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5-VALVE MANUAL ESO PROTECTED CENTURION™ GAS SOURCE MANIFOLD

OPERATION & MAINTENANCE MANUAL

Part Number S052-0091 July, 2003

166 Keystone Drive Montgomeryville, PA 18936 Telephone: 215-641-2700 Fax: 215-641-2714

Copyright Notice © 2003 Matheson Tri-Gas All rights reserved. Printed in USA Trademark Information Auto-Purge is a registered trademark of Matheson TriGas. Auto-Guard, GEMS, and GEMS-Simon are trademarks of Matheson TriGas. MicroLogix is a registered trademark of Rockwell Automation. Pro-face is a registered trademarks of Digital Electronics Corporation. Teflon is a registered trademark of E.I. du Pont de Nemours and Company. Kwik Bolt® is a registered trademark of Hilti. Beldfoil® and Flamarrest® are registered trademarks of Belden. Ethernet is a registered trademark of Digital Equipment Corporation, Intel, and Xerox Corporation. Purifilter is a trademark of Black & Decker. Other product and company names mentioned in this manual may be the trademarks of their respective owners. Scope of this Document This document is concerned with the installation, operation, and maintenance of the 5-Valve Air Operated Centurion Auto-Purge Gas Source Manifold. For information about the installation, operation, and maintenance of the Consul Centurion Controller, refer to the appropriate manual.

Document Revision History Document Part No. Edition Status Issued Centurion Gas Source Manifold Operation & Maintenance Manual

S052-0091 Revision A1 Current July, 2003

TABLE OF CONTENTS

CENTURION GAS SOURCE MANIFOLD – OPERATION & MAINTENANCE MANUAL i

1. GENERAL DESCRIPTION OF CENTURION EQUIPMENT ................................................1 1.1 Centurion Gas Source Manifold.............................................................................2

1.1.1 GSM Features ................................................................................................5 1.1.2 Gas Cylinder Enclosure Features...................................................................6

2. ENGINEERING DATA ..........................................................................................................7

2.1 Gas Source Manifold..............................................................................................7 2.1.1 Utilities Required.............................................................................................7 2.1.2 Manifold Characteristics .................................................................................7 2.1.3 Enclosure Characteristics...............................................................................8

3. COMPONENT OPERATING CONVENTIONS...................................................................11

3.1 Valves ..................................................................................................................11 3.2 Regulators............................................................................................................11

4. SAFETY PRECAUTIONS ...................................................................................................13 5. PERSONNEL TRAINING....................................................................................................15 6. INSTALLATION...................................................................................................................17

6.1 Equipment Unpacking and Insurance Claims......................................................17 6.2 Installation Personnel...........................................................................................17 6.3 General Installation Recommendations...............................................................17 6.4 GSM and CE Enclosure Installation.....................................................................19 6.5 GSM Utilities ........................................................................................................19 6.6 GSM Process Gas Delivery Line and Vent Line ..................................................21 6.7 GSM Accessory Monitors and Controls...............................................................21 6.8 GSMC installation ................................................................................................22 6.9 Post-Installation Tests..........................................................................................22 6.10 Initial System Start-Up .......................................................................................22

7. OPERATION .......................................................................................................................31

7.1 5 Valve Manifold Cylinder Change Procedure.....................................................33 7.2 5 Valve Manifold Maintenance Purge Procedure ................................................37 7.3 5 Valve Line Maintenance Purge Procedure .......................................................39 7.4 5 Valve Manifold Overnight Shutdown Purge Procedure ....................................41 7.5 Automatic Switchover Operation..........................................................................43

8. GSM MAINTENANCE.........................................................................................................45

8.1 Maintenance Personnel .......................................................................................45 8.2 General Maintenance Recommendations ...........................................................46 8.3 Component Replacements ..................................................................................49

8.3.1 Pressure Regulator Maintenance Procedure ...............................................49 8.3.2 Pigtail Pressure Sensor Maintenance Procedure.........................................51 8.3.3 Purge Gas Check Valve Maintenance Procedure........................................53 8.3.4 Purge Gas Orifice Maintenance Procedure..................................................55 8.3.5 Automatic Switchover Assembly Maintenance Procedure...........................57 8.3.6 Filter, PURIFILTER, or Bloc Purifier Maintenance Procedure......................59 8.3.7 Manifold Maintenance Procedure.................................................................61 8.3.8 Vacuum Generator Assembly Maintenance Procedure ...............................63

8.4 Component Rebuild .............................................................................................65 8.4.1 Vent In-Gland Check Valve ..........................................................................65

8.5 Pressure Transducer Calibration .........................................................................67

TABLE OF CONTENTS

ii CENTURION GAS SOURCE MANIFOLD – OPERATION & MAINTENANCE MANUAL

9. TROUBLESHOOTING ....................................................................................................... 69 9.1 Manifold Indication: High Delivery Pressure........................................................ 69 9.2 Manifold Indication: High Manifold Pressure During Evacuation ........................ 69 9.3 Manifold Indication: Low Manifold Pressure During Purge ................................. 69 9.4 Manifold Indication: Low Cylinder Pressure ........................................................ 69 9.5 Manifold Indication: Excess Flow Shutdown ....................................................... 70 9.6 Manifold Indication: Low Cylinder Weight ........................................................... 70

10. LIMITED WARRANTY AND SERVICE POLICY.............................................................. 71

10.1 Limited Hardware and Software Warranty ........................................................ 71 10.2 In-Warranty Repairs .......................................................................................... 71 10.3 Out-of-Warranty Repairs ................................................................................... 71 10.4 Shipments to Factory......................................................................................... 71

11. GLOSSARY...................................................................................................................... 73

TABLE OF CONTENTS

CENTURION GAS SOURCE MANIFOLD – OPERATION & MAINTENANCE MANUAL iii

LIST OF FIGURES Figure 1. 5-Valve Manual Centurion GSM Typical System Flow Schematic..........................3 Figure 2. 5-Valve Manual Centurion GSM Typical Assembly Drawing .................................4 Figure 3. Single Gas Cylinder Enclosure Tiedown Locations...............................................24 Figure 4. Dual Gas Cylinder Enclosure Tiedown Locations .................................................25 Figure 5. Dual Cylinder Enclosure Manifold Roof Penetrations ...........................................26 Figure 6. Triple Gas Cylinder Enclosure Tiedown Locations................................................27 Figure 7. Triple Cylinder Enclosure Manifold Roof Penetrations..........................................28 Figure 8. Typical Manifold Vent Tubing Installation Detail....................................................29 Figure 9. Exploded In-Gland Check Valve............................................................................66

LIST OF TABLES Table 1. Dimensions—Gas Cylinder Enclosures...................................................................8 Table 2. Enclosure Air Flow Requirements .........................................................................20

TABLE OF CONTENTS

iv CENTURION GAS SOURCE MANIFOLD – OPERATION & MAINTENANCE MANUAL

GENERAL DESCRIPTION

CENTURION GAS SOURCE MANIFOLD – OPERATION & MAINTENANCE MANUAL 1

1. General Description of Centurion Equipment The purpose of the 5-Valve Manual Centurion Gas Source Manifold (GSM) is to supply pressure-regulated process gas to either a gas distribution manifold or process equipment. The manifold is intended for high purity applications and in particular manufacturing 0.5 µm and less geometry semiconductor wafers. While the 5-Valve Manual Centurion GSM is designed for use with hazardous and non-hazardous gases, the manifold is typically used with non-hazardous gases because Auto-Purge® manifolds have better purge performance and are recommended for toxic, corrosive, and most reactive gas services to improve performance and safety. Many novel features of this equipment assure safety, dependability, ease of use, economy, and a minimal requirement for maintenance, while preserving gas purity. Many different features and options are offered to be able to provide a manifold that addresses each customer's requirements. In addition many customers have special requirements that result in designs specific for that customer. Therefore, the equipment discussed in this manual may not exactly represent the equipment purchased by each customer. All valves are manually operated on 5-Valve Manual Centurion GSMs except for automatic switchover valves and the emergency shutoff valve if so equipped. The manifold pneumatic valve for emergency protected manifolds can be operated using many different controllers supplied by Matheson TriGas (MTG) such as the GSM-1A Gas Safety Monitor, GSM-4A Gas Safety Monitor, and GSM5 Manual Gas Safety Monitor. The manifold pneumatic valves for automatic switchover systems can be operated using the AS-200 Automatic Switchover controller. The cylinder and delivery pressure transducers can be powered/displayed by an AM-8, GSM5 Manual, or Span LR300 controller. New controllers developed by MTG may also be able to operate the 5-Valve Manual Centurion Gas Source Manifold. This operation and maintenance manual concentrates on gas source manifold features—controller features are discussed in other operations manuals.

GENERAL DESCRIPTION

2 CENTURION GAS SOURCE MANIFOLD – OPERATION & MAINTENANCE MANUAL

1.1. Centurion Gas Source Manifold The 5-Valve Manual (5VM) Centurion Gas Source Manifold (GSM) typically receives a pressure-unregulated process gas from a gas cylinder; the same pressure-regulated gas is then delivered to process equipment, either directly or indirectly via a Gas Distribution Manifold (GDM). 5-Valve manifolds are designed for use with non-hazardous gases, but can be used for hazardous gases when the pneumatic ESO valve is supplied in place of the manual HPI valve. The standard valves supplied on 5-Valve manifolds are PGI, HPV, HPI, and LPV. A typical schematic for the 5VM Centurion GSM is shown in Figure 1. A typical assembly for the 5VM Centurion GSM is shown in Figure 2. Uninterrupted process gas delivery can be assured with optional automatic gas source switchover equipment. The automatic switchover feature senses when a gas cylinder is nearing depletion and shuts off the manifold supplying process gas and turns on the gas supply from a standby manifold. The Centurion product is specifically designed for semiconductor fabrication facilities that use this feature. This manual describes purge procedures to enable cylinder changing and equipment maintenance to be accomplished without introducing contamination by atmospheric gases or particles. The 5VM Centurion GSM is typically wall mounted when used for non-hazardous gas applications and is placed inside a gas cabinet above and behind the process gas cylinder for hazardous gas applications. The Gas Source Manifold Controller (GSMC) is typically mounted atop the gas cabinet or on a shelf above the GSM. Cylinder Enclosure (CE) gas cabinets are available that can house up to three gas cylinders. There are many different configurations and combinations of GSMs, GSMCs, and CEs that are currently available.

