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    14-1 Introduction

    An experiment is a test or series of tests.

    The design of an experiment plays a major role in

    the eventual solution of the problem.

    In a factorial experimental design, experimental

    trials (or runs) are performed at all combinations of

    the factor levels.

    The analysis of variance (ANOVA) will be used as

    one of the primary tools for statistical data analysis.

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    14-2 Factorial Experiments

    Definition

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    14-2 Factorial Experiments

    Figure 14-3 Factorial Experiment, no interaction.

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    14-2 Factorial Experiments

    Figure 14-4 Factorial Experiment, with interaction.

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    14-2 Factorial Experiments

    Figure 14-5 Three-dimensional surface plot of the data from

    Table 14-1, showing main effects of the two factorsA and B.

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    14-2 Factorial Experiments

    Figure 14-6 Three-dimensional surface plot of the data from

    Table 14-2, showing main effects of theA and B interaction.

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    14-2 Factorial Experiments

    Figure 14-7 Yield versus reaction time with temperature

    constant at 155 F.

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    14-2 Factorial Experiments

    Figure 14-8 Yield versus temperature with reaction time

    constant at 1.7 hours.

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    14-2 Factorial Experiments

    Figure 14-9

    Optimizationexperiment using the

    one-factor-at-a-time

    method.

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    14-3 Two-Factor Factorial Experiments

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    14-3 Two-Factor Factorial Experiments

    The observations may be described by the linear

    statistical model:

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

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    14-3 Two-Factor Factorial Experiments

    To test H0: Xi = 0 use the ratio

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    To test H0: Fj = 0 use the ratio

    To test H0: (XF)ij = 0 use the ratio

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Definition

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Example 14-1

    Figure 14-10 Graph

    of average adhesionforce versus primer

    types for both

    application methods.

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    14-3 Two-Factor Factorial Experiments

    14-3.1 Statistical Analysis of the Fixed-Effects Model

    Minitab Output for Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.2 Model Adequacy Checking

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    14-3 Two-Factor Factorial Experiments

    14-3.2 Model Adequacy Checking

    Figure 14-11

    Normal probabilityplot of the residuals

    from Example 14-1

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    14-3 Two-Factor Factorial Experiments

    14-3.2 Model Adequacy Checking

    Figure 14-12 Plot of residuals versus primer type.

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    14-3 Two-Factor Factorial Experiments

    14-3.2 Model Adequacy Checking

    Figure 14-13 Plot of residuals versus application method.

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    14-3 Two-Factor Factorial Experiments

    14-3.2 Model Adequacy Checking

    Figure 14-14 Plot of residuals versus predicted values.

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    14-4 General Factorial Experiments

    Model for a three-factor factorial experiment

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    14-4 General Factorial Experiments

    Example 14-2

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    Example 14-2

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    14-4 General Factorial Experiments

    Example 14-2

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    14-5 2kFactorial Designs

    14-5.1 22 Design

    Figure 14-15 The 22 factorial design.

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    14-5 2kFactorial Designs

    14-5.1 22 Design

    The main effect of a factor A is estimated by

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    14-5 2kFactorial Designs

    14-5.1 22 Design

    The main effect of a factor B is estimated by

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    14-5 2kFactorial Designs

    14-5.1 22 Design

    The AB interaction effect is estimated by

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    14-5 2kFactorial Designs

    14-5.1 22 Design

    The quantities in brackets in Equations 14-11, 14-12, and 14-

    13 are called contrasts. For example, theA contrast is

    ContrastA = a + abb (1)

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    14-5 2kFactorial Designs

    14-5.1 22 Design

    Contrasts are used in calculating both the effect estimates and

    the sums of squares forA,B, and theAB interaction. The

    sums of squares formulas are

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    14-5 2kFactorial Designs

    Example 14-3

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    14-5 2kFactorial Designs

    Example 14-3

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    14-5 2kFactorial Designs

    Example 14-3

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    14-5 2kFactorial Designs

    Residual Analysis

    Figure 14-16

    Normal

    probability plot of

    residuals for the

    epitaxial process

    experiment.

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    14-5 2kFactorial Designs

    Residual Analysis

    Figure 14-17 Plot

    of residualsversus deposition

    time.

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    14-5 2kFactorial Designs

    Residual Analysis

    Figure 14-18 Plot

    of residualsversus arsenic

    flow rate.

    k

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    14-5 2kFactorial Designs

    Residual Analysis

    Figure 14-19 The standard deviation of epitaxial layer

    thickness at the four runs in the 2

    2

    design.

    k

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    14-5 2kFactorial Designs

    14-5.2 2kDesign for ku 3 Factors

    Figure 14-20T

    he 2

    3

    design.

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    Figure 14-21 Geometric

    presentation of contrasts

    corresponding to the

    main effects andinteraction in the 23

    design. (a) Main effects.

    (b) Two-factor

    interactions. (c) Three-

    factor interaction.

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    14 5 2k F i l D i

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    14-5 2kFactorial Designs

    14-5.2 2kDesign for ku 3 Factors

    The main effect ofC is estimated by

    The interaction effect ofAB is estimated by

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    14-5.2 2kDesign for ku 3 Factors

    Other two-factor interactions effects estimated by

    The three-factor interaction effect,ABC, is estimated by

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    14-5.2 2kDesign for ku 3 Factors

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    14-5.2 2kDesign for ku 3 Factors

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    14-5.2 2kDesign for ku 3 Factors

    Contrasts can be used to calculate several quantities:

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    Example 14-4

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    Example 14-4

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    Example 14-4

    14 5 2k F t i l D i

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    14-5 2kFactorial Designs

    Example 14-4

    14 5 2k Factorial Designs

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    14-5 2kFactorial Designs

    Example 14-4

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    Example 14-4

    14 5 2k Factorial Designs

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    14-5 2kFactorial Designs

    Residual Analysis

    Figure 14-22 Normal

    probability plot of

    residuals from thesurface roughness

    experiment.

    14 5 2k Factorial Designs

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    14-5 2kFactorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

    14 5 2k Factorial Designs

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    14-5 2kFactorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

    14 5 2k Factorial Designs

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    14-5 2kFactorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

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    14 5 2k Factorial Designs

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    14-5 2kFactorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

    14 5 2k Factorial Designs

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    14-5 2kFactorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

    Figure 14-23

    Normal probability

    plot of effects from

    the plasma etchexperiment.

    14-5 2kFactorial Designs

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    14-5 2 Factorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

    Figure 14-24 AD (Gap-Power) interaction from the

    plasma etch experiment.

    14-5 2kFactorial Designs

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    14-5 2 Factorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

    14-5 2kFactorial Designs

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    14-5 2 Factorial Designs

    14-5.3 Single Replicate of the 2kDesign

    Example 14-5

    Figure 14-25

    Normal probability

    plot of residuals

    from the plasmaetch experiment.

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    14-5 2kFactorial Designs

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    14-5 2 Factorial Designs

    14-5.4 Additional Center Points to a 2k Design

    Figure 14-26 A 22

    Design with center

    points.

    14-5 2kFactorial Designs

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    14 5 2 Factorial Designs

    14-5.4 Additional Center Points to a 2k Design

    A single-degree-of-freedom sum of squares

    for curvature is given by:

    14-5 2kFactorial Designs

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    14 5 2 Factorial Designs

    14-5.4 Additional Center Points to a 2k Design

    Example 14-6

    Figure 14-27 The

    22 Design with five

    center points for

    Example 14-6.

    14-5 2kFactorial Designs

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    14 5 2 Factorial Designs

    14-5.4 Additional Center Points to a 2k Design

    Example 14-6

    14-5 2kFactorial Designs

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    14 5 2 Factorial Designs

    14-5.4 Additional Center Points to a 2k Design

    Example 14-6

    14-5 2kFactorial Designs

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    14 5 2 Factorial Designs

    14-5.4 Additional Center Points to a 2k Design

    Example 14-6

    14-6 Blocking and Confounding in the 2k

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    14 6 Blocking and Confounding in the 2

    Design

    Figure 14-28 A 22 design in two blocks. (a) Geometric view. (b)

    Assignment of the four runs to two blocks.

    14-6 Blocking and Confounding in the 2k

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    14 6 Blocking and Confounding in the 2

    Design

    Figure 14-29 A 23 design in two blocks withABCconfounded. (a)

    Geometric view. (b) Assignment of the eight runs to two blocks.

    14-6 Blocking and Confounding in the 2k

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    14 6 Blocking and Confounding in the 2

    Design

    General method of constructing blocks employs a

    defining contrast

    14-6 Blocking and Confounding in the 2k

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    14 6 Blocking and Confounding in the 2

    Design

    Example 14-7

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    Example 14-7

    Figure 14-30 A 24 design in two blocks for Example 14-7. (a)

    Geometric view. (b) Assignment of the 16 runs to two blocks.

