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Scanning Electron Microscope
FEI INSPECT F50Step by step operation manual
Scanning Electron Microscope, FEI Inspect F50
FE-SEM-F Observation Flow
ESEM FE-SEM-H FE-SEM-JFE-SEM-FE
rro
r
ch
eck
Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor
Specim
en
pre
para
tio
n
Mount Specimen on The Stub
Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder
Measure The Height of The Specimen
Holder
Insert The Specimen Holder into The
SEM Chamber
Sta
rt O
bserv
ation
Switch On Electron Beam
Adjust The Focus at The Present Condition
Select “Home Stage” or
Appropriate WD Select WD=12mm at 250x
of The High Mag Mode
Gently Adjust The Actual Height of (z) Manually,
for Focusing The Image With The WD You Choose
Start Observation With The Low Magnification
Sa
vin
g
Da
ta A
nd
An
aly
sis
Switch Off Electron Beam
Save Images
BSD,STEM / EDXLow Vacuum / EDX
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen
Exchange Position
Set The Stage of SEM to The Specimen
Exchange Position
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Link (Z) to WD
FE-SEM-F Observation Flow
ESEM FE-SEM-H FE-SEM-JFE-SEM-FE
rro
r
ch
eck
Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor
Specim
en
pre
para
tio
n
Mount Specimen on The Stub
Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder
Measure The Height of The Specimen
Holder
Insert The Specimen Holder into The
SEM Chamber
Sta
rt O
bserv
ation
Switch On Electron Beam
Adjust The Focus at The Present Condition
Select “Home Stage” or
Appropriate WD Select WD=12mm at 250x
of The High Mag Mode
Gently Adjust The Actual Height of (z) Manually,
for Focusing The Image With The WD You Choose
Start Observation With The Low Magnification
Sa
vin
g
Da
ta A
nd
An
aly
sis
Switch Off Electron Beam
Save Images
BSD,STEM / EDXLow Vacuum / EDX
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen
Exchange Position
Set The Stage of SEM to The Specimen
Exchange Position
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Link (Z) to WD
1. Check vacuum level of SEM.
Vacuum indicator (B) should be green
Pressure (D) < 1.56e-4 mbar
2. Make sure the specimen holder will not touch the SEM column by CCD.
How to Observe Your SpecimenSoftware should be always running. Just switch on the monitor switch
① Confirm SEM condition
1. Click Vent(A). Wait until the chamber becomes the air condition state. The vacuum indicator (B) displayed in gray.
2. Open the door gently when the vacuum indicator (B) presented in gray
② Vent Chamber
③ Mount and tighten the stub in the sample Holder using a screw
④ Check the height of stage with specimen using scale Adjust height of the sample holder including the stub. The maximum height must
be below 10 of the scale. It is adjustable by turning the top of screw ② after
loosen a base of sample holder ①, or by using Z knob of the stage controller on
the SEM chamber door.
AC
B
D
⑤ Close the Door1. Close the door with placing your hands and click Pump (C).
2. Waite until pressure (D) reach less than 1.56e-4mbar and the vacuum indicator (B) is presented in green .
Do not Screw Too
Much
【1.Locate your specimen in the SEM chamber】
High vacuum Air conditionMiddle of Evac / Vac
Stage Base
Platform
①
①
②
Stage base
Sample holder
Stub
FE-ESEM-F Observation Flow
ESEM FE-SEM-H FE-SEM-JFE-SEM-FE
rro
r
ch
eck
Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor
Specim
en
pre
para
tio
n
Mount Specimen on The Stub
Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder
Measure The Height of The Specimen
Holder
Insert The Specimen Holder into The
SEM Chamber
Sta
rt O
bserv
ation
Switch On Electron Beam
Adjust The Focus at The Present Condition
Select “Home Stage” or
Appropriate WD Select WD=12mm at 250x
of The High Mag Mode
Gently Adjust The Actual Height of (z) Manually,
for Focusing The Image With The WD You Choose
Start Observation With The Low Magnification
Sa
vin
g
Da
ta A
nd
An
aly
sis
Switch Off Electron Beam
Save Images
BSD,STEM / EDXLow Vacuum / EDX
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen
Exchange Position
Set The Stage of SEM to The Specimen
Exchange Position
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Link (Z) to WD
⑥ Stage Preparation
E Activate CCD monitor and make sure the sample holder will never hit the SEM column. Then click “Centre position (E)” in “Stage” tab. The sample holder moves to directly below the column, which is the centre position of SEM.* Confirm X and Y of the control panel (F) are also X=0 and Y=0.
F
【2. Electron Beam And Spot Size Settings】
G
H
【3. Rink Z to WD (Working Distance)】
Select appropriate acceleration voltage and spot size using pull down key or adjuster(G) and (H) .
*acceleration voltage and Spot Size is able to change during observation anytime during observation.
High Voltage : 200 V ~ 30 kVMagnification : 30 x ~ 1,000,000 x
I
J
1. Click “Beam On” (I).The Indicator now should be presented in green. If the indicator is presented in red, the filament may be broken.
