िन वदा सूचना सं. सैकपपट /21/2014-15 tender notice no.sac ... ·...

() ..

380 015 ()

+91-79-2691 3051/98

. : +91-79-2691 5835/02/48

Government of India

Department of Space

SPACE APPLICATIONS CENTRE (ISRO)

Ambawadi Vistar P.O.

Ahmedabad 380 015 (INDIA)

Telephone : +91-79 2691 3051/98

Fax No. : +91-79 2691 5835 / 02 /48

Email: [email protected]

. / /21/2014-15

Tender Notice No.SAC/PT/21/2014-15

Dt.: 02-02-2015

, . , , , :

For and on behalf of the President of India, Sr. Head, Purchase & Stores, Space Applications Centre, Ahmedabad invites sealed tenders for the following:

.. SN

. Tender No.

Brief Description

0B( 3

) 1BDue on (up to

3 pm)

1. CUDE 201400163801 3D Camcorder and 3D Video Monitor (Two Part Tender)

25-02-2015

2. AHEG 201400172701 Seed Layer Coated Alumina Substrates (Two Part Tender)

23-02-2015

3. AHEG 201400178501 Magnetron Sputtering System (Two Part Tender)

23-02-2015

4. AHAD 201400185001 Data Entry Services at SAC & Bhopal Campus (Two Part Tender)

25-02-2015

, Uwww.isro.gov.in U . 218/- ( ) . :

Tender documents can be bought from the Purchase Division, SAC and are also available on ISRO website Uwww.isro.gov.in.U Interested tenderers may download the same from the website and submit their offer along with Tender fee of Rs. 218/- each (In the form of Crossed Demand Draft). While submitting your offer superscribe Tender No., and due date on the envelope. If the documents are requisitioned by post, the following points shall be noted:-
http://www.isro.gov.in/

1) / .218/ ( ) , , -380015 2) " " 3) () ( ) , -380015 4) 5) 6) 10 7) , ( . 30-, . 57) 1400 1600 8) 3 :00 9) / 3:30

1) Request letter shall be sent for requisitioning tender documents indicating tender notice number and tender number together with tender fee Rs. 218/- each (In the form of Crossed Demand Draft issued by any Nationalized Bank ) to the Purchase and Stores Officer, Space Applications Centre, Ahmedabad - 380 015 only. 2) The Envelope containing such request shall be super-scribed with

10) 11) / 12) , /

REQUEST FOR TENDER DOCUMENTS'. Separate request letter and separate Demand Draft shall be sent for each tender document. 3) The tender fees (non refundable) shall be paid in the form of CROSSED DEMAND DRAFT (MICR DD ONLY) payable at AHMEDABAD in favor of The ACCOUNTS OFFICER, SAC, Ahmedabad - 380 015 only. 4) Vendor name and tender number shall be indicated on the reverse side of the Demand Draft. 5) No request for extension of the due date will be considered. 6) The sale of the tender documents through POST shall be closed 10 days prior to due date. 7) In case vendors desire to collect the tender document in person, they may contact Purchase Division (Bldg. No. 30-A, Room No. 57) on any working day between 1400 to 1600 hrs up to one day before the due date. 8) Deadline for the receipt of the sealed offers shall be up to 3:00 p.m. on the due date mentioned against individual tender. 9) Bids received before the deadline shall be opened in the presence of attending tenderers/their authorized representatives on the same day at 3:30 p.m

***

. 10) In the event any date indicated above is declared as holiday, the next working day at SAC shall be considered as the due date for receiving & opening of tenders. 11) Late/Delayed offers will not be accepted. 12) Parties, who have submitted bids in time and want to participate in Tender opening, may inform their authorized representatives name one day in advance of the due date indicated against the particular tender. Delayed requests / requests for entry at eleventh hour will not be entertained.

() ..

380 015 ()

+91-79-2691 3051/98

. : +91-79-2691 5835/02/48

Government of India

Department of Space




Telephone : +91-79 2691 3051/98

Fax No. : +91-79 2691 5835 / 02 /48


. / /21/2014-15


.. SN

. Tender No.

Brief Description

0B( 3

) 1BDue on (up to

3 pm)

1. CUDE 201400163801 3D Camcorder and 3D Video Monitor (Two Part Tender)

25-02-2015

GOVERNMENT OF INDIADEPARTMENT OF SPACE

SPACE APPLICATIONS CENTREAHMEDABAD 380 015,INDIA

PURCHASE & STORES

Ph No:Fax

079-2691 3067079-2691 5848/02/35

Date :11/02/2015

M/s

Dear Sirs,

Please submit your sealed quotation , in the Tender Form enclosed here along with the descriptive catalogues /

pamphlets /literature ,superscribed with Our Ref.No. and Due Date for the supply of the following items as per

the terms & conditions mentioned in Annexure( Form No:

S.No. Description of Items with Specifications Unit Quantity

000000

)

Tender Due: 25/02/2015on15:002014-001638-01Our Ref No :

INVITATION TO TENDER

Hrs ISTCUDE

No. 11 3D CAMERA RECORDER (CAMCORDER - INTEGRATED TWIN ZOOM LENS) & ACCESSORIESNo. 12 3D VIDEO MONITOR

DELIVERY AT:

MODE OF DESPATCHDUTY EXEMPTIONS

SPECIAL INSTRUCTIONS

SPECIFIC TERMS

NIL

We are exempted from the payment of Customs/Excise Duty.

ON SITE

SAC-STORES,A'BAD

INSTRUCTIONS TO TENDERERS:(1) This is a Two Part Tender. Please send your offer as per enclosed instructions only. Offer not conforming to the instructions will be rejected. Fax offer will not be accepted. Your offer should be valid for 120 days.(2) In Case, vendors are failing under the category of MSME, registered under NSIC & would like to avail exemptions, their quotations should be accompanied with necessary Registration Certificate with declarationto consider their offer. Quotation received without such declaration and valid registration certificate will not be considered for exemption under Public Procurement Policy.(3) Technical Specifications and Terms & conditions of the items attached.(4) Tender Terms & Conditions (Foreign) attached.

RAJESH SINGH

For and on behalf of the President of India The Purchaser

PUR & STORES OFFICER

Technical Specifications of Integrated Twin Zoom Lens 3D (Three Dimension)

CAMERA RECORDER (CAMCORDER) & Accessories Sr No.

Specification Comply/ Deviation

1 General:

Power requirements: Operate with 1. Rechargeable Battery Pack at rated DC input (For minimum 60 minutes

runtime on battery 2. AC 220V to 240V, 50 Hz through AC Adapter

Operating Temperature : 0C to +40C (32F to 104F)

Operating Humidity: 10% to 80% (No condensation)

2 Camera Section :

Imager -- 1/4 Size (Approx.) , 3- MOS/CMOS/CCD sensor 2 Picture Element - 2 Million pixel (Approx.) X 3 (16/9) X 2

Optical Color Separation Prism type

Sensor Resolution -- 1920 (H) X 1080 (V) or better

Color correction filter -- For color temperature of 3200, 5600 degree Kelvin

Aspect Ratio 16/9

White Balance -- Preset, Memory, ATW

Gain Selection variable gain should be available to meet different lighting conditions

3 Recording Section : Recording media -- Solid State Memory Card (32 GB minimum) X 2 Slot

(For Left & Right Channel) 60 minutes (minimum) recording in full HD mode per unit media

Recording time -- 60 minutes (minimum) in full HD mode per unit media

4 Digital Video :

Recording Video Signal -- 1920 X 1080/ 50i Data Rate

1. 21 Mbps or better AVCHD MPEG4 AVC H.264 OR 2. 50 Mbps or better MPEG 2 Long GOP

Recording Slot Two slot for Left & Right Channel

5

Digital audio :

Recording channel -- Minimum 2 channel Sampling frequency -- 48 KHz Quantization 16 Bits or better

6 Video input/ output :

Video Output -- HD SDI X 2 (Left & Right Channel), (Connector -BNC ) HDMI Output : Should be available

7 Audio input /Output :

Audio Input -- CH-1/CH-2:(Connector-XLR-type 3-pin x2) INTERNAL MICROPHONE: Stereo Microphone Audio output -- Should be available

8 ACCSSORIES: Lens --

Integrated Twin Zoom Lens

Minimum shooting distance: Approx. 1.2m

Inter-Axial Distance : 45mm or more

Zoom Ratio:7x (optical), or better

Zoom -- Servo zoom

Focus Manual

9 ACCSSORIES: View Finder/Display 2 or more -- Auto Stereoscopic

10 ACCSSORIES: Interface base plate for 3D HD camcorder --

To mount 3D Camcorder on Tripod Make Vinten Model - Vision 11

11 ACCSSORIES: Rechargeable battery Pack with battery mount & battery adapter (if

required) for 3D camera recorder At rated DC input

12 ACCSSORIES: Battery Charger & AC Adapter with cable for 3D camera recorder -- To

operate with AC 220V to 240V, 50 Hz

13 ACCSSORIES:CASE & COVER : Hard Case for 3D camera recorder Soft Case for 3D camera recorder Rain Cover 3D camera recorder

14 ACCSSORIES: Manuals for 3D camera recorder -- Operation manual

15 ACCSSORIES: Shoulder mount -- To be used with the 3D camera recorder

16 ACCSSORIES: Compliance to Attached LIST OF DELIVERABLES for Integrated twin zoom lens 3D camera recorder and Accessories

List of Deliverables for

Integrated Twin Zoom Lens 3D (Three Dimension)

CAMERA RECORDER (CAMCORDER) & accessories

Sr No

Description Qty

1 3D camera recorder with integrated twin zoom lens with View Finder / Display (auto stereoscopic)

01

2a Solid state memory card (32 Gb minimum) 10 2b Card reader for Solid State Memory Card 02 3 Interface base plate for 3D camera recorder for

Tripod Make Vinten Model - Vision 11 01

4 Rechargeable battery Pack with mount & battery adapter (If required) for 3D camera recorder

02

5 Battery Charger 3D camera recorder 01 6 AC Adapter with cable for 3D camera recorder 01 7 Hard Case for 3D camera recorder 01 8 Soft Case for 3D camera recorder 01 9 Rain Cover for 3D camera recorder 01 10 Operation manuals for 3D camera recorder 01 Set 11 Shoulder mount for 3D camera recorder 01

Technical Specifications Of

3D (Three Dimension) Video Monitor

Sr No

Description Specifications

Comply/ Deviation

1 Panel Type -- LCD panel with polarizing filter for 3D capture viewing 2 Picture Size (Viewable area, measured diagonally) -- 24 Approx. 3 Aspect Ratio : 16/9 4 Display colors -- Approx. 16.7 million colors 5 Resolution -- 1920 X 1080 pixels or better 6 Viewing Angle -- 178 (Both Horizontal & Vertical) 7 Video Signal Input Format 1080/50i 8 3D Display feature:

Should support 3D capture played back from (procured) Camera recorder (to be supplied as a part of this tender)

9 3D input formats Simultaneous (Dual Stream) Line by Line (Line Interleave) Side by Side

10 Input Interface : HD/ SD SDI -- Connector BNC x 2 Composite -- Connector BNC x 1 RGB/Component -- Connector BNC x 3 External Synchronization -- Connector BNC X 1 DVI-D signal -- Connector DVI-D X1 Audio Input -- Audio input (L,R) interface should be available

11 Output Interface (Loop through) : Monitor output HD/ SD SDI -- Connector BNC x 2 Composite -- Connector BNC x 1 RGB/Component -- Connector BNC x 3 External Synchronization -- Connector BNC X 1 Audio (monitor) out -- Audio output interface should be available

12 General : Power Requirements -- AC 220V to 240V, 50 Hz Operating temperature -- 0C to +35C Operating Instruction manual

13 Compliance to Attached LIST OF DELIVERABLES for 3D Video Monitor

List of Deliverables

For

3D (Three Dimension) Video Monitor

Sr No

Description Qty

1 3D Video Monitor of picture size 24 Approx. 01 2 Operation manual for HD Video Monitor 01 Set 3 For 3D viewing polarized Eyewear 10 4 Cable (with minimum 6 feet length) for 3D video viewing , played

back from camera recorder (to be supplied as a part of this tender) 02

Terms and Conditions for 3D (Three Dimensions)

CAMERA RECORDER with Accessories & Video Monitor

Sr No.

Terms and Conditions Compliance / Deviation

1 Supply, delivery, installation, testing & integration of 3D camera recorder with accessories & 3D Video Monitor, at SAC/ISRO, Ahmedabad, are vendors responsibility.

2 Inter connection compatibility of existing procured equipments with accessories i.e. to make it operational for 3D image capture, 3D recording and the same capture to be played back on3D video monitor is vendors responsibility. Vendor should give functional diagram with quoted equipment & accessories to meet above requirement.

3 Vendor should quote for all the items for 3D camera recorder with accessories & 3D Video Monitor (as per list of deliverables given). Partly quoted offer will not be considered. Vendor should clearly mention in the quotation about applicable tax, Custom duty, levies & other applicable charges, otherwise its offer will not be considered. Price quoted should be for delivery at site i.e. at SAC/ISRO, Ahmedabad.

4 Vendor should clearly mention about his authorization and produce proper authorization certificate of the Original Equipment Manufacturer (OEM) for 3D camera recorder, recording media & 3D Video Monitor. OEMs authorization letter address to our organization with specific tender enquiry should be submitted with the offer.

5 Quoted 3D camera recorder, recording media & 3D Video Monitor by vendor should be from the same OEM.

6 Along with quotation vendor should produce original literature/catalog of the equipments & accessories quoted. Vendor should clearly mention about item description, make, model, quantity, supplied accessories (if any) etc.

7 1. Vendor should produce compliance statement complied by OEM for 3D camera recorder, recording media & 3D Video Monitor along with the offer.

2. Vendor should produce compliance statements for Accessories of 3D camera recorder, Terms and conditions for 3D camera recorder with accessories & 3D Video Monitor, & List of deliverables mentioning item description, make, model, quantity etc.

Any deviations with compliance statements should be clearly mentioned with remark column, if any.

8 Delivery time is 3 month from the release of purchase order. 9 All the equipments and accessories supplied against this order shall be warranted

for 12 (twelve) months on site from the date of acceptance of the material. During the period of warranty, if found that the supplied equipments and accessories is not conforming to the

functioning of equipment standalone as well as a system description, specification, quality, Workmanship etc.

Vendor shall replace/repair at the same, free of cost.

10 Vendor should give ready to quote Annual Maintenance Contract (AMC) for one year after completion of warranty period for the 3D camera recorder with accessories & 3D Video Monitor (optaional).

11 Vendor should ensure and provide On Site service during Annual Maintenance Contract (AMC) for supplied 3D camera recorder with accessories & 3D Video

Monitor. Complain logged, should be attended within two working days. The Vendor shall provide a single contact point with Help Desk for all break down calls reported. Help desk should have a contact phone no., Email, Fax, etc., and should be available during office hours. Vendor must confirm complain/docket number and maintain the logbook.

12 Vendor should prepare Acceptance Test Procedure document (Individual as well as integrated functioning system) for 3D camera recorder with accessories & 3D Video Monitor, approved by DECU. Acceptance test will be done by DECU Engineers at our end. However vendor should remain present and make necessary arrangement during the test.

13 During installation if any equipment, sub-system or accessories found missing, damage or faulty, vendor should replace it on site, free of cost immediately.

14 Vendor should give operational training for 3D camera recorder with accessories & 3D Video Monitor at DECU/ISRO.

15 Payment will be done after delivery & successful acceptance test of 3D Camera recorder with accessories & 3D Video Monitor.

16 Validity of the quotation should be of 120 days. 17 DECU/ISRO reserves right to place order on single vendor for procurement of 3D

camera recorder with accessories & 3D Video Monitor.

18 Performance Bank Guaranty: Vendor should furnish bank guarantee for satisfactory performance of the system during the warranty period for 10% of the total order value along with invoice. The Performance Bank Guarantee shall be issued by the nationalized/scheduled bank as per Performa (to be given by purchaser) on non judicial stamp. The Performance Bank Guarantee shall be valid till the completion of warranty period.

19 Liquidated Damage: The delivery period indicated at clause No. 8 shall be deemed to be the essence of the order. In the event, vendor fail to deliver the systems within the specified in the order or any extension thereof allowed by ISRO, the Department shall have the right to recover from vendor as Liquidated Damage (LD) a sum at the rate of 0.5% (1/2 %) per week not exceeding the total cost of 10% of undelivered systems.

INSTRUCTIONS FOR TWO-PART TENDER

We are proposing to invite Tenders in Two Parts viz. Part I Technical and Commercial & Part II Price.

All Tenderers are requested to follow carefully the following instructions before preparing their offer.

I PART I : TECHNICAL & COMMERCIAL BID Part (a) Technical

i. This part should contain detailed specifications of the items quoted by you along with Technical literature and leaflets if any.

ii. A compliance statement showing the compliance of the item quoted by you with that of item tendered by us should be prepared and enclosed to this.

iii. Any other information called for in the tender related technical and specifications can also come in this part.

iv. Prices should not be indicated in this cover.

