chapter 2 semiconductor materials and process chemicals
DESCRIPTION
Chapter 2 Semiconductor Materials and Process Chemicals. 半導體製程 材料科學與工程研究所 張翼 教授. Figure 2.1 Bohr atom model. Figure 2.2 Periodic table of elements. Figure 2.3 Atomic structures of hydrogen, lithium, and sodium. Figure 2.4 The three best electrical conductors. - PowerPoint PPT PresentationTRANSCRIPT
![Page 1: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/1.jpg)
Chapter 2Semiconductor Materials
and Process Chemicals
半導體製程材料科學與工程研究所張翼 教授
![Page 2: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/2.jpg)
Figure 2.1 Bohr atom model.
![Page 3: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/3.jpg)
Figure 2.2 Periodic table of elements.
![Page 4: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/4.jpg)
Figure 2.3 Atomic structures of hydrogen, lithium, and sodium.
![Page 5: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/5.jpg)
Figure 2.4 The three best electrical conductors.
![Page 6: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/6.jpg)
Figure 2.5 Resistance of rectangular bar.
![Page 7: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/7.jpg)
Figure 2.6 Semiconductor materials.
![Page 8: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/8.jpg)
Figure 2.7 Silicon resistivity versus doping (carrier) concentration. (After Thurber et al. Natl. Bur Standards Spec. Publ. 400-64, May 1981, tables 10 and 14.)
![Page 9: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/9.jpg)
Figure 2.8 N-type doping of silicon with arsenic.
![Page 10: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/10.jpg)
Figure 2.9 P-type doping of silicon with boron.
![Page 11: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/11.jpg)
Figure 2.10 Electron conduction in N-type semiconductor material.
![Page 12: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/12.jpg)
Figure 2.11 Hole conduction in P-type semiconductor material.
![Page 13: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/13.jpg)
Figure 2.12 Electrical classification of materials.
![Page 14: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/14.jpg)
Figure 2.13 Characteristics of doped semiconductors.
![Page 15: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/15.jpg)
Figure 2.14 Physical properties of semiconductor materials.
![Page 16: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/16.jpg)
Figure 2.15 Diagram of wafer molecule.
![Page 17: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/17.jpg)
Figure 2.16 Four states of nature.
![Page 18: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/18.jpg)
Figure 2.17 Temperature scales.
![Page 19: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/19.jpg)
Figure 2.18 Pressure vacuum measurement.
![Page 20: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/20.jpg)
Figure 2.19 Acid and base solutions.
![Page 21: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/21.jpg)
Figure 2.20 pH scale.
![Page 22: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/22.jpg)
Si (S) + 3HCl (g) → SiH Cl3 (e) + H2
SiO2 + C → Si + CO2 Purity Grade 98%
1500 - 2000℃
Si (S) + 3HCl (g) → SiH Cl3 (e) + H2
SiHCl3 + H2 → Si + 3HCl
Purity Grade 99.999999999%
![Page 23: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/23.jpg)
Silicon purification reactions
SiO2 + C → Si + CO2 Purity Grade 98% 1500 - 2000℃ Si (S) + 3HCl (g) → SiH Cl3 (g) + H2
SiHCl3 + H2 → Si + 3HCl Purity Grade 99.999999999%
![Page 24: Chapter 2 Semiconductor Materials and Process Chemicals](https://reader036.vdocuments.mx/reader036/viewer/2022081506/56813a64550346895da25c10/html5/thumbnails/24.jpg)
Wafer cutting and polishing from the ingot