a comparison of scrub marks & contact resistance ... 12, 2003 1 “a comparison of scrub marks...
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May 12, 2003 1
““A Comparison of Scrub Marks A Comparison of Scrub Marks
& Contact Resistance Between & Contact Resistance Between Cantilever Type and New MEMS Cantilever Type and New MEMS
Type Probe CardsType Probe Cards””
JaeJae--Ha LeeHa LeeByungByung--Ho Jo DrHo Jo Dr
Phicom CorporationPhicom Corporation
May 12, 2003 2
Probe Card Comparison CriteriaProbe Card Comparison Criteria1. MEMS PROBE CARD1. MEMS PROBE CARD2. Pin Force2. Pin Force3. Probe Planarity3. Probe Planarity4. Scrub Mark Width/Depth4. Scrub Mark Width/Depth5. Probe X,Y Alignment5. Probe X,Y Alignment6. Path Resistance6. Path Resistance7. Life Time (Number of touchdowns)7. Life Time (Number of touchdowns)8. Bandwidth8. Bandwidth9. Specification9. Specification
May 12, 2003 3
1. MEMS PROBE CARD1. MEMS PROBE CARD
Manufactured by MEMS TechnologyManufactured by MEMS Technology
Vertical Micro ProbeVertical Micro Probe
High MultiHigh Multi--DUTDUT
Optional Tip StructureOptional Tip Structure
May 12, 2003 4
MEMS Probe Card ViewMEMS Probe Card View
Probe Head
Micro ProbesPCB
Planarization Mechanism
Decoupling Capacitor
Planarization Mechanism
Interface Pin
PCB
Micro Probe
Micro Probe Head
MEMS Probe Card- Manufactured by MEMS
technology
MEMS Probe Card side view
May 12, 2003 5
Micro Probe Tips of MEMSMicro Probe Tips of MEMS
54µm
125µm
42µm
12µm
35~45µm
MEMS PT1 Type MEMS PT2 Type
May 12, 2003 6
2. Pin Force2. Pin Force- Overdrive Vs Contact Force
- GraphNeedle P/CMEMS P/C
O.D Value
6.46.4--
2mil2mil
4.64.6--
1.5mil1.5mil
----9.79.77.47.87.87.07.06.06.05.0
4 mil4 mil3.5 mil3.5 mil3 mil3 mil2.5 mil
7.4Needle P/C5.0MEMS P/C
2.5 milO.D Value(Unit:gf/mil)
(Unit:gf/mil)
May 12, 2003 7
• The planarity after 29,600 touchdowns• T/D is real contact number on production line
3. Probe Planarity (MEMS P/C 64 DUT)3. Probe Planarity (MEMS P/C 64 DUT)
After 29600 TDS (Unit:um)
Before TDS
May 12, 2003 8
Probe Planarity (NEEDLE TYPE P/C)
• The Planarity after 29,600 Touchdowns• Touchdown Test in EG 4090 Prober System without Signal
After 29600 TDS (Unit:um)
Before TDS
May 12, 2003 9
Probe Planarity (PRVX)- Touchdowns Vs Planarity (Max.-Min.).
Measure the Pin Planarity after touchdownsTD of MEMS P/C is real contact number on production lineTD of Needle P/C is internal test data on EG 4090 Prober
25.218125.218122.242422.242420.324920.324917.221417.2214Needle P/CNeedle P/C22.146622.146620.356420.3564MEMS P/CMEMS P/C29.6K29.6K12K12K6.4K6.4K00TDS TDS
(Unit:um)
May 12, 2003 10
4. 4. Scrub Mark Width/DepthScrub Mark Width/Depth
PT1 Tip Scrub Mark Width/DepthPT1 Tip Scrub Mark Width/Depth
PT2 Tip Scrub Mark Width/DepthPT2 Tip Scrub Mark Width/Depth
Needle Scrub Mark Width/Depth Needle Scrub Mark Width/Depth
May 12, 2003 11
PT1 Tip Scrub Mark Width (SEM)PT1 Tip Scrub Mark Width (SEM)
O.D:3.0 milO.D:2.5 mil
O.D:3.5 mil O.D:4.0 mil
May 12, 2003 12
PT2 Tip Scrub Mark Width (SEM)PT2 Tip Scrub Mark Width (SEM)O.D:3.0 milO.D:2.5 mil
O.D:3.5 mil O.D:4.0 mil
May 12, 2003 13
Needle Scrub Mark Width (SEM)Needle Scrub Mark Width (SEM)O.D:3.0 milO.D:2.5 mil
O.D:3.5 mil O.D:4.0 mil
May 12, 2003 14
Scrub Length & Area (all types are compared)Scrub Length & Area (all types are compared)
Scrub Mark X trend
Scrub Mark X*Y trend