Part (b) Commercial terms : (WITHOUT PRICES) i. The commercial terms applicable for the item quoted by you should be indicated

in this part.

ii. If any compliance statement is called for the commercial terms / contractual terms and conditions, the same is to be attached in this part.

iii. Prices should not be indicated in this part. However a copy of the price bid (without prices) can be enclosed in this part to enable to understand whether all the items required to be quoted by you have been quoted in the price bid. Alternatively a statement is to be made indicating that you have quoted prices for all the items as per the tender and enclosed in the Price Bid as per the format.

iv. The Commercial terms such as delivery terms, delivery period, payment terms, Warranty, validity of the offer, installation & commissioning, duties and taxes etc., shall come into this.

Note : 1. Either Technical Specifications or terms & conditions as above should be very clearly

reflected item-wise with reference to the items called for in the tender.

2. Please note that the PRICE SHOULD NOT BE indicated in this part. 3. Technical and Commercial part as described above shall be prepared and put it in a

sealed cover & super scribed and addressed as follows:

Tender No. : Due Date : PART I : TECHNICAL & COMMERCIAL BID

The Sr. Head Purchase & Stores Space Applications Centre

Ambawadi Vistar P.O. Ahmedabad 380 053

From :

II PART II : PRICE BID

i. The prices applicable for the items, item-wise in response to the tender shall come into this part.

ii. Tenderer shall indicate very clearly item-wise prices with reference to their technical offer.

iii. Price part prepared as above shall be enveloped and superscribed as follows: III The Technical & Commercial envelope (Part I) and Price cover (Part II) prepared as

above along with Tender fee cover (if applicable) should be inserted in another envelope and superscribed as follows:

Important Note: Being a Two-Part Tender, fax quotations will not be accepted. Please ensure your offers are received by mail before due date and time. In case you are going to download the documents from our website and submitting the offer, you are requested to submit the DD towards Tender fee in a separate cover along with a covering letter duly superscribing on the cover Tender fee in respect of File No. __________________.

Tender No. : Due Date : PART II : PRICE BID



From :

Tender No. : Due Date : PART I & PART II ARE INDIVIDUALLY SEALED AND KEPT INSIDE : (DD towards Tender fee also is kept inside)



From :

COMPLIANCE STATEMENT REQUIRED TO BE FILLED AND ENCLOSED ALONG WITH THE TECHNICAL AND COMMERCIAL BID BY THE VENDOR.

Sr. No.

Commercial terms Compliance/Remarks/Comments by Vendor

1. Delivery terms -Ex-works/FOB/ FCA etc. 1.1 Purchaser is having an air consolidation contract

and their freight forwarder will arrange to collect the consignment from your premises/will take the responsibility for onward transmission from the point of delivery as per INCOTERMS 2010. This is applicable for import cases.

2. Packing charges inclusive/exclusive. 3. Delivery period in weeks/months 4. Payment terms :

Our standard term is - Sight Draft (import) /within 30 days from the date of acceptance (indigenous).

5. Country of origin to be declared in the invoice. 6. Name and address of the Indian Agent. 7. Percentage of agency commission included in the

quoted price payable in Indian Rupees only directly to the Indian Agent.

8. Validity of the offer- minimum of 120 days from the date of opening.

9. If you are an Indian Agent, please enclose the authorization letter of your Principal and confirm that whether you have enrolled with DGS&D as per rules.

10. In a tender, either the Indian agent on behalf of the Principal/OEM or Principal/OEM itself can bid but both cannot bid simultaneously for the same item/product in the same tender.

11. If an agent submits bid on behalf of the Principal/OEM, the same agent shall not submit a bid on behalf of another Principal/OEM in the same tender for the same item/product.

12. Cost of spares included in the price bid not included.

13. Will you be able to provide consumables/spares for 10 years?

14. 14.1 14.2 14.3 14.4 14.5

Taxes and duties : Taxes in India to the account of Purchaser. Outside India to Sellers/Contractors account. Please indicate your Tax Registration Number. Wherever installation involved, Income Tax @ 2% will be deducted from the bill and a certificate issued. Installation in India will attract Service Tax @ 12.36%. If required, orders for supply and installation can be issued separately. Work order will attract work contract tax as per rules. Please confirm whether you have included WCT in your offer. Customs Duty Exemption Certificate (CDEC) will

14.6 14.7 14.8

be issued by Purchaser. Hence no CD is to be included in your offer wherever applicable. Please indicate rate of the Sales Tax/VAT applicable. Octroi Duty/Entry Tax exempted. Exemption certificate will be issued, if required. Purchaser is eligible for full Excise Duty exemption. Excise Duty exemption certificate will be issued.

15. No Insurance is required at Purchasers cost. 16. For two part bids two separate sealed envelops

are to be sent duly superscribed as follows : 1. TECHNICAL & COMMERCIAL BID 2. PRICE BID

Please refer instructions.

17. Wherever EMD/tender fee is payable provide the same in the form of crossed Demand Draft in favour of The Accounts Officer, SAC, Ahmedabad along with the bid but in a separate cover or along with technical bid. On the back side of the D.D, please write your companys name.

18. Language to be used in all correspondence English

19. Measurements Metric system to be followed 20. Whether prequalification of your facility procedure

completed (if applicable).

21. Warranty period We need minimum 3 years from the date of acceptance. In case the product has a standard warranty of 1 year, confirm that additional 2 years warranty cost is indicated in the price bid/prices. However the warranty requirement if projected in RFP shall prevail.

22.1 Defective/rejected items if any, are to be replaced free of cost.

23. Confirm whether you will be able to provide samples if called for, free of cost.

24 Approximate weight (net and gross) of the consignment.

25. Instruction/operational manual to be supplied free of cost.

26. Supply and installation is subject to Purchasers acceptance.

27. LC extension charges to your account, in case of delay from your side.

28. Items from latest production batch only are to be supplied.

29. Wherever Export Licence required, payment will be made after getting export licence and after confirmation by the supplier, with a copy of Export Licence.

30.

Bank Guarantees (from Nationalized/ Scheduled Bank/ Bank approved by Purchaser.

30.1 30.2 30.2.1 30.3

Advance payment for the equal value valid till the completion of contract/acceptance, is to be provide by you. Towards issue of Free Issue Material by Purchaser for the value of the material issued, is to be provided. The Bill of material for the material used for the Fabrication work and available balance to be prepared by you and countersigned by the User Department is to be sent along with the final bill for arranging the balance/payment. Towards Performance of the Contract and Product for 10% value valid till the expiry of warranty period.

31. Security Deposit is to be submitted to SAC by the successful bidder (wherever applicable )on awarding the contract

32. Training free of cost to be imparted at Purchasers site.

33. Bank charges wherever applicable shall be paid by Purchaser/Contractor to their respective Bankers.

34. Arbitration proceedings Within India as per provisions of Arbitration and Conciliation Act 1996.

35. Liquidated Damages - @ 0.5% per week for the delayed portion maximum 10% of the contract value.

36. Force Majeure conditions applicable? 37. Acceptance of Fall clause.

The rates as per the charges of the Contract should not in any event exceed the lowest rates, the supplier charge to any other party or organization. If at any time during the period of contract, the supplier reduce the charges to any other party, then they shall forth-with notify such reduction to Head, Purchase & Stores, SAC and reduce the contract rates subsequently, from the date of coming into force of such reduction .

38. You are requested to indicate the registration number; you have for Sales Tax/Service Tax as the case may be with concerned Government authorities. Also you are requested to provide company registration details wherever applicable along with copy of the company registration certificate. The offers received without the above information will be summarily rejected.

() ..

380 015 ()

+91-79-2691 3051/98

. : +91-79-2691 5835/02/48

Government of India

Department of Space




Telephone : +91-79 2691 3051/98

Fax No. : +91-79 2691 5835 / 02 /48


. / /21/2014-15


.. SN

. Tender No.

Brief Description

2B( 3

) 3BDue on (up to

3 pm)

2. AHEG 201400172701 Seed Layer Coated Alumina Substrates (Two Part Tender)

23-02-2015



PURCHASE & STORES

Ph No:Fax

079-2691 3067079-2691 5848/02/35

Date :11/02/2015

M/s

Dear Sirs,





000000

)

Opening :Tender Due: 23/02/2015

23/02/2015onon

15:0015:30

2014-001727-01Our Ref No :


Hrs ISTHrs IST

AHEG

each 2001 TiW-Au SEED LAYER COATED 10 Mil ALUMINA SUBSTRATESeach 1002 TiW-Au SEED LAYER COATED 25 Mil ALUMINA SUBSTRATESeach 2003 Cr-Au SEED LAYER COATED 10 Mil ALUMINA SUBSTRATESeach 2004 Cr-Au SEED LAYER COATED 25 Mil ALUMINA SUBSTRATES

DELIVERY AT:



SPECIFIC TERMS

NIL

BY AIR FRE

SAC-AHMEDABAD

INSTRUCTIONS TO TENDERERS:1) Indicate percentage of agency commission payable to your Indian agent, if any2) All bank charges outside India will be to your account only.3) Specifications as per attached sheet.4) This is a Two part Tender, please quote as per attached sheet.

