x ray topography applications

Camera

1

XRT-100

Geometries

2

Transmission Reflection

XRT-100 XRT-100

Sample holder

3

Sample alignment

4

Find a reflection by omega scan Align tilt angle

CCM (crystal collimator)• Radiation: Cu Kα1 λ = 1.54056 Å• Monochromator: Si(220) x 4• Band width: Δλ/ λ = 6.04 x 10-5

• Beam divergence: Δθ = 5.46 arcsec

5

4H-SiC (2”)

6

g110 g118

Lang / XF (transmission) Berg-Barrett / XF (reflection)

4H-SiC

7

g =118 　 Cu 50kV-300mA 1.5 hour exposure, ILFORDL4 50μm

2 mm diameter at wafer center(negative image)

CCM / NP

4H-SiC

8

Lang / XF

4H-SiC

9

CCM / XF

10mm

CaF2

10

g-220 g440g440

Lang / XF Berg-Barrett / XF CCM / NP

CaF2

11

5mm×6.7mm

g440

CCM / NP

CaF2 (4”)

12

Lang / IP

MgO

13

- 300 - 200 - 100 0 100 200 300

0

20000

40000

60000

80000

100000

120000

140000

Inte

nsi

ty (

cps)

(arcsec)

30mm

Lang / IP

MgO(002) rocking curves

g220

4 mm pitch x scan

Diamond

14

Lang / IP

Section / NP Section / NP

LiTaO3 (4”)

15

Lang / IP Berg-Barrett / IP

Horizontal Bridgeman grown GaAs

16

Lang / XF

LEC grown GaAs

17

Lang / IP

Silicon

18

Lang / IP Lang / NP

Czochralski grown Si

19

Lang / NP Section / NP

1 mm step

SiOx precipitation after heat treatment