GENERAL DESCRIPTION


Figure 1. 5-Valve Manual Centurion GSM Typical System Flow Schematic LEGEND NANO - NANOCHEM GAS PURIFIER PLI - PROCESS LINE ISOLATION VALVE BLOC - BLOCK PURIFIER PBV - PURIFIER BYPASS VALVE LI - LINE ISOLATION VALVE POV - PURIFIER OUTLET VALVE CFG - CONICAL FILTER GASKET PIV - PURIFIER INLET VALVE EFS - EXCESS FLOW SWITCH PVV - PURIFIER VENT VALVE FTR - FILTER 0.003 MICRON REG - REGULATOR HPI - HIGH PRESSURE ISOLATION VALVE LPT - LOW PRESSURE TRANSDUCER HPV - HIGH PRESSURE VENT VALVE HPT - HIGH PRESSURE TRANSDUCER HPA - HIGH PRESSURE ACCESS VALVE PPT - PURGE PRESSURE TRANSDUCER LPA - LOW PRESSURE ACCESS VALVE VPT - VENT PRESSURE TRANSDUCER LPI - LOW PRESSURE ISOLATION VALVE VGS - VACUUM GENERATOR SUPPLY VALVE LPV - LOW PRESSURE VENT VALVE VGI - VACUUM GENERATOR ISOLATION VALVE PGB - PURGE GAS BLEED VALVE V V - VACUUM VENTURI GENERATOR PGI - PURGE GAS INLET VALVE VAI - VACUUM ACCESS ISOLATION PGO - PURGE GAS ORIFICE VAP - VACUUM ACCESS PORT COMPONENTS SHOWN ARE TYPICAL – ACTUAL EQUIPMENT MAY VARY DEPENDING UPON CONFIGURATION ORDERED DASHED LINES MAY DENOTE OPTIONAL EQUIPMENT

GENERAL DESCRIPTION


Figure 2. 5-Valve Manual Centurion Auto-Purge GSM w/Purge Panel Typical Assembly Drawing

GENERAL DESCRIPTION


1.1.1 GSM Features Standard GSM features include: • Application specific valve and regulator models designed to deliver the process gas at the required

pressure and flow rate • Springless diaphragm valves for most gases (springless 4000 Series diaphragm valves are

recommended for applications where process gas compatibility or seat swelling are a concern) • Pressure transducers for cylinder and delivery pressure indication • Meticulous construction of autogenously welded, electropolished, 316L stainless steel tubing and

components • Ergonomic design provides convenient, safe cylinder connection at a height suitable for the typical worker • Improved purge efficiency by minimizing internal volume and internal surface area • Process gas excess flow switch(s) are supplied standard with HPM gases whose pressure at 70 °F is

above 15 psig (reference 1994 Uniform Fire Code™ section 8001.4.3.3 which is adopted by most local jurisdictions in the United States)

• Emergency shutoff valve is supplied standard on emergency protected manual manifolds for use with

HPM gases. • Venturi vacuum generator to evacuate the GSM to less than 100 Torr during the purge procedure

evacuation step • Pigtail inert gas bleed to virtually eliminate atmospheric contamination entering the pigtail during a

cylinder change procedure (an orifice is installed in the purge gas supply line to limit purge gas flow) Typical GSM options include: • Pressure display for process gas supply and delivery lines • Sample port to perform inboard helium leak testing of the manifold via the delivery line, sampling of the

manifold process gas, or argon purging of the delivery line during installation welding • All metal process line filter to remove all particles greater than 0.003 µm (a nickel media filter or Bloc

Purifier™ can also be installed) • Purge gas bleed valve to provide an inert gas bleed as described above using a valve in place of the

orifice (the valve can be fully opened for more efficient process gas delivery line purging) • A Bloc® Purifier to purify and filter the process gas prior to exiting the GSM (option is only available for

gases that can be purified using one of the Nanochem® resins) • Source purifier to purify and filter the process gas from the gas cylinder (downstream of the regulator)

prior to allowing the gas to flow into the process piping (option is only available for gases that can be purified using one of the Nanochem® resins)

• Vacuum isolation valves to perform inboard leak testing of the cylinder connection via the vent header

after each cylinder change and to monitor for seat leakage from the HPV and LPV valves

GENERAL DESCRIPTION


• Final process line isolation valve to enable replacement of GSM without compromising the integrity of the process gas delivery line

• High pressure purge supply to perform a pressure decay leak test on the pigtail after a cylinder change • Cylinder scale for monitoring residual content of a liquefied compressed gas 1.1.2 Gas Cylinder Enclosure and Wall Mount Panel Features The gas cylinder enclosure also serves as the enclosure for the GSM. Single, dual, or triple cylinder models are produced to accommodate one, two, or three cylinders (typically 1 or 2 process gas cylinders with or without a purge gas cylinder); the gas cylinder enclosure is typically used for hazardous gases. The wall mount panel mounts two manifolds with an automatic switchover assembly to a single panel; the wall mount panel is typically used for non-hazardous gases or for hazardous gases located outdoors. Gas cylinder enclosure features include: • Underwriter's Laboratories approved fire sprinkler head • Large wire reinforced glass window that can be opened independently • Polycarbonate plastic safety shield protects users when window is open. Typical gas cylinder enclosure options include: • Hazardous gas detectors • Door lock • Gas cylinder temperature control equipment (45 to 100 °F; 7 to 38 °C) • Ramp to enable convenient positioning of cylinders on scale • Door or window open monitor • Exhaust pressure monitor • Thermal or ultraviolet fire monitor Wall mount panel features include: • Heavy metal support plate to secure manifold and components

ENGINEERING DATA


2. ENGINEERING DATA 2.1 Gas Source Manifold 2.1.1 Utilities Required • Purge gas Inert gas (typically nitrogen, argon, helium, or some mixture), filtered to 0.01 µm, 99.999 percent pure Pressure range: 85 to 95 psig • Vacuum generator supply nitrogen

Nitrogen filtered to 1.0 µm, 99 percent pure Pressure range: 70 to 110 psig Nitrogen usage: 60 slpm at 80 psig supply pressure Vacuum generated: 26” Hg (100 Torr)

• Vent from vacuum generator exhaust: suitable for intended process gas • Facility exhaust for enclosure: suitable for intended process gas

See Section 6.5 for detailed requirements • Pneumatic supply for valve operation (typically supplied via GSMC)

Nitrogen or clean dry air, filtered to 1.0 µm Pressure range: 70 to 110 psig

• Water supply for fire sprinkler

Static (nonflowing) pressure: 175 psig maximum Dynamic (flowing) pressure: 7 psig minimum Water usage: 7 to 36 gpm depending upon supply pressure

2.1.2 Manifold Characteristics • Operating pressures:

Low pressure side: 125 psig maximum High pressure side: 125 - 3000 psig maximum depending on manifold components and process gas Purge gas: 125 psig maximum (if high pressure purge option is chosen, then pressure rating increases to 2500 psig maximum when high pressure components are used)

• Operating temperature:

Manifold: 32°F to 120°F

ENGINEERING DATA


2.1.3 Enclosure Characteristics The all welded gas cylinder enclosure is ruggedly constructed of 11 gage (0.1196 inch) cold-rolled steel with a light gray, corrosion-resistant, polyurethane matte finish on all surfaces; dimensions are shown in Table 1. The enclosure is NEMA 1 rated for indoor use only. The interior is designated a Class I Division 2 location when used with flammable or pyrophoric gases. The electrical equipment inside the enclosure is acceptable for that location (customer specified or installed equipment may not be acceptable - it is the users responsibility to use acceptable equipment). The wall mount panel is constructed of 11 gage (0.1196 inch) cold-rolled steel with a light gray, corrosion-resistant, polyurethane matte finish on all surfaces; dimensions are shown in Table 1.

Table 1. Dimensions - Gas Cylinder Enclosures

Height Width Depth* Single Gas Cylinder

Enclosure 75.6 in (1920 mm)

15.0 in (381 mm)

20.0 in (510mm)

Double Gas Cylinder Enclosure

75.6 in (1920 mm)

25.0 in (635 mm)

20.0 in (510mm)

Triple Gas Cylinder Enclosure

75.6 in (1920 mm)

40.0 in (1016mm)

20.0 in (510mm)

Silane Gas Cylinder Enclosure

78.6 in (1996 mm)

15.0 in (381 mm)

20.0 in (510mm)

Wall Mount Panel

76.1 in (1933 mm)

25.0 in (635 mm)

20.0 in (510mm)

* Clearance in front of gas cylinder enclosures should be at least 24 inches (610 mm). This will permit the gas cylinder enclosure door to swing fully open, and will provide room for a user to stand comfortably in front of the gas cylinder enclosure while viewing and operating the equipment. Additional room may be required to prevent blocking of corridors and allow personnel access and egress.

When properly installed all Centurion GSMs and gas cylinder enclosures have been designed to meet Uniform Building Code™ (UBC) and Uniform Fire Code (UFC) safety regulations. Because regulations are subject to interpretation, which can vary from location to location, it is recommended that the user consult the local authority for their specific installation. New changes to the Uniform Fire Code mandated a special cylinder gas cabinet for Silane (SiH4). This special enclosure is for single gas cylinders only. The enclosure has adjustable air intake louvers in the door and rear wall. The Silane cylinder enclosure must be positioned to allow for air flow into the intake in the enclosure rear; the enclosure rear or side should be located 1 inch minimum from a wall. The Silane single cylinder enclosure is designed to provide for a minimum 200 ft3/min air velocity across unwelded process gas connections inside the enclosure. All gas cylinder enclosure doors and windows are gasketed and are provided with spring closers and flush mounted, spring loaded latches. Adjustable air intake louvers at the bottom of the door enable accurate adjustment of exhaust air flow through enclosure. A heavy-duty rubberized floor covering inside the gas cylinder enclosure protects the enclosure floor from cylinder impact and sliding. A permanently installed ¼ - inch (6.3 mm) thick, high impact-strength polycarbonate plastic safety shield installed immediately inside the enclosure window protects users from gas exposure and other hazards while observing operation, adjusting pressure regulators, or changing cylinders. With the safety shield in place, adequate gas cylinder enclosure exhaust flow is maintained, even when the gas cylinder enclosure window is open.

ENGINEERING DATA


Gas cylinder enclosure roof penetrations accommodate process gas delivery, purge gas inlet, vacuum generator supply, and vent exhaust lines. A 6-inch (152 mm) diameter collar welded to the roof of the single and dual gas cylinder enclosure enables connection to a facility exhaust duct. The diameter of the triple gas cylinder enclosure and Silane single cylinder enclosure exhaust duct is 8-inches (203 mm).

ENGINEERING DATA


COMPONENT CONVENTIONS


3. COMPONENT OPERATING CONVENTIONS 3.1 Valves • Manual valves are closed when the operator is positioned fully clockwise (CW). • Manual valves are open when the operator is positioned fully counterclockwise (CCW). • Pneumatic valves are closed when there is no pressure supply to the actuator. Pneumatic valves are

open when 70 to 110 psig is supplied to the actuator. The pressure supply is controlled by the GSMC. 3.2 Regulators

WARNING! When pressure exists on the low pressure side of a tied-diaphragm pressure regulator, rotating the adjustment knob counterclockwise (i.e. closing or decreasing the regulator) may cause damage. The system pressure should be vented if possible before turning the adjustment knob counterclockwise.

• Delivery pressure is minimal when the adjustment knob is positioned fully counterclockwise (CCW). • Delivery pressure increases as the adjustment knob is rotated clockwise (CW).

COMPONENT CONVENTIONS


SAFETY PRECAUTIONS


4. SAFETY PRECAUTIONS

DANGER!

FOLLOW ALL SAFETY PRECAUTIONS TO THE LETTER Under no circumstances should you attempt to circumvent compressed gas equipment safety precautions. Compressed gases and associated equipment are potentially dangerous; persons that have not been formally trained must not use them. Only by strictly adhering to all safety precautions can the risk of personal injury or damage to equipment be avoided.

DANGER! Matheson TriGas recommends that whenever possible, the flow of process gas inside the enclosure should be shut off and all lines purged when maintenance is performed. If this is not possible, then the user should consult their Safety and Industrial Hygiene department to determine the appropriate personnel protective equipment that must be worn during maintenance.

This manual cannot replace formal training in compressed gas equipment safety principles. This section is intended only as a reminder to adequately trained personnel that already understand and follow accepted safety practices. • Installation, operation, and maintenance of gas control equipment should be performed by trained

personnel only. • Follow all installation, operation, and maintenance instructions to the letter. Always replace all

components, fasteners, labels, and other items exactly as originally installed; do not modify anything without authorization.

• Failure to follow recommended procedures may result in personal injury and equipment failure or

contamination. • Equipment not in adequate operating condition should be shut down immediately. Do not attempt to use

equipment that is not operating properly. • Never attempt to defeat interlocks or other safety devices. • Operation of valves in the manual mode may override GSMC safety interlocks that would normally protect

equipment and personnel during automatic valve operation. Be especially attentive when valves are operated in the manual mode.

SAFETY PRECAUTIONS


• Because 110 or 220 VAC electrical power is applied to the equipment, a shock hazard exists if the GSMC enclosure is entered during operation. Disconnect electrical power prior to disassembly or replacement of electrical components within the GSMC, and prior to connecting or disconnecting wiring, including sensor output leads, within the GSMC.

• Material Safety Data Sheets for all gases used in the facility should be available for consultation by all

concerned personnel. These data are obtainable from the gas supplier. • Make sure the gas cylinder enclosure exhaust is functioning properly before starting a maintenance

procedure. Accidental process gas release is more likely to occur during maintenance than during day - to - day operation.

• To avoid injury and discourage tampering, the gas cylinder enclosure door and window should remain

closed and secured during normal operation. The door should be opened only when changing process gas cylinders or performing system maintenance. The window should be opened only when visually checking GSM operation or making adjustments. If the exhaust equipment is not functioning, do not open the gas cylinder enclosure door or window.

• Close the process gas source valve before starting a maintenance procedure. If this practice is followed,

accidental gas release will involve only a small volume of gas. While this practice is required only for GSM maintenance, its general adoption is worth consideration.

• Equipment used in or exposed to hazardous gas service must be purged with an inert gas prior to

disassembly. • Even though equipment may have been properly purged, trace amounts of gases may remain. For this

reason, components and piping that have been exposed to hazardous gases should be carefully labeled with the names of the gases and stored or discarded in accordance with safety ordinances and regulations.

• Personnel working with hazardous gases or contaminated components must be provided with suitable

personnel protective equipment. • Vent all equipment prior to disassembly. Unexpected jet noise accompanying release of a high-pressure

gas can frighten workers and precipitate an accident. • Should fire, release of toxic or otherwise hazardous gases, or another potentially dangerous situation

arise, press the GSMC SHUTDOWN button, then clear the location. • Installation of gas cylinder enclosures and replacement of gas cylinders may require strenuous lifting or

manipulation; if accomplished in an unsafe manner, injury or equipment damage could result. It is the responsibility of the user to employ safe cylinder lifting and manipulation techniques as described in NIOSH Publication 81-122.

• Mechanical or electrical maintenance should follow lockout/tagout procedures described in OSHA

document 29 CFR 1910.147 Control of Hazardous Energy (Lockout/Tagout) and 29 CFR 1910.331-335 Electrical Safety-Related Work Practices (7-1-94 Edition).

PERSONNEL TRAINING


5. PERSONNEL TRAINING The Centurion GSM flow path and operation is logical and straightforward, making extensive additional training unnecessary. Personnel should review this manual thoroughly before attempting to install or operate the equipment. Installation and maintenance should be executed only by personnel trained and experienced in general electromechanical assembly and repair and who thoroughly understand gas control equipment. Administrative and supervisory personnel are encouraged to achieve a thorough understanding of the operation of all pertinent MTG gas control equipment. MTG Field Service personnel can provide authoritative operation and maintenance training.

PERSONNEL TRAINING


INSTALLATION


6. INSTALLATION Figures pertaining to equipment installation are collected at the end of the section. 6.1 Equipment Unpacking and Insurance Claims If installation has been contracted with MTG, please do not unpack any equipment, as MTG Field Service prefer to open the boxes themselves. Exteriors of all packages nevertheless should be carefully inspected on arrival as described below. Because all shipments are FOB the MTG factory, the title to purchased goods passes to the customer upon pickup by the carrier. Damage sustained during transit accordingly is the responsibility of the carrier, with whom insurance claims for damage should be filed. Please inspect all shipping cartons immediately upon receipt. Should damage or stains be observed, immediately notify the carrier requesting that an insurance claims agent be present when the carton is opened. Should any damage be discovered, retain the carton, contents, and all packing materials for inspection by the insurance claims agent. 6.2 Installation Personnel Equipment should be operated only by trained personnel. Installation of equipment should be entrusted only to personnel that are in addition trained and experienced in electromechanical assembly techniques. Persons that do not understand the principles of gas equipment operation can injure themselves and co-workers. They can also damage equipment, resulting in unexpected downtime and expense. Before starting a job, all personnel responsible for equipment installation or operation must fully understand the specific procedures to be accomplished and all pertinent safety considerations. Because optional or non-standard components often are included in equipment configuration, installation details may differ substantially from the generic instructions provided. If facility personnel are not confident in their abilities to install or operate the equipment, MTG Field Service should be contacted for assistance. MTG specialists are available to assist equipment owners and provide authoritative training on all aspects of equipment installation, operation, and maintenance. 6.3 General Installation Recommendations All installation personnel should be familiar with these recommendations that are pertinent to several sections of this manual. • The gas cylinder enclosure safety shield is constructed of polycarbonate plastic. Although this material is

of exceptional impact strength, it also is easily scratched and readily damaged by contact with many organic solvents and vapors, including practically all alcohols, esters, and ketones. Soap and water are acceptable cleaning agents. Never attempt to clean the plastic safety shield with an incompatible solvent that would compromise its strength or transparency.

• Inspect face - seal connector gasket sealing surfaces for dirt, scratches, dents, pitting, or corrosion.

Clean or replace affected parts before assembly.

INSTALLATION


• Tighten face - seal connections exactly 1/8 turn beyond finger tight. Overtightening can damage the connection; undertightening can cause leakage.

• Always install new gaskets when assembling face - seal connections. • When working with components that contact process or purge gases - for example, face - seal connection

gaskets - always wear new latex gloves to avoid fingerprint contamination. • Pneumatic supply tubing is best cut with a plastic tubing cutter rather than scissors or diagonal pliers.

Plastic tubing cutters are available from tool distributors. • Following installation, leak test all affected process gas connections. Leak testing procedures are

documented in SEMI F11, ASTM E 498, and ASTM E 4992. Three possible leak test methods are described below.

— For inboard testing with a helium-mass spectrometer leak detector, leakage at any connection should

not exceed 1 x 10-9 sccs. The inboard leak test evacuates the GSM with the leak detector and sprays helium at the affected locations.

— For outboard pressure decay testing, the pressure decay after four hours should not exceed 1

percent of the initial value after compensation for any temperature changes. The pressure decay test pressurizes the high pressure side of the GSM to design pressure and then monitors the supply pressure sensor.

— For outboard leak testing using a sniffer probe, leakage from any connection should not cause an

increase in helium concentration greater than 1 ppm above background. The outboard leak test pressurizes the affected regions of the GSM with 100 percent helium to 100 percent of the system design pressure.

CAUTION! When performing inboard leak testing using a helium mass spectrometer leak detector, isolate the gas source manifold prior to venting the leak detector. Many leak detectors backfill the evacuated line with atmosphere and this can contaminate the gas source manifold.

1. SEMI Standards Order Department, 805 East Middlefield Road, Mountain View CA 94043-4080 2. ASTM, 1916 Race Street, Philadelphia PA 19103

INSTALLATION


6.4 GSM and CE Enclosure Installation GSM facility connection locations are shown in Figures 3 through 8.

WARNING!

IMPROPER LIFTING OF HEAVY EQUIPMENT CAN CAUSE INJURY Because the GSM and CE are heavy, only workers trained in NIOSH - approved lifting techniques should be assigned to either installation or removal efforts. In this way personal injury and damage to equipment can effectively be avoided.

1. For cylinder enclosures: Level and anchor the GSM enclosure assembly to an architecturally stable

element using four 3/8 - inch anchor bolts with washers through the four holes in the floor of the enclosure or on the wall mount panel in accordance with Uniform Building Code™ requirements.

For wall mount systems: Attach the GSM wall mount panel to an architecturally stable element using four 3/8 - inch screws through the holes on the panel in accordance with Uniform Building Code™ requirements. Attach Cyl-Safe™ cylinder restraints to an architecturally stable element using four 3/8 - inch screws per restraint in accordance with Uniform Building Code™ requirements. The Uniform Building Code™ has different requirements depending upon the location of the installation; for instance, earthquake zone 4 location have more stringent structural tie down requirements. Locations of CE gas cabinet anchor points are shown in the figures at the end of this section. The equipment is not intended for exterior installation. Equipment that is required to be installed outside a building should be protected from harsh environments through use of overhead covers, partial walls, environmental conditioning equipment, etc.

6.5 GSM Utilities

WARNING!

PROPER EXHAUSTING OF THE PROCESS GAS IS REQUIRED Exhaust requirements differ according to the intended process gas. Inert and non-toxic gases, for example, are typically exhausted to a burner. When in doubt as to the exhaust disposition of a specific gas, consult appropriate authorities. Equipment installation, including duct material selection, should be managed by qualified personnel that understand the hazard potential of the intended process gas.

INSTALLATION


1. Using materials compatible with the intended process gas, connect the 6-inch (single or dual gas cylinder enclosure) or 8-inch (triple GSM enclosure, single enclosure for Silane and Silane mixtures) exhaust outlet collar atop the gas cylinder enclosure to a suitable facility exhaust line.

Depending upon the process gas, effluent treatment may be required. SEMI F5 Guide for Gaseous Effluent Handling can provide information on a recommended type of treatment system.

2. Install an air flow damper in the connecting exhaust duct.

With the GSM enclosure door closed and window open, adjust the exhaust duct damper to achieve an exhaust duct air flow within the values shown the "window open" column of Table 2. This will ensure that an air velocity of at least 200 ft3/min average exists within the plane of the plastic safety shield opening.

3. With the GSM enclosure door closed and window open, verify that an exhaust air velocity of 150

ft3/min minimum exists at all points within the plastic safety shield opening. Measurements must be made within the plane of the plastic.

4. Adjust the GSM enclosure door louver damper(s) so that, with the GSM enclosure door and window

closed, the exhaust duct air flow is within the values shown in the "window closed" column of Table 2. This will maintain a constant air flow through the enclosure to "purge" the interior in case of process gas piping leakage.

Table 2. Enclosure Air Flow Requirements

Enclosure Model

Window Open (scfm)

Window Closed (scfm)

1CE (Single) 100-115 25-50 2CE (Dual) 260-280 100-200 3CE (Triple) 360-390 150-300 1CE (Silane) 150 minimum 450-500

SGS cabinets are designed for connection to a facility exhaust system capable of achieving a minimum static pressure of 0.75" of H2O in the exhaust duct measured one foot downstream of the gas cabinet exhaust outlet collar. 5. Connect a source of 10.0 µm filtered regulated nitrogen at 70-110 psig (483-758 kPa) pressure and

60 slpm to the vacuum generator supply tube stub connection. To facilitate vacuum generator maintenance, installation of a manual shutoff valve on the vacuum generator supply line just outside the gas cylinder enclosure using compression fittings is recommended.

6. Connect a source of 0.01 µm filtered regulated purge gas at 85-95 psig (586-655 kPa) pressure and

10 slpm to the ¼ - inch purge gas supply face seal connection on the GSM inside the gas cylinder enclosure. For GSMs installed in cylinder enclosures, route this line via its penetration in the roof of the gas cylinder enclosure. For GSMs installed on wall mount panels, route this line as desired. To facilitate maintenance, install a manual shutoff valve on the purge gas supply line leading to each gas cylinder enclosure.

7. Connect a source of 1.0 µm filtered regulated nitrogen or clean dry air at 70-110 psig pressure to the

GSMC for valve actuation.

INSTALLATION


8. Connect a fire protection water source at 175 psig maximum to the sprinkler inlet ½ - inch male NPT connection on the top of the cylinder enclosure.

6.6 GSM Process Gas Delivery Line and Vent Line 1. Connect a ¼ - inch 316L SS process gas delivery line between the GSM outlet face seal connection

and the process gas inlet(s) at the GDM or process equipment. For GSMs installed in cylinder enclosures, route this line via its penetration in the roof of the gas cylinder enclosure. For GSMs installed on wall mount panels, route this line as desired.

All connections outside the enclosure on all HPM process gas lines must be welded and braced in accordance with safety ordinances and regulations. Only welded connections must be installed on HPM process gas lines external to the gas cylinder enclosure.

Safety ordinances may require dual containment (coaxial) delivery lines for certain gases and locations. Depending upon the process gas, the use of materials other than 316L SS may be necessary for the process gas delivery line. For example, Hastelloy® C-22 lines may be desired for their superior corrosion resistance to gases such as hydrogen chloride (HCl) and chlorine (Cl2). Depending upon the flow rate, the use of larger diameter process gas delivery lines may be necessary to reduce the pressure drop between the GSM and the GDM or process tool.

2. If a GSM is intended for use with a hazardous process gas, consult the gas supplier for

recommendations concerning GSM vent line routes and outlet locations to preclude reflux of specific hazardous gases into the gas cylinder enclosure. Then similarly connect a 3/8 - inch 316L SS vent line between the GSM process gas vent exhaust tube stub and a suitable facility exhaust duct.

Manifold vent lines terminating within an exhaust duct should be positioned horizontally near the center line of the duct, point downstream, and terminate downstream of the gas cylinder enclosure (see Figure 8 for a typical installation).

Depending upon the process gas, effluent treatment may be required. SEMI F5 Guide for Gaseous Effluent Handling can provide information on a recommended type of treatment system.

3. Label the equipment per federal and state OSHA standards. Specifically, tag all GSM process gas,

purge gas, and vacuum generator supply lines with name and flow direction in accordance with NFPA regulations. Diagram the intended process gas and flow direction on the gas cylinder enclosure door.

6.7 GSM Accessory Monitors and Controls 1. Install an exhaust differential pressure switch (e.g., Magnehelic or Photohelic) on the gas cylinder

enclosure exhaust ducting. This device is recommended by SEMI S2 Safety Guidelines for Semiconductor Manufacturing Equipment for HPM gas applications. Direct the switch output to either a facility exhaust system monitor or GSMC digital input channel.

2. Install hazardous gas detection equipment as mandated by pertinent safety ordinances and

regulations. The output from this equipment should be directed to a GSMC digital input channel or to an appropriate accessory monitor.

INSTALLATION


3. Install a fire sensor within the gas cylinder enclosure for flammable and pyrophoric gases. This device is recommended by SEMI S2 Safety Guidelines for Semiconductor Manufacturing Equipment. The output from this equipment should be directed to a GSMC digital input channel or to an appropriate accessory monitor.

6.8 GSMC Installation A GSMC is required for 5-Valve Manual Centurion Gas Source Manifolds that have an ESO valve or an automatic switchover. Several controllers are currently available to perform these functions. Consult the GSMC operations manual for the specific controller chosen for installation procedures. 6.9 Post-Installation Tests

WARNING!

OPERATION OF UNTESTED EQUIPMENT CAN CAUSE INJURY All tests in this section must be completed to assure the equipment has been correctly installed and is safe to use. In addition, all tests specified in the GSMC operations manual must be completed prior to equipment operation.

1. Calibrate and test all of the pressure transducers for each manifold. 2. Perform a leak test of all process gas piping and components. 3. Confirm operation of the emergency shutdown button on GSMC for hazardous gases. 4. Confirm operation of all safety sensors such as fire sensor, cylinder exhaust pressure sensor, etc. 5. Confirm operation of excess flow switch shutdown circuit if so equipped. 6.10 Initial System Start-Up Prior to introducing process gas into the Centurion GSM, the user should perform a purge from the GSM through the distribution manifold (if applicable) to the process equipment. This process is not detailed in the operations manual because it requires knowledge of the configuration of the distribution manifold and process equipment. MTG recommends the general steps identified below modified as necessary based upon the user's equipment. • Secure process gas cylinder(s) and perform a cylinder valve shutoff leak test. • Perform a leak test of the entire process gas system. • Perform a flow-through purge from the GSM through the distribution manifold to the process equipment. • Perform a cycle purge from the GSM to the GDM or process equipment by alternating pressurization and

evacuation steps.

INSTALLATION


• Additionally, perform a flow-through purge and cycle purge from the GDM to the process equipment if applicable.

• Sample the process line at the distribution manifold and process equipment. Verify that particulate levels

and chemical contamination levels are below required levels.

INSTALLATION


Figure 3. Single Gas Cylinder Enclosure Tiedown Locations

INSTALLATION


Figure 4. Dual Gas Cylinder Enclosure Tiedown Locations

INSTALLATION


Figure 5. Dual Cylinder Enclosure Manifold Roof Penetrations LEGEND 1 N2 INLET, ¼” MALE FACE SEAL CONNECTION INSIDE ENCLOSURE 2 EXHAUST OUTLET, ½” FEMALE FACE SEAL CONNECTION INSIDE ENCLOSURE 3 PROCESS OUTLET, ¼” FACE SEAL TYPICAL 4 ENCLOSURE EXHAUST CONNECTION, 6.00” ID 5 ENCLOSURE SPRINKLER CONNECTION ½” MALE NPT 6 PURGE GAS SUPPLY, ¼” FEMALE FACE SEAL CONNECTION INSIDE ENCLOSURE 7 HIGH PRESSURE PURGE GAS SUPPLY, ¼” FEMALE FACE SEAL CONNECTION INSIDE ENCLOSURE

INSTALLATION


Figure 6. Triple Gas Cylinder Enclosure Tiedown Locations

INSTALLATION


Figure 7. Triple Cylinder Enclosure Manifold Roof Penetrations LEGEND 1 N2 INLET, ¼” MALE FACE SEAL CONNECTION INSIDE ENCLOSURE 2 EXHAUST OUTLET, ½” FEMALE FACE SEAL CONNECTION INSIDE ENCLOSURE 3 PROCESS OUTLET, ¼” FACE SEAL TYPICAL 4 ENCLOSURE EXHAUST CONNECTION, 8.00” ID 5 ENCLOSURE SPRINKLER CONNECTION ½” MALE NPT

INSTALLATION


Figure 8. Typical Manifold Vent Tubing Installation Detail

INSTALLATION


OPERATION


7. OPERATION Four purge procedures are described in this operations manual. Each purge operation is comprised of many steps, including many evacuation / pressurization cycles. The purge procedures described in the operations manual are: • Cylinder Change Purge: purges GSM from process gas cylinder valve outlet to HP1 (ESO) - its purpose is

to be able to remove and replace gas cylinders • Manifold Maintenance Purge: purges GSM from process gas cylinder valve outlet to process line isolation

valve downstream of regulator (LPI or AS) - its purpose is to be able to remove and replace manifold components

• Line Maintenance Purge: purges GSM from process gas cylinder valve outlet to GDM or process

equipment - its purpose is to be able to perform maintenance on the process gas delivery line • Overnight Shutdown Purge: purges GSM from process gas cylinder valve outlet to process equipment;

process gas delivery line remains pressurized with purge gas to preclude contamination by effusion of atmospheric gases into manifold space - its purpose is to remove hazardous gases from the system in order to increase safety during facility downtimes.

The procedures described in this manual for the line maintenance and overnight shutdown purges use the LPV valve to evacuate the line. The purges would be more efficient if a vent valve located at the end of the process gas delivery line is used to evacuate the manifold. In addition, a flow-through purge from the GSM to the GDM or process equipment would also be more effective than the procedure described in this manual. A flow-through purge is recommended to be performed for hazardous gas applications.

WARNING!

IMPROPER LIFTING OF HEAVY EQUIPMENT CAN CAUSE INJURY Because compressed gas cylinders are heavy, only workers trained in NIOSH-approved lifting techniques should be assigned to either installation or removal efforts. This way, personal injury and damage to equipment can be avoided.

Before changing cylinders, we suggest reviewing § 4 (Safety Precautions), § 8.2 (General Maintenance Recommendations), and the appropriate operations manual for the GSMC. Never drop, strike, or improperly transport cylinders. Never use a pipe wrench on the compressed gas cylinder connection - always use an open-end or flare-nut wrench. Always install the cylinder valve cover before moving the gas cylinder. Always install a new cylinder connection gasket, if one is required.

OPERATION


OPERATION


7.1 5 Valve Manifold Cylinder Change Procedure 1. Close the cylinder valve. 2. Close process isolation valve downstream of regulator (PLI or AS). 3. Open LPV valve for 15 seconds, then close. Verify cylinder and delivery pressure indication is zero (0)

psig. 4. Fully decrease regulator (CCW). 5. Close HPI (ESO) valve. 6. Open HPV valve for 10 seconds, then close. Verify cylinder pressure indication is zero (0) psig. 7. Wait 3 minutes minimum, then again verify cylinder pressure indication is zero (0) psig or less. If pressure

has increased, then cylinder valve is leaking past the seat. If cylinder valve is leaking, open the valve and close again tightly; then return to step 6. Do not proceed if cylinder valve continues to leak; contact gas supplier for assistance.

8. Open VGS valve. 9. Open HPV valve for 15 seconds, then close. Verify cylinder pressure indication is zero (0) psig or less. 10. Open PGI valve for 6 seconds, then close. Verify cylinder pressure indication is approximately 90 psig. 11. Repeat steps 9 and 10 for five times minimum. For hazardous process gases, repeat steps 9 and 10 for

up to 60 times depending upon the hazard level of the gas. 12. Close VGS valve. 13. Open PGI valve.

WARNING!