BALRAJ SINGH



Specifications of seed layer coated alumina substrates

A TEECHNICAL SPECIFICATIONS

Seed layer Metallization Scheme: 1) TiW-Au 2) Cr-Au

1 Sputtered 1) TiW 2) Cr

200-300 A0 Part has to specify the exact composition of TiW

2 Sputtered Au 0.5 -0.7 microns 3 Deposition method RF or magnetron sputtered

4 Uniformity of coating 5 % on any substrate or batter 5 Substrate As fired grade Al2O3 Coorstek superstrate 996 or

equivalent (Party has to specify the surface finish 6 Substrate Size 1.0x1.0 50m. 7 Coating layers are required on both sides of the substrate.

8 Coating shall be smooth and free from Nodules, bumps, voids, pinholes with dimensions and allowable cumulative density of such defects shall be as per Annexure-1.

9 Manufacture shall use Alumina substrates as per Annexure-2. 10 Coated substrates and build up metallization shall withstand standard scribing techniques

without metal peeling from edges during snapping. 11 Coated layer shall be easily etchable using standard wet chemical etchants for pattern

generation.

B GENERAL SPECIFICATIONS

1 Manufacturer shall ensure proper packing of substrates with identical identification mark on ground face(B face) of coated substrates, in slotted thermocol boxes with all the details such as ceramic lot number, coated lot number, process date, quantity of substrates clearly indicated on each box..

2 The substrates shall be properly packed with cushioning so that handling and transportation related damages are avoided.

3 The container & individual box shall have mandatory marking instruction written on it Handle with care Fragile material To be opened in clean environments only

4 Individual manufacturing lot should clearly be mentioned and no lot mixing shall be accepted.

5 Quotation should be in the quantity slab of 1 to 100, 101 to 200, 201 and above

6 Manufacturer shall have to provide detailed compliance certificates for seed layer coated substrates as well as bare alumina substrates (Annexure-II) which must include visual inspection of each substrate as per annexure-I with traceability as well as measured values of all specifications, coating thickness (Cr &Au, TiW& Au), uniformity etc. as indicated in bare alumina substrate specifications and seed layer coated substrates. Absence of such document along with substrate shall call for rejection.

C TERMS AND CONDITIONS

1 Manufacturer/authorized representative should provide compliance statement clearly indicating compliance/noncompliance of each specification point along with their offer.

2 The seed layer metalized substrates shall be tested at user end for Bake-In-Air at 300 C for 15 min and metallization adhesion test using pull test method. Any sample showing the sing of blister or discoloration during Bake In Air test and showing pull strength less then 73Kgf shall cause for lot rejection. Supplier shall be responsible to replace the rejected lot as well as any sample rejected during visual inspection at no extra cost within 12 month after receiving the rejected material at their end.

3 Manufacturer shall also mention the delivery schedule and shall also give detail cost and time break up/ schedule.

ANNEXURE: 1

SrNo

Acceptance levels for visual inspection of coated substrates.

DEFECT `A FACE DIMENSION (MICRONS)

MAXIMUM ALLOWANCE/SQ.INCH

`B FACE DIMENSION (MICRONS)

MAXIMUM ALLOWANCE/ SQ.INCH

1 NODULES & BUMPS

>100 DIA. 50-100 DIA. 200 >100 to 200 50 to 100 100 DIA. 50-100 DIA. 200 DIA.

NONE

3 VOIDS/PIN HOLES

>50 DIA. 100 DIA. 50-100 DIA. 100 DIA. 50-100 DIA 100 DIA. 50-100 DIA. 200 05 TO 200

ANNEXURE: 2

Note: Manufacturer shall ensure bare alumina substrate meets above specifications prior to coating. Supplier shall clearly specify heritage of equivalent material if chosen other than Coorstek make superstrate 996 along and detailed datasheet to be provided along with the quote.

S.No. specifications 1 Alumina substrates Coorstek make superstrate 996 or equivalent. 2 SIZE 1.0x1.0 50 microns.

Substrates to require size shall be diced using only diamond blade. Laser scribed substrates are not acceptable.

3 THICKNESS a) 25 mil b) 10 mil 4 THICKNESS TOLERANCE 5% 5 EDGE FINISH 1013










in this part.








Tender No. : Due Date : PART I : TECHNICAL & COMMERCIAL BID



From :

II PART II : PRICE BID

i. The prices applicable for the items, item-wise in response to the tender shall come into this part.

ii. Tenderer shall indicate very clearly item-wise prices with reference to their technical offer.

iii. Price part prepared as above shall be enveloped and superscribed as follows: III The Technical & Commercial envelope (Part I) and Price cover (Part II) prepared as

above along with Tender fee cover (if applicable) should be inserted in another envelope and superscribed as follows:

Important Note: Being a Two-Part Tender, fax quotations will not be accepted. Please ensure your offers are received by mail before due date and time. In case you are going to download the documents from our website and submitting the offer, you are requested to submit the DD towards Tender fee in a separate cover along with a covering letter duly superscribing on the cover Tender fee in respect of File No. __________________.

Tender No. : Due Date : PART II : PRICE BID



From :

Tender No. : Due Date : PART I & PART II ARE INDIVIDUALLY SEALED AND KEPT INSIDE : (DD towards Tender fee also is kept inside)



From :

COMPLIANCE STATEMENT REQUIRED TO BE FILLED AND ENCLOSED ALONG WITH THE TECHNICAL AND COMMERCIAL BID BY THE VENDOR.

Sr. No.

Commercial terms Compliance/Remarks/Comments by Vendor

1. Delivery terms -Ex-works/FOB/ FCA etc. 1.1 Purchaser is having an air consolidation contract

and their freight forwarder will arrange to collect the consignment from your premises/will take the responsibility for onward transmission from the point of delivery as per INCOTERMS 2010. This is applicable for import cases.

2. Packing charges inclusive/exclusive. 3. Delivery period in weeks/months 4. Payment terms :

Our standard term is - Sight Draft (import) /within 30 days from the date of acceptance (indigenous).

5. Country of origin to be declared in the invoice. 6. Name and address of the Indian Agent. 7. Percentage of agency commission included in the

quoted price payable in Indian Rupees only directly to the Indian Agent.

8. Validity of the offer- minimum of 120 days from the date of opening.

9. If you are an Indian Agent, please enclose the authorization letter of your Principal and confirm that whether you have enrolled with DGS&D as per rules.

10. In a tender, either the Indian agent on behalf of the Principal/OEM or Principal/OEM itself can bid but both cannot bid simultaneously for the same item/product in the same tender.

11. If an agent submits bid on behalf of the Principal/OEM, the same agent shall not submit a bid on behalf of another Principal/OEM in the same tender for the same item/product.

12. Cost of spares included in the price bid not included.

13. Will you be able to provide consumables/spares for 10 years?

14. 14.1 14.2 14.3 14.4 14.5

Taxes and duties : Taxes in India to the account of Purchaser. Outside India to Sellers/Contractors account. Please indicate your Tax Registration Number. Wherever installation involved, Income Tax @ 2% will be deducted from the bill and a certificate issued. Installation in India will attract Service Tax @ 12.36%. If required, orders for supply and installation can be issued separately. Work order will attract work contract tax as per rules. Please confirm whether you have included WCT in your offer. Customs Duty Exemption Certificate (CDEC) will

14.6 14.7 14.8

be issued by Purchaser. Hence no CD is to be included in your offer wherever applicable. Please indicate rate of the Sales Tax/VAT applicable. Octroi Duty/Entry Tax exempted. Exemption certificate will be issued, if required. Purchaser is eligible for full Excise Duty exemption. Excise Duty exemption certificate will be issued.

15. No Insurance is required at Purchasers cost. 16. For two part bids two separate sealed envelops

are to be sent duly superscribed as follows : 1. TECHNICAL & COMMERCIAL BID 2. PRICE BID

Please refer instructions.

17. Wherever EMD/tender fee is payable provide the same in the form of crossed Demand Draft in favour of The Accounts Officer, SAC, Ahmedabad along with the bid but in a separate cover or along with technical bid. On the back side of the D.D, please write your companys name.

