unique microlithography results using maskless lithographypowerpoint presentation author jay...

Unique Microlithography Results Using Maskless Lithography

Jay Sasserath, PhDIntelligent Micro Patterning LLC

St. Petersburg, Florida, USASeptember, 2010

Agenda

• Maskless Lithography Technology• Greyscale Processing• 3D Lithography• Summary

Who is IMP?

• Exclusive Global License for Smart Filter Technology (DLP for Litho) from USF.

• Global HQ in St. Petersburg, FL• Formed in 2001• Privately Held

Intelligent Micro Patterning LLC Microlithography Systems

SF-100 XPRESSSF-100 XCEL

SF-100 XTREME SF-100 XTEND

Basic System Operation

•Pattern an Area With Each Exposure•Operation is Similar to Wafer

Stepper• 1024 x 768 Array (>750K

Pixels/Exposure)• 255 Levels of Greyscale is

Standard.

SF-100 Maskless Lithography

Optics

BeamSplitter

Mercury Arc Lamp

Optics

Computer

Smart Filter

Substrate

Stage

Camera

Filter Wheel

Reduction Lens

Greyscale Lithography

Why Greyscale Lithography?1. Large, Controlled Resist Slopes2. Vary Resist Height Locally

% C

onve

rsio

n%

Con

vers

ion

EnergyEnergy

Greyscale Lithography

Mic

roM

irror

Beam Splitter

Substrate

White or “On”

Micr

oMirr

or

Beam Splitter

Substrate

Black or “Off”

Greyscale Lithography

• The Mask– Start with Design File (DXF, GDSII, CIF)– Convert to 24 bit BMP File

Greyscale Lithography

Greyscale Lithography

Why Smart Filter Technology (SFT) for Greyscale Lithography?

• Compare to Mask Aligners/Steppers:• Masks are Expensive ($8K each or more)• Light Uniformity over Entire Surface is Critical for

Slope/Height Control• SFT Allows for Individual Alignment of Substrate

• Compare to Laser Writers• SFT Much Faster (More Pronounced for Large

Features)• SFT Supports Thicker Resists, up to 1mm, with

Single Exposures

Non-Flat Surface Lithography

Collimated Light &Advanced Lens Design

Allows Projected ImagesTo Remain in Focus Over

Deep Topology in aSingle Exposure

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Non-Flat Surface Lithography

Non-Flat Surface Lithography

Additional Integrated Stage forCylindrical Substrate Processing

Non-Flat Surface Lithography

…and the Optical Design Comes in Handy forDoing Thick Films too (200 um SU8 Above)

Non-Flat Surface Lithography

• Ping Pong Balls Aren’t the OnlyNon-Flat Substrates to be Patterned:– Thin Plastics Never Lie Flat– Cut AlTiC Maybe Bowed– Cover Traces Between Mechanical

Parts in Drive (ex. TFH and Suspension Assembly)

Non-Flat Surface Lithography

Why Smart Filter Technology (SFT) for Non-Flat Lithography?

• Compare to Mask Aligners/Steppers:• Substrate Fixturing is Not Easy• Mask/Substrate Gap is Typically Only a Few

Millimeters• Fixed Microscope Objectives for Viewing Are

Suitable for Large Substrates.• Compare to Laser Writers

• SFT Much, Much, Much Faster• Static Substrate During Exposure Simplifies the

Process• Short Wavelength Lasers Don’t Support Topology

• Unique Maskless Lithography Technology is Proven for– Greyscale Applications– 3D and High Topology Samples.

• Feel Free to Contact Me at– Tel: 727-522-0334, x1– Jays@intelligentmp.com

• Thank You for Your Attention!!!