral 3m near341 K. Furthermore, Fujishiro et al.,4) using a (Ill) crystalplate under a polarizing microscope at the spontaneous state,observed a lower symmetry phase (monoclinic or triclinic) atthe phase boundary between the tetragonal and rhombohe-dral phases. Fu et Cohen5) reported that the high piezo-electric response in the rhombohedral composition PZN-PTclose to the MPB is due to the polarization rotation, betweenthe rhombohedral and tetragonal phases via the monoclinicphase, during poling under an electric field applied along thepseudocubic [001] direction. Later Noheda et al.6) showedthat in PZN-80/0PT the spontaneous rhombohedral phase isirreversibly transformed into the monoclinic phase during anelectric field increase and the crystal comprises four domainvariants corresponding to a macroscopic 4 mm symmetry.Recently, Cox et al.7) showed that the phase of PZN-90/0PT(grounding of a poled crystal) is orthorhombic.

ln this paper, we report new results for the domainstructures and phases of PZN-90/0PT single crystal~ poledalong the two pseudocubic directions [001] and [101].

2. Experimental

PZN-90/0PT single crystals were grown by the self fluxmethod using a PbO flUX.l,2.8-10) The flux and thePZN-PTraw materials were mixed at a PZN-90/0PT: flux ratio of 45/55 (mol%). A total amount of 550 g of materials was placedin a 133 cm3 platinum crucible. The crucible was coveredwith a lid after two pre-melts at 1173 K for 2 h and thenplaced in a 346 cm3 Al2O3 crucible. The A1203 crucible wascovered with a lid, to prevent bath lead evaporation anddamage to the electric furnace. The crucible was then placedin a computer-controlled electric furnace. The temperaturewas increased to 1463 K and maintained there for 2h. It wasreduced to 1173 K at 1 K/h. The sile of the largest as-grown

"E-mail address: [email protected] address: [email protected]

3846

A.-E. RENAULT et al. 3847

(a) (001) planePig. 1. Temperature dependence of piezoelectric permittivity 81/80

measured at 10kHz in a PC process (E = lOOkV/m) for [001], [tOi]

and [Ill] poling directions.

showing that a "single domain crystal" is obtained, thecomponent of ils polar axis is close to the [lOi] direction.

When the electric field is applied along [Ill], the largevalues of SI3/S0 measured at aIl temperatures show that thecrystal remains in a multidomain state. ln fact, SI3/S0 valuesare equal to those measured along [lOi] in the 2T state (i.e.,300-450 K temperature range) and equal to those measuredalong [001] in the 200-300 K temperature range. ln thefollowing, we show that at room temperature the domainsymmetry is monoclinic (M) for both [001] and [lOi] polingdirections.

(b) (100) plane

Crystal B

(c) (101) plane

Fig. 2. Optical observations of domains in crystal A: (a) (001) plane, (b)(100) plane, and in crystal B: (IOÏ) plane.

am = 4.0635(4),

hm = 4.0290(4),

Cm::; 4.0674(4) A

and

f3 = 90.17(2)°

A different monoclinic domain state (four-domain state,4M) was also obtained on another crystal A' (similar tocrystal A). Figure 3(c) shows that the (303) diffraction peak,recorded from the crystal A' oriented [010] Il (IJ-axis, is a

3.2 Monoclinic domains in [001] poled crystalsOptical observations of crystal A poled along [001] show

bands parallel to [010] when light is reflected on (001) or(100) face [Figs. 2(a) and 2(b)] and a dense striated aspectalong [001] when light is transmitted along [010]. Theseobservations indicate that the domain arrangements along[100] and [010] seem to be different. On the other band, the(004), (040) and (400) diffraction peaks, respectivelyrecorded on the three faces of crystal A, are unique [Fig.3(a)] and correspond to three different reticular distances. A2(}-(1) mapping, carried out in the (a*, c*) reciprocal planearound (400), shows two maxima centered at the Saille 2fJ[Fig. 3(b)]. A similar peak splitting was also observed in themapping carried out around (004). The value of splittingL\.w = 0.34° is directly correlated to the angle between

adjacent domains. The optical observations as weIl as the X-ray records indicate that crystal A comprises two families ofmonoclinic domains (2M). The orientation relationships(OR) between the ml and m2 families are shown as follows:

(1): [OOI]ml Il [001]m2 and (OIO)ml Ir (OÏO)m2, for the (001)face [Fig. 5(a)].

(II): [IOO]ml Il [ÏOO]m2 and (OIO)ml Il (OÏO)m2, for the (100)face [Fig. 5(b)].

These two ORs are very similar and they correspondprobably to two types of local relaxation inside the crystal inorder to minimize the elastic and electric energies of the

poled crystal.The lattice parameters of the monoclinic cell, calculated

from the experimental (2fJ) values of (400), (040), (004) andwith .B = 90° + L\.w/2, are

A.-E. RENAULT et al.