18. Language to be used in all correspondence English

19. Measurements Metric system to be followed 20. Whether prequalification of your facility procedure

completed (if applicable).

21. Warranty period We need minimum 3 years from the date of acceptance. In case the product has a standard warranty of 1 year, confirm that additional 2 years warranty cost is indicated in the price bid/prices. However the warranty requirement if projected in RFP shall prevail.

22.1 Defective/rejected items if any, are to be replaced free of cost.

23. Confirm whether you will be able to provide samples if called for, free of cost.

24 Approximate weight (net and gross) of the consignment.

25. Instruction/operational manual to be supplied free of cost.

26. Supply and installation is subject to Purchasers acceptance.

27. LC extension charges to your account, in case of delay from your side.

28. Items from latest production batch only are to be supplied.

29. Wherever Export Licence required, payment will be made after getting export licence and after confirmation by the supplier, with a copy of Export Licence.

30.

Bank Guarantees (from Nationalized/ Scheduled Bank/ Bank approved by Purchaser.

30.1 30.2 30.2.1 30.3

Advance payment for the equal value valid till the completion of contract/acceptance, is to be provide by you. Towards issue of Free Issue Material by Purchaser for the value of the material issued, is to be provided. The Bill of material for the material used for the Fabrication work and available balance to be prepared by you and countersigned by the User Department is to be sent along with the final bill for arranging the balance/payment. Towards Performance of the Contract and Product for 10% value valid till the expiry of warranty period.

31. Security Deposit is to be submitted to SAC by the successful bidder (wherever applicable )on awarding the contract

32. Training free of cost to be imparted at Purchasers site.

33. Bank charges wherever applicable shall be paid by Purchaser/Contractor to their respective Bankers.

34. Arbitration proceedings Within India as per provisions of Arbitration and Conciliation Act 1996.

35. Liquidated Damages - @ 0.5% per week for the delayed portion maximum 10% of the contract value.

36. Force Majeure conditions applicable? 37. Acceptance of Fall clause.

The rates as per the charges of the Contract should not in any event exceed the lowest rates, the supplier charge to any other party or organization. If at any time during the period of contract, the supplier reduce the charges to any other party, then they shall forth-with notify such reduction to Head, Purchase & Stores, SAC and reduce the contract rates subsequently, from the date of coming into force of such reduction .

38. You are requested to indicate the registration number; you have for Sales Tax/Service Tax as the case may be with concerned Government authorities. Also you are requested to provide company registration details wherever applicable along with copy of the company registration certificate. The offers received without the above information will be summarily rejected.

() ..

380 015 ()

+91-79-2691 3051/98

. : +91-79-2691 5835/02/48

Government of India

Department of Space




Telephone : +91-79 2691 3051/98

Fax No. : +91-79 2691 5835 / 02 /48


. / /21/2014-15


.. SN

. Tender No.

Brief Description

4B( 3

) 5BDue on (up to

3 pm)

3. AHEG 201400178501 Magnetron Sputtering System (Two Part Tender)

23-02-2015



PURCHASE & STORES

Ph No:Fax

079-2691 3067079-2691 5848/02/35

Date :11/02/2015

M/s

Dear Sirs,





000000

)

Opening :Tender Due: 23/02/2015

23/02/2015onon

15:0015:30

2014-001785-01Our Ref No :


Hrs ISTHrs IST

AHEG

each 11 MAGNETRON SPUTTERING SYSTEM AS PER ATTACHED SPECIFICATIONSE

DELIVERY AT:



SPECIFIC TERMS

NIL

BY AIR FRE

SAC-AHMEDABAD

INSTRUCTIONS TO TENDERERS:Specifications as per attached sheet.This is a two part tender, please quote as per attached sheet.Indicate percentage of agency commission payable to your Indian agent, if any.

BALRAJ SINGH



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Specifications for Magnetron sputtering system: BRIEF INTRODUCTION:

The system is required for deposition of high purity resistive, conductive, dielectric and insulating thin films on variety of substrates/wafers such as dielectric substrates (alumina) piezoelectric substrates (Quartz/LiNbO3 etc.), semi insulating/ semiconductor materials (silicon and gallium based wafer/substrates) etc

The deposited thin films shall be pure with controlled rates and desired uniformity of better than +/- 5 % on a typical 6 wafer.

The system shall be capable of producing smooth and well adherent thin films using magnetron sputtering cathodes with RF and DC sources for stand alone or co sputtering of materials.

The system shall be configured for two separate chamber for (1) metallic material sputtering (deposition) & (2) oxides/nitrides material reactive sputtering (deposition), both the chamber shall be connected with load lock facility to avoid atmospheric exposure during multilayer deposition of metallic, oxides and nitrides deposition as well as loading and unloading the wafers for processing.

System shall be semi automatic operations with manual over ride with clean pumping and suited for small volume R & D laboratory usage (to accommodate minimum 1 wafers of 6 dia. per batch along with all standard accessories) on continuous usage basis and shall have a proven heritage.

Offers received directly from original manufacturer or their authorized representative (with due authorization from manufacturer) shall only be considered.

Supplier shall give bid in two parts in separately sealed envelopes as follows, Part A: Technical offer & commercial offer without price bid. Part B: Price bid for main item and options. Experience of designing, manufacturing, maintaining and supplying the same type of system is Mandatory requirement for Manufacturer/Supplier. The Manufacturers/Suppliers shall clearly bring out any non compliance with respect to SAC specifications stating proper justifications.

PART-A IMPORTANT, INSTRUCTIONS TO TENDERER

Supplier shall give two parts tender, technical & commercial separately. Supplier shall read all below mentioned specifications, description/parameters, remarks and indicate their agreement/compliance to each one separately as well as attach required supporting documents/details substantiating unambiguous compliance of each specification. Supplier shall also read total tender document and submit a signed copy indicating that all parts of the tender has been read and understood before submitting their offer.

Sr.no Detail Response 1 This is a two part tender i.e. The offer shall be strictly in two parts i.e. (1)Techno-

commercial bid & (2)Price bid.(Vendor should also refer two part tender instructions, which are also part of this tender document in addition to the following one.)

1.1 The Technical bid should contain following documents/information. 1.1.1 Vendors Experience: Vendor submitting the quote for above mentioned work shall be a

manufacturer as a regular product or he shall be an authorized representative of such manufacturer. If Vendor represents any such manufacturer then vendor shall attach authorized agency certificate along with the quote indicating date of issue and its validity. Vendor must have supplied, installed, commissioned and operative minimum three similar or higher capacity and rating specified in this tender in last three years. Vendor must have all the required equipments like Helium Leak Detector, vacuum systems, Instrumentation

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& control testing set up etc. which would be essential for such work. Vendor shall attach a list of customer to whom similar items is supplied along with customer reference and contact details. All the documents substantiating experience, list of required equipments, machines and capabilities of manufacturer/vendor to take up this work, as mentioned in this part must be enclosed and absence of which would disqualify the offer.

1.1.2 Vendor shall attached detailed compliance statement with respect to (wrt.) all the specifications/conditions/sub points of this tender document clearly indicating quantitative values offered wherever applicable. They shall also clearly indicate Compliance for total compliance and NC for non-compliance against each specification. Absence of indications such as blank, dash or otherwise against any specification will consider as disagreement/non compliance and same shall be binding to the vendor. Vendor shall also highlight compliance with better or superior specification wherever offered giving detailed merits and description. Supplier shall read all below mentioned specifications, description/values and remarks and indicate their agreement/compliance to each one separately as well as attach required supporting documents/details substantiating unambiguous compliance of each specification. Supplier shall also read total tender document and submit a signed copy indicating that all parts of the tender has been read and understood before submitting their offer. Compliance statement must contain clear and unambiguous response of vendor for all main as well as sub points of this tender document. Vendor shall attach additional documents where ever required giving due reference of respective specification number. Supplier shall clearly bring out non-compliance if any giving due reasons and extent to which it is proposed to comply. Supplier will not be entertained to change compliance status of any specification at later stage.

1.1.3 Original (photocopies not allowed) technical catalogs, literature and detailed data sheets of all items offered by the vendor in support of their offer must be enclosed. Lack of information or ambiguous presentation of technical information shall weaken the merit of their offer.

1.1.4 Application notes and papers published in support of design aspects of the system offered as well as patented designs if any must be enclosed.

1.1.5 Techno-commercial bid containing un-priced details of Taxes, duties and statutory levies applicable, all the payment terms and conditions. Techno-commercial bid should also contain the exact replica of price bid but without containing any price information.

