additive manufacture of interconnects event/4. thomas.pdf · 2011. 3. 25. · tooling cost ©2011...

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Additive Manufacture of Interconnects Steve Thomas Conductive Inkjet Technology Ltd.

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Page 1: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

Additive Manufacture of Interconnects

Steve Thomas

Conductive Inkjet Technology Ltd.

Page 2: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Importance Of Interconnects

• All electronic devices have

one thing in common:

– Need to get charge carriers

in and out of the device

• Interconnects usually

overlooked

– Organic semiconductors

need lots of development

but metals are already

understood

– Solution exists…

Page 3: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Traditional Production Methods

Copper Clad Board Apply Resist

Expose Resist

Develop Resist Etch Copper Strip Resist

Labour and equipment intensive.

Wasteful of copper – Reprocessing etch solution expensive

Tooling Cost

Page 4: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Screen Printing

Page 5: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Screen Printing

Page 6: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Screen Printing

Page 7: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Screen Printing

Page 8: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Why Move Away?• Etching metals wasteful, equipment and labour

intensive

– Expensive (especially for sputtered metals)

• Printed Silver

– Expensive material

– Good conductivity requires high temperatures

– Problems with soldering

• Both methods require tooling and high up-front costs

– Not good for high mix applications

• Additive and Digital would be nice…

Page 9: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Print and Plate

• Useful if we can separate the printability

from the conductivity

– Print something with poor conductivity but

good print reliability

– Enhance the conductivity once the pattern

has been defined

• Example: Electroplating of silver in seed

layer

– Good conductivity

– But requires advanced plating system or

fully linked pattern

• Use chemistry rather than electricity…

Page 10: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Electroless Copper Plating

• Reduction of copper 2+ ions out of solution without the need to apply an electric current

• Requires 3 main ingredients

– Source of copper ions – Copper Sulphate/Chloride

– Chelating agent to stabilise copper – EDTA/Quadrol

– Reducing agent

• Need a method of control so that the copper only reduces where and when we want it to

Page 11: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Electroless Copper Plating

Catalytic Reduction of Metal Ions in Solution

HCHO + 30H- HCOO- + 2H20 + 2e-Au, Pt, Ni

Cu2+ + 2e- Cu0

Autocatalytic!

2HCHO + 40H- 2HCOO- + 2H20 + H2 + 2e-Cu

Reaction continues after catalyst is completely covered

Page 12: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Catalyst Ink Formulation

Inkjet printing catalyst allows easy patterning of metal and leads to an additive process

� Catalytic metal species

� Binder/thickener

� Solvent

� Humectants

� Surfactant

• Requires drying to remove solvent

• Relatively slow process

• Image quality can deteriorate

• Catalyst prone to chemical attack

Page 13: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

UV Cure

0

0.2

0.4

0.6

0.8

1

1.2

1.4

1.6

200 250 300 350 400

Wavelength (nm)

OD

2-Benzyle-2-(dimethylamino)-1-[4-(4-morpholinyl) phenyl]-1-butanone

Photoinitiator Materials used to kick off a free-radical polymerisation after exposure to UV light

Very rapid transition between non-volatile liquid and insoluble solid

Page 14: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Microstructural Control

• Microstructural control + Phases of differing solubility

– Provides good access to plating solution

– Good adhesion to metal and substrate

A B

C

• Pure UV cure has hard glassy surface and seals catalyst away from plating solution

• Blending different phases and carefully controlling curing/drying can lead to carefully controlled microstructure

Page 15: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Reel to Reel Manufacture

• Inkjet suitable for reel

to reel

• Reel to reel plating

– Fluidic bearings

– No moving parts

– Improved reliability

• Cost of manufacture

– Continuous

– Reduced labour

Page 16: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Typical Properties

• Line Width

– Typical 220 µm and above

• Conductivity

– Typical sheet resistance 20 mΩ/□ to

100 mΩ/□

• Production Speed

– Print ~ 20 m/min

– Plate ~ 2 – 12 m/min

• Solderable

– Assembly using conventional SMT

process and low temp solder

Page 17: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Finer Features

• Device structures such as TFT

arrays, memory or display

elements require much finer

features

• Micron scale

• Not really practical by current

printing technology

• UV Cure nature of ink makes it

ideal to modify for

photolithographic patterning!200 µm

Page 18: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Photolithographic PatterningApply Catalyst

Page 19: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Photolithographic PatterningBake

Page 20: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Photolithographic PatterningExpose Through Mask

Page 21: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Photolithographic PatterningDevelop Catalyst

Page 22: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Photolithographic PatterningGrow Copper on Catalyst By Electroless

Plating

Page 23: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Advantages• Micron scale features

– Typically down to 3 µm

• Less wasteful of metal than sputter and etch

• Ideal for fine metal features on transparent substrates

– ITO Replacement

– Displays, Photovoltaics, Lighting, Transistors, Touch Screens

Page 24: Additive Manufacture of Interconnects Event/4. Thomas.pdf · 2011. 3. 25. · Tooling Cost ©2011 Conductive Inkjet Technology Ltd CONFIDENTIAL ... – But requires advanced plating

© 2011 Conductive Inkjet Technology Ltd CONFIDENTIAL

Summary

• In many applications Print and Plate method is a

more economical solution for interconnect

metallisation

• Inkjet printing allows interconnects to be produced

digitally and reel to reel with modest feature size

• Photolithographic patterning allows micron sized

features for device applications and potential ITO

replacement