atmospheric pressure plasma processing of...
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ATMOSPHERIC PRESSURE PLASMA PROCESSINGOF POLYPROPYLENE*
Rajesh Dorai 1 and Mark J. Kushner 2
University of Illinois1 Department of Chemical and Biomolecular Engineering, [email protected]
2 Department of Electrical and Computer Engineering, [email protected], IL 61801
http://uigelz.ece.uiuc.edu
November 2002
* Work supported by the 3M Company and the National Science Foundation (CTS99-74962)
University of IllinoisOptical and Discharge Physics
AGENDA
• Introduction to plasma surface modification of polymers
• Description of the model for gas phase and surface kinetics
• Processing of polypropylene in humid air plasmas
• Concluding remarks
RAJESH_AVS_02_02
University of IllinoisOptical and Discharge Physics
PLASMA SURFACE MODIFICATION OF POLYMERS
• Atmospheric pressure plasmas (typically coronas) are used for the ease of generation of gas-phase radicals which react with and modify the polymer surface.
RAJESH_AVS_02_03
• Polymers typically require surface activation to improve their wettingand adhesion properties.
University of IllinoisOptical and Discharge Physics
SURFACE ENERGY AND WETTABILITY OF POLYMERS
MJK_AUSTIN_RD_01
• Most polymers, due to their low surface energies, are hydrophobic.
• For good adhesion between a liquid and a polymer, the surfaceenergy of the polymer should exceed the surface tension of theliquid by ≈ 2-10 mN m-1.
0
10
20
30
40
50
60
PTFE
Poly
prop
ylen
e
Poly
ethy
lene
Poly
styr
ene
SUR
FAC
E EN
ERG
Y (m
N m
-1)
POLYMER0
10
20
30
40
50
60
Prin
ting
inks
UV
adhe
sive
s
Coa
tings
Wat
erba
sed
adhe
sive
s
UV
inks
Wat
erba
sed
inks
SUR
FAC
E TE
NSI
ON
(mN
m-1
)
LIQUID
University of IllinoisOptical and Discharge Physics
COMMERCIAL CORONA PLASMA EQUIPMENT
RAJESH_AVS_02_04
(Tantec Inc.)
University of IllinoisOptical and Discharge Physics
POLYMER TREATMENT APPARATUS
RAJESH_AVS_02_04A
HIGH-VOLTAGEPOWER SUPPLY
FEED ROLLGROUNDEDELECTRODE
COLLECTORROLL
PLASMA
~
SHOEELECTRODE
POWERED
TYPICAL PROCESS CONDITIONS:
Gas gap : a few mmApplied voltage : 10-20 kV at a few 10s kHzEnergy deposition : 0.1 - 1.0 J cm-2Residence time : a few sWeb speed : 10 - 200 m/min
University of IllinoisOptical and Discharge Physics
REACTION PATHWAY
RAJESH_AVS_02_05
C C C C C C C C C
C C C C C C C C C C
OH
OHO||
OH, O
C C C C C C C C C C C
LAYER 1
LAYER 2
LAYER 3
H
OH, H2O
OH
OHO2
O2
HUMID-AIR PLASMA
BOUNDARY LAYER
POLYPROPYLENE
H2O
e e
H OH
N2
e e
N NO2
O O
e e
O2O3
O2NO
NO
University of IllinoisOptical and Discharge Physics
POLYPROPYLENE (PP) - STRUCTURE
RAJESH_AVS_02_06
• Polypropylene polymer:
• Three types of carbon atoms in a PP chain:
• Primary C – attached to only one another carbon;• Secondary C – attached to two carbon atoms; and• Tertiary C – attached to three carbon atoms.
• The reactivity of an H-atom depends on the type of C bonding.
• Reactivity scales as: HT > HS > HP (HT = tertiary H; HS = secondary H; HP = primary H)
C C C C C CH H H H H H
H H HCH3 CH3CH31
2 31 - Primary C2 - Secondary C3 - Tertiary C
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FUNCTIONALIZATION OF THE PP SURFACE
RAJESH_AVS_02_07
• Untreated PP is hydrophobic (repels water).
• The increase in surface energy of PP after corona treatment isattributed to the functionalization of the polymer surface withhydrophilic groups (attract water).
• An air-corona-processed PP film contains hydrophilic functionalgroups such as:
• Carbonyl (-C=O) • Alcohols (C-OH)• Peroxy (-C-O-O) • Acids ((OH)C=O)
• The process parameters are energy deposition and relativehumidity (RH).
• At sufficiently high energy deposition, erosion of the polymeroccurs.