1.1.6 Vendor revealing any price information either knowingly or unknowingly in their Techno-commercial bid as well as during subsequent communication unless it is asked from our purchase department would disqualify the offer for further consideration.

1.1.7 Warrantee/guarantee of the quoted system required shall be for 60 months (as preferable), however vendor shall clearly bring out the standard Warrantee/guarantee period offered as well as extended warrantee/guarantee period offered to cover total duration of 60 months. Please note that minimum standard warrantee/guarantee period required is for 24 months from the date of final acceptance of the system at SAC. Any cost implication if any for the above requirement may please be indicated clearly in the price bid. Extended guarantee period shall be quoted on chargeable basis on per 12 month basis. Vendor has to clearly mention any support on site required for any defect or repair during Warrantee/guarantee period. This system is required to function with highest uptime hence minimum down time preferred would be less than 96 hours from the date of intimation.

1.1.8 Detailed schedule in Primavera OR MS Project showing all the activities from date of receipt of technically and commercially clear Purchase order by vendor till installation, commissioning and final acceptance of the total system at SAC, Ahmedabad.

1.1.9 List of essential spares required for trouble free operation of total system for a period of 36 months after successful completion of standard guarantee period.

1.1.10 List of recommended special tools and toolkits for O & M of the offered system. Relevant price details shall be given in price bid.

1.1.11 List of optional instruments and accessories offered along with full technical details. 1.1.12 Inspection at required stages like factory acceptance shall be carried out by SAC

representative.

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1.1.13 Vendor shall submit minimum two sets of Technical & commercial bids. 1.2 The price bid should contain following documents. 1.2.1 Total price covering entire scope of supply and work defined in these specifications. Total

price shall include standard 24 months warrantee/guarantee period from the date of final acceptance of the system at SAC. Cost of extended warrantee/ guarantee period shall be quoted separately. Any exclusion or optional items offered must be brought out clearly.

1.2.2 It shall also contain detailed price break up for important work/supply elements like chambers, load lock arrangement, vacuum pumping systems, sputtering cathodes (guns), wafer/substrate holder, in situ cleaning arrangement, instrumentation and control system (with & with-out PLC ), installation and commissioning cost. Vendor shall provide as far as possible detailed cost break up on per item basis and work basis to enable SAC to evaluate their offer.

1.2.3 List of all the essential spares recommended in techno-commercial bid with prices on per unit basis and quantity required for trouble free operation of total system for a period of 36 months after completion of standard guarantee of 24 months period. Spare prices must be valid for a period of 36 months from the completion of standard guarantee period.

1.2.4 List of optional items and accessories offered with prices if any. 1.2.5 List of recommended special tools & toolkits as well as preliminary maintenance kit including

required O rings and consumable parts with prices for O & M of the offered system.

1.2.6 Charges for providing basic training for operation, normal maintenance, trouble shooting and acceptance testing at vendors works for two people prior to dispatch of the system. Travel & stay expenses will be borne by SAC. Charges for providing basic training for operation, normal maintenance, trouble -shooting, installation, commissioning & acceptance testing at SAC shall be borne by the vendor.

1.2.7 Charges for safe transportation of total supply elements of these tender, loading, unloading and handling activities, installation & commissioning, acceptance testing and basic training for operation and maintenance of the total system at SAC, Ahmadabad shall be borne by the vendor.

1.2.8 Validity of the offer should be for a period of 180 days from the opening date of this tender. Vendor shall clearly indicate their confirmation for validity period in their offer.

2 General instructions and guide lines to tenderer. 2.1 Tenderer shall go through the complete tender document carefully prior to submitting the

offer and if offer does not contain any specific disagreement/non compliance, it would be treated as total agreement/compliance and shall be binding on the tenderer.

2.2 Tenderer shall attach all technical details in all respect and include confirmation to all the tender specifications, parts, source of brought items and interface requirements, detailed cost break-ups, delivery schedules and performance guarantee.

2.3 Any specification not confirmed or kept blank or indicated dash etc. shall be treated as total non compliance of such specification and SACs interpretation of non compliance shall be binding on the tenderer. Vendor would not be entertained to change status of such compliance of such specification later. Tenderer shall clearly bring out non-compliances if any, giving due reasons and extent to which it is proposed to be complied.

2.4 Compliance of each technical specification must be supported with write up/explanation indicating vendors experience and knowledge base in understanding and capabilities to meet the specification. Plain compliance without such supporting information, datasheet, literature or write up could be treated as non compliance and SAC reserves sole right of acceptance or rejection of such plain compliances w.r.t. SAC specifications.

2.5

Any specification, tenderer is differing or deviating must be brought out with clear justification and SAC reserves sole right of acceptance or rejection of the offer for any of such deviation.

2.6

Tenderer shall submit design details, its approaches and all preliminary calculations along with the compatibility demonstration of the total system with the individual subsystems.

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PART: B

TECHNICAL SPECIFICATIONS:

Sr No.

Specification Description/ Parameters Remark Suppliers response to each specification, description and remarks

1.0 Basic System configuration 1.1 Application Sputter down configuration for

deposition of high purity thin metallic, oxides and nitrides films single material as well as co sputtering, used for multi layer microelectronic applications for space use.

1.2 Structure 1) Separate chambers for oxides/nitrides deposition and metallic/compound film depositions which shall be connected with each other as well as loading and unloading of the wafer by single load lock arrangement using gate valve configuration.

2) Single unit frame enclosure (preferable) with universal design for different applicable field up gradation. Lockable type leveling jacks and castor wheels of appropriate capacity are must.

1.3 Sputtering cathodes (guns)

1. Oxides/nitrides deposition chamber should have three RF-magnetron sputter cathodes (guns) with co-focal arrangement.

2. Metallic and its compound deposition chamber should have three DC magnetron sputter cathodes (guns) with co-focal arrangement.

Each sputtering sources required with separate shutter for pre sputtering and preventing cross contamination of all the target material with each other. Each cathode contained separate power supply RF/DC connected all three targets. With co sputtering facility.

1.4 Sputtering process

Sputtering process vacuum level 2.0 X 10 -3 Torr to 2.0 X 10 -1 Torr System should have co sputtering facility for compound/alloy deposition.

Both the chambers should be usable independently at a time for film deposition process. It should be possible to operate all sputter cathodes (guns) at a time for compound material deposition.

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1.5 Controls and power supply unit

Solid state electronics control Std. 19 rack mounted and integrated within single unit. All the power supply, controlling unit, gas distributions, pump operation, system operation, process control unit, and monitoring units HMI/MMI panel etc., shall be incorporated in single integrated unit.

Comply with any US/EUROPEAN standard. Details may be provided for the same.

1.6 Operations Semi automatic with full function manual over ride for vacuum achieving, process controlling and interlocking etc., is essential. Semi automatic with full function manual override for sputtering process control ie., individual cathode with power level, time duration, thickness monitor etc., Facility process recipe preparation, execution and data storage (soft as well as hard copy) is essential.

Fully automatic production system/ tools without manual over ride are not acceptable.

1.7 Status display Full function display through a MMI or HMI panel.

Display shall be for all the status of vacuum and process ongoing, interlocks etc.,

1.8 Deposition rate and film thickness monitor

Essential for metal deposition chamber only.

Thickness measurement range shall be 0 to 99999

Thickness resolution 1 or better.

Rate of deposition measurement range: 0.0 to 999.9 /sec.

Density value shall be settable 0.01 to 99.99gm/cm3

Tooling factor range : 0.01 to 99.9

LED display should be provided for showing deposition rates & deposited thicknesses.

INFICON/ EDWARDS make preferable. Thickness controller (only for metallic chamber) may be quoted as optional Item.

1.9 Inter locks Vendor shall clearly brought out and include necessary interlocks which are essential for safe & secure operation. Vendor shall also provide detailed list of all built-in safety features including power failure and other emergencies.

Interlocks required for system operation, process and human safety

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2.0 Chamber configuration 2.1 Chamber

Construction material

Chamber material shall be Stainless steel 304L (Internal finish: electro polished and Outer side finish: machine polished.)

Preliminary fabrication drawing of the chamber supplier has to clearly indicate the exact locations of required ports for the system & extra blank ports asked by SAC. It is preferable to get approval of drawing by SAC prior to fabrication. Supplier shall have to provide chamber material test certificate along with the drawing.

2.2 Chambers & load lock

Two separate chambers with single load lock arrangement for loading/unloading the wafers as well as transporting wafer from one chamber to other chamber.

Both the chambers and load lock should have separate vacuum pumps and vacuum plumbing lines.

Universal circular shaped chambers with preferable dimension of preferable minimum 450 mm and 600 mm height.

