digital production industry 4.0 challenges in · pdf fileminiaturised imaging systems –...

© Fraunhofer IOF

Andreas Tünnermann Fraunhofer Institute for Applied Optics and Precision Engineering IOF Friedrich-Schiller-Universität Jena, Institute of Applied Physics

Hamamatsu Photonics 2016

SOLUTIONS WITH LIGHT DIGITAL PRODUCTION INDUSTRY 4.0 CHALLENGES IN MEN-MACHINE-INTERACTION

Seite 2

energy environment

healthcare

mobility

communication security

Optics and photonics: key technology and enabler Solutions with light

Seite 3

Branchenreport 2013 / Optech Consulting, Studie Photonik 2013

Key Figures: Photonics World Market (2011)

Seite 4


Key Figures: Photonics World Market (2020) Growth rate 6.5 %

Seite 6

Photonics in Europe World market shares - eminent position in production technology


Seite 7

Jena – the city of optics one of the most dynamic areas in Germany*

* Prognos 2015

Seite 8

Jena – the city of optics Example for collaboration of industry and university

Friedrich Schiller University (1558)

1866 Carl Zeiß / Ernst Abbe

1884 Otto Schott

Seite 9

Optics Region Economic data in the field of optical technologies

Enterprises

Turnover

R&D rate

Export rate

Employees of which in research institutes

Turnover development since 2008

167

~ 3,0 B€

13%

66 %

14,400 1,000

+ 6 % p.a.

© OptoNet e.V. 2015

Seite 10

Center of exellence in optics and photonics FhG IOF/ FSU IAP

350 employees + 150 students

budget: ≈ 45 mio €

Seite 11

Optics and photonics: markets and growth rates German world market shares in the photonics segments


Seite 12

Fraunhofer IOF / FSU IAP Markets

Information Mobility Production

Space technology Security and defense Science and research

© Fraunhofer IOF

ENERGY AND ENVIRONMENT

solutions with light ...

. . . ensure energy efficiency and

guarantee sustainability.

Seite 14

Photon management of solar cells and LED structured silicon surfaces with R < 1% @ 300 nm – 1200 nm

luminous silicon

Seite 15

courtesy of Rapid Eye AG

Optical systems for environmental monitoring

Seite 16

High power fiber lasers for production technology

© Fraunhofer IOF

INFORMATION AND SAFETY

solutions with light ... . . . optimize information flows and generate safety.

Seite 18

Micro-optical imaging system

Patent DE 10 2009 049 387.5

Multiapertur-camera-optics on wafer level (ultra-slim camera)

Seite 19

Collector mirrors for EUV lithography

R > 65 % = (13.5 ± 0.03) nm

0,0%

10,0%

20,0%

30,0%

40,0%

50,0%

60,0%

70,0%

12,7 13,1 13,5 13,9

Wavelength, nm

Ref

lect

ivit

y, %

r = 60 mm

r = 70 mm

r = 80 mm

r = 90 mm

r = 100 mm

r = 110 mm

r = 120 mm

r = 130 mm

r = 140 mm

r = 150 mm

r = 160 mm

r = 170 mm

r = 180 mm

r = 190 mm

r = 200 mm

r = 210 mm

r = 220 mm

r = 230 mm

r = 240 mm

r = 250 mm

r = 260 mm

r = 270 mm

r = 280 mm

r = 290 mm

r = 300 mm

r = 310 mm

r = 315 mm

radius: > 660 mm weight: > 40 kg

Seite 20

courtesy of Rapid Eye AG

Biometric sensors

Seite 21

The next big thing…

Seite 22

Man. Machine. Environment. FUTURE

Seite 23

interpersonal communication is based 80% on v isual sense

Man-man-interaction

Source: Blick.ch

Seite 24

Man-man-interaction

Seite 25

gestures, facial expressions, body language are basic indicators

record spatial information, process, interpret

cognitive skills enable fast and flexible decisions

Man-man-interaction

Source: spox.com

Seite 26

Man-machine-environment-interaction

Seite 27

unnatural use of input and output media

limited interaction in well-defined environmental one-to-onescenarios

Man-machine-environment-interaction

Seite 28

Challenge man-machine-environment-interaction

Seite 29

Production – manufacturing and engineering

Man-machine-interaction: vision for production

Seite 30


Production – manufacturing and engineering

Seite 31

optical solutions for ...

reintegration of people in the production

highly automated and flexible production processes

inline quality control for GREEN PRODUCTION

Bildquelle: Fraunhofer IWU


Seite 32

Mobility – spatial recognition

for autonomous mobility

Man-machine-interaction: vision for mobility

Seite 33

Mobility – spatial recognition for autonomous mobility


Seite 34

optical solutions for ...

secure, autonomous and efficient mobility

intelligent control of driver assistance systems

interaction of vehicles and transportation systems

Bildquelle: Continental AG


Source: Continental AG

Seite 35

small and medium-size enterprises

globally active leader

excellent academic institutions

Interdisciplinary consortium

Seite 36

“The older generation of employees has to be supported by

mobile, context-dependend assistance systems and has to be

assisted both physically and cognitively by novel service robots.“

Henning Kagermann, President of acatech

3Dsensation radically changes the interaction between man, machine and the environment in our living and working environments for the benefit of everybody.

3Dsensation turns machines into partners for mankind with the goal of a self-determined, mobile and safe life.

3Dsensation reintegrates people into the world of work, regardless of physical ability .

3Dsensation – Vision

Seite 38

intersectoral and interdisciplinary approach

Solutions for people

Seite 40

3D recording

detection of humans in complex scenarios

facial express ion and gesture recognition

Challenge: innovative 3D imaging systems

Seite 41

Camera technologies

from analogue to digital image recording

analogue

digital

roll-film

CCD CMOS

instantaneous availability + extreme miniturisation 1. revolution in image recording

Seite 42

life science

consumer electronics

security

automotive

machine vision

sensor systems

information tech.

medical imaging

requiements:

size

mass

costs (<< 2 €/MP)

Miniaturised imaging systems – market

Seite 43

3 Billion mobile camera systems in 2014

„Global and China CMOS Camera Module Industry Report 2014-15“, ResearchInChina

Miniaturised imaging systems – consumer market

Seite 44

Quelle: „2012-2020 CCM Revenue Forecast“, Yole Développement, August 2015

20 Billion US$ volume of sales

Miniaturised imaging systems – market

Seite 45

*

* Nutzerumfrage von Maybank

Smartphone – the camera system: „the main differentiator“.

Seite 46

Status in miniaturized camera systems

conventional

single piece production and assembly

injection molding/hot embossing for optical components

Seite 47

Scaling of camera optics

high angular resolution large information

capacity (number of transferable details)

large overall size high production costs

See: [1] A. Lohmann, Appl. Opt. 28, 4996-4998 (1989). [2] R. Völkel et. al., Microelectron. Eng. 67-68, 461–472 (2003).

small overall size low production

costs low angular

resolution reduced

information capacity

assumption: diffraction limited imaging

D=Np

aperture

image

L

FOV

scaling limits

noise, Abbe-Limit

tan2

DL

N > 1000 p > 1.7µm

L>2mm

Seite 48

The same old story…

Stand 2015:

cameras – quo vadis.

Seite 49

too small for regular movable single channel eyes

4 different, but rigid eye pairs

jumping spyder Salticidae

© Bell, Maddisson

e.g. vision system of jumping spyder

task-oriented eye types

front: small field of view and high

resolution

lateral: low resolution and large

field of view

function principle (top view)

Bio inspiration

Seite 50

Fruit fly drosophila

interommatidial angle: = D/R

acceptance angle: = [(d/f)2 + (/D)2]1/2

sensitivity: ~ d2/(F/#)2

scaling: 2 ~ 1/R

large field of view

small volume

small resolution

Menschenfliege © Kirschfeld

e.g. apposition eye – daylight insects

function principle

Bio inspiration

Seite 51

JJ

p

a

D

L

p

a

D

L

J J J J J J J J

microlens-array

micro-picture

pixel

substrate

general view

Technical realisation of the apposition eye

Seite 52

300µm 188µm 300µm 300µm

…but page1 news in scientific conferences

multi-aperture camera

„apposition eye camera“

110° FOV, distortion free

small field of view per aperture (0.8°)

low resolution (40 kPixel)

IOF 2006

The dawn of multi-aperture imaging (at IOF!)

Seite 53

cooperation of many channels

increases sensitivity

up-right images -> stitching possible

large field of view

moderate resolution (superposition)

eye of moth Tristifica

refractive superposition eye

Ommatidia of superposition eyes

Refractive Reflective

© Franceschini, Land

Bio Inspiration

Bio inspiration e.g. superposition/cluster eye – nocturnal insects

Seite 54

Xenos peckii

1,2) E. Buschbeck, B. Ehmer, R. Hoy, Science 286, 1178 (1999) 3) E. Buschbeck, Arthropod Structure & Development 34,

315–326 (2005)

many different eyes with different

viewing directions

fractions of the object on each part of

the retina (ommatidium)

image rotation and stitching in the

„brain“

scheme of Xenos peckii’s eye 1

2

3

Bio inspiration e.g. superposition eye – Xenos parasite

Seite 55

schematic view on an electronic cluster-eye

< 2

.0 m

m

basic working principle: array of tiny lenses

each channel transmits partial image of a different part of field of view

image processing to assemble final image from all partial images

-> electronic image stitching

A. Brückner et.al., Opt. Express 18 (24), 24379-24394 (2010)

Electronic cluster eye – operation principle

Seite 56

Advanced micro lens arrays

new microlens technology: freeform microlens segment arrays

standard micro lens array

chirped array

of ellipsoidal lenses

enhance resolution

increase optical fill-factor

Seite 57

Micro lens fabrication - reflow technique

UV - light

diameter 100µm

focal length 200µm

resist

photo mask

developed pattern

after melting / reflow

substrate

substrate

substrate

Courtesy of A. Schilling,

IMT

modeling of

the melting

Seite 58

substrate:

Quartz

cylinder/lens:

PBS glass

(doped quartz glass)

NAmin 0.35

ball lenses

Reflow lenses

Seite 59

Analogue lithography for continuous profiles

developed

resist

profile

substrate

resist

variable dose exposure

1 mm

Seite 60

Analogue lithography for micro lens arrays

h = 13 µm

100 µm x 100 µm

h= 20 µm

67 µm x 67 µm developed profile

substrate

resist

uniform illumination

gray tone mask

HEBS glass mask blank

variable dose e-beam writing

Seite 61

combined phase dislocation and

refractive lens

(diameter 330 µm, total height 35 µm, step

height 15 µm)

corrected profile

profile developed

pre form

Substrate

photoresist

gray tone mask

uniform illumination

Analogue lithography for phase redarder

Seite 62

Analogue lithography + binary lithography

resist coated pre form

substrate

e-beam extreme low numerical aperture

high depth of sharpness

Fresnel-lens on a refractive lens

(height 50 µm, diameter 500 µm)

1.5 µm period grating on a lens

Seite 63

Charakterisierung tactile und interferometrical characterization

single master

• UP-machining • Aluminium / NiP

data compilation & transfer

• surface description • alignment marks • yard structures

imprint tool

• UV transparent • polymer / epoxy-

based

array master

• Step & Repeat • multiple

imprint replication

optics modul

• mask aligner • replication &

stacking

pre-compensation

J. Dunkel, et. al.,Proc. SPIE 8763, p. 876330 (2013).

F. Wippermann, et. al., 18th Microoptics Conference (MOC’13), (2013).

Microlens fabrication technology

Seite 64

8“ master wafer with refractive freeform lenslet arrays double-sided replicated multi-aperture objective



