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Photo-sensing Receivers
using a-SiC: based materials
Visible Light Communication Systems
Manuela Vieira
The Eighth International Conference on Sensor
Device Technologies and Applications
SENSORDEVICES 2017
September 10 - 14,
2017 - Rome, Italy
• Manuela Vieira was born in Lisbon, Portugal. In 1986 she received the Master of Science in Solid State Physics-
Microelectronic and in 1993 the PhD in Semiconductor Materials both from the New University of Lisbon. She is a full
professor since 2011 in Electronics inside the Department of Electronics Telecommunication and Computers (ISEL-
Portugal) and the head of a Group in Applied Research in Microelectronic Optoelectronic and Sensors-GIAMOS in ISEL
and another in Microelectronic, Material and processes-(M2P) in CTS-UNINOVA. She has several scientific papers and 30
years of experience in the field of thin films and devices, her research activities have been mainly related to the
development of optical sensors .
• Research in the first phase (1987/1996) took place in “Centro de Física Molecular da Universidade de Lisboa”–CFM and
“Centro de Excelência de Microelectrónica e Optoelectrónica de Processos “-CEMOP-UNINOVA. Research in the second
and third phases takes place under her own coordination in “Grupo de Investigação Aplicada a Microelectrónica,
Optoelectrónica e Sensores” (GIAMOS ISEL-DEETC) (1997/...) and in group “Microelectrónica Materiais e Processos
(M2P)” in “Instituto de Desenvolvimento de Novas Tecnologias da Faculdade de Ciências e Tecnologia da Universidade
de Lisboa”.
• Other scientific activities:
• Referee for international publications such as: Thin Solid Films, Material Research Society, Sensor Magazine, Sensor and
Actuators, Material Science Fórum, Solid State Electronics, Vacuum, Applied Surface Science, Sensors and Transducers,
Revista Ibersensors, Physica Status Solidi, Sensors, Journal of Nanoscience Nanotechnology, Journal of Sensors, Journal
of Signal and Imaging Systems Engineering (IJSISE), etc.
• Referee for several EU projects as part of the Programme Growth “Innovative Products, Processes and Organisation“.
• Supervision and co-supervision of Master and PhD students
• Examiner for Master and Doctoral degrees.
• Authored and co-authored more than 300 publications in international journals cited in “Science Citation Index”. Presented
more than 400 communications at conferences and seminars most of which with publication in journals and proceedings.
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
People
• PhD members (9)
• Manuela Vieira (Coordinator)
• Alessandro Fantoni
• Guilherme Lavareda
• João Costa
• Manuel Barata
• Manuel Vieira
• Miguel Fernandes
• Paula Louro
• Yuriy Vygranenko
• PhD students (5)
• Dora Gonçalves
• João Martins
• Vitor Fialho
• João Mendes
• Vítor Silva
• MSc students (5)
• Ricardo Almeida
• João Reis
• Nuno Mendes
• Hugo Leão
• Fábio Cardoso
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Location
ISEL-ADEETC
Rua Conselheiro Emídio Navarro, 1
1959-007 Lisboa
Portugal
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Objectives
• Development, optimization and application of
semiconductor based devices: image and color sensors,
optoelectronic devices, solar cells, optical amplifiers,
biosensors, VLC devices, nanostructures and UV and IV
detectors.
• Design and modeling of optical devices.
• Electrical and numerical simulation of optical devices.
• Integration of different technologies, namely optical
sensors, wavelength-division multiplexing, Visible Light
Communication, X-ray detectors and full digital medical
imaging.