May 12, 2003 15
Scrub Mark Depth Measurement EquipmentScrub Mark Depth Measurement Equipment
Model: SIS-1200
Interscan System
Z-Resolution : EPSI 1nm
PSI 0.1nm
Lateral Resolution :MAX0.64um
Lens : 50X
L/R:0.64um
Field of View : 0.14 x 0.10mm
May 12, 2003 16
O.D:2.5 milPT1 Tip Scrub DepthPT1 Tip Scrub Depth
O.D:3.0 mil
May 12, 2003 17
PT1 TIP Scrub DepthPT1 TIP Scrub Depth O.D:3.5 mil
O.D:4.0 mil
May 12, 2003 18
O.D:4.5 milPT1 Tip Scrub DepthPT1 Tip Scrub Depth
PT1 Tip Scrub Depth TrendPT1 Tip Scrub Depth TrendPT1 Tip
2000
2500
3000
3500
4000
2 2.5 3 3.5 4 4.5 5
Over Drive(mil)
Scru
b Dep
th(Å
)
May 12, 2003 19
O.D:2.5 milPT2 Tip Scrub DepthPT2 Tip Scrub Depth
O.D:3.0 mil
May 12, 2003 20
PT2 Tip Scrub DepthPT2 Tip Scrub DepthO.D:3.5 mil
O.D:4.0 mil
May 12, 2003 21
PT2 Tip Scrub DepthPT2 Tip Scrub Depth O.D:4.5 mil
PT2 Tip Scrub Depth TrendPT2 Tip Scrub Depth TrendPT2 Tip
2000
2500
3000
3500
4000
4500
5000
5500
2 2.5 3 3.5 4 4.5 5
Over Drive(mil)
Scrub
Dep
th(Å
)
May 12, 2003 22
Needle Scrub DepthNeedle Scrub DepthO.D:2.5 mil
O.D:3.0 mil
May 12, 2003 23
O.D:3.5 milNeedle Scrub DepthNeedle Scrub Depth
O.D:4.0 mil
May 12, 2003 24
Needle Scrub DepthNeedle Scrub Depth
Needle Tip Scrub Depth TrendNeedle Tip Scrub Depth Trend
O.D:4.5 mil(Å
)
Needle
0
1000
2000
3000
4000
5000
6000
2 2.5 3 3.5 4 4.5 5
Over Drive(mil)
Scrub
Dep
th(Å
)
May 12, 2003 25
Scrub Depth (all types are compared)Scrub Depth (all types are compared)
Scrub Depth (All type)
0
1000
2000
3000
4000
5000
6000
2 2.5 3 3.5 4 4.5 5
Over Drive
Dep
th PT1PT2Needle
(Å)
May 12, 2003 26
5. Probe X,Y Alignment (MEMS)5. Probe X,Y Alignment (MEMS)
Before TDS After 29600 TDS
Real contact number on production line
May 12, 2003 27
6. Path Resistance- Touchdown Vs Path Resistance (Average)
- Graph
1.61211.61211.60121.60121.69811.69811.14371.1437Needle P/CNeedle P/C
1.051.051.041.04MEMS MEMS P/CP/C
29.6K29.6K12K12K6.4K6.4K00TDSTDS
(Unit:Ohm)
May 12, 2003 28
MEMS P/C Path Resistance Trend
Before TDS After 29600 TDS without Cleaning
Real contact number on production line
May 12, 2003 29
Needle P/C Path Resistance Trend
Before TDS After 29600 TDS without Cleaning
Phicom Test Data
May 12, 2003 30
7. Probe Life Time- Life Time (Number of Touchdowns)
32,000TDS
120,000TDS64,000TDS
May 12, 2003 31
- Cleaning Period
30000TDS CleaningMean Time Between Cleaning (April 03')
0
5
10
15
20
25
30
35
M01 M02 M03 M04 M05 M06 M07 M08 M09 M10
MEMS P/C (64 DUT) Serial number
Days
Initial
May 12, 2003 32
8. MEMS Probe Card Bandwidth
Insertion Loss (S21)
-3
-2.5
-2
-1.5
-1
-0.5
0
0 0.5 1 1.5 2
GHz
dB
May 12, 2003 33
Sys te m Value Unit3D 15 ~ 20 um
25 ~ 30 umLe akage <5 nA
<5 OhmVxe rr 80 ove rlay %Vye rr 80 ove rlay %S crub 10 umTscrub 25 umDiame te r <18 um
S EM < 13 umS crub Are a <13x24 um2
Normal 75 umMaximum 110 um
Impe dance Polar 50 (±10%) Ohm600 mA
Pin Force 2.5(±20%) gf/mil8.8 mm
> 15,000 TDsLife Time Probe r 1 Million TDs
Me asure me nt Ite msSpe cification
Planarity
PRVX
Contact Re sistance
Probe De pthCle aning Pe riod
Max Curre nt
Tip Diame te r (Change able )(Base d on O.D 75um)
O.D.
9. MEMS Probe Card Specification
May 12, 2003 34
Summary
- Enough Pin Force to penetrate Al2O3- Stable Planarity- Stable X.Y Alignment Status- Low Pad Damage With Enough Scrub Mark- Constant Path Resistance- Long Cleaning Period- Long Life Time- Uniform Probe Tip Shape