Microlens Fabrication Technology

Seite 65

65

001-0

02-M

S-0

05_ch

an00

001-0

02-M

S-0

05_ch

an01

001-0

02-M

S-0

05_ch

an02

001-0

02-M

S-0

05_ch

an03

001-0

02-M

S-0

05_ch

an04

001-0

02-M

S-0

05_ch

an10

001-0

02-M

S-0

05_ch

an11

001-0

02-M

S-0

05_ch

an12

001-0

02-M

S-0

05_ch

an13

001-0

02-M

S-0

05_ch

an14

001-0

02-M

S-0

05_ch

an20

001-0

02-M

S-0

05_ch

an21

001-0

02-M

S-0

05_ch

an22

001-0

02-M

S-0

05_ch

an23

001-0

02-M

S-0

05_ch

an24

001-0

02-M

S-0

05_ch

an30

001-0

02-M

S-0

05_ch

an31

001-0

02-M

S-0

05_ch

an32

001-0

02-M

S-0

05_ch

an33

001-0

02-M

S-0

05_ch

an34

001-0

02-M

S-0

05_ch

an40

001-0

02-M

S-0

05_ch

an41

001-0

02-M

S-0

05_ch

an42

001-0

02-M

S-0

05_ch

an43

001-0

02-M

S-0

05_ch

an44

001-0

02-M

S-0

05_ch

an50

001-0

02-M

S-0

05_ch

an51

001-0

02-M

S-0

05_ch

an52

001-0

02-M

S-0

05_ch

an53

001-0

02-M

S-0

05_ch

an54

001-0

02-M

S-0

05_ch

an60

001-0

02-M

S-0

05_ch

an61

001-0

02-M

S-0

05_ch

an62

001-0

02-M

S-0

05_ch

an63

001-0

02-M

S-0

05_ch

an64

001-0

02-M

S-0

05_ch

an70

001-0

02-M

S-0

05_ch

an71

001-0

02-M

S-0

05_ch

an72

001-0

02-M

S-0

05_ch

an73

001-0

02-M

S-0

05_ch

an74

0

10

20

30

40

50

60

70

80

90

100

Fo

rma

bw

eic

hu

ng

[n

m] (r

ms)

8“ master wafer with refractive freeform lenslet

surface roughness ~ 8nm (RMS)

av. shape deviation ~ 52nm (RMS)

measured master properties

Advanced micro lens technology



Seite 66

Elektronisches Clusterauge: Prototypen Electronic cluster eye

Seite 67

… …

…

…

… …

…

…

image recording

image: sensor 2048 x 1536 Pixels

selection of image sections

correction of aberrations

pixel re-arrangement

reconstructed image 700 x 550 Pixels

each of the 17 x 13 image sections includes 39 x 39 Pixels

offset correction

Abbildungskonzepte \ Kamera Electronic cluster eye – image reconstruction

Seite 68

captured image of test target image to determine distortion

image captured outside the institute video captured with prototype

Test images

Seite 69

software-refocusing

Electronic cluster eye

Seite 70

map of depth


Seite 71

thin camera with new linear des ign


Seite 73 Quelle: www.bmw.de

insect-inspired projection

Seite 74

Fraunhofer IOF IAP – Hamamatsu Photonics Mutual fields of interest?

Seite 75

optics setup analogous to focused fly´s eye condenser buried slide array (object array)

projection distance determined by pitch difference between slide and proj. lens array

Light solutions Multi-aperture microprojector

Seite 76

Light solutions Array projection on freeform surfaces

Seite 77

depth of focus - new poss ibilites 3D lightfield shaping for front lights

Light solutions Car2human communication

Seite 78

Volkswagen AG

Light solutions Car2human communication

Seite 79

F-numberl: 1; FOV: 37° x 25°

CT-Aufnahme

17 mm

Asphäre Asphäre (Off-Axis)

Freiform (Zernike)

Asphäre

De

tek

tor

Monolith_150902_bsatz.zmxConfiguration 1 of 1

3D Layout

15.09.2015

X

Y

Z

21.5 mm

Light solutions Night vision

Seite 80

Light solutions Structured illumination

refractive illumination optics with micro-structured freeform individualized products

Seite 81

Light solutions man-machine interaction

3D-CGH – 3D-computer generated hologram

Seite 82

Light solutions Moth-eye structures for semiconductor materials

Seite 83

Light solutions Functional coatings

new anti-reflective coating reduces false lights and reflections

0

1

2

3

4

5

400 600 800 1000 1200 1400 1600

refl

ex

ion

[%

] wavelength [nm]

Seite 84

Solutions with light

digital production industry 4.0 challenges in · pdf fileminiaturised imaging systems –...

Documents