University of IllinoisOptical and Discharge Physics
DESCRIPTION OF THE MODEL: GLOBAL_KIN
RAJESH_AVS_02_08
• Modules in GLOBAL_KIN:• Circuit model• Homogeneous plasma chemistry• Species transport to PP surface• Heterogeneous surface chemistry
N(t+∆t),V,I
CIRCUITMODULE
GAS-PHASEKINETICS
SURFACEKINETICS
VODE -ODE SOLVER
OFFLINEBOLTZMANN
SOLVER
LOOKUP TABLEOF k vs. Te
University of IllinoisOptical and Discharge Physics
REACTION MECHANISM FOR HUMID-AIR
RAJESH_AVS_02_09
• Gas phase products of humid-air corona treatment include O3,N2O, N2O5, HNO2, HNO3.
N2
O2
H2O
N N2(A)
e
e O
H OH
e
O2
NO
O2,OH
HNO2OH
NO2O3, HO2
OHNO3
OHN2
N
O3
HO2
OH
OH
O2
O2(1∆)
HO2
O2HO2H2O2
N2O5
NO3OH
University of IllinoisOptical and Discharge Physics
SPECIES TRANSPORT TO THE POLYMER SURFACE
RAJESH_AVS_02_10
• Species in the bulk plasma diffuse to the PP surface through aboundary layer (d ~ a few λmfp ≈ µm).
• Flux of the radicals reaching the surface is,
4thnv
=φ , n = density, vth = thermal speed.
• Radicals react on PP based on a site balance model.
POLYPROPYLENE
BOUNDARYLAYER ~ λmfp
BULK PLASMA
DIFFUSION REGIME
O OH CO2
δ
University of IllinoisOptical and Discharge Physics
REACTIONS AT PP SURFACE
RAJESH_AVS_02_11
• O and OH abstract H from PP to produce alkyl radicals.
• Reactions of O3 and O2 with alkyl radicals produce peroxyand alkoxy radicals, which further react to form alcohols and carbonyl species.
CH2~O
~CH2 CCH3
+
~CH2 C CH2~
CH3
~CH2 C CH2~
CH3
H O(g)
OH(g), H2O(g)
(ALKYL RADICAL)(POLYPROPYLENE)
O3 (g)
(ALKOXY RADICAL)
O2 (g)
O
~CH2 C CH2~
CH3
~CH2 C CH2~
CH3
OO
(PEROXY RADICAL)
(CARBONYL)
OH
~CH2 C CH2~
CH3
H(s)
(ALCOHOLS)
OH(g)
O(g)CO2 (g)
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BASE CASE: ne, Te
RAJESH_AVS_02_12
• Ionization is dominantly of N2 and O2,
e + N2 → N2+ + e + e,
e + O2 → O2+ + e + e.
• Once the gap voltage decreases belowsustaining, electrons decay by attachment(primarily to O2).
• The differences between the 1st and laterpulses are due to the incomplete chargingof the dielectrics on the electrodes.
• N2/O2/H2O = 79/20/1, 300 K, 15 kV at 9.6 kHz.
• Edep = 0.8 J cm-2, Web speed = 250 cm/s.
Time (s)
1
25 - 460
Ele
ctro
n D
ensi
ty (c
m-3
)
1014
1013
1012
1011
1010
10910-610-710-810-910-10
1
25 - 460
10-710-810-910-10Time (s)
Ele
ctro
n Te
mpe
ratu
re (e
V)
6
5
4
3
2
1
0
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GAS-PHASE RADICALS: O, OH
RAJESH_AVS_02_13
• Electron impact dissociation of O2 and H2O produces O and OH.
• O is consumed in the gas phase primarily to form O3,
O + O2 + M → O3 + M.
• After 100s of discharge pulses, the radicals attain a periodicsteady state.
O (1
014
cm-3
)
115
30
45
0
25 - 460
10-610-710-810-9 10-5Time (s)
~~
0.0
0.1
0.2
0.3
2
6
10
1OH
(101
3 cm
-3)
25 - 460
10-610-710-810-9 10-5Time (s)
• Surface concentrations of alcohols, peroxy radicals achieve nearsteady state with a few J cm-2.
• Alcohol densities decreased at higher energy deposition due todecomposition by O and OH to regenerate alkoxy radicals.
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MODEL VS. EXPERIMENT
RAJESH_AVS_02_14
* L-A. Ohare et al., Surf. Interface Anal. 33, 335 (2002). Air at 300 K, 1 atm, 30% RH
Experiment*Model
0.0
0.5
1.0
1.5
2.0
2.5
3.0
0.5 1.51.0
PP
Per
oxy
Rad
ical
s (%
)
0.0Energy Deposition (J cm-2)
3.0
0.0
0.5
1.0
1.5
2.0
2.5
0.5 1.0 1.5Energy Deposition (J cm-2)
PP
Alc
ohol
(%)
0.0
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GAS-PHASE PRODUCTS: O3, NXOY, HNOX
RAJESH_AVS_02_15
• O3 is produced by the reaction of O with O2,
O + O2 + M → O3 + M.