Dissemination
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
MRS
EUROSENSOR
IBERSENSOR
SENSORCOM
ICANS
Abbreviated Journal Title
APPL PHYS LETT
IEEE T ELECTRON DEV
SENSORS and TRANSDUCERS
J APPL PHYS
J. NANOSCI. NANOTECH.
DoCEIS’
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Publications
Journals Confer. Book ch. Patents
2012 14 10 2
2013 16 11
2014 15 12 2 2
2015 14 9 2
2016 16 10 5
75 52 9 4
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Projects
• Electronic transport and magnetic dynamics in low-dimensional magnetic systems
and nanostructures, IST-UTL, ISEL, Un. Évora, CFIF/IST/UTL, 109.188,00 €, Vitalii Dugaev
• SDS silicon ribbons: a new path lo low cost photovoltaics, FC-UL, INETI, ISEL, CFMC/UL,,
140.000,00 €, João Serra
• Development of a biosensor based on ISFET system for assay of toxic amides, ISEL,
Un. Évora, CIEB/ISEL/IPL 81.000,00 €, Amin Karmali
• X-Ray flat-panel detector for Medical Applications (MARx), UNINOVA/FCT/UNL, ISEL,
120.000,00 €, Main Researcher: Luís Miguel Fernandes
• Optical Biosensor based on FRET (OBIOS, ISEL, UNINOVA/FCT/UNL, 135.000,00 €, Manuela
Vieira
• Wavelength Division Demultiplexing in the visible window using semiconductor
devices, UNINOVA/FCT/UNL, 373 214,00 €, Paula Louro Antunes
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Technology Transfer
• Patents
– G. Heiler, T. Tredwell, M. Bedzyk, R. Kerr, Y. Vygranenko, D. Striakhilev, Y. Hong,
J. Lai, A. Nathan, ”High fill-factor sensor with reduced coupling”, European Patent
Application EP2070121, Publication Date: 06/17/2009.
– G. Heiler, T. J. Tredwell, M. D. Bedzyk, R. S. Kerr, Y. Vygranenko, D. Striakhilev,
Y. Hong, J. C. S. Lai, A. Nathan, ”High fill-factor sensor with reduced coupling”, US
Patent No.: 7,615,731 B2, Nov. 10, 2009.
– D.Striakhilev, A. Nathan, Y.Vygranenko, S.Tao, “Pixel having an organic light
emitting diode and method of fabricating the pixel”, US Patent No.: 7,948,170 B2,
May 24, 2011.
– Nathan, Y. Vygranenko, S. Jafarabadiashtiani, P. Servati, “Circuit and method for
driving an array of light emitting pixels”, US Patent No.: 7,978,187 B2, Jul. 12,
2011.
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Conferences / Editorial Services
• Members of scientific committees – IBERSENSOR, Ibero-American Congress on Sensors: 2008 (Rio de Janeiro), 2010, 2010)
(Lisbon), 2012 (Porto Rico)
– CETC, Conference on Electronics, Telecommunications and Computers: 2011, 2013, 2017
– DOCEIS, Doctoral Conference on Computing Electrical and Industrial Systems, 2009-1017
• Organization of conferences: – IBERSENSORS 2010, 7th Ibero-American Congress on Sensors ISEL, Lisboa,
(November, 9-11, 2010), http://portugal2010.ibersensor.org/.
– CETC 2011, Conference on Electronics, Telecommunications and Computers, ISEL, Lisboa,
(November, 24-25, 2011), http://www.deetc.isel.pt/cetc11/.
– CETC 2013, 2nd Conference on Electronics, Telecommunications and Computers, ISEL, Lisboa,
(December, 5-6, 2013),
– CETC 2017, 3nd Conference on Electronics, Telecommunications and Computers, ISEL, Lisboa,
(December, 5-7, 2017), http://www.adeetc.isel.pt/cetc13/.
• Edition of a peer reviewed, online open access journal – i-ETC (ISSN: 2182-4010) Publication of original research and review articles in the broad fields of
Electronics, Telecommunications and Computers-ETC
• Review of scientific papers for international journals – Plasmonics, Thin Solid Films, Sensors & Actuators, Sensors Journal, Vacuum, Solid state
Electronics, J. Nanoscience and Nanotechnology, …
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
International Cooperation
• Department of Electrical and Computer Eng., Waterloo, Canada.
• Giga to Nano Electronics Group, Univ. Waterloo, Canada.
