atlas-101 ultra-precision linear air bearing stages the atlas‐101 motorized linear air bearing...
TRANSCRIPT
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OverviewTheATLAS‐101motorizedlinearairbearingstageisafully‐supported,fullypreloadedairbearingdesign.HighperformanceairbearingswithintegratedlinearservomotorsandopBcalencodersdelivertotallynon‐contact,fricBonlessmoBonwithsubmicronresoluBonandrepeatability.DesignedtomeetthedemandingneedsofprecisionproducBonfaciliBes,thesesystemsareequallysuitedtolaboratoryenvironmentswhereflexibilityandeaseofusearecriBcal.
DynamicandSta1cPerformanceAirbearingsaretheprovenstandardforsuperiorsmoothnessofmoBonandposiBoningcontrolinhighprecisionapplicaBons.LowfricBonenablessmoothacceleraBonandBghtvelocitystability.TheeliminaBonofsBcBonandbacklashallowsposiBoningresoluBonof±1encodercount,evenatthehighestresoluBon.Withoutmechanicalcontact,posiBoningrepeatabilityisalsogreatlyimproved.
Nelson Air Corp.precision air bearing positioning
559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008
e‐mail:[email protected]:www.nelsonair.com
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Ultra‐PrecisionLinearAirBearingStages ATLAS‐101ThesmallestinNelsonAir’sAtlaslineofstandardairbearingstages,Atlas‐101stagesoffersuperiorposi1oningperformanceinanextremelycompactpackage.
Features:• TableSizeof115x115mm
• Travelupto400mm
• 100Nmaxload
• Velocityto1m/s
• Accelera1onto2G’s
• Encoderresolu1onto0.001μm
• Straightness/Flatnessto±0.25μm
• Repeatabilityto±0.040μm
• Ultra‐lowvelocityripple
• Posi1oningResolu1onof±1count
• Zero‐maintenance‐nolubrica1on
• Cleanroomcompa1ble
• Ultra‐PrecisionUnibodyAirBearingConstruc1on
• Integratedlinearop1calencoder
• Non‐cogginglinearmotor
• AxescanbestackedforXYopera1onoroperatever1cally
Applica1ons:• Posi1oning
• Scanning
• Metrology
• Inspec1on
• Calibra1on
• CleanRooms
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Nelson Air Corp.precision air bearing positioning
559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008
e‐mail:[email protected]:www.nelsonair.com
Page:2of7
ATLAS‐101
AirBearings‐AProvenStandardforAccuracyAirbearingsaretheprovenstandardforsuperiorsmoothnessofmoBonandposiBoningcontrolinhighprecisionapplicaBons.TheATLASseriesstagesemployafullypreloadedunibodydovetailairbearingdesignwithlargebearingsurfacestoprovideexcellentmechanicalsBffnessandloadcapacitywhilemaintainingsmoothmoBon.
UnibodyconstricBonmeanstheairbearingsareintegratedintothecarriagecomponents,allowingustomaximizeairbearingsurfaceareawhilekeepingthedesigncompact.LargeairbearingsurfacessupporttheloadacrosstheenBrelengthofthecarriageplatesandprovideairfilmaveraging,greatlyincreasingsBffnessandaccuracy.
TheATLAS‐101usesadovetaildesignwithopposingairbearingstoprovideacBveairbearingpreload.UnlikeballbearingswhichrequireadjusBngpreloadtotradesmoothnessforaccuracy,airbearingsdeliverhighsmoothnessandhighsBffnessatthesameBme.
ManufacturedtoexacBngstandardsusingproprietaryinhousetechniques,ourprecisiongroundandassembledairbearingsdeliversuperiorpitch,yaw,roll,andstraightnesscharacterisBcs.Thenon‐contact,inherentlyfricBonlessnatureofairbearingsalsotranslatesintoincreasedreliabilityandavirtuallylimitlesslifeBmewithoutrequiringmaintenance.
DirectDriveLinearMotorDirectdrivelinearmotorshavebecomethestandardsoluBonformoBonsystemsrequiringhighacceleraBonandsmooth,accuratemoBon.TheATLASstage’snon‐contact,cogless,ironlesslinearservomotorhasnomagneBca`racBonbetweenthemotorcoilandbackiron,eliminaBngtheinfluenceofthemotoronaccuracyandenablingextremelysmoothmovement.
TwoStandardLinearEncoderOp1onsInordertomeetavarietyofapplicaBonrequirements,ATLASstagesareofferedwithtwoencoderopBons.
• SDEncoderOp1on:20micronsignalperiod,steelscalewith±5.0μmoverallaccuracy(higheraccuracyavailable)
• HDEncoderOp1on:4micronsignalperiod,glassscalewithupto±1.5μmoverallaccuracy
Interpola1onOp1ons:TheseencodersareofferedwithanumberofnaBveinterpolaBonopBonsorcanbeusedwithanexternalinterpolatorbuiltintothemoBoncontrollertomaximizespeedandresoluBon.
LaserCalibra1on:Whenorderedwithacontroller,stagescanbelasercalibratedatourfacilitytoincreaselinearaccuracyabovethatofthenaBvescaleaccuracy.
CablesandCableCarrierOneofenneglectedcomponentwhichcaninfluenceaccuracyandsmoothnessindemandingapplicaBonsisthecablecarrierassembly.InaddiBontotransferringmotorpowerandencodersignals,airbearingshavetheaddedrequirementofairtubing.
AnumberofhighqualitycablecarriersoluBonsnowexisttosolvethisproblem.ForpointtopointposiBoning,tradiBonalplasBclinkchainisadequate,forsmoothervelocityandse`lingathigherresoluBonsweofferflatcableassembliesofsiliconeandteflon.
• EZCableTrackOp1on:PlasBclinkchaincablecarrierwithroundhigh‐flexmotor,encoderandaircables.
• FFCableTrackOp1on:Flatcableassembly.
StageMoun1ngAccuratemounBngsurfacesarecriBcaltoproperoperaBonoftheairbearingstage.Becausethisisafullysupportedstage,theenBremounBngsurfaceneedstobeflatorthestraightnessandaccuracyofthestagewillbecompromised.MounBngsurfaceflatnessmustbe0.0001”overtheenBremounBngsurface.Forthehighestaccuracy,werecommendhavingNelsonAirintegratethestageontothemountfortesBngandadjustment.NelsonAircanalsoprovideaccuratemounBngsurfacesmadefromgranite,aluminumandcastiron.
Customiza1onandSystemsATLASstagescanbemodifiedwithavarietyofopBonstosuitanyapplicaBon.ThesemodificaBonsrangefromcustommounBngholepa`ernstointegraBonofmulBpleaxesforXYposiBoning.FullypreloadedairbearingsallowthesestagestooperateinanyorientaBonandapneumaBccounterbalancecanbefi`edforverBcaloperaBon.
Op1onsandAccessories:
• Protec1veBellows
• CustomCableTrackandCableOp1ons
• XYMul1‐AxisAssemblieswithprecisionalignment
• Pneuma1cCounterbalanceforver1calopera1on
• Rotaryaxesfordirectintegra1on
• GraniteBasesandvibra1onisola1onstands
• AirHandlingAssembliesandFi_ngs
• Mo1onControllerandAmplifiers
NelsonAirpridesitselfonprovidinghighqualityposi6oningsolu6onsforitscustomers.Pleasecontactusformoreinforma6on.