• N-containing productsinclude NO, NO2, HNO2 andN2O5,
N2 + O → NO + N,NO + O + M → NO2 + M,
NO + OH + M → HNO2 + M,NO2 + NO3 + M → N2O5 + M.
O3
N O52
HNO2
NONO2
0.0
0.5
1.0
1.5
2.0
2.5
0.0
2.5
5.0
7.5
10.0
12.5
0.0 0.5 1.0 1.5Energy Deposition (J cm-2)
O3
(101
7 cm
-3)
NO
, NO
2, H
NO
2, N
2O5
(101
4 cm
-3)
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EFFECT OF RH: PP FUNCTIONALIZATION
RAJESH_AVS_02_16
• With increasing RH, more OH is produced.• Due to the high reactivity of OH, more PP alkyl radicals are generated.• As a result, the densities of peroxy radicals increase,
PP-H + OH(g) → PP• + H2O(g) PP• + O2(g) → PP-O2• .
• Alcohol and carbonyl densities decrease at higher RH due to increased consumption by OH to form alkoxy radicals and acids.
0
1
2
3
1 10 100RH (%)
Peroxy
Alcohol
CarbonylAcidS
urfa
ce C
once
ntra
tion
(%)
PP-OH+ OH(g)→ PP-O• + H2O(g)
PP=O• + OH(g)→ (OH)PP=O
0
5
10
15
1 10 100RH (%)
Den
sity
(101
3 cm
-3)
<OH>
<O>
University of IllinoisOptical and Discharge Physics
EFFECT OF RH: GAS-PHASE PRODUCTS
RAJESH_AVS_02_17
• Higher RH results in decreasing O atom densities and so theproduction of O3 decreases.
• Due to the increased production of OH with RH, larger densities ofHNO2 and HNO3 are produced.
N + OH → NO + H, NO + OH → HNO2, NO2 + OH → HNO3.
0
4
6
8
10
HNO3 (x 0.1)
1 10 100RH (%)
Den
sity
(101
4 cm
-3)
2
CO2
HNO2
O3
N O52
NO (x 10)
NyO
x (1
015
cm-3
)
0
1
2
3
O3
(101
7 cm
-3)
NO2 (x 10)
N O2
0
1
2
3
4
1 10 100RH (%)
University of IllinoisOptical and Discharge Physics
EFFECT OF TEMPERATURE: GAS-PHASE PRODUCTS
RAJESH_AVS_02_18
• With increasing gas temperature, consumption of O3 increases.• Most of the NO is lost by reduction to N2 and oxidation to NO2,
NO + N → N2 + O, NO + O3 → NO2 + O2.
• N2O5 is a maximum at intermediate temperatures,
NO2 + NO3 + M → N2O5 + M, N2O5 → NO2 + NO3.
NyO
x (1
014
cm-3
)
O3
(101
7 cm
-3)
0.0
0.5
1.0
2.0
1.5
0
1
2
3
42.5
300 310 320 330 340 350Gas Temperature (K)
N O52
N O (x 0.1)2
O3
NO2
NO
Den
sity
(101
4 cm
-3)
HNO3 (x 0.1)
15
10
5
0300 310 320 330 340 350Gas Temperature (K)
HNO2
CO2
University of IllinoisOptical and Discharge Physics
EFFECT OF TGAS: PP FUNCTIONALIZATION
RAJESH_AVS_02_19
• With increasing gas temperature,the production of O3 decreases leading to lower alkoxyproduction,
PP• + O3(g) → PP-O• + O2(g).
• … and decreased production ofalcohols, carbonyl, and acids,
PP-O• + PP-H → PP-OH + PP•
PP-O• → PP=OPP=O → PP=O•
PP=O• + OH → (OH)PP=O•
• Decreased consumption of alkyl radicals by O3 enables increasedconsumption by O2 increasing the density of peroxy radicals.
Peroxy
Alcohol
Carbonyl
Acid
0.0
1.0
3.0
4.0
300 310 320 330 340 350Gas Temperature (K)
2.0
Sur
face
Con
cent
ratio
n (%
)
300 310 320 330 340 350Gas Temperature (K)
University of IllinoisOptical and Discharge Physics
SUMMARY
RAJESH_AVS_02_20
• A surface reaction mechanism for PP has been developed andvalidated against experiments.
• With increasing energy deposition the surface concentrations ofalcohol, acid, carbonyl, and peroxy groups increase.
• However, significant densities of environmentally sensitive gasessuch as O3 (1017 cm-3) and HNO3 (1016 cm-3) are generated.
• Increasing RH resulted in increased surface concentrations ofperoxy and acid groups and decreased alcohols and carbonyls.
• Operating at larger RH resulted in reduced production of O3.
• Surface concentrations of alcohol, carbonyl, and acid groupsdecreased with temperature while those of peroxy groupsincreased.