• University of Cagliari, Italy.
• IPE, Stuttgart University, Germany
• Institute of Semiconductor Physics, Ukrainian Academy of Science,
Kiev, Ucraine.
• Institute of Physics, Polish Academy of Sciences, Warszawa, Poland.
• Institute of Molecular Physics University, Polish Academy
of Sciences, Poland.
• Wurzburg University, Germany.
• Polish Academy of Sciences, Poland.
• Production of semiconductor devices,
• Characterization of materials and devices,
• Joint publications (since 2006).
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Main Research Areas/Projects
• Applications of semiconductor devices
– Wavelength division demultiplexing
– Optical biosensors
– X-ray flat panel
– Visible Light Communication
– OLEDs
0.0 0.5 1.0 1.5 2.0
[0101 0011]
V
B
G
R
Code w
ord
(R
GB
V)
Time (ms)
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Swot Analysis
• 9 PhD members with different academic formation: physics,
materials, electronics.
• Good Publication index in peer review journals and
conferences.
• Strong connection to the academy: interaction with other
institutions, many graduate students.
• High efficiency in concluded MSc.
• Increase the number of citations.
• Reinforcement of the collaboration with other national
groups.
• Participation in European projects.
• Collaboration with the industry/companies.
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
What are we Pursuing/Aiming
• Generate cross fertilization with other national
research groups;
• Increment the number of graduation students;
• Participation in European projects;
• Collaboration with industry/companies;
• Increase the number of patents.
Future
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Investment in R&D is part of the solution to exit from the economic
crises
•Information and communication technologies
• Nanotechnologies
• Advanced materials
• Biotechnology
•Health
•Green and integrated transport
•Resource efficiency
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Live Demo - Outline
• Deposition facilities: – Laboratories for support of Semiconductor Thin Film Development using the PECVD (Plasma
Enhanced Chemical Decomposition) techniques.
– Laboratories for support of Electronic, Optoelectronic and Microelectronic Device Processing.
• Characterization facilities: – UV-VIS-NIR and IR Spectrophotometers (Shimadzu),
– dark/photo conductivity as a function of temperature;
– spectral response;
– Flying Spot Technique-FST;
– Photothermal Deflection Spectroscopy-PDS;
– Space Charge Limited Current-SCLC;
– C(T)/C(V) measurements,
– Coatings uniformity test-bench,
– Characterization systems for devices (IV characteristics; annealing test chambers; degradation
tests; interface characterization; Electroluminescence) and Solar simulator for small areas.
– Spectrometers (UV, VIR, NIR, IR) and
– Optical Characterization Systems (I-V, C-V),
– Electric Characterization Systems,
– Material Testing Bench.
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Running projects applications
controller FRET based prototype to
detect fluorescence of the
excited fluorophores when
glucose is present, allowing to
monitor its level.
PTDC/EEA-ELC PTDC/EEA-ELC
The use of Laser Scanned
Photodiode (LSP) sensor is
proposed for medical applications
Short distance communication
Systems. Digital city auto
industry, medical sector and in-
house communication
First
project
X-ray flat
detector
Large area
Optical biosensor
system
Third
project
Second
project
WDM based optical
communication
system area
PTDC/EEA-ELC
Receivers
Transmitters
V1
V2
p
Glass
i’
200 nm
a-SiC:Hp
i
1000 nm
a-Si:Hn
nT
CO
TC
O
l V
l B
lG
l R
Input
channels
Front diode
Back diode
V=-8V
Optical Bias
Optical Bias
0.0 0.5 1.0 1.5 2.0
[0101 0011]
V
B
G
R
Code w
ord
(R
GB
V)
Time (ms)
Deposition laboratory
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Mass Spectrometry
PE-CVD
PE-CVD
Thermal evaporation
Spin coating
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Material microstructure
Microscope Dektak
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
0,5 1,0 1,5 2,0 2,5 3,00
20
40
60
80
100 n-SiC:H
p-SiC:H
n-Si:H
p-Si:H
Tra
nsm
itta
nce
(%
)
Energy (eV)
Transmittance/reflectance
Absorption coefficient
Optical gap
Thickness
Refractive index
Structural analysis
UV/VIR/IR Spectroscopy
Shimadzu
Optical characterization
500 750 1000 1250 1500 1750 2000 22500,00
0,02
0,04
0,06
0,08
0,10
0,12
0,14
Si(C)H
SiH2/(SiH)
n
SiHSiH
2/(SiH)
n
SiCHn
SiHn
Intrinsic
N0
P0
P40
Absorv
ance (
a.u
.)
