x ray topography applications
DESCRIPTION
X-ray topography examplesTRANSCRIPT
![Page 1: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/1.jpg)
Camera
1
XRT-100
![Page 2: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/2.jpg)
Geometries
2
Transmission Reflection
XRT-100 XRT-100
![Page 3: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/3.jpg)
Sample holder
3
![Page 4: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/4.jpg)
Sample alignment
4
Find a reflection by omega scan Align tilt angle
![Page 5: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/5.jpg)
CCM (crystal collimator)• Radiation: Cu Kα1 λ = 1.54056 Å• Monochromator: Si(220) x 4• Band width: Δλ/ λ = 6.04 x 10-5
• Beam divergence: Δθ = 5.46 arcsec
5
![Page 6: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/6.jpg)
4H-SiC (2”)
6
g110 g118
Lang / XF (transmission) Berg-Barrett / XF (reflection)
![Page 7: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/7.jpg)
4H-SiC
7
g =118 Cu 50kV-300mA 1.5 hour exposure, ILFORDL4 50μm
2 mm diameter at wafer center(negative image)
CCM / NP
![Page 8: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/8.jpg)
4H-SiC
8
Lang / XF
![Page 9: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/9.jpg)
4H-SiC
9
CCM / XF
![Page 10: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/10.jpg)
10mm
CaF2
10
g-220 g440g440
Lang / XF Berg-Barrett / XF CCM / NP
![Page 11: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/11.jpg)
CaF2
11
5mm×6.7mm
g440
CCM / NP
![Page 12: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/12.jpg)
CaF2 (4”)
12
Lang / IP
![Page 13: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/13.jpg)
MgO
13
- 300 - 200 - 100 0 100 200 300
0
20000
40000
60000
80000
100000
120000
140000
Inte
nsi
ty (
cps)
(arcsec)
30mm
Lang / IP
MgO(002) rocking curves
g220
4 mm pitch x scan
![Page 14: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/14.jpg)
Diamond
14
Lang / IP
Section / NP Section / NP
![Page 15: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/15.jpg)
LiTaO3 (4”)
15
Lang / IP Berg-Barrett / IP
![Page 16: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/16.jpg)
Horizontal Bridgeman grown GaAs
16
Lang / XF
![Page 17: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/17.jpg)
LEC grown GaAs
17
Lang / IP
![Page 18: X ray topography applications](https://reader035.vdocuments.mx/reader035/viewer/2022062513/556103bbd8b42a0e408b58cb/html5/thumbnails/18.jpg)
Silicon
18
Lang / IP Lang / NP
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Czochralski grown Si
19
Lang / NP Section / NP
1 mm step
SiOx precipitation after heat treatment