PIGTAIL BLEED FEATURE PRESSURIZES MANIFOLD Because the manifold has a purge gas bleed feature, the process gas cylinder connection line is pressurized with purge gas. Once the connection is loosed, the purge gas will vent and a low flow of purge gas will continue to flow out of the manifold side of the connection.

14. Separate the process gas cylinder connection. Discard the gasket, if applicable. 15. Install the cylinder cap protective cover; remove the cylinder and place the cylinder on a gas cylinder cart

or in a designated storage facility; install the safety chain to prevent accidental damage by falling. 16. Inspect the cylinder connection sealing surface on the pigtail for dirt, scratches, dents, pits, or corrosion.

Clean or replace parts as indicated. 17. Install the new cylinder and fasten the safety chain. Remove the protective heavy metal cap from the

cylinder valve.

OPERATION


18. Inspect the cylinder valve connection sealing surface for dirt, scratches, dents, pits, or corrosion. Clean as

indicated. Do not attempt to connect a cylinder that is in any way defective. 19. Wearing new latex gloves to avoid fingerprints, install a new cylinder connection gasket, if required,

between the connectors, then loosely make up the connection. 20. Wait 30 seconds to allow the pigtail bleed to purge through the pigtail and out the loose connection, then

finger tighten the connection. 21. With a suitable wrench, tighten the cylinder connection. 22. Carefully inspect all work. 23. Open HPV valve for 15 seconds, then close. Verify cylinder pressure display indication is zero (0) psig. 24. Open PGI valve for 5 seconds, then close. Verify cylinder pressure display indication is approximately 90

psig. 25. Wait for 2 minutes minimum and monitor cylinder pressure display. A drop in pressure indicates a

potential leak most probably at the cylinder connection. If leakage is discovered, repair leaks and return to step 22.

26. Open VGS valve. 27. Open HPV valve for 15 seconds, then close. Verify cylinder pressure display indication is zero (0) psig or

less. 28. Open PQI valve for 5 seconds, then close. Verify cylinder pressure display indication is approximately 90

psig. 29. Repeat steps 27 and 28 for five times minimum. For hazardous process gases or high purity applications,

cycle purging of up to 60 times may be necessary depending upon the hazard level of the gas or the atmospheric contamination introduced.

30. Open HPV valve for 15 seconds, then close. Verify cylinder pressure display indication is zero (0) psig or

less. 31. Close VGS valve. 32. Open cylinder valve. Wait 5 seconds minimum or until cylinder pressure indication stabilizes. Verify full

cylinder pressure indication, then close cylinder valve. 33. Wait for 2 minutes minimum and monitor cylinder pressure display. A drop in pressure indicates a

potential leak most probably at the cylinder connection. If leakage is discovered, close cylinder valve and repeat this entire procedure except repair leaks instead of replacing cylinders.

34. If the process gas uses a scale to determine when the cylinder contents' are nearly depleted, then adjust

the cylinder scale indication as required by the equipment. Refer to the applicable controller operations manual for instructions.

35. Open HPI (ESO) valve. 36. Increase regulator (CW) to desired delivery pressure.

OPERATION


37. Manifold is now ready to be place in SERVICE and supply process gas. 38. Open process isolation valve downstream of regulator (PLI or AS).

OPERATION


OPERATION


7.2 5 Valve Manifold Maintenance Purge Procedure 1. Close the cylinder valve. 2. Close process isolation valve downstream of regulator (PLI or AS). 3. Open LPV valve for 15 seconds, then close. Verify cylinder and delivery pressure indication is zero (0)

psig. 4. Close HPI valve. 5. Wait 3 minutes minimum, then again verify cylinder pressure indication is zero (0) psig or less. If pressure

has increased, then cylinder valve is leaking past the seat. If cylinder valve is leaking, open the valve and close again tightly; then return to step 3. Do not proceed if cylinder valve, continues to leak; contact gas supplier for assistance.

6. Open HPI (ESO) valve. 7. Open VGS valve. 8. Fully increase regulator (CW). 9. Open LPV valve for 30 seconds, then close. Verify cylinder pressure indication is zero (0) psig or less. 10. Open PGI valve for 10 seconds, then close. Verify cylinder and delivery pressure indication is

approximately 90 psig. 11. Repeat steps 9 and 10 for five times minimum. For hazardous process gases, cycle purging for up to 60

times may be necessary depending upon the hazard level of the gas. 12. Close VGS valve. 13. Open LPV valve for 10 seconds, then close. Verify cylinder pressure indication is zero (0) psig. 14. Perform manifold maintenance. 15. Open PGI valve for 10 seconds, then close. Verify cylinder pressure display indication is approximately

90 psig. 16. Wait for 2 minutes minimum and monitor cylinder pressure and delivery pressure displays. A drop in

pressure indicates a potential leak. If leakage is discovered, repair leaks and return to step 14. 17. Open VGS valve. 18. Open LPV valve for 30 seconds, then close. Verify cylinder pressure display indication is zero (0) psig or

less. 19. Open PGI valve for 10 seconds, then close. Verify cylinder pressure display indication is approximately

90 psig. 20. Repeat steps 17 and 18 for five times minimum. For hazardous process gases or high purity applications,

cycle purging of up to 60 times may be necessary depending upon the hazard level of the gas and the atmospheric contamination introduced.

21. Open LPV valve for 30 seconds, then close. Verify cylinder pressure indication is zero (0) psig or less.

OPERATION


22. Close VGS valve. 23. Fully decrease regulator (CCW). 24. Close HPI (ESO) valve. 25. Open the cylinder valve. Wait 5 seconds minimum or until cylinder pressure indication stabilizes. Verify

full cylinder pressure indication, then close cylinder valve. 26. Wait for 2 minutes minimum and monitor cylinder pressure display. A drop in pressure indicates a

potential leak. If leakage is discovered, close cylinder valve and return to step 3. 27. Open HPI (ESO) valve. 28. Increase regulator (CW) to desired delivery pressure. 29. Manifold is now ready to be placed in service and supply process gas. 30. Open process isolation valve downstream of regulator (PLI or AS).

OPERATION


7.3 5 Valve Line Maintenance Purge Procedure 1. Close the cylinder valve. 2. If the manifold has an EFS, place the controller in PURGE mode. 3. Open process isolation valve downstream of regulator (PL! or AS). 4. Open LPV valve for 120 seconds, then close. Verify cylinder pressure and delivery pressure display

indication is zero (0) psig. 5. Close HPI (ESO) valve. 6. Wait 3 minutes minimum, then again verify cylinder pressure indication is zero (0) psig or less. If pressure

has increased, then cylinder valve is leaking past the seat. If cylinder valve is leaking, open the valve and close again tightly; then return to step 4. Do not proceed if cylinder valve continues to leak; contact gas supplier for assistance.

7. Open HPI (ESO) valve. 8. Fully increase regulator (CW). 9. Open VGS valve. 10. Open LPV valve for 120 seconds, then close. Verify cylinder pressure indication is zero (0) psig or less. 11. Open PGI valve for 120 seconds, then close. Verify cylinder and delivery pressure indication is

approximately 90 psig. 12. Repeat steps 10 and 11 for five times minimum. For hazardous process gases, cycle purging for up to 60

times may be necessary depending upon the hazard level of the gas. 13. Close VGS valve. 14. Open LPV valve for 30 seconds, then close. Verify cylinder pressure and delivery pressure display

indication is zero (0) psig. 15. Perform line maintenance. 16. Open PGI valve for 120 seconds, then close. Verify cylinder pressure display indication is approximately

90 psig. 17. Wait for 2 minutes minimum and monitor cylinder pressure display. A drop in pressure indicates a

potential leak. If leakage is discovered, close PGI, repair leaks, and return to step 16. 18. Open VGS valve. 19. Open LPV valve for 120 seconds, then close. Verify cylinder pressure display indication is zero (0) psig or

less. 20. Open PGI valve for 120 seconds, then close. Verify cylinder pressure display indication is approximately

90 psig. 21. Repeat steps 19 and 20 for five times minimum. For hazardous process gases or high purity applications,

cycle purging of up to 60 times may be necessary depending upon the hazard level of the gas and the atmospheric contamination introduced.

OPERATION


22. Open LPV valve for 120 seconds, then close. Verify cylinder pressure and delivery pressure display indication is zero (0) psig or less.

23. Close VGS valve. 24. Fully decrease regulator (CCW). 25. Close HPI (ESO) valve. 26. Open the cylinder valve. Wait 5 seconds minimum or until cylinder pressure indication stabilizes. Verify

full cylinder pressure indication, then close cylinder valve. 27. Wait for 2 minutes minimum and monitor cylinder pressure display. A drop in pressure indicates a

potential leak. If leakage is discovered, close cylinder valve and return to step 4. 28. Open HPI (ESO) valve. 29. Slowly increase regulator (CW) to desired delivery pressure. 30. If the manifold has an EFS, place the controller in SERVICE mode. 31. Manifold is now ready to be placed in service and supply process gas.

OPERATION


7.4 5 Valve Manifold Overnight Shutdown Purge Procedure 1. Close the cylinder valve. 2. If the manifold has an EFS, place the controller in PURGE mode. 3. Open process isolation valve downstream of regulator (PLI or AS). 4. Open LPV valve for 90 seconds, then close. Verify cylinder and delivery pressure indication is zero (0)

psig. 5. Close HPI (ESO) valve. 6. Wait 3 minutes minimum, then again verify cylinder pressure indication is zero (0) psig. If pressure has

increased, then cylinder valve is leaking past the seat. If cylinder valve is leaking, open the valve and close again tightly; then return to step 4. Do not proceed if cylinder valve continues to leak; contact gas supplier for assistance.

7. Open HPI (ESO) valve. 8. Fully increase regulator (CW). 9. Open VGS valve. 10. Open LPV valve for 120 seconds, then close. Verify cylinder pressure indication is zero (0) psig or less. 11. Open PGI valve for 120 seconds, then close. Verify cylinder and delivery pressure indication is

approximately 90 psig. 12. Repeat steps 9 and 10 for five times. 13. Close VGS valve. 14. Close process isolation valve downstream of regulator (PLI or AS). 15. Verify system pressure is 75 psig minimum. 16. Overnight shutdown is complete. Continue when ready to restart manifold process gas flow. 17. Open process isolation valve downstream of regulator (PLI or AS). 18. If system pressure is below 50 psig, check system for leaks. 19. Open VGS valve. 20. Open LPV valve for 120 seconds, then close. Verify cylinder and delivery pressure display indication is

zero (0) psig or less. 21. Fully decrease regulator (CCW). 22. Close HPI valve. 23. Open the cylinder valve. Wait 5 seconds minimum or until cylinder pressure indication stabilizes. Verify

full cylinder pressure indication, then close cylinder valve.

OPERATION


24. Wait for 2 minutes minimum and monitor cylinder pressure display. A drop in pressure indicates a potential leak. If leakage is discovered, close cylinder valve and perform a manifold maintenance purge procedure to repair leaks.

25. Open HPI (ESO) valve. 26. Slowly increase regulator (CW) to desired delivery pressure. 27. If the manifold has an EFS, place the controller in SERVICE mode. 28. Manifold is now ready to be placed in service and supply process gas.

OPERATION


7.5 Automatic Switchover Operation The automatic switchover function automatically operates the final isolation valve to the process gas delivery line to shut off a manifold whose gas cylinder is nearly depleted and turn on a standby manifold whose gas cylinder is full (standby manifold must be in service ready mode). An alarm will sound to notify the operator that the empty cylinder should be replaced. Typically the automatic switchover function for 5 Valve Manual Centurion GSMs is accomplished using an AS-200. Refer to the operations manual for the AS-200 or other controller as appropriate for correct operating procedures.

OPERATION


GSM MAINTENANCE


8. GSM MAINTENANCE Before starting maintenance, we suggest reviewing Section 4 (Safety Precautions), Section 8.2 (General Maintenance Recommendations), and the appropriate operations manual for the GSMC.

DANGER! Matheson TriGas recommends that whenever possible, the flow of process gas inside the enclosure should be shut off and all lines purged when maintenance is performed. If this is not possible, then the user should consult their Safety and Industrial Hygiene department to determine the appropriate personnel protective equipment that must be worn during maintenance.

WARNING! The high pressure leak test option allows a user to pressurize the manifold with high pressure purge gas to perform a pressure decay leak test. When performing a high pressure leak test on one manifold, NEVER perform a purge procedure on the adjacent manifold because high pressure gas is being supplied and can damage manifold components.

Figures and instructions may not exactly correspond to equipment

Optional and non-standard components often are specified and installed. For this reason, the figures and instructions in this section may not exactly correspond to the equipment at hand. Questions concerning maintenance procedures not described in this section should be referred to MTG Field Service,

8.1 Maintenance Personnel Equipment should be operated only by trained personnel. Maintenance of equipment should be entrusted only to personnel that are in addition trained and experienced in electromechanical assembly and repair techniques. When working on Hazardous Production Material (HPM) process gas equipment, personnel should perform tasks in teams of at least two (i.e. the "buddy system"). It is recommended that one person be stationed to be able to evacuate the area and call for help. Persons that do not understand the principles of gas equipment operation can injure themselves and co-workers. They can also damage equipment, resulting in unexpected downtime and expense. Before starting a job, all personnel responsible for equipment operation or maintenance must fully understand the specific procedures to be accomplished and all pertinent safety considerations. Because optional or non-standard components often are included in equipment configuration, maintenance

GSM MAINTENANCE


details may differ substantially from the generic instructions provided. If facility personnel are not confident in their abilities to maintain or operate the equipment, MTG Field Service should be contacted for assistance. MTG specialists are available to assist equipment owners and provide authoritative training in all aspects of equipment operation and maintenance. 8.2 General Maintenance Recommendations

WARNING!

IMPROPER LIFTING OF HEAVY EQUIPMENT CAN CAUSE INJURY Because the GSM and gas cylinder enclosure are heavy, only workers trained in NIOSH-approved lifting techniques should be assigned to either installation or removal efforts. In this way personal injury and damage to equipment can effectively be avoided.

WARNING!

EXCESS FLOW SAFETY ALARM BYPASSED DURING PURGE The flow rate during purge operations and initial process gas introduction usually exceeds the trip point of the excess flow switch (EFS). To prevent manifold shutdown during the purge procedures, the EFS alarm is bypassed and will not shutdown the manifold.

All maintenance personnel should be familiar with these recommendations that are pertinent to several sections of this manual. • It is recommended that the SHUTDOWN switch is pressed after completion of the pre-purge prior to

breaking connections for manifold maintenance. This will prevent the controller from starting a post-purge if the ACK button is accidentally pressed. Please consult the appropriate controller manual to determine how the SHUTDOWN switch will affect the purge procedure.

• The gas cylinder enclosure safety shield is constructed of polycarbonate plastic. Although this material

possesses exceptional impact strength, it also is easily scratched and readily damaged by contact with many organic solvents and vapors, including practically all alcohols, esters, and ketones. Soap and water are acceptable cleaning agents. Never attempt to clean the plastic safety shield with an incompatible solvent that would compromise its strength or transparency.

• To minimize equipment contamination, maintenance operations should be completed as quickly as

possible. Gather required tools and materials beforehand and make sure enough time is allotted for the job.

GSM MAINTENANCE


• Inspect face - seal connector gasket sealing surfaces for dirt, scratches, dents, pitting, or corrosion. Clean or replace affected parts before reassembly.

• Tighten face - seal connections exactly 1/8 turn beyond finger tight. Overtightening can damage the

connection and cause leakage; undertightening can also cause leakage. • Always install new gaskets when reassembling face - seal connections. • When working with components that contact process or purge gases - for example, face - seal connection

gaskets - always wear new latex gloves to avoid fingerprint contamination. • When performing maintenance procedures, install protective plastic caps on open connectors when the

connection is open to atmosphere for any long period of time or when required to protect the face seal connection from damage.

• Pneumatic supply tubing is best cut with a plastic tubing cutter rather than scissors or diagonal pliers.

Plastic tubing cutters are available from tool distributors.

WARNING! Failure to leak test process gas connections can result in leakage of hazardous process gases. MTG recommends that a leak test be performed to verify the connections are leak free. The leak test can be a high pressure decay test, an inboard helium leak test, and/or an outboard helium leak test. The leak test method is best chosen by the user to fit the capabilities of their facility and meet their safety requirements.

• Following maintenance, leak test all affected process-gas connections. Leak testing procedures are

documented in SEMI F11, ASTM E 498, and ASTM E 4992,

- For inboard testing with a helium-mass spectrometer leak detector, leakage at any connection should not exceed 1 x 10-9 sccs. The inboard leak test evacuates the GSM with the leak detector and sprays helium at the affected locations.

- For outboard pressure decay testing, the pressure decay after four hours should not exceed 1

percent of the initial value after compensation for any temperature changes. The pressure decay test pressurizes the high pressure side of the GSM to design pressure and then monitors the supply pressure sensor.

1. SEMI Standards Order Department, 805 East Middlefield Road, Mountain View CA 94043-4080 2. ASTM, 1916 Race Street, Philadelphia PA 19103

GSM MAINTENANCE


- For outboard leak testing using a sniffer probe, leakage from any connection should not cause an increase in helium concentration greater than 1 ppm above background. The outboard leak test pressurizes the affected regions of the GSM with 100 percent helium to 100 percent of the system design pressure.

CAUTION! When performing inboard leak testing using a helium mass spectrometer leak detector, isolate the gas source manifold prior to venting the leak detector. Many leak detectors backfill the evacuated line with atmosphere and this can contaminate the gas source manifold.

GSM MAINTENANCE


8.3 Component Replacements 8.3.1 Pressure Regulator Maintenance Procedure Tools and Materials • 5/8 - inch open end wrench • ¾ - inch open end wrench • 5/32 - inch hex key wrench • New latex gloves • Face - seal connection gaskets (as required) • Pressure regulator Procedure 1. Start a manifold maintenance purge procedure described in Section 7.2. When the "perform

maintenance" instruction is encountered, continue with this procedure. 2. Open the gas cylinder enclosure door. 3. With a wrench, hold the pressure regulator outlet connector male nut. With another wrench, loosen but

do not separate the connection. 4. Similarly loosen but do not separate the other pressure regulator connections. 5. With a hex key wrench, remove the screws holding the pressure regulator bracket to the manifold main

mounting panel. 6. Separate the pressure regulator inlet and outlet connections, then carefully remove the pressure

regulator, its bracket, and both gaskets. Discard all gaskets. 7. Inspect all exposed gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Clean or replace

parts as indicated. 8. Remove the screws holding the pressure regulator to its bracket. 9. Transfer the bracket to the replacement pressure regulator. 10. Wearing new latex gloves to avoid fingerprints, remove the protective plastic caps from the pressure

regulator connectors. 11. Insert a new gasket between the pressure regulator outlet connector, then finger tighten the connection. 12. Similarly make up the other pressure regulator connection(s). 13. Loosely install the screws holding the pressure regulator bracket to the manifold main mounting panel. 14. With a wrench, hold the pressure regulator inlet connector male nut. With another wrench, tighten the

connection 1/8 turn beyond finger tight. 15. Similarly tighten the other pressure regulator connection(s). 16. Tighten all regulator bracket screws. 17. Carefully inspect all work.

GSM MAINTENANCE


18. Close the enclosure door. 19. Perform a leak test of all reworked connections when required by the purge sequence. 20. Complete the purge sequence using the procedure described in Section 7.2. 21. Restore process gas service.

GSM MAINTENANCE


8.3.2 Pigtail Pressure Sensor (Transducer) Maintenance Procedure The pigtail assembly and cylinder pressure transducer can be removed independently. Depending on the process gas, the manifold may or may not use a CFG. A standard face seal connection gasket is used for manifolds that do not require a CFG. Tools and Materials • 5/8 - inch open end wrench (2 each) • ¾ - inch open end wrench (2 each) • New latex gloves • Face - seal connection gasket (as required) • Vent pressure sensor with signal cable and connector Procedure 1. Start the manifold maintenance purge described in Section 7.1. When the "perform manifold

maintenance" instruction is encountered, continue with this procedure. 2. Open the gas cylinder enclosure door. 3. Disconnect the cable connector for the existing pigtail pressure sensor at the controller. 4. With a wrench, hold the pigtail pressure sensor male nut. With another wrench, loosen but do not

separate connection. 5. Carefully remove the pigtail pressure sensor and gasket. Discard all used gaskets. 6. Inspect all exposed gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Clean or replace

parts as indicated. 7. Wearing new latex gloves to avoid fingerprints, remove the protective plastic cap from the replacement

pigtail pressure sensor assembly. 8. Insert new face - seal gasket between the pigtail pressure sensor connector and the pigtail, then finger

tighten the connection. 9. Using two wrenches, tighten up the pigtail pressure sensor connection 1/8 turn beyond finger tight. 10. Connect the pressure sensor cable to its mating connector on the controller. Allow 15-20 minutes for the

transducer to warm-up, then calibrate if necessary. 11. Carefully inspect all work. 12. Close the enclosure door. 13. Complete the purge procedure using the procedures outlined in Section 7.2. 14. Restore process gas service.

GSM MAINTENANCE


GSM MAINTENANCE


8.3.3 Purge Gas Check Valve Maintenance Procedure Tools and Materials • 5/8 - inch open end wrench • ¾ - inch open end wrench (2 each) • 7/8 - inch open end wrench • New latex gloves • Face - seal connection gaskets (as required) • Purge gas check valve Procedure 1. Start a manifold maintenance purge described in Section 7.2. When the "perform manifold maintenance"

instruction is encountered, continue with this procedure. 2. Close the purge gas supply shutoff valve that supplies the manifold. 3. Open the gas cylinder enclosure door.

CAUTION! The purge gas supply line is pressurized with purge gas which will vent to ambient pressure when a connection is loosened.

4. With a wrench, hold the check valve body. With another wrench, loosen the check valve inlet connection. 5. Similarly, loosen the check valve outlet connection. 6. Adjust the purge gas supply shutoff valve to obtain a low flow of purge gas through the purge line. 7. Separate both face - seal connections; discard the face - seal gaskets. 8. Inspect the exposed gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Clean or replace

parts as indicated. 9. Wearing new latex gloves to avoid fingerprints, remove the protective plastic caps from the replacement

check valve. 10. Insert new face - seal gaskets between the check valve inlet and outlet connectors observing correct flow

orientation, then finger tighten the connections. 11. Using two wrenches, tighten the check valve connections 1/8 turn beyond finger tight. 12. Carefully inspect all work. 13. Open the purge gas supply shutoff valve. 14. Perform a leak test of all reworked connections. 15. Close the enclosure door.

GSM MAINTENANCE


16. Complete the purge procedure using the procedures outlined in Section 7.2. 17. Restore process gas service.

GSM MAINTENANCE


8.3.4 Purge Gas Orifice Maintenance Procedure Tools and Materials • 5/8 - inch open end wrench • ¾ - inch open end wrench (2 each) • 7/8 - inch open end wrench • New latex gloves • Face - seal connection gaskets (as required) • Purge gas orifice (PGO) Procedure 1. Start a manifold maintenance purge described in Section 7.2. When the "perform manifold maintenance"

instruction is encountered, continue with this procedure. 2. Close the purge gas supply shutoff valve that supplies the manifold. 3. Open the gas cylinder enclosure door.

CAUTION! The purge gas supply line is pressurized with purge gas which will vent to ambient pressure when a connection is loosened.

4. With a wrench, hold the orifice gland body. With another wrench, loosen the orifice nut.

5. Adjust the purge gas supply shutoff valve to obtain a low flow of purge gas through the purge line. 6. Separate the face - seal connection; discard the orifice gasket. 7. Inspect the exposed gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Clean or replace

parts as indicated. 8. Wearing new latex gloves to avoid fingerprints, remove the orifice gasket from the protective bag. 9. Insert the new orifice gasket between the orifice inlet and outlet glands, then finger tighten the connection. 10. Using two wrenches, tighten the orifice gasket connection 1/8 turn beyond finger tight. 11. Carefully inspect all work. 12. Open the purge gas supply shutoff valve. 13. Perform a leak test of all reworked connections. 14. Close the enclosure door. 15. Complete the purge procedure using the procedures outlined in Section 7.2. 16. Restore process gas service.

GSM MAINTENANCE


GSM MAINTENANCE


8.3.5 Automatic Switchover Assembly Maintenance Procedure Tools and Materials • 5/8 - inch open end wrench • ¾ - inch open end wrench • 11/16 - inch open end wrench • 5/32 - inch hex key wrench • New latex gloves • Face - seal connection gaskets (as required) • Automatic switchover assembly ("assembly") Procedure 1. Perform the line maintenance purge procedure described in Section 7.3 of this manual for one GSM and

the manifold maintenance purge procedure described in Section 7.2 for the other GSM. When the “perform maintenance” instruction is encountered, continue with this procedure.

2. Open the gas cylinder enclosure door. 3. With a wrench, hold the LPI module inlet gland on manifold “A”; with another wrench, separate the face -

seal connection to the automatic switchover inlet on manifold “A”. 4. Similarly separate the analogous connection on manifold “B”. Discard both gaskets. 5. Similarly separate the connection at the automatic switchover assembly process gas outlet. Discard the

gasket. 6. Remove the screws holding the assembly valve brackets to the mounting panel; remove the automatic

switchover assembly and brackets. 7. Inspect all exposed connector gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Clean

or replace parts as indicated. 8. Remove the screws holding the assembly valves to their brackets. 9. Install the brackets to the replacement assembly and tighten screws. 10. Position the assembly onto the top piping mounting panel and loosely install the screws on all assembly

brackets. 11. Wearing new latex gloves to avoid fingerprints, insert new face - seal gaskets at all three face - seal

connections, then finger tighten all connections. 12. Using two wrenches, tighten all face - seal connectors 1/8 turn beyond finger tight. 13. Tighten the screws that hold the assembly brackets to the mounting panel. 14. Carefully inspect all work. 15. Close the enclosure door. 16. Perform a leak test of all reworked connections when prompted in the purge sequence.

GSM MAINTENANCE


17. Complete the line maintenance purge procedure described in Section 7.3 and the manifold maintenance purge procedure described in Section 7.2 on the appropriate manifolds.

18. Restore process gas service.

GSM MAINTENANCE


8.3.6 Filter, PURIFILTER, or Bloc Purifier Maintenance Procedure Please refer to the installation manual for the filter, PURIFILTER, or Bloc Purifier to determine any special procedures that must be observed. Tools and Materials • ¾ - inch open end wrench • 11/16 - inch open end wrench • 5/32 - inch hex key wrench • Face - seal connection gaskets (as required) • Stainless steel PURIFILTER purifier/filter gaskets (2 each if required) • Filter, PURIFILTER, or Bloc Purifier ("filter") Procedure 1. If the filter is located between the low pressure module and the automatic switchover module, perform the

manifold maintenance purge procedure described in Section 7.2. If the filter is located on the outlet of the automatic switchover module, perform the line maintenance purge procedure described in Section 7.3. When the “perform line maintenance” or “perform manifold maintenance” instruction is encountered, continue with this procedure.

2. Open the gas cylinder enclosure door. 3. With a wrench, hold the filter body nut. With another wrench, loosen but do not separate the filter inlet

connection. 4. Similarly loosen but do not separate the filter outlet connection. 5. Separate the filter inlet and outlet connections, then remove the filter and both gaskets. If additional axial

clearance is needed, loosen adjacent component bracket screws and ask a helper to hold the connectors apart. Discard both gaskets.

6. Inspect all exposed gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Clean or replace

parts as indicated. 7. Wearing new latex gloves to avoid fingerprints, remove the protective plastic caps from the replacement

filter inlet and outlet connectors. 8. Insert a new gasket between the filter outlet connectors, then finger tighten the connection. Special

gaskets are required for the PURIFILTER. 9. Similarly make up the filter inlet connection. 10. Using two wrenches, tighten the filter outlet and inlet connections 1/8 turn beyond finger tight. 11. Tighten all affected bracket screws. 12. Carefully inspect all work. 13. Close the enclosure door.

GSM MAINTENANCE


14. Perform a leak test of all reworked connections when prompted by the purge sequence. 15. If the filter is located between the low pressure module and the automatic switchover module, complete

the manifold maintenance purge procedure described in Section 7.2. If the filter is located on the outlet of the automatic switchover module, complete the line purge procedure described in Section 7.3.

16. Restore process gas service.

GSM MAINTENANCE


8.3.7 Manifold Maintenance Procedure Several maintenance procedures mandate removal of the entire manifold from the gas cylinder enclosure. This procedure covers removing the entire process gas portion of the manifold. If only one of these parts is to be replaced, follow this general procedure but only remove and replace the affected part. Tools and Materials • ¾ - inch open end wrench (2 each) • 5/8 - inch open end wrench • 9/64 - inch and 5/32 - inch hex key wrenches • Conical filter gasket (CFG) • Face - seal gaskets (as required) • Protective plastic caps for exposed face - seal connectors (as required) • Replacement manifold parts including PGI/HPI/HPV high pressure module, regulator, and EFS/LPV and

delivery transducer low pressure module ("manifold"). 8.3.7.1 Removal 1. Perform the line maintenance purge procedure described in Section 7.3 of this manual for one GSM and

the manifold maintenance procedure described in Section 7.2 for the other GSM. When the “perform maintenance” instruction is encountered, continue with this procedure.

2. Open the gas cylinder enclosure door. 3. Close the purge gas supply shutoff valve. 4. Separate the process gas cylinder CGA connection; install the cylinder cap protective cover; remove the

cylinder from the gas cylinder enclosure; place the cylinder on a gas cylinder cart or in a designated storage facility; install the safety chain to prevent accidental damage by falling.

5. Disconnect the delivery pressure transducer and excess flow switch cable connectors at the controller. 6. Disconnect the pneumatic actuation tubing at the PGI, HPI, HPV, and LPV pneumatic valves. 7. With a wrench, hold the LPV module outlet nut. With another wrench, loosen but do not separate the

auto-switchover inlet face - seal connection. 8. Similarly loosen but do not separate the face - seal connections at:

- Purge gas and pigtail connection at the PGI valve

- HPV to vent header weldment

- LPV to vent header weldment and LPV to process connection

- Relief valve connection to vent tubing (if applicable)

- Remove the four screws holding the manifold right hand main mounting panel to the manifold left hand main mounting panel. Remove the two nuts holding the right hand main mounting panel to the gas cabinet.

- Separate all piping connections that were loosened. Should additional axial clearance be

required for manifold removal, loosen adjacent component bracket screws or nuts and ask a

GSM MAINTENANCE


helper to hold apart the connectors. Discard all gaskets.

- Inspect all exposed connector gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Clean or replace parts as indicated.

- Install protective plastic caps on all exposed connectors.

8.3.7.2 Installation 1. Without touching the gasket sealing surfaces, remove the protective plastic caps from all replacement

manifold connectors and mating connectors 2. Position the replacement manifold next to the left hand main mounting panel inside the gas cabinet and

loosely install the four screws that secure the right hand main mounting panel to the left hand main mounting panel. Loosely install the nuts that secure the right hand main mounting panel to the gas cabinet.

3. Insert new face - seal gaskets at all piping connections, then finger tighten all connections. 4. Using two wrenches, tighten all connections 1/8 turn beyond finger tight. 5. Tighten the screws holding the right hand and left hand main mounting panels together and the right hand

main mounting panel to the gas cabinet wall. 6. Connect the pneumatic actuation tubing to each manifold valve. 7. Tighten all other affected bracket nuts and screws. 8. Connect the delivery pressure transducer and excess flow switch cable connectors to their respective

mating connectors at the controller. 9. Install process gas cylinder and secure safety chain. Make up and tighten the process gas cylinder CGA

connection. 10. Carefully inspect all work. 11. Open the purge gas supply shutoff valve. 12. Close the enclosure door. 13. Perform a leak test of all reworked connections when prompted by the purge sequence. 14. Complete the line maintenance purge procedure described in Section 7.3 and the manifold maintenance

purge procedure described in Section 7.2 on the appropriate manifolds.

GSM MAINTENANCE


8.3.8 Vacuum Generator Assembly Maintenance Procedure Tools and Materials • 9/16 - inch open end wrench • 5/8 - inch open end wrench • 11/16 - inch open end wrench • ¾ - inch open end wrench • Face - seal gasket (as required) • Plastic tubing cutter • 3/8 - inch compression ferrule and nut • ¼ - inch compression ferrule and nut • Vacuum generator assembly and/or VGS (as indicated) Procedure 1. Purging typically is not required for this maintenance procedure. 2. Close the HPI (ESO) and the cylinder valve. 3. Close the vacuum generator supply shutoff valve outside the cylinder enclosure. 4. Open the gas cylinder enclosure door. 5. If required, remove the pneumatic supply tubing from the VGS actuator one touch fitting and remove the

one touch fitting from the actuator. 6. Hold the vacuum generator body by hand; with a wrench separate the 3/8 inch face seal fitting at the VGS

outlet. 7. With a wrench, hold the VCR nut at the vacuum generator vacuum port. With another wrench, separate

the connection. 8. With a wrench, hold the VCR nut at the vacuum generator inlet port. Separate the face - seal connection

at the vacuum generator venturi inlet. Discard the gasket. 9. Inspect all exposed gasket sealing surfaces for dirt, scratches, dents, pits, or corrosion. Similarly inspect

the compression connectors. Clean or replace parts as indicated. 10. Install the replacement vacuum generator. 11. Reinstall the one touch fitting into the VGS actuator and reinstall the pneumatic supply tubing into the one

touch fitting. 12. Wearing new latex gloves to avoid fingerprints, remove the protective plastic caps from the face - seal

vacuum connections. 13. Install new gaskets and loosely make up the face - seal connections. 14. With a wrench, in turn hold the male nut of each of the face - seal connections. With another wrench,

tighten all of the connections 1/8 turn beyond finger tight. 15. Open the vacuum generator supply shutoff valve. 16. Close the enclosure door.

GSM MAINTENANCE


17. Unlatch the GSMC SHUTDOWN switch by rotating its operator clockwise. 18. Restore process gas service.

GSM MAINTENANCE


8.4 Component Rebuild Maintenance Procedure 8.4.1 Vent In-Gland Check Valve Tools and Materials • 5/8 - inch open end wrench • ¾ - inch open end wrench (2 each) • 1/8 - inch hex key • Face - seal connection gaskets (2 each) • Protective plastic cap for face - seal connectors (2 each) • In-gland check valve rebuild kit comprising small and large O-rings, poppet, spring, and poppet retainer Procedure 1. Start a manifold maintenance purge described in Section 7.2. When the "perform manifold maintenance"

instruction is encountered, continue with this procedure. 2. Open the gas cylinder enclosure door. 3. With a wrench, hold the in-gland check valve male nut. With another wrench, separate the connection.

Discard the gasket. 4. Similarly separate the HPV outlet to vent header weldment and vacuum generator inlet to vent header

weldment connections. 5. Install a protective plastic cap on the exposed face - seal connectors. 6. With a hex key, remove and discard the existing check valve poppet retainer with O-ring, the poppet with

O-ring, and the poppet spring from the vent header weldment. 7. With scissors, open the rebuild kit package. 8. Wearing new latex gloves to avoid fingerprints, install the small replacement O-ring on the replacement

poppet (Figure 9). 9. Insert the replacement spring into the spring cavity of the poppet. 10. Insert the replacement poppet - spring end first - into the gland. 11. Install the large replacement O-ring on the poppet retainer, then install the poppet retainer into the gland

and tighten with a hex key. 12. Wearing new latex gloves to avoid fingerprints, insert a new gasket between the face - seal connectors,

then finger tighten the connection. 13. Using two wrenches, tighten the face - seal connection 1/8 turn beyond finger tight. 14. Carefully inspect all work.

GSM MAINTENANCE


15. Close the enclosure door. 16. Complete the purge procedure using the procedures outlined in Section 7.2. 17. Restore process gas service.

Figure 9. Exploded In-Gland Check Valve

GSM MAINTENANCE


8.5 Pressure Transducer Calibration Maintenance Procedure Pressure transducer calibration should be confirmed every 6 months; calibration instructions are available from MTG Field Service.

GSM MAINTENANCE


TROUBLESHOOTING


9. TROUBLESHOOTING This section describes possible causes for manifold indications caused by component failure, incorrect operation, etc. The indication observed by the operator is given and then possible failure causes. Should questions arise, contact the SGS Field Service Department for assistance in interpretation. 9.1 Manifold Indication: High Delivery Pressure Possible causes: • Defective or maladjusted pressure regulator • Defective, obstructed, maladjusted, or disconnected delivery pressure transducer • Defective analog input channel 9.2 Manifold Indication: High Manifold Pressure During Evacuation Possible causes: • Defective HPV, LPV, or VGS • Inadequate vacuum generator supply source pressure • Obstructed vacuum generator supply line • Defective or obstructed vacuum generator • Obstructed vacuum generator supply line check valve • Defective, obstructed, maladjusted, or disconnected cylinder pressure transducer 9.3 Manifold Indication: Low Manifold Pressure During Purge Possible causes: • Inadequate purge gas supply pressure • Defective purge gas check valve • Obstructed purge gas orifice • Defective, obstructed, maladjusted, or disconnected cylinder pressure transducer 9.4 Manifold Indication: Low Cylinder Pressure Possible causes: • Inadequate process gas source pressure (e.g., empty cylinder) • Blocked process gas line between cylinder and GSM • Blocked conical filter gasket between source and GSM • Defective, obstructed, maladjusted, or disconnected cylinder pressure transducer

TROUBLESHOOTING


9.5 Manifold Indication: Excess Flow Shutdown Possible causes: • Incorrect, defective, or disconnected excess flow switch • Broken or disconnected process gas delivery line to process equipment. • Process equipment using excess of process gas. 9.6 Manifold Indication: Low Cylinder Weight Possible causes: • Nearly-depleted cylinder • Defective cylinder scale • Improperly tared cylinder weight • Disconnected cylinder scale input to GSMC

WARRANTY


10. LIMITED WARRANTY AND SERVICE POLICY Should a problem develop in the operation of a Centurion source gas manifold or other MTG equipment, we respectfully suggest reading appropriate operation manual sections. Should the problem persist, please remember that MTG Field Service is available during normal business hours (Eastern Time) to answer questions. The Field Service direct telephone number is 800 850-6231. The MTG factory toll-free telephone number is 800-850-6231; local telephone number is 215-641-2700; FAX number is 215-641-2714. Customer suggestions for service and product improvements are always appreciated. 10.1 Limited Hardware and Software Warranty Matheson TriGas (MTG) warrants its equipment to be free from defects in materials and workmanship for a period of sixty (60) days after installation or ninety (90) days after shipment, whichever period first expires. This warranty, at MTG’s option, is limited to incurred labor and repair or replacement of parts. Warranty claims may be lodged with either the MTG Field Service Department or authorized local sales representatives. Not covered under this warranty are equipment failures caused by (1) misapplication, (2) improper installation or operation, (3) internal or external contamination, (4) abuse, and (5) failure of equipment not purchased from MTG. In no event shall MTG liability include special, incidental, or consequential loss or damage, even though MTG may have been apprised of the possibility of such potential loss or damage. This warranty is in lieu of all other warranties of fitness and merchantability. Additional warranties of any kind are neither expressed nor implied. 10.2 In-Warranty Repairs Charges are waived; repaired equipment is returned freight prepaid. 10.3 Out-of-Warranty Repairs Charges typically include parts, labor, freight, and insurance. Equipment that cannot be economically restored to satisfactory operating condition will be returned unrepaired freight collect or discarded at the owner's option. 10.4 Shipments to Factory Please contact your local MTG Field Service or the MTG factory for consultation and advice prior to returning suspected defective goods for inspection and repair. All returns must be shipped with freight prepaid and accompanied by a RETURNED MATERIAL AUTHORIZATION (RMA) NUMBER.

WARRANTY


GLOSSARY


11. GLOSSARY Abbreviations: n = noun; v = verb; adj. = adjective AGC (n) Auto-Guard Connection, a pneumatic device that automatically positions a metal

guard over a CGA connection when gas pressure exists in a pigtail, thereby preventing disconnection of the cylinder when the cylinder valve is open.

CFG A conical filter gasket that is installed upstream of GSM valves to filter out large

particles that can prevent manifold components from operating properly. EFS A vertical flow sensor that provides a signal when the process gas flow rate exceeds

the sensor set point. The signal is used to SHUTDOWN all manifold valves and an audible alarm alerts the user to investigate.

Enable (v) To manually or automatically accomplish preliminary steps required to make an

operation immediately invokable. MOP (n) Maximum Operating Pressure, the pressure to which a manifold can be pressurized

without exceeding the safe operating pressure ratings of its components. Synonymous with design pressure as defined by ANSI/ASME B31.3.

Proof Pressure A component test pressure considerably above the maximum operating pressure but

below the burst pressure, and that should not result in permanent deformation of the component.

PGO (n) Purge Gas Orifice, a flow-limiting orifice that is interposed in the purge gas inlet line. Purge Procedure (n) An automated procedure for replacing process or contaminant gas in the manifold

space with purge gas. This is accomplished by repeatedly pressurizing and exhausting the space with purge gas; interruptions in the procedure enable maintenance operations, leak testing, etc., to be accomplished. Several types of purge procedures are available for accomplishing different tasks.

Sensor (n) A pressure transducer, flow switch, pressure switch, or similar device that detects a

change in physical characteristics. Unit (n) The engineering unit associated with a parameter; example: psig Value (n) The number associated with a unit; example: 245.5 Valve Acronyms (n) Two - or three - letter standard designations for GSM valves, set in HELVETICA type:

- ACV = Automated Cylinder Valve; a pneumatically-actuated version of the conventional cylinder valve.

- AS = Automatic Switchover Valve; a pneumatically-actuated valve that is

used with controllers.

- HPI = High Pressure Isolation Valve; when closed, isolates regulator and downstream components from process gas source.

GLOSSARY


- HPV = High Pressure Vent Valve; when open, vents high-pressure purge gas or high-pressure process gas via vacuum generator.

- LI = Line Isolation Valve; when closed, isolates process line from LPI

manifold

- LPI = Low Pressure Isolation Valve; when closed, isolates GSM from process gas delivery line. This valve also performs the automatic switchover function when used with LNX controllers

- LPV = Low Pressure Vent Valve; when open, vents low-pressure purge gas

or low-pressure process gas via vacuum generator. A check valve precludes backflow of vacuum generator supply gas or high pressure process gas into the GSM via LPV.

- PBV = Purifier Bypass Valve; when closed allows process gas to bypass

purifier. When open, allows process gas to flow out of purifier.

- PGB = Purge Gas Bleed Valve; a valve that when open allows full flow of purge gas and when closed allows a small flow of purge gas. Extends equipment life by allowing a small flow of purge gas at all times, thereby lessening the chance of corrosive obstruction.

- PGI = Purge Gas Inlet Valve; when closed, isolates regulator and

downstream components from purge gas source.

- PIV = Purifier Inlet Valve; when closed allows process gas to bypass purifier. When open, allows process gas to flow through purifier.

- PLI = Process (Gas Delivery) Line Isolation Valve; when closed, isolates

GSM from process gas delivery line.

- POV = Purifier Outlet Valve; isolates purifier outlet from process panel.

- PVV = Purifier Vent Valve; allows purified gas to be sent to vent during purifier conditioning.

- SHT = Shut-Boy; a pneumatic motor that rotates a typical manual cylinder

valve operator, thereby automatically opening and closing the cylinder valve.

- VAI = Vacuum Access Isolation Valve; when closed, isolates the low-pressure vent line from leak test equipment vacuum source. The inlet port of this valve is connected to leak test equipment during leak testing only; the inlet port is closed with a protective cap during typical operation of the GSM.

- VAP = Vacuum Access Port; port used to connect vacuum or leak test

equipment to the low-pressure GSM vent line.

- VGI = Vacuum Generator Isolation Valve; when closed, isolates the low - and high - pressure vent lines from the vacuum generator.

- VGS = Vacuum Generator Supply Valve; when open, allows vacuum

generator supply gas to enter vacuum generator venturi, producing vacuum.

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