    14-6 Blocking and Confounding in the 2k

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    14 6 Blocking and Confounding in the 2

    Design

    Example 14-7

    Figure 14-31 Normal

    probability plot of the effects

    from Minitab, Example 14-7.

    14-6 Blocking and Confounding in the 2k

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    14 6 Blocking and Confounding in the 2

    Design

    Example 14-7

    14 7 F ti l R li ti f th 2k D i

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    14-7 Fractional Replication of the 2kDesign

    14-7.1 One-Half Fraction of the 2kDesign

    14 7 F ti l R li ti f th 2k D i

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    14-7 Fractional Replication of the 2kDesign

    14-7.1 One-Half Fraction of the 2kDesign

    Figure 14-32 The one-half fractions of the 23 design. (a) The

    principal fraction, I = +ABC. (B) The alternate fraction, I = -ABC

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    14 7 F ti l R li ti f th 2k D i

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    14-7 Fractional Replication of the 2kDesign

    Example 14-8

    Figure 14-33 The 24-1 design for the experiment of Example 14-8.

    14 7 F ti l R li ti f th 2k D i

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    14-7 Fractional Replication of the 2kDesign

    Example 14-8

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    14 7 F ti l R li ti f th 2k D i

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    14-7 Fractional Replication of the 2kDesign

    Example 14-8

    14 7 Fractional Replication of the 2k Design

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    14-7 Fractional Replication of the 2kDesign

    Example 14-8

    Figure 14-34 Normal probability plot of the effects from

    Minitab, Example 14-8.

    14 7 Fractional Replication of the 2k Design

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    14-7 Fractional Replication of the 2kDesign

    Projection of the 2k-1 Design

    Figure 14-35 Projection of a 23-1 design into three 22 designs.

    14 7 Fractional Replication of the 2k Design

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    14-7 Fractional Replication of the 2kDesign

    Projection of the 2k-1 Design

    Figure 14-36 The 22 design obtained by dropping factors B

    and Cfrom the plasma etch experiment in Example 14-8.

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    14-7 Fractional Replication of the 2kDesign

    Design Resolution

    14 7 Fractional Replication of the 2k Design

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    14-7 Fractional Replication of the 2kDesign

    14-7.2 Smaller Fractions: The 2k-p

    FractionalFactorial

    14 7 Fractional Replication of the 2k Design

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    14-7 Fractional Replication of the 2kDesign

    Example 14-9

    Example 14 8

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    Example 14-8

    14 7 Fractional Replication of the 2k Design

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    14-7 Fractional Replication of the 2kDesign

    Example 14-9

    14 7 Fractional Replication of the 2kDesign

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    14-7 Fractional Replication of the 2 Design

    Example 14-9

    Figure 14-37 Normalprobability plot of effects

    for Example 14-9.

    14-7 Fractional Replication of the 2kDesign

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    14-7 Fractional Replication of the 2 Design

    Example 14-9

    Figure 14-38 Plot ofAB(mold temperature-screw

    speed) interaction for

    Example 14-9.

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    14-7 Fractional Replication of the 2kDesign

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    14-7 Fractional Replication of the 2 Design

    Example 14-9

    Figure 14-39 Normalprobability plot of

    residuals for Example

    14-9.

    14-7 Fractional Replication of the 2kDesign

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    14-7 Fractional Replication of the 2 Design

    Example 14-9

    Figure 14-40 Residualsversus holding time (C)

    for Example 14-9.

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    14-7 Fractional Replication of the 2 Design

    Example 14-9

    Figure 14-41 Average shrinkage and range of shrinkage in

    factorsA, B, and Cfor Example 14-9.

    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    Response surface methodology, orRSM , is a

    collection of mathematical and statistical techniques

    that are useful for modeling and analysis in

    applications where a response of interest is

    influenced by several variables and the objective isto optimize this response.

    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    Figure 14-42 A three-dimensional response surface showing

    the expected yield as a function of temperature and feed

    concentration.

    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    Figure 14-43 A contour plot of yield response surface in Figure

    14-42.

    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    The first-ordermodel

    The second-ordermodel

    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    Methodof Steepest Ascent

    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    Methodof Steepest Ascent

    Figure 14-41 First-order

    response surface andpath of steepest ascent.

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    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    Example 14-11

    Figure 14-45 Response surface plots for the first-order

    model in the Example 14-11.

    14-8 Response Surface Methods and Designs

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    14 8 Response Surface Methods and Designs

    Example 14-11

    Figure 14-46 Steepest ascent experiment for Example

    14-11.

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