1

EMD Group

MEMS/Photonics and Nano/Electronic Materials

2

Electronic Materials Group

Graduate Student Orientation

AltanFerendeci

Marc Cahay

PunitBoolchand

3

M.Cahay Research Areas

Field Emission from tips

Spintronics

Three generic structural phases of network glasses

P.Boolchand,

University of Cincinnati

Supported by NSF grant DMR 08- 53957

Model of an amorphous/crystalline Si interface, taken from F. Wooten, JNCS 114, 681 (1989).

Functional Disordered networks

Each may have at its base a self-organized phase that endows these systems with unusual functionalities.

PB, G.Lucovsky, J.C.Phillips and M.F.Thorpe, Phil. Mag.85, 3823 (2005).

Window GlassWindow Glass Self-organizationSelf-organization

in oxide glassin oxide glass

Electrical EngElectrical Eng.. Thin-film gateThin-film gate

dielectricsdielectrics

Biological SciencesBiological Sciences Protein foldingProtein folding

Computer ScienceComputer Science Satisfiability ProblemsSatisfiability Problems

Solid State PhysicsSolid State Physics Pairing in Oxide Pairing in Oxide SuperconductorsSuperconductors

Intermediate phasesIntermediate phases in glassesin glasses

Microwave and Millimeter Wave Communications

Laboratory.

Short Range Wireless CommunicationsAltan M. Ferendeci

Department

of

School of Electronics and Computing Systems

University of Cincinnati

UC-MEMS SwitchesUC-MEMS Switches

Switch-up “on” Switch-down “off”

On/off switching times

3-D Multilayer MMIC• Multilayer Transmitter

Circuit– Power Amplifier

– MEMS switched Phase Shifter

– MEMS switched T/R module

– Slotted Spiral Antenna with Wide-Bandwidth Balun

• Monolithically processed vertical posts or planes interconnecting the sub-units.

• Ground planes for circuit isolation.

10

Recommended Courses

• 611 Microwave Communications (Fall)• 757 Semiconductor Physics (Fall) • 628 Nanoelectronics (Winter)• 758 Quantum Mechanics for EE (Winter)• 711 Millimeter Wave Electronics (Spring)• 810 Materials Characterization by Optical… (Spring)• 6 hrs of 780 (Self Study Research)• Seminar series (701,702,703) in Fall, Winter, and Spring

quarter, respectively.

11

Photonics and Nanostructures Group … and more!

Graduate Student Orientation

Fred R. Beyette

Joseph Boyd

Jason Heikenfeld

Peter B.Kosel

Stephen T.Kowel

Thomas D.Mantei Andrew J.

Steckl

12

Research Areas

• Photonic devices: LED's, lasers, waveguides, optical memory, displays

• Organic light emitting devices

• Photonic band gap-based waveguides, simulation of photonic waveguide

devices

• Plasma sources, plasma characterization, plasma etching, and plasma

deposition

• Anodic fiber bonding for telecommunications applications

• High energy-density dielectrics, chalcopyrite semiconductor growth for

photonics

• MBE and MOCVD deposition of wide bandgap semiconductors

• electrofluidics for tunable/switchable refractive and diffractive optics

• optical tools for membrane science/sensing

• carbon nanofiber arrays for biomimetic devices

• electrowetting pixels for flat panel displays GO TO THE ECE WEBSITES!

13

Research Interests

14

Research Interests

Current Research Activity in

Photonic Waveguide Structures

Joseph T. Boyd

Photonic crystal structuresFabricationLow loss propagationParabolic couplerStructures for efficient information processing

Nano-slot photonic waveguidesFabricationLow loss propagationEnhanced field for efficient nonlinear interactions

16

Novel Devices Laboratory

UC is an academic leader in electrowetting (Steckl group also has an APL cover in EW!)

2005 2006 2007 2009 2010 2010 2010

Applications in displays, lab-on-chip, optics (switchable lenses/prisms), reconfigurable antenna’s.. Etc…

September 2010

U. of Cincinnati - GaAs Devices & ICs Laboratory

Current Research - Professor P B Kosel

University of Cincinnati

Diamond-based Electronics

Chalcopyrite Semiconductor Devices

Cold Electron SourcesPressure Sensors

Microwave Poly PreparationVapor Phase Transport

High Temperature Electronics

High temperature probing

11b

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

100%

0 50 100 150 200 250

Pressure (KPa)

Out

put

Sig

nal

Calculated

Measured

Linear (Measured)

Linear (Calculated)

PCD Diaphragm

PCD capacitors

Powder source in quartz ampoule

Ave Temp

800850900950

10001050

1 2 3 4 5 6 7 8

Ave Temp

Film growth furnace

Photodetectors

18

Recommended Courses

• 618 Microfabrication of Semiconductor Devices (Fall) • 648 Fundamentals of Optoelectronics (Fall) • 614 Photonic Information Processing Lab (Winter) • 641 Silicon Fab Lab or 697 Compound Semiconductor

Fab Lab (Winter) • 652 Optical Communications (Spring) • 784 Advanced Semiconductor Lasers (Spring)• 6 hrs of 780 (Self Study Research)• Seminar series (701,702,703) in Fall, Winter, and Spring

quarter, respectively.

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MEMs Group

Graduate Student Orientation

IanPapautsky

ChongAhn

 

Chong H. Ahn, Professor

Microsystems and BioMEMS LaboratorySchool of Electronics and Computing Systems

University of CincinnatiPO Box 210030

Cincinnati, OH 45221-0030, USAhttp://www.BioMEMS.uc.edu

Biochips and Lab on a Chip, BioMEMS and Microfluics

Smart Point-of-Care Diagnostics for Home Care or Emergency Room

Action buttons

Watch & Display cap

Wrist watch band

Wristwatch Type Point-of-Care Testing

Inlet ports

Pressurized air bladders

Microneedle array

Air-bursting“Detonator”

sPROMs

Biochemical sensors (underneath)

Integrated Disposable Biochip

Cartridge

Biochip Analyzer for Multi-analyte

Detection

Integration of Disposable Smart Biochip Cartridge

Integration of Metal needle

Spray and screen printing Wristwatch type

Solid-propellant (AIBN)

Waste chamber

Lateral metallic microneedle

Calibration pouch

Biosensor array

sPROMs (passive valve)

AIBN heater

200 um

150 um

Mold injection

Microneedle

Rapid injection molding

Pouch

Integration of pouch

Pressure source

AIBN

Screen printing

Biochemical sensor Techniques for MASS-PRODUