Appendix E

S.O.P.- Standard Operating Procedures DREESE LABS CLEANROOM

SAFETY RULESRevised 10.01.12

Section 1Intro

The following Dreese Lab Cleanroom safety rules must be read, understood, and practiced at all times. Use common sense when thinking of safety. When working in the cleanroom, think about your actions and how they will affect other lab members, as well as yourself. The rules and procedures outlined here have evolved from experience and are for the protection of you and fellow lab members. Failure to follow them can result in expulsion from the cleanroom. If you have any questions, feel free to ask a staff member. There are no excuses for not following safety procedures.

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Section 2Handling Emergencies and After Hours work

Emergencies: The Microlab Emergency Response Plan is posted by the telephones as displayed below. Please follow the procedures listed.

The nature of the emergency will determine whether you will call police, staff, or both. If someone is injured, the 911 emergency number should be called before calling staff. If there is a facilities problem, such as a flood or a utility problem that does not represent a danger to the lab users but may result in damage to equipment, the staff and Campus Services need to be called. Primary contact for these cases is Mark Brenner: 688-4568 or 614-975-1321. Don’t be shy about calling home numbers. 911 emergency should never be called for facility or equipment problems.

After hours ( weekends as well as 6pm – 7am weekdays):All users should proceed with caution during after-hours lab use. There is currently no

system in place that requires you to use the buddy system (users required to be in the lab with a partner) during after-hours lab use. You are strongly encouraged to let other know your plans for lab use during this time and it is also encouraged to send lab staff an e-mail of your after-hours lab use intentions in the case of lab emergencies. If you are not comfortable with the lab emergency action plan you are prohibited from using the lab during off hours. Please contact staff or your advisor if you have questions.

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Section 3Apparel

Open toed shoes, or sandals are not permitted. Shorts and skirts are not permitted. Wearing of contact lenses is discouraged due to the hazard of trapping chemicals in or under your lenses. Soft or hydrated contact lenses may contain up to 50% water by weight and can become irritating if they absorb chemical vapors from the air. If you choose to wear contact lenses in the lab, you do so at your own risk.

Inside the cleanroom, one must wear a tyvek bunny suit including a hood and boots as well as latex gloves. These are provided in the cleanroom gowning room. The gowning process will be described in full during the cleanroom indoctrination tour required for cleanroom entrance.

There is additional safety equipment that must be worn while working with chemicals in the wet bench chemical hoods. These include safety goggles, face shield, and apron, which must be worn at all times when handling chemicals. Staff will regularly inspect chemical gloves and aprons for micro rips and tears, but it is also the users responsibility to check their safety equipment prior to use. This will described further during wet bench training.

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Section 4Chemical Safety and Procedures

In general, you are far more likely to be injured while working with chemicals than doing anything else the cleanroom. When working with chemicals you should have all of your focus on the task at hand. Never rush the process when chemicals are involved and always contact staff or EHS with any questions concerning your process or lab procedures.

Emergencies: - Call 911 for any injuries, explosions, fire, etc. - Call staff or EHS immediately for spills or chemical incidents- Call staff for all other problems

Primary Staff Contact Secondary ContactMark Brenner Dr. George ValcoLab Manager Dreese Cleanroom Office: 614-688-4568 (8-4568) Office: (614)292-5110 (2-5110)Cell: 614-975-1321

EHS (Environmental Health and Safety)Main Office: (614) 292-1284 (2-1284)Website: http://www.ehs.ohio-state.edu/

General Chemical Information:

A large number of chemicals are used in the cleanroom. Dreese Cleanroom has an inventory of 'Standard Chemicals' is listed in the MSDS binder found in the gowning room. MSDS (Materials Safety Data Sheets) provide information on procedures for handling or working with that substance in a safe manner, and includes information such as physical data (melting point, boiling point, flash point, toxicity, health effects, first aid, reactivity, storage, disposal, protective equipment, and spill-handling procedures. Cleanroom users should familiarize themselves with the chemicals that they plan to use in their research.