Top plates should be of SS 304L with 3 nos of sputter cathodes (guns),

In situ low energy ion source arrangement and 4 nos. of 1 feedthroughs and minimum 6 nos. blanked additional feedthroughs for attachments and field up gradations shall be provided on top/bottom of the chamber in addition to system required feedthroughs for both the chambers.

Four gas inlets for each chamber.

Top flange lifting by Hydraulic package system type (also see spec no 2.4)

Extra feedthrough on side wall

Load lock arrangement should be made in such a fashion so that wafer can be loaded/unloaded from any of the chamber as well wafer will be transported from one to another chamber. Load lock to be provided with vacuum line to maintain vacuum during transportation of wafer from one chamber to another.

Supplier shall propose each chamber for

1) Sputter down process with size ( & height) adequate enough to accommodate minimum1 wafer of 6 diameter.

2) 3 three co focal sputter cathodes (guns) having flexibility to adjust distance as well as angle between sputter cathodes (gun) to wafer holder,

3) Heater lamp as well as In-situ cleaner probe,

4) Thickness Monitor/Controller probe.

5) Any other items which supplier feels essential to be incorporated inside the chamber.

Upgradability to accommodate at least two wafers of 4 with planetary motion may be quoted as on optional.

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2.3 Wafer/Substrate holders unit.

a. Required mechanism must be for 3 (02 nos. wafer), 4 diameter wafers (minimum quantity 01) and 6 one wafer basic size.

b. Additional required mechanism must be for 1 square (~20 nos wafer) and 2 square ( 4 nos wafer) basic size.

c. Rotary system to achieve film uniformity of better than 5 % for each holder. Supplier should provide rotary speed 1 rpm to 30 rpm minimum however in case of higher rotary speed specify the range of speed of rotary system.

d. Biasing of the wafer holder and cooling mechanism is essential.

Two sets of each type of the holder to be quoted along with the offer.

For cooling mechanism recirculation water chillers to be quoted along with the offer.

For biasing the wafer holder suitable power supply to be quoted along with the offer.

Planetary motion is preferable.

In case motors for planetary motions are outside the chamber, the coupling to inside the chamber shall be ferromagnetic seal based only.

In case motor for planetary motions is inside than it shall be vacuum compatible.

2.4 Chamber Access Loading and unloading of the wafer through load lock only.

Heavy duty hydraulic package arrangement for lifting the top plate/flange is essential.

Load lock is essential Heavy duty hydraulic arrangement for maintenance as well as changing target material.

2.5 Chamber liner Linear should be of SS 304L with electro polished to avoid the deposition of material on the chamber wall.

One additional set of liner shall be quoted as optional supply.

2.6 View port 6 viewports 3 nos in each chamber and 1 nos in load lock.

View port should be located opposite side of the sputter gun having size 6 diameter quarts window for direct viewing of process at source and sample holder. One view port should be located in the center of load lock for viewing wafer holder during transportation from one chamber to another chamber. Additional Periscope arrangement is desirable and shall be quoted as optional supply. One set of quarts windows should be quoted as an optional.

2.7 Chamber heating IR/ halogen lamp heater of adequate capacity shall be provided to heat the chamber as well substrate surface with PID

Extra sensor with mounting mechanism desirable and quoted as optional. Exact resolution of digital

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controller. Temperature control accuracy of 1C of set value. Heating System shall be capable to provide temperature from ambient to 150C (at sample holder) with in 30 min. Temperature sensor: Vacuum compatible PT100, three wire sensor with shielded. Temperature measuring range: -200 C to +200 C. Provision of one spare sensor is also required.

readout shall be specified. There should be provision for upgrading the heating of the substrates up to 300 C without changing of major components of heater.

2.8 Empty Chamber Helium Leak Test

Each welded joint shall have less than 5 X 10 -9 Torr ltr/sec leak rate for Helium

Before integration starting, supplier has to carry out MSLD test And ensure the specification.

2.9 Ultimate Vacuum Empty and clean chamber shall be capable of maintaining better than 7 X 10 -8 Torr.

System should be capable to achieve the vacuum level 1 X 10 -7 Torr in < 4 hour. Exact vacuum level and time duration may be provided. Also same will be demonstrated in presence of SAC engineer during FAT spec no: 6.12 as well as at the time of installation at SAC.

2.10 In-situ Cleaning provision

In-situ substrate cleaning using grid less low energy ion gun (up to 300 eV), preferably KRI source with calibrated MFC arrangement.

Ion source shall be field upgradeable. DC/RF based glow discharge mechanism is not acceptable.

2.11 Shutter and enclosure for sputter cathodes (guns)

System shall be equipped with suitable auto shutter for each sputter cathodes (guns) total six shutters with manual override for source enclosure and used for a. To avoid cross contamination

from other sputter cathodes (guns)

b. Viewing/ Monitoring the process

3.0 Vacuum Pumping and gas distribution system 3.1 Vacuum

Pumping System Separate vacuum pumping system required for both the chamber and load lock arrangement. Required capacity of Turbo molecular pump with suitable dry type backing/roughing pump. Oil free clean dry pumping system is must. 1. Shall be capable of achieving ultimate vacuum better than 7 X

Pfeiffer/ Agilent /Edwards /Alcatel make pumps are preferable.

Vendor shall provide required vacuum pumping system sizing calculations in the Technical offer.

Exact attainable vacuum level and pump down time of

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10 -8 Torr. in clean and empty chamber. Required time to achieve 7 X 10 -8 Torr to be specified by supplier. 2. Vacuum system shall be able to achieve better than 1 X 10 -7 torr. in a 4 hour for normal operation.

Dry rotary/Scroll vacuum pumps shall be specified in the offer.

Required mist filter and all other essential accessories/ attachments shall be inclusive.

Required automatic vent valve, filter and other essentials accessories including maintenance bearings of Turbo pump shall be inclusive part of the offer.

Turbo controller shall be rack mounted.

3.2 Turbo pump cooling

Air cooled version shall be preferred. In case of water cooled turbo the utility requirements shall be clearly stated.

In case of water cooled turbo, supplier shall quote for recirculation water chiller separately as optional supply item.

3.3 Liquid nitrogen trap

This is essential with easily accessible fill port with all required filling accessories.

Appropriate nitrogen trap volume shall be specified for LN2 requirement.

3.4 Vacuum plumbing and valves

It shall provide vibration free operation and easy access for maintenance and leak tests. Electromagnetic vacuum valves shall be must. All the valves are electromagnetic/ electron pneumatically operated.

Vacuum plumbing shall be of KF type flanges with clamping arrangement is preferable with one blank for vacuum leak testing purpose. Flexible SS bellow shall be used from mechanical pump to backing/roughing line to prevent unwanted vibrations. One set of valves shall be quoted as an optional.

3.5 Vacuum system Control

PLC based automatic with full function manual over ride for diagnostics and maintenance purpose is essential. All safety interlocks and alarms feature for safe operation and time out etc. shall be provided and included.

PLC automation shall be GE-Fanuc/Siemens preferable with all essential programmable, operation and safety interlocks. Interface with MMI/HMI main control panel for on line monitoring essential.

3.6 Vacuum and Status display

Digital display for chamber, backing and roughing vacuum levels, diagnostics etc., shall be provided with computer interface.

Pfiffer/Agilent makes vacuum status display with computer interfaces preferred.

3.7 Vacuum gauges Universal type with digital display computer interface capability. It will be essential to provide NIST traceable calibration

Pfiffer/ Agilent make vacuum gauges are preferred which is able to diplay for the range form atm to 1.0-10 torr Shall be mounted on both the

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certificates at the time supply valid for a period of one year from final installation at SAC.

chamber and load lock system for measurement of realistic levels at minimum contamination locations. Exact mounting location diagram to be provided before fabrication of the system. Maintenance and calibration procedures are to be specified by supplier. One extra set of vacuum gauges shall be quoted as optional.(specs no 6.10)

3.8 GAS distribution system

Each chamber should have at least three gas inlets with electronically controlled mass flow controller (MFC), for different gases like Argon, Oxygen, and Nitrogen etc. Minimum four channel MFC to be provided with each chamber. Full scale range up to 500 SCCM Controller with digital read out having controllability better than 0.1 SCCM is essential. Calibration of MFC and gas correction factor for different gases is essential. Separate valve system to provide for each gas inlets. All the gases can be purged individually as well as simultaneously

MKS make is preferred.

4.0 Sputter cathodes

4.1 Sputter cathodes Total Six nos of sputter cathodes (gun)

Each chamber containing three sputter cathodes.

All the sputter cathodes should be permanent magnet based.

Water cooling mechanism. For 3 and 2~10 mm thick

target material. Target can be mounted using

screw type mechanism. Mounting of the target on sputter cathode using conductive epoxy/bonding material is not acceptable

Adjustable distance and between targets to wafer holder.

Power handling- for RF up to 1000 W and for DC up to 2000 W

Balanced magnetron sputter cathodes (guns) is only acceptable.

Additional adjustment of at least 1 distance between cathodes and wafer holder inside the vacuum chamber without breaking the vacuum.

Changing the angle between sputter cathodes (gun) and substrates is preferable.

Angstrom make sputter cathode is preferred.

Details of the cathodes with supporting document shall be provided by vendor

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5.0 RF& DC power supply for sputter cathodes (guns) 5.1 RF power source Three RF power sources/

supplies for oxide/nitride chamber

Frequency 13.56 MHz 5% Power level 1.0 KW Power adjustable form 1W to

1 KW at 1 W step. Tuning network having auto

tuning facility with manual over ride

Digital display for forward power, reflected power, bias, position of capacitance load (CL) & capacitance tuning (CT) temperature etc.,

Air cooled RF power source and tuning network is preferable. In case of water cooling required necessary water lines and interlocks to be provided.

Rack mountable, Compact, completely safety interlocked & CE certified.

Huttinger/Advanced Energy make is preferred. All the power supplies should be of same make and model. For water cooled RF supply, recirculation water chiller with full technical details shall be quoted as optional. All the power supplies should be of same make and model.

5.2 Vacuum level & RF power interlocks

Essential. Vacuum level for interlock must be settable. Interlocks also provide for water, reflected power etc.

It shall be capable to interlock no water, High temperature, poor vacuum level >3X 10 -1 torr, high reflected power, etc.,

5.3 DC power supply Power level 1.5 KW (1500 W) Current range 0.1 to 3 amps

with increment of 0.01 amps Voltage 10 to 600 V with

increment of 0.1 volts Constant voltage (CV) and

constant current (CC) indicator.

On/Off control/power supply status signal.

Interlock unable/disable Standard digital interface. Power factor correction. Programmable fold back

protection delay. Power level setting through

controller.

Current and voltage range shall be corresponding with total power of 1.5KW shall be chosen. Huttinger/Sorenson/Advanced energy make power supply is preferred. All the power supplies should be of same make and model.

5.4 Vacuum level & DC power interlocks

Essential. Vacuum level for interlock must be settable. Interlocks is also essential for water, high temperature, open circuits etc.,

It shall be capable to interlock no water, High temperature, poor vacuum level 3X 10 -1 torr, open circuit etc.,

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6.0 General specifications 6.1 Mains power

supply 230 V 10 % single phase (1 ) OR 440 V 10 % three phase (3 ) 50 Hz

Exact electric load and heat dissipation for full operation to be specified

6.2 Environmental conditions & site requirements

The quoted system shall be fully compatible to class 100 clean room with 22+/- 2 0 C and 50 +/- 5 % RH environmental condition.

Exact details for operating conditions and detailed site requirements are to be specified.

6.3 Recirculation water chiller

Recirculation water chiller for all the required mechanism like wafer holder cooling, turbo pump cooling, sputter cathodes (guns), RF power supply cooling, etc.,

Single recirculation water chiller for each chamber is preferred for all the applications.

6.4 Utilities All external utilities shall be inter-locked for system performance and safety. Recirculation water chiller.

Single recirculation Water chiller used for all the required cooling mechanism is preferred. In case of electro-pneumatic operation of valves required Air compressor (with technical details) shall be quoted as an optional. Any other utilities which are essential for smooth and reliable operation such as venting gas requirement, remote assistance etc and not listed here shall be quoted as optional items.

6.5 Foot print and weight and clean room compatibility

The system shall be compact designed with lowest possible foot print. However the configurations must be equally maintenance friendly. All exteriors of the cabinets etc shall be powder coated/finished and Class-100 clean room compatible only.

Maximum height of the total system should be less than 2.5 meter. Details to be provided for overall dimension and weight.

6.6 Operation and trouble shooting manuals along with electric/mechanical schematics

Essential. Detailed PCB circuit diagrams shall be provided. All standard software shall be licensed or free version. All customized software shall be provided with total modifiable source code, compiler, editor etc. all inclusive.

2 sets of each in English in hard copy format. However the same shall be provided in CDs/USB drive etc.

6.7 Safety and inter locks

System design shall take care of all inter locks and safety aspects like equipment, human and application safety. Supplier shall provide details of all built-in safety features including power failures and other emergencies.

Supplier to provide full details.

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6.8 Standard Warrantee/guarantee and Extended Warrantee/guarantee Period

Total 60 months (preferable) Warrantee/guarantee shall be quoted and included in the price offered. This shall include standard Warrantee/guarantee of 24 months and extended Warrantee/guarantee of 36 months. Note: For detailed clarity on this refer Important instruction to Tanderer at Sr no: 1.1.7 Please note that standard Warrantee/guarantee period shall commence from the date of final acceptance of the system at SAC.

Charges for 36 months extended Warrantee/guarantee shall be quoted as an optional on 12 month basis. Vendor shall clearly mentioned parts which are not covered under standard Warrantee/guarantee with its price. Supplier to state clearly a detailed schedule of free preventive and break down visits included as a part of Warrantee/guarantee. To ensure full and efficient support during Warrantee/ guarantee period, local support is preferable. (Supplier shall note that the extended warrantee shall be on post payment basis (on 12 month basis) and shall be effective on successful completion of standard Warrantee/guarantee period )

6.9 System heritage The complete system or parts like vacuum pumps, power supplies, PLC, PID, electron gun, thickness monitors etc shall be from reputed manufacturer/ supplier and have a proven heritage and necessary details shall be submitted in support of this. Refurbished system is not acceptable.

Prototype, developmental or refurbished system shall not be quoted. A detailed list of existing customer base, references, and contact details may be submitted along with the quotation.

6.10 Consumables Maintenance kit of in situ ion cleaning consisting of source filament, connectors, spacers etc.

Minor/major system maintenance kit.

O ring and oxygen free coper (OFC) gasket kit

Feedthroughs/ clamps Essential bellows Blanks. Thermocouple One set of vacuum gauges Window glasses. One set of shutter assembly Any other consumable/spares

which is essential for smooth functioning of the system.

Vendor shall specify the full details of the consumables with quantity of each component. Required consumables shall be quoted as an optional.

6.11 Spares/consumables support

Manufacturer to guarantee spares/consumables support for a period of not less than 10 years.

During the warrantee/guarantee period SAC shall be procuring only the consumables. However post warrantee/guarantee period SAC may enter into AMC/ call basis contract on mutually agreed terms and conditions.

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6.12 Pre-dispatch Inspection and acceptance (Factory acceptance test-FAT)

SAC reserves the right to have pre-dispatch inspection at manufacturers site and may request to produce test samples/test results to ensure at least following system performance checks for its acceptance. 1. Ultimate vacuum 2. Vacuum pump down curve. 3. Electronics and control system 4. All six sputter gun operation. 5. In situ cleaning process operation. 6. Co sputtering as well as

simultaneous deposition in both the chamber.

7. Reactive sputtering for oxides and nitrides deposition.

8. Deposited film thickness control 9. Deposited film uniformity 5%

on 6 wafers for 500, 15000 & 70000 thickness of at least three layer thin film deposited wafers.

10. Deposited film adhesion by standard scotch tape test.

11. Supplier has to provide operation and maintenance training to minimum two SAC engineers/technicians at their site.

In case of pre dispatch inspection and acceptance desired by SAC, vendor has to communicate readiness of the system with six to eight weeks notice time.

6.13 Installation & demonstration of performance at SAC.

System shall be installed at SAC by OEM or their qualified representative and performance shall be demonstrated as per specifications/ Purchase order.

Installation also includes demonstration as per spec no: 6.12

6.14 Training at SAC Vendor shall provide necessary operational/ maintenance training to SAC engineers/technicians.

6.15 Compliance All compliances shall be supported by technical leaflet or statement from manufacturer. Any blank left shall be taken as non compliance. Vacuum pumps, gauges, RF and DC power supplies, thickness monitor, In situ ion source cleaning mechanism, Gas distribution, valves etc., shall be of standard product of the manufacturer. A technical leaflet for quoted items is essential photo copy is not acceptable.

Vendor shall also bring out the reasons for deviations, all relevant standards or with better specifications along with explanations.

6.16 Application notes Desirable Any applications notes etc which the supplier think may be useful shall be submitted along with the quotation.










in this part.








Tender No. : Due Date : PART I : TECHNICAL &

िन वदा सूचना सं. सैकपपट /21/2014-15 tender notice no.sac ... ·...

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