2. Increase magnification (J) little by little, while adjusting focus until 1000x. Magnification can be changed by pressing “+” and “-” on the keyboard;
it can be double by ”+” key, and make it half by ”-” key.
Also, magnification can be changed in the input directly. A blank column will be appeared after double-click the number above the slider. Enter the magnification of your choice.
Pointer on the screen will become Arrow (⇔) with right click of the mouse. Focus of the image can be adjusted by moving the arrow(⇔) from side to side.
Same as focusing process, Stigma is adjustable by moving the mouse with right click while pressing Shift key.
FE-SEM-F Observation Flow
ESEM FE-SEM-H FE-SEM-JFE-SEM-FE
rro
r
ch
eck
Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor
Specim
en
pre
para
tio
n
Mount Specimen on The Stub
Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder
Measure The Height of The Specimen
Holder
Insert The Specimen Holder into The
SEM Chamber
Sta
rt O
bserv
ation
Switch On Electron Beam
Adjust The Focus at The Present Condition
Select “Home Stage” or
Appropriate WD Select WD=12mm at 250x
of The High Mag Mode
Gently Adjust The Actual Height of (z) Manually,
for Focusing The Image With The WD You Choose
Start Observation With The Low Magnification
Sa
vin
g
Da
ta A
nd
An
aly
sis
Switch Off Electron Beam
Save Images
BSD,STEM / EDXLow Vacuum / EDX
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen
Exchange Position
Set The Stage of SEM to The Specimen
Exchange Position
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Link (Z) to WD
4. After adjust focus, actual height (Z) MUST be linked to WD. Click (K).5. Confirm the indication (K) is now displayed as (L) and WD and Z are also
similar distance.
L
【4. Actual Observation, Capture and Saving Images 】A. Search An Area of Interest
Track mode (effective at low magnification) : A yellow ball appears on the monitor by pressing a middle button of the mouse. Move it to any direction by a cursor.
Get mode : An area ( or subject) of interest can be located to the centre of the monitor by left – double click of the mouse.
Arrow in the keyboard : An observation area moves to the direction of arrow for approx. 80 % of a field of view.
Beam Shift Mode / effective at high magnification : a hand mark, which is represented as shift of electron beam, appears on the monitor by pressing a left button of the mouse while pressing [Ctrl]. A field of view can be moved by beam shift, without actual stage moving.
B. Adjusting Focus and Stigma Use the “Selected area frame”(M) to adjust focus and stigma. The selected area
frame allows changing magnification within the frame area only. Therefore, focus and stigma can make a fine adjustment while minimizing beam irradiation damage on the surface.
M
1. Adjust focus precisely.
2. Adjust stigma if required. Cross-type arrow appears after right -click of the mouse while pressing “Shift key”. Move mouse in left and right for X-axis stigma while pressing “Shift key”, and then, move it in top and bottom for y-axis stigma.
3. Adjust focus again. Repeat process 1 and 2, until obtaining the finely adjusted image.
K
Before LinkHeight (z) and WD are different
After Link Height (z) and WD are similar
L
WD(Working Distance) is distance between a just – focus position on the specimen and SEM Column.
FE-SEM-F Observation Flow
ESEM FE-SEM-H FE-SEM-JFE-SEM-FE
rro
r
ch
eck
Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor
Specim
en
pre
para
tio
n
Mount Specimen on The Stub
Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder
Measure The Height of The Specimen
Holder
Insert The Specimen Holder into The
SEM Chamber
Sta
rt O
bserv
ation
Switch On Electron Beam
Adjust The Focus at The Present Condition
Select “Home Stage” or
Appropriate WD Select WD=12mm at 250x
of The High Mag Mode
Gently Adjust The Actual Height of (z) Manually,
for Focusing The Image With The WD You Choose
Start Observation With The Low Magnification
Sa
vin
g
Da
ta A
nd
An
aly
sis
Switch Off Electron Beam
Save Images
BSD,STEM / EDXLow Vacuum / EDX
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen
Exchange Position
Set The Stage of SEM to The Specimen
Exchange Position
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Link (Z) to WD
S
D. Changing Scan Speed
Slow scan :Turtle (P) / Fast scan :Rabbit (Q)Scan speed can be changed by clicking Turtle or Rabbit. Setting of scanning speed can be changed following, Scan (R) → Preference (S) → Scanning (T)
P Q
R
T
E. Filter for imaging
Select Live, Average, Integrate
Live : Real-time imaging
Average : Default setting / Fast scan will be useful during observation. However, in order to capture a fine image, Number of Flame should be set up four to 16.
Integrate : The integrate mode is effective if materials are easily affected by the electrostatic charge. Scanning will be paused once automatically after integrated the set number of times.
N
C. Adjusting Contrast and Brightness Click Auto contrast (N)
Or, use sliding bar(O) of the user interface. Arrows (o-2) can change current condition finely, but knob at the centre (o-1) can change it coarsely.