If a chemical you need is not listed in the Chemical and Materials inventory, you should alert lab management. When ordering new chemicals make sure an MSDS is ordered at the time the chemical is purchased. Chemicals cannot be brought into the SEAL lab until an MSDS sheet is on file in the MSDS binders. MSDS sheets should be given to Mark Brenner when received.

Chemical Safety/Protecting Yourself:

Prior to working with chemicals, make sure you are properly protected. If working with acids, corrosive or hazardous chemicals, you must wear a rubber apron chemically rated, rubber

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gloves, goggles, and a face shield. If gloves, aprons, or face shields aren't readily available near your location, contact Mark Brenner and the necessary items will be provided. The latex gloves you put on when you enter the lab are for the protection of lab surfaces and equipment, and are not of sufficient strength to protect against chemical burns or solvents. Two types of gloves are commonly used in the lab:

Transporting Chemicals Through the Lab:

Glass chemical bottles cannot be transported through the lab or building hallways unprotected. Individual bottles must be placed in a rubber safety carrier located in the gowning room. Remember to return these safety carriers to the front of the lab when you are done with them.

Working with Chemicals:

Always work at a fume hood or a wet process station! Fume hoods and wet process stations are exhausted, with face velocities greater than 100 feet/minute. Always follow the procedures of the wet bench rules and procedures guide when working with chemicals.

Chemical Exposure:

The wet bench rules and procedures guild outlines the details rules for chemical exposure. The procedures outlined in that document are:

- Remove affected clothing.- Flush affected areas with water from emergency shower or eye wash station. DI deck hoses at the wet benches can be used as well. (15min of water for eyes or shower)- Contact staff or emergency personnel. Phone is located in the gowning area new the shower/eyewash station.- As a precaution, all chemical exposures requires a visit to an emergency room for a check-up.- Report any injuries ASAP with ECE office.

Chemical Spills:Chemcical Spill procedures are outlined in the wet bench rules and procedures guide in full detail. If you encounter strong fumes from a spill you should exit the area right away and contact staff. The equipment to clean small spill is located in the gowning room labeled "HAZ-MAT PIG". Report all spills to staff so they can arrange to dispose of any necessary hazardous materials.

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Section 5COMPRESSED GASES

Handling Gas Cylinders

Cylinders of both toxic and non-toxic compressed gases are in use throughout the lab. Lab members should not install or disconnect these bottles until trained. Training encompasses first completing the EHS online training course “Compressed Gases” and signing the training log in the gowning. This is followed by on-site staff training on specific gases in use.

All compressed gas cylinders are handled by trained staff. There are several reasons for this policy. Some gases are toxic. Some gases in these cylinders are at high pressures, some as high as 3000 psi. Regulators are designed to handle specific gases and can explode if not properly chosen. Improper installation or purging will contaminate a full bottle of gas. Our etching gases cost hundreds of dollars and their loss or contamination is very costly.Gas cylinders must be chained or strapped down at all times.Care and handling procedures for cylinders are located in the GAS VAULTS.

Toxic Gases

Most toxic, flammable or corrosive gases are kept in steel gas cabinets equipped with exhaust and alarms. Among the toxic gases used in the Microlab are ammonia, phosphine, silane. Most of these gases have a characteristic odor. Phosphine smells like garlic or decaying fish, while ammonia has a pungent, acrid odor. Silane, a pyrophoric gas (i.e., it ignites upon contact with air). There are gas detectors at each point of use for the different gasses; as well as at the cylinder gas cabinets. When these detectors sense ppm of the gas a Red Alarm Bell sounds and a strobe flashes. When you hear this BELL; stop what you are doing and go to the gowning room. In the gowning area is the toxic gas controller. If you open the controller door you will see what gas has been detected and in what area of the cleanroom. Remember this gas and location information and give it to the people responding to the alarm. There is a RESET button on the controller below the LCD display. Push the reset button and if the bell is silenced and stays off then there is no gas leak; but if the alarm continues, there is a gas leak and you are to get everyone out of the cleanroom using the intercom. If a gas leak is even suspected, the Microlab must be evacuated. If you notice an unusual odor, leave the lab and immediately report it to the staff so an evaluation can be made. Follow the Micro lab Emergency Procedures posted by the telephones. If no staff is available go to the ECE office.