Wavenumber (cm-1)
Thermo-Nicolet FTIR Avatar 370 Infrared spectroscopy
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
ELECTRICAL DATA
(T) dependence
• in dark
• Activation energy
• Photoconductivity
2,6 2,7 2,8 2,9 3,0 3,1 3,2 3,3
10-11
10-10
10-9
10-8
10-7
10-6
10-5
10-4
p-Si:H
n-Si:H
n-SiC:H
i-Si:H
p-SiC:H
(
.cm
) -1
1000/T (K-1)
Electrical characterization (I)
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
-1,0 -0,5 0,0 0,5 1,010
-10
10-9
10-8
10-7
10-6
10-5
10-4
10-3
#M006291
#M006301
#M007192
Curr
ent
Den
sity
(A
/cm
2)
Voltage (V)
DARK
-1,0 -0,5 0,0 0,5 1,010
-7
10-6
10-5
10-4
10-3
10-2
#M006291
#M006301
#M007192
Curr
ent
densi
ty (
A/c
m2)
Voltage (V)
AM 1.5
-1,0 -0,5 0,0 0,5 1,0
-8
-6
-4
-2
0
Simulation curve
p-Si:H/i-Si:H/n-Si:H
p-Si:H/i-Si:H/n-SiC:H
Experimental data
#M006291
#M006301
Curr
ent
Den
sity
(m
A/c
m2)
Voltage (V)
-1,0 -0,5 0,0 0,5 1,00
20
40
60
80
100
120
140
160
1x1016
ph/(s cm)2
5x1016
ph/(s cm)2
2,5x1016
ph/(s cm)2
0,5x1016
ph/(s cm)2
darkCap
acitan
ce (
nF/c
m2)
Voltage (V)
-1,0 -0,5 0,0 0,5 1,00
20
40
60
80
100
120
140
160
1x1016
ph/(s cm)2
5x1016
ph/(s cm)2
2,5x1016
ph/(s cm)2
0,5x1016
ph/(s cm)2
darkCap
acitan
ce (
nF/c
m2)
Voltage (V)
C-V I-V
Electrical characterization (II)
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Spectral response (Triax 180, Jobin Ivon)
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
SPECTROPHOTOMETER (Jasco FP-8300)
450 500 550 600 650 700
0
500
1000
1500
2000 pRSET FLIPsuc-90
Inte
nsity
(a.u
)
Wavelength (nm)
0.1 mM
1 mM
10 mM
100 mM
450 500 550 600 650 7000
500
1000
1500
2000 13660 pRSET FLIPglu-3.2mDelta13
Inte
nsity
(a.u
)
Wavelength (nm)
0.1mM
1 mM
10 mM
100 mM
Microscopic image (100-fold
magnification) of ''Aspergillus
niger'', grown on Sabouraud agar
medium.
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Signal analysis
0,0 0,5 1,0 1,5 2,0 2,50
1
2
3
4
5
=0
BG R
pin2
pin1
0
G
0
0
G
0
G
G
0
0
0
0
B
B
B
B
00
0
0
R
R
R
R
Ph
oto
cu
rren
t (a
.u)
Time (ms)
Red
Green
Blue
Dark
Vpin1
Vpin2
R ch
G channel
B channel
Photo-sensing Receivers using a-SiC: based materials - Visible Light Communication Systems
Optical components
Optical bench, Thorlabs
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