O-1
O-2
FE-SEM-F Observation Flow
ESEM FE-SEM-H FE-SEM-JFE-SEM-FE
rro
r
ch
eck
Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor
Specim
en
pre
para
tio
n
Mount Specimen on The Stub
Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder
Measure The Height of The Specimen
Holder
Insert The Specimen Holder into The
SEM Chamber
Sta
rt O
bserv
ation
Switch On Electron Beam
Adjust The Focus at The Present Condition
Select “Home Stage” or
Appropriate WD Select WD=12mm at 250x
of The High Mag Mode
Gently Adjust The Actual Height of (z) Manually,
for Focusing The Image With The WD You Choose
Start Observation With The Low Magnification
Sa
vin
g
Da
ta A
nd
An
aly
sis
Switch Off Electron Beam
Save Images
BSD,STEM / EDXLow Vacuum / EDX
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen
Exchange Position
Set The Stage of SEM to The Specimen
Exchange Position
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Link (Z) to WD
F. Capture images
U
1. Adjust focus and stigma with appropriate scan speed and magnification.
2. Click Camera (U), or Press F2 button. Camera mode allows capturing images with the fixed scan
speed, which is set up in Scan Preference. After each capturing, image on the monitor will be frozen. Pixel size of captured image is 1024 x 884; appropriate exposure time is 30 to 90 seconds.
3. After capturing process, “Save as” menu (V) appeared automatically. For image saving, you must create your own holder in the ESEM datastation (W). And then, save images. Do not create a holder in the SEM PC except the ESEM datastation.
4. Take out your data with your USB. and remove your date from the ESEM datastation immediately.
Please make sure you saved all of your data in your USB.Data in the ESEM datastation will be deleted without prior notice.
V
W
*Make sure those checkbox were selected
FE-SEM-F Observation Flow
ESEM FE-SEM-H FE-SEM-JFE-SEM-FE
rro
r
ch
eck
Confirm the SEM Chamber by CCD Confirm Error Message of SEM And PC Monitor
Specim
en
pre
para
tio
n
Mount Specimen on The Stub
Mount Stub on The Specimen Holder of SEM Measure The Height of The Specimen holder
Measure The Height of The Specimen
Holder
Insert The Specimen Holder into The
SEM Chamber
Sta
rt O
bserv
ation
Switch On Electron Beam
Adjust The Focus at The Present Condition
Select “Home Stage” or
Appropriate WD Select WD=12mm at 250x
of The High Mag Mode
Gently Adjust The Actual Height of (z) Manually,
for Focusing The Image With The WD You Choose
Start Observation With The Low Magnification
Sa
vin
g
Da
ta A
nd
An
aly
sis
Switch Off Electron Beam
Save Images
BSD,STEM / EDXLow Vacuum / EDX
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCDSet The SEM Stage to The Specimen
Exchange Position
Set The Stage of SEM to The Specimen
Exchange Position
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Link (Z) to WD
【5. Closing Procedure】
1. Click “Beam On”① button to switch off the electron beam.2. Confirm the stage height of SEM that will never hit the SEM column
by CCD.
2. Click “Vent”② and, wait until the chamber becomes the air condition state. The vacuum indicator (B) displayed in gray.
3. Gently open the door and take out the specimen4. Close the door and then click ”Pump” ④. Wait until the chamber becomes the
high vacuum condition, such as <1.56e¯ mbar.
①
②
③
④
• PC monitor is showing inside of the chamber by CCD• Vacuum indicator should be presented in green • Keep running the SEM software• Switch off the PC monitor only• No error message or alarm are appeared
It is compulsory that confirming following conditions before you leave the room.
FE-SEM-F Observation Flow - BSD, STEM and EDX
BSD STEM EDX
Sa
vin
g D
ata
An
d A
na
lysis Save Images
Switch Off Electron Beam
Clo
sin
g P
rocedure
Confirm The SEM Chamber by CCD
Take Out Specimen And Data
Leave The Room After Verifying That The Error Message Does Not Appear
Error check
Specimen preparation
Start Observation
Saving images and data
Need to Change Detector* Contact us
Analyze your Specimen
FE-SEM-F Observation Flow - BSD, STEM and EDX
BSD STEM
EDX
To attach detector is necessary. Please contact our staff. Both detectors fix to the bottom of the SEM column. So, you have to be seriously
careful because you may give serious damages to both detectors if your specimen are not flat. Therefore, you have to confirm the actual position of stage through the CCD camera often, especially, when you want to change the stage position.
Cautionary note
BSD STEM
Aperture Size 6 6
Acceleration Voltage Higher than normal observation. You must find out the appropriate condition depending on your material, whichthe BSD and the STEM detectors are able to detect sufficient signals.
Spot Size Same as normal observation
WD 10 10
Recommended observation condition
EDX
Detector SDD(Silicon Drift Detector)
Aperture Size 6
Acceleration voltage Theoretically, an appropriate acceleration voltage, which is 2-3 times higher than the energies of K-shell or L-shell of elements of interests, should be selected.
Spot Size Same as normal observation
WD 10
Cooling the detector is necessary before starting analysis. It is very important to extend the detector’s service life, cooling must be switched
off. life
Please contact our staff when you are not able to obtain sufficient signals during your experiments.
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