Air & Nitrogen Guns

Air/Nitrogen guns and compressed gas can inflate the skin like a balloon, tearing it away from the tissue underneath. Be cautious and avoid cuts on the hands when using compressed air guns or working around gas streams.

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Section 6Cryogenics

Liquid nitrogen or "LN" is used commonly in the lab. It is stored in vacuum jacketed cylinders called "dewars". These containers are large and heavy and should be moved with care. Wear supplied gloves, apron and face shield when filling LN containers. See the map below for the location of LN2 based equipment and locations of the safety equipment.

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LN2 safety equipment (Apron, gloves and face shield).

LN2 Drop for filling 5L dewars.

5L LN2 dewer for CHA or MBE Room.

230L LN2 dewer for ICP/RIE low temp stage work

Section 7Disposal of Hazardous Objects

Broken Glass- Do Not dispose of broken glass in the waste paper cans! Broken glassware must be cleaned

before depositing in the pail designed for broken glass disposal. This pail is located in the gowning corridor by the safety shower.

Needles and Razor Blades- Needles and razor blades should be disposed of in the plastic bottles marked 'SHARPS &

BLADES. This is located in the gold room spinner hood.

Substrates material- Broken substrate material can be disposed of in the container labeled “broken substrates

located on the wire rack in the back of the gold room.

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Section 8Fire Hazzards

1. Fire Prevention

Fires in the lab can result from many causes including ignition of flammable gases or solvents, and combustion of materials. Use care when using heat lamps or heating flammable solvents on hot plates. Always use a water bath to transfer heat to flammable solvents when using a hot plate. Avoid water around electricity and use common sense when working in the lab.

2. In Case of Fire

In the event of a fire, use the extinguishers in the lab and report its use to the staff. Fire extinguishers are located just inside the doors to the service corridors. These are CO2 type extinguishers capable of extinguishing A,B,&C type fires without damaging equipment. Fire extinguishers are regularly checked by the campus Fire Department. Report any use of a fire extinguisher to the ECE office or staff immediately. Cleanroom users are not expected to be fire fighters and should evacuate the building when a fire threatens safety. For fires, call the police at 911 and evacuate the lab. If your clothes catch fire, use the showers and don't panic. Before you start your research MAKE SURE YOU KNOW THE LOCATION OF THE SHOWERS AND EYE WASH STATIONS !

3. Sprinkler System

The cleanroom is covered by a water type sprinkler system. This system is designed to deliver 15 gallons/minute. When water flows for a fire, an alarm is automatically sent to the fire station and fire fighters will respond. If you see water spraying and no fire, call Mark Brenner immediately or go to the ECE office 205DL and tell someone.

ELECTRICAL SAFETY

All electrical power wiring is to be done by cleanroom staff or outside contractors. If you have to use an extension cord it must be rated for 20amps. Learn the locations of the circuit breakers required by the equipment you use. In case of electrocution of someone in the lab, do not touch or grab them. Do not attempt to shut off power on the equipment, use the circuit breakers in the service corridor. Report all electrical problems to staff.

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Section 9Dreese Cleanroom Evacuation Procedures

1. When the building fire alarm sounds, you MUST evacuate the cleanroom. Follow the Dreese Lab Evacuation Routes on the floor plans lined in red beside the telephones. Secure your process and leave the lab quickly. When an evacuation announcement is made over the intercom you MUST evacuate the building.

2. If a gas alarm sounds and the cleanroom staff is not present, evacuate other lab users as you leave. Place the red plastic evacuation sign that is in the gowning room located on the gas controller shelf. The sign reads: MICROLAB HAS BEEN EVACUATED DO NOT ENTER.

