inkjet printer for use in fabrication of memsmems.soe.ucsc.edu/media/test_inkjet.pdf · process and...

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Testing an Inkjet Printer for Use in MEMS

FabricationMarvin Cruz

Home Institution: University of California, Santa Cruz

Principal Investigator: Joel Kubby, Ph.DResearch Mentor: Oscar Azucena

Center for Adaptive OpticsUniversity of California, Santa Cruz

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Outline

1. Introduction to MEMS2. Project Description3. Process and General Workflow4. Data Analysis and Results

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Introduction to MEMS MEMS are micro-electro-

mechanical-systems Various applications include

sensors, actuators, and (RF) switches

Fabricated through surface micromachining processes deposit layers of material on a

substrate perform photolithography and

etching to remove unwanted material

*image courtesy of http://www.stanford.edugroupquate_groupMemsFrame.html

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Project Description Use special inkjet printer to deposit thin films of

material (layer by layer) on a substrate

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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter

device in convection oven4. Characterize device using various lab tools

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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter

device in convection oven4. Characterize device using various lab tools

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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter

device in convection oven4. Characterize device using various lab tools

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Process and General Workflow1. Design MEMS device and chose substrate and ink2. Calibrate printer and print device3. Investigate ideal sintering time and temperature and sinter

device in convection oven4. Characterize device using various lab tools

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Substrate Cleaning

Anemometer designno cleaning

Anemometer designcleaned with alcohol and pre-baked

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Resolution Improvements with Cartridge Size

Anemometer design10pL cartridge

Anemometer design1pL cartridge

700µm 700µm

100µm 100µm

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Resolution Improvements with Cartridge Size cont.

Anemometer design10pL cartridge

Anemometer design1pL cartridge

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Conductivity and Sintering Temperature

3,000,000

4,000,000

5,000,000

6,000,000

7,000,000

8,000,000

9,000,000

10,000,000

11,000,000

180 200 220 240 260 280 300 320

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Future Work Continue testing other substrates and observe relevant

topography characteristics and measure conductivity Extend printing to include more complex, multi-layered

devices

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Acknowledgements Joel Kubby Oscar Azucena Bautista Fernández Darwin Fernandez Lynne Raschke Hilary O’Bryan Lisa Hunter faculty, friends, and fellow interns from the CfAO

This project is supported by the National Science Foundation Science and Technology Center for Adaptive Optics, managed by the University of California at Santa Cruz under cooperative agreement No. AST - 9876783