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Nelson Air Corp.precision air bearing positioning
559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008
e‐mail:[email protected]:www.nelsonair.com
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ATLAS‐101
Specifica1on Value
TableSize 114x114mm(4.5x4.5in)
MaximumLoadNormal 100N(25lbs)
Transverse 40N(10lbs)
MaximumTravelSpeed 1000mm/s(40in/s)
Con1nuousLinearAccelera1on 1g‐10m/s2(384in/s2)(noload)PeakLinearAccelera1on 2g‐20m/s2(768in/s2)(noload)MotorType Non‐coggingironlesslinearbrushlessservomotorwithhallsensors
MotorCon1nuousForce 15N(3.4lbs)
MotorPeakForce 45N(10.0lbs)
EncoderType NoncontactopBcallinearencoder,opBcalhomesensorandmagneBclimits
EncoderResolu1onOp1onsSD 1.0μm,0.5μm,0.1μm,0.05μm,0.005μm
HD 0.2μm,0.02μm,0.01μm,0.001μm
RepeatabilitySD ±0.1μm(±4μin)(resoluBondependent)
HD ±0.04μm(±2μin)(resoluBondependent)
MovingCarriageMass 1.3kg(2.8lbs)
Opera1ngPressureandAirUse 80psi±5psi,<1scfm
MaterialandFinish HighStrengthAluminum,PrecisionGround,HardAnodizedwithCrashResistantCoaBng
>StageSpecifica1ons
Model ATLAS‐101‐050 ATLAS‐101‐100 ATLAS‐101‐160 ATLAS‐101‐210
StageTravel 50mm(1.9in) 100mm(3.9in) 160mm(6.3in) 210mm(8.3in)
LinearAccuracySD ±5.0μm(±200μin)
HD ±0.3μm(±12μin) ±0.3μm(±12μin) ±0.3μm(±12μin) ±0.5μm(±20μin)
RepeatabilitySD ±0.1μm(±4μin)(resoluBondependent)
HD ±0.04μm(±2μin)(resoluBondependent)
StraightnessandFlatness ±0.25μm(±10μin) ±0.40μm(±16μin) ±0.40μm(±16μin) ±0.50μm(±20μin)
Pitch/Roll/YawLocal 0.25arc‐sec/25mm
Maximum ±0.50arcsec(±3μrad) ±1.0arcsec(±5μrad) ±2.0arcsec(±10μrad) ±2.0arcsec(±10μrad)
StageWeight 2.9kg(6.5lbs) 3.2kg(7lbs) 3.9kg(8.5lbs) 4.3kg(9.5lbs)
>AccuracySpecifica1ons
Model ATLAS‐101‐250 ATLAS‐101‐310 ATLAS‐101‐350 ATLAS‐101‐400
StageTravel 250mm(9.85in) 310mm(12.2in) 350mm(13.78in) 400mm(15.75in)
LinearAccuracySD ±5.0μm(±200μin)
HD ±0.5μm(±20μin) ±0.5μm(±20μin) ±0.5μm(±20μin) ±0.75μm(±30μin)
RepeatabilitySD ±0.1μm(±4μin)(resoluBondependent)
HD ±0.04μm(±2μin)(resoluBondependent)
StraightnessandFlatness ±0.75μm(±30μin) ±1.00μm(±40μin) ±1.25μm(±50μin) ±1.5μm(±60μin)
Pitch/Roll/YawLocal 0.25arc‐sec/25mm
Maximum ±2.5arcsec(±12.5μrad) ±3.0arcsec(±15μrad) ±3.5arcsec(±17.5μrad) ±4.0arcsec(±20μrad)
StageWeight 4.8kg(10.5lbs) 5.3kg(11.5lbs) 5.7kg(12.5lbs) 6.2kg(13.5lbs)
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Nelson Air Corp.precision air bearing positioning
559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008
e‐mail:[email protected]:www.nelsonair.com
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ATLAS‐101
>StageDimensions
ATLAS‐101‐050
ATLAS‐101‐100
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Nelson Air Corp.precision air bearing positioning
559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008
e‐mail:[email protected]:www.nelsonair.com
Page:5of7
ATLAS‐101
>StageDimensions
ATLAS‐101‐160
ATLAS‐101‐210
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Nelson Air Corp.precision air bearing positioning
559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008
e‐mail:[email protected]:www.nelsonair.com
Page:6of7
ATLAS‐101
>StageDimensions
ATLAS‐101‐250
ATLAS‐101‐310
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Nelson Air Corp.precision air bearing positioning
559Rt.13South,P.O.Box2,Milford,NH03055Tel:603‐673‐3908,Fax603‐672‐3008
e‐mail:[email protected]:www.nelsonair.com
Page:7of7
ATLAS‐101
>StageDimensions
ATLAS‐101‐350
ATLAS‐101‐400