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Section 10Lab Communications (Phone and Computer Use)

1. Phones

The Cleanroom is located in the basement of Dreese Labs which gets little or no cell phone service. The cleanroom phone numbers are:

614-688-3066 Dreese Cleanroom 614-688-3065 SEAL MBE Lab

All users should answer the phone when it rings. To dial out of the lab for OSU numbers use similar procedures as other campus facilities. When dialing a 292-XXXX number, dial 2-XXXX. For a 688-XXXX number, dial 8-XXXX. If you need to dial long distance, you should acquire your own long distance code or discuss your needs with lab staff. If you are making a local call, 614-XXX-XXXX, you need to dial 9-XXX-XXXX.

2. Computers

The Dreese Cleanroom does not have wireless OSU internet capabilities. Access to the internet can be made through a gold room computer and the CHA room computer. In the case you find these computer in the off position or logged out, turn on the computers and login user names and passwords are located on or near all computers.

3. Intercom System

The Cleanroom is equipped with an intercom system to communicate with users throughout the cleanroom and outside the cleanroom entrance door. Instructions for the intercom system are supplied near all intercom locations.

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Section 11SEAL MBE Lab (Non MBE students can skip this section)

The SEAL MBE Lab is located within the Dreese Cleanroom. Access to the MBE lab is limited to MBE users only. Access is granted by cleanroom staff and needs approval of the SEAL Lab PIs.

Users of the SEAL Lab must follow all cleanroom procedures. Chemical and cryogenic use must be accompanied with the proper safety equipment as outlined in the previous sections.

The MBE Lab has an MBE system which uses solid source phosphorus and arsenic. During normal usage there is no risk of exposure to these carcinogenic items. However during times of maintenance, the use of a respiration mask is require to protect against these chemicals in dust forms. MBE lab users will be instruction how to be approved for usage and must conduct proper fit testing of the required equipment on regular intervals to meet EHS requirements. Contact lab staff for further info.

White Phosphorus is combustible when exposed to oxygen and red phosphorus is combustible in the presence of a heat or a spark in combination with oxygen. In both of these cases, special precautions are taken to prevent phosphorus fires during maintenance. Contact lab staff for full instruction for phosphorus handling.

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Section 12Penalties for Breaking Cleanroom Rules

Cleanroom Users,

The Cleanroom Committee has met and decided on the penalty for violating the cleanroom rules as spelled out in the S.O.P. If you haven't read the S.O.P. in a while there is a copy in the gowning room as well as on the Cleanroom web site.

The penalties are as follows: 1.) First offense will get you a warning. ( a word to the wise should be sufficient) 2.) Second offense, you will be bared from cleanroom access for two days. 3.) Third offense will mean one week expulsion from the cleanroom. 4.) Fourth offense, you will be sent to the ECE Chairman to justify your actions and why you should be allowed to continue research.

- Also, any new processes that you want to perform in the cleanroom must go through the Cleanroom Committee for approval.

Contact Mark Brenner with the process in writing and he will take it to the committee for approval.

Remember, all chemicals new and old must have an approved lab chemical label.

Let’s all treat this facility with respect so everyone can get good research results.

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Section 13Cleanroom Chemical and Safety Map

Chemical Storage 1 = Used to store excess or new bottles of photolithography chemicals. This does not contain photoresist

Chemical Storage 2 = Used to unique solvents or group specific solvents Chemical Storage 3 = Used to store new bottles of lab supplied acids. Chemical Storage 4 = Used to store new bottles of lab supplied solvents. This is flame resistant

cabinet. Chemical Storage 5 = Gold room chemical storage used to store in-use bottles of lab supplied acids.

If the bottle is empty or near empty you can triple rinse the old bottle and get a new bottle from Chemical Storage 3.

Chemical Storage 6 = Gold room chemical storage used to store in-use bottles of lab supplied acids and developers. If the bottle is empty or near empty you can triple rinse the old bottle and get a new bottle from Chemical Storage 1 or 4. In-use, cleanroom supplied PR is also stored in this chemical cabinet. This is a flame resistant cabinet

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First Aid (Contains Calcium Gluconate for HF Burn)Fire ExtinguisherSafety Shower and Eye Wash Station

Refrigerated Chemical Unit Chemical Storage Cabinet Compressed Gas Cylinder