86 86.5 8728

87.5 88

also bands parallel to [010] when light is reftected on the(lOÏ) face [Fig. 2(c)]. On the other hand, 2(}--(JJ m~ppingscarried out in the (a*, c*) reciprocal plane, around (303) [Fig.4(a)], (005) [Fig. 4(b)] and (304) present two maxima. Thetwo components of (303), which are separated by an angle ofabout 0.036° in CV, have the same 2(}max (i.e., the samereticular distance) [Fig. 4(a)] whereas the two components of(005) have different reticular distances [Figs. 4(b) and 4(d)].

The optical observations and the peak splittings on X-Taymappings suggest that crystal B comprises two domainfamilies. This polydomain state is not consistent with anorthorhombic symmetry; indeed, in this symmetry, the pol~axis is very close to the pseudocubic direction [101]involving to the formation of a single domain state. On theother hand, with a monoclinic symmetry (i.e., a and c aredifferent), two domain families ml and m2 are possible.From a domain to another, am and Cm are exchanged and the[lOl]m direction is rotated by about 0.036° [Fig. 5(d)]. TheOR between the two monoclinic domains is shawn asfollows(III): [lOÏ]ml Il [10Ï]m2 and (OlO)ml Il (OÏO)m2.The differences between the reticular distances of (005) and(500) as weIl as the (303) peak splitting(ôcv = 0.036° = 6.3 x 10-4 rad) are quite consistent withthe OR: [lOÏ]ml Il [10Ï]m2. Indeed, the angle calculatedbetween the planes (303)ml and (303)m2 is approximatelyll)equal to

.--1/1

06.1

'c=

.c"-ta

't;'lnc~06.1C

am = 4.0617(1) A,

hm = 4.027(2) A,

Cm = 4.0628(1) A

and

.8 = 90.19(2)'

The values of am and Cm are very close, so a 2-foldorthorhombic cell was also considered. A good fit (error lessthan 5 x 10-4) was also obtained with

ao = 5.754(1),

ho = 4.027(2)

Fig. 3. X-Tay diffraction patterns for crystals A and A' poled along [001]:(a) {400}M diffraction peaks recorded on three faces of crystal A, (b)2O-<ù mapping in the (a*, c*) reciprocal plane carried out around the (400)reflection for crystal A, (c) {303} diffraction peaks recorded from crystalA (solid line) and from crystal A' (dotted line).

triplet. ~nder the SaIne diffraction conditions, one singlepeak (303) was obtained for crystal A (2M state). A secondpeak, (033) or (033), corresponds to a second recordingcarried Ol:tt from the SaIne crystal oriented [100] Il w-axis.Therefore, the components of the triplet of crystal A' can beindexed, using th~ monoclinic cell parameters determined oncrystal A, as (303)ml, (303)m2 and (033)m3.

andCo = 5.736(1) A

As expected, the pseudocubic parameter ! x ja~ =4.062(1) A has a value intermediate between am and Cm.

4. Discussion and Conclusions

PZN-9%PT single crystals, poled under a low electricfield (E = IOOkV/m), are monoclinic at room temperature.3.3 Monoclinic quasi-single domain in [101] poled_crystal

Optical observations of crystal B poled along [lOI] show

3849Jpn. J. Appl. Phys. Vol. 41 (2002) Pt. No.6A A.-E. RENAULT et al.

<r>N

(a) (b)

[10-1]~

i"ë=

0,2,-5 .e:ca

.,.,~

5~,O ~co ., e

~~ ., . 8)

;

.8> .,

$-0) 26

(d)(c)

Fig. 4. X-ray diffraction data from crystal B poled along [lOi]: (a) and (b) 2O--<ù mappings in the (a*, CO) reciprocal plane carried outaround the (303) and (005) reflections, respectively, (c) (a*, CO) reciprocal plane showing the superposition of (hOÎ)ml and (IOh)m2reflections resulting from monoclinic domains ml and m2 tbat have the [lOi] direction in common, (d) pattern showing tbat (005)Mand (500)M peaks have different reticular distances.

PZN-8%PT. Since the electromechanical and dielectricproperties depend on the macroscopic symmetry of thecrystal, in the 4M configuration the transverse directions:[100] and [010] are equivalent. On the other hand, the 2Mconfiguration (macroscopic 2 mm symmetry) is unexpectedbecause it leads to two nonequivalent transverse directions:[100] and [010], this macroscopic anisotropy involves thatthe d31 and d32 constants are not equal. Therefore, to obtain amaximal piezoelectric response in the transverse mode thelongitudinal wave propagation should be parallel to thevector am contributing to the polar vector, but not to hm.

The piezoelectric properties of crystal A' were measuredas a function of temperature, apart from the M # T phasetransition, in order to relate them to the symmetry of thephase and to the domain configuration. Figure 6(a) showsthat the M # T transition is characterized by a widehysteresis when the temperature is cycled between 280 Kand 360 K. An abrupt change of the piezoelectric permittiv-ity occurs at temperatures of the M -+ T and T -+ Mtransitions. Furthermore, Fig. 6(b) shows that for [001] poledcrystals the piezoelectric coefficient d33 and the electro-

The monoclinic symmetry was confirmed by the 28-œmappings which allow us to distinguish between domains inthe crystal. However, optical observations, dielectric andhigh-resolution X-ray measurements show that poledcrystals can adopt different monoclinic domain structuresaccording to the direction of the poling field. A monoclinicquasi-single domain (lM) was obtained for ~e first lime bypoling the crystal along the pseudocubic [101] direction. Thecrystal is flot strictly single domain because the polar axis ofthe monoclinic phase makes an angle of a few degrees withthe poling [101] direction. When crystal is poled along[001], a more complex monoclinic domain state is obtained,because the polar axis makes an angle of about 45° with thepoling direction. Two different domain states were obtained:a two-domain state (2M) with crystal A and a four-do mainstate (4M) with crystal A'. The existence of two differentstates could be related to the different domain configurationsfor crystals A and A' before poling.

The 4M configuration (macroscopic 4 mm symmetry) ofmonoclinic domains is the most common configuration; thisconfiguration was recently evidenced by Noheda et al.6) in

14,0,-3 1 3,0,-4~ 1 8)

3,111,_3., ~ .,

3850 Jpn. J. Appl. Phys. Vol. 41 (2002) Pt. l, No. 6A A.-E. RENAULT et al.

1 . .C ~ ,

1000280 300 360320 340

T (K)

(a)

0t~CI

.="'ë.~0V

jijv

'ëlU

.cV<IIE0'-t<II

W

Ë 11[001]

/1~ I

, -c, ml,

am ~~[101.1_- 0-

-;:-

[lOI],

Ë 1I[10-lJ

""', i~ ij C m2" ;" '

,,"amI"

-=~"0.036°

(Crystal B)(Crystal A')

Fig. 6. Temperature dependence of (a) piezoelectric permittivity eI3/eo.(b) piezoelectric constant d33 and electromechanical coupling factor k33.for crystal A' poled along [001].

Cd)(c)

Fig. 5. Schematic representation of orientation relationships betweencrystallographic axes of monoclinic domains for crystal A: (a) and (b),crystal A': (c) and crystal B: (d).

mechanical coupling factor k33 are larger in the monoclinicmultidomain state than in the tetragonal single-domain state.These results confirm unambiguously that the monoclinicphase and its multidomain structures are responsible for theexceptional piezoelectric response in PZN-9%PT. Such abehavior was already reported in KNbO3.12)

AcknowledgmentsThe authors ~are grateful to M. Gramond, J. Chevreul and

B. Fraisse for helping during X-Tay diffraction experimentsand electrical measurements.

1) J. Kuwata, K. Uchino and S. Nomura: Ferroelectrics 37 (1981) 579.2) J. Kuwata, K. Uchino and S. Nomura: Jpn. J. Appl. Phys. 21 (1982)

1298.3) S. E. Park and T. R. Shrout: J. App1. Phys. 82 (1997) 1804.4) K. Fujishiro, R. V1okh, Y. Uesu, Y. Yamada, J. M. Kiat, B. Dkhi1 and

Y. Yamashita: Jpn. J. App1. Phys. 37 (1998) 5246.5) H. Fu and R. E. Cohen: Nature (London) 403 (2000) 281.6) B. Noheda, D. E. Cox, G. Shirane, S. E. Park, L. E. Park, L. E. Cross

and Z. Zhong: Phys. Rev. Lett. 86 (2001) 3891.7) D. E. Cox, B. Noheda, G. Shirane, Y. Uesu, K. Fujishiro and Y.

Yamada: App1. Phys. Lett. 79 (2001) 400.8) F. J. Kumar, L. C. Lim, C. Chi1ong and M. J. Tan: J. Cryst. Growth

216 (2000) 311.9) T. Kobayashi, S. Shimanuki, S. Saitoh and Y. Yamashita: Jpn. J. App1.

Phys. 36 (1997) 6035.10) S. Gentil, G. Robert, N. Setter, P. Tissot and J. P. Rivera: Jpn. J. Appl.

Phys. 39 (2000) 2732.Il) The angle between (10ï)ml and (10ï)m2 is twice that between [10ï]m

and (10ï)m and its expression is simplified by using sin(fJ) ~ 1 andc~ - a~ ~ 2am{cm - am).

12) S. Wada, A. Seike and T. Tsurumi: Jpn. J. Appl. Phys. 40 (2001) 5690.