unique microlithography results using maskless lithographypowerpoint presentation author jay...
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Unique Microlithography Results Using Maskless Lithography
Jay Sasserath, PhDIntelligent Micro Patterning LLC
St. Petersburg, Florida, USASeptember, 2010
Agenda
• Maskless Lithography Technology• Greyscale Processing• 3D Lithography• Summary
Who is IMP?
• Exclusive Global License for Smart Filter Technology (DLP for Litho) from USF.
• Global HQ in St. Petersburg, FL• Formed in 2001• Privately Held
Intelligent Micro Patterning LLC Microlithography Systems
SF-100 XPRESSSF-100 XCEL
SF-100 XTREME SF-100 XTEND
Basic System Operation
•Pattern an Area With Each Exposure•Operation is Similar to Wafer
Stepper• 1024 x 768 Array (>750K
Pixels/Exposure)• 255 Levels of Greyscale is
Standard.
SF-100 Maskless Lithography
Optics
BeamSplitter
Mercury Arc Lamp
Optics
Computer
Smart Filter
Substrate
Stage
Camera
Filter Wheel
Reduction Lens
Greyscale Lithography
Why Greyscale Lithography?1. Large, Controlled Resist Slopes2. Vary Resist Height Locally
% C
onve
rsio
n%
Con
vers
ion
EnergyEnergy
Greyscale Lithography
Mic
roM
irror
Beam Splitter
Substrate
White or “On”
Micr
oMirr
or
Beam Splitter
Substrate
Black or “Off”
Greyscale Lithography
• The Mask– Start with Design File (DXF, GDSII, CIF)– Convert to 24 bit BMP File
Greyscale Lithography
Greyscale Lithography
Why Smart Filter Technology (SFT) for Greyscale Lithography?
• Compare to Mask Aligners/Steppers:• Masks are Expensive ($8K each or more)• Light Uniformity over Entire Surface is Critical for
Slope/Height Control• SFT Allows for Individual Alignment of Substrate
• Compare to Laser Writers• SFT Much Faster (More Pronounced for Large
Features)• SFT Supports Thicker Resists, up to 1mm, with
Single Exposures
Non-Flat Surface Lithography
Collimated Light &Advanced Lens Design
Allows Projected ImagesTo Remain in Focus Over
Deep Topology in aSingle Exposure
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Non-Flat Surface Lithography
Non-Flat Surface Lithography
Additional Integrated Stage forCylindrical Substrate Processing
Non-Flat Surface Lithography
…and the Optical Design Comes in Handy forDoing Thick Films too (200 um SU8 Above)
Non-Flat Surface Lithography
• Ping Pong Balls Aren’t the OnlyNon-Flat Substrates to be Patterned:– Thin Plastics Never Lie Flat– Cut AlTiC Maybe Bowed– Cover Traces Between Mechanical
Parts in Drive (ex. TFH and Suspension Assembly)
Non-Flat Surface Lithography
Why Smart Filter Technology (SFT) for Non-Flat Lithography?
• Compare to Mask Aligners/Steppers:• Substrate Fixturing is Not Easy• Mask/Substrate Gap is Typically Only a Few
Millimeters• Fixed Microscope Objectives for Viewing Are
Suitable for Large Substrates.• Compare to Laser Writers
• SFT Much, Much, Much Faster• Static Substrate During Exposure Simplifies the
Process• Short Wavelength Lasers Don’t Support Topology
• Unique Maskless Lithography Technology is Proven for– Greyscale Applications– 3D and High Topology Samples.
• Feel Free to Contact Me at– Tel: 727-522-0334, x1– [email protected]
• Thank You for Your Attention!!!