www.cscleansystems.com

DISCOVER THE ADVANTAGES

Exhaust Gas Treatment for Semiconductor Industry

Safety and Environment...Our highest priority. We are specialised in the safe treatment of process gases using Dry Bed Chemisorption. Our unique CLEANSORB®

technology converts toxic gases into stable inorganic compounds without consuming energy, water, fuel, or other valuable resources.

Research & Development...At the forefront of technology.Professional product management and modern R&D tools accelerate development processes. CS CLEAN SYSTEMS is more than a supplier to the semiconductor industry: we are a competent partner offering individual solutions tailored to customer needs.

Best prepared for the future...Semiconductor industry’s new process gases and increasing environmental awareness require further development of a product range.

Increasing usage of UHP-chemicals and their toxicity and reactivity require devices which guarantee high precision and fulfil different needs. We have your solution.

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History

Headquarters:CS CLEAN SYSTEMS AGFraunhoferstrasse 485737 IsmaningTelephone: +49 (89) 96 24 00-0Fax: +49 (89) 96 24 00-122Email: welcome@csclean.comwww.cscleansystems.com

2010 First CLEANSORB® TOWER installed for Solar H2S/H2Se abatement substituting existing water scrubber solution

2009 Include Novapure and Novasafe products from AMAT to CS CLEAN SYSTEMS AG portfolio

2008 Market introduction of microwave plasma conversion system PCS PIRANHA

2007 Product redesign CLEANSORB® systems: CLEANSORB® BASE LINE

2006 CLEANSORB® modules: new column design

2004 Launch of the new product line TRICHEM delivery products

1999 Change of company form to a private stock corporation

1994 Moved to new premises in Ismaning (near Munich)

1991 Launch of CLEANSORB® Product line

1990 Launch of CLEAN-PROTECT point of extract purifier and CLEANVENT point of vent purifier

1986 Foundation of CS Halbleiter- und Solartechnologie GmbH, Munich by Dr. Christoph Scholz

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Position in the value chain of Semiconductor Indust ries

TRICHEM Delivery SystemAdvanced lquid UHPprecursor supply

CLEAN-PROTECTRemoval of toxic gasesduring emergency releasefrom gas cabinets

CLEANSORB ®

Dry bed chemisorption technologypoint-of-exhaust purificationfor process waste gas

CLEANVENTRemoval of hazardousgases during purging ofvent lines

PCS PIRANHAPlasma conversionsystem removal of perfluorinatedcompounds

CLEANSORB® Systems…point-of-exhaust purifiers absorb toxic process gases at ambient temperature.

CLEAN-PROTECT Systems…absorb in the event of an emergency contaminated air from supply cabinet extracts.

LDP (Liquid Delivery Products)…TCD TRICHEM Delivery Systems guarantee a safe and consistent supply of UHP liquid precursor to a CVD or ALD tool.

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Technical Equipment

Research and Development is a particular focus for CSAG as a supplier of the semiconductor industry. For this purpose CS CLEAN SYSTEMS AG created the environment required. State-of-the-art, air-conditioned laboratories provide the basis for intensive and creative research and development:

– central, ultra-pure, particle-free gas supply

– ultra-pure DI water supply system

– application laboratory, where all gases from semiconductor applications can be tested

– special research reactors

– gas chromatograph

– QMS mass spectrometer

– FTIR-Infrared spectrometer – leak-detectors.

Absorber columns with used granulates are disposed, drained, cleaned and refilled in a special laboratory for the next mission.

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Engineering – Production – Shipping

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Worldwide Refill Service

In a special treatment centre the modules with expended absorber granulates are evacuated and according to the semiconductor process refilled with special granulates.

Prior to emptying, returned modules are connected to a special purging system.

Emptying of the module. One column of CLEANSORB granulate typically binds several thousand litres of hazardous gas into a safe, solid by-products.

Precision cleaning of the sealing surfaces.

Permanent quality assurance: leak-testing

Refill of modules

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EGT Products

CLEANSORB ® Series

Dry-Bed Chemisoption at Ambient Temperature

A wide range of CLEANSORB model sizes are available to meet the needs of all our customers- from small-scale university researchers to round-the-clock wafer fabrication.

The CLEANSORB ® waste gas treatment system removes hazardous process gases on the basis of chemical conversion (chemisorption) to stable salts at ambient temperature. No external heating, moisturisation, or other facilities are required for operation. Hence the CLEANSORB ® system is fully passive, and is permanently on stand-by, even in the event of a power- or other facilities failure.

CLEANSORB® Technology is based on dry bed chemisorption converting hazardous gas species into stable inorganic solids by employing CLEANSORB® granulates. It is the most elegant and environmentally-friendly exhaust gas purification technology available.

CS CLEAN SYSTEMS has over 20 years experience in dry bed chemisorptiontechnology and offers optimised solutions for all process applications. Our granulates are subject to permanent quality control and ongoing R&D work to keep pace with the ever-changing chemistries deployed in semiconductor manufacturing.

CLEANSORB® modules are patented, UN-approved and reusable transport containers.

CLEANSORB ® customers enjoy a comprehensive maintenance service which incorporates a unique disposal/ reprocessing function for the spent absorber material. Accordingly, the process user need not concern himself to an unnecessary degree with the handling of hazardous process by-products, and is thereby additionally relieved of a considerable bureaucratic burden.

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CLEAN-PROTECT

This product line was specially developed to absorb large quantities of toxic, corrosive or pyrophoric gases during an emergency gas release incident. CLEAN-PROTECT can be installed as active or passive emergency release absorber.

Active systems are installed with an automatic valve bypass line. When a high hazardous gas concentration is detected by a gas sensor in any of the connected gas cabinets, the CLEAN-PROTECT controller automatically closes the bypass valve and opens the isolation valve to divert the contaminated exhaust through the CLEANSORB ® absorber bed where it is detoxified.

Passive systems are installed with the gas cabinet extract air flowing continuosly through the chemisorbent bed.

This safety installation guards against uncontrolled escape of those gases from up to ten gas cabinets.

EGT Products

CLEANVENTThe CLEANVENT cartridge was developed for installation within gas cabinets or supply panels for speciality gases. During cylinder change speciality gases have to be purged. Such purge gases are evacuated through the absorber bed CLEANSORB®.

PCS PIRANHA 2000 Plasma Conversion SystemThe semiconductor industry has committed itself to reduce its emissions of global warming perfluorinated compounds (PFCs) by as much as 90% per process step by 2010. The PCS PIRANHA 2000 foreline plasma conversion systems are designed to destroy PFC’slike CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch processes and CVD chamber clean. The PCS PIRANHA 2000 is installed in the vacuum foreline of the etch chamber for maximum efficiency. The system is particularly eco-friendly due to its low energy consumption corresponding to a reduced CO2 output. The reactive by-products are best removed using a CLEANSORB® dry bed chemisorber. (Photo: PCS PIRANHA 2000 Microwave ApplicatorMWA2000 with High-Voltage Supply HVS2000 and Control & Interface Box)

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Latest-generation materials required for deposition of low-k and high-k dielectrics, barrier layers and metallization, generally require ultra-high purity (UHP) precursors in liquid form. The TRICHEM product line was introduced by CS CLEAN SYSTEMS AG to meet the needs of tomorrow’s materials. The function of the TRICHEM Delivery System is to assure a safe and consistent supply of UHP liquid precursor to a CVD (Chemical Vapour Deposition) or ALD (Atomic Layer Deposition) tool, enabling it to stay up-and-running for prolonged production cycles without interruption.

The key elements which guarantee safety, reliability and ease of handling have been specially developed for UHP liquids and do not rely on designs inherited from conventional gas delivery systems.

LDP Products for Supply of Liquid Chemicals

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LDP Products for Supply of Liquid Chemicals

TRICHEM Delivery SystemsOne Design – two applications

TRICHEM Delivery Systems (TCD) guarantee a safe and fully automated supply of CVD- or ALD tools with UHP liquid chemicals. TCD chemical dispensing systems are available as either a single (photo left.:TCD040SC) or dual (photo right:TCD020DC) canister cabinet. TCD cabinets are optimised for use with the TRICHEM TCC canisters but can also be run with all proprietary canister types used by major vendors of precursor materials. Depending on the application the system can be configured:

Constant pressure supply for direct liquid injection. The chemical is conducted with pressure to a buffer-tank, wherefrom it is delivered to the tool with highest precision or:

automatic batch-fill mode for bubbler replenishment. Up to 12 “On-Board Bubbler” can be served.

TRICHEM Canister TCC-SeriesPatented UHP-Canister for CVD- and ALD-precursors.The electro-polished stainless steel canister incorporates three separate vessels into one single canister, the inner one incorporates a UHP chemical vessel, the second a solvent purge reservoir, and the outer a waste tank with an annular adsorbent layer. The 3-in-1 concept of the “S-models” (S=solvent) eliminates the need for separate waste container and UHP solvent supply system. Therefore the canister offers considerable footprint savings and, the 3-wall design a higher level of safety.

TRICHEM Canisters contain integrated solvent purging mechanism with minimal death-volume. The UN-approved canisters are authorised for transport of hazardous chemical goods and available in different sizes.

T-Models (T=thermalised) are a variant of TRICHEM canisters. The UHP-chemical vessel is fully immersed in a thermostatic fluid which is fed from an external thermostat through a pair of quick couplings. The fluid can be drained off prior to canister shipment.

The thermal insulating material made of the light-weight chemisorbentvermiculite and respectively the chemisorbent inside the third outer vessel retain the double-wall design with integrated “binder”. Thereby the canisters are up to highest safety standards.

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System-Installations

CLEANSORB ® Systems

TCD020DC TCD040SC

TRICHEM Delivery Systems

Semiconductor Manufacturer, Asia Research Centre, E urope

300 mm FAB, USA ALD-Tool Manufacturer, Asia

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International Partner Network

Detailed contact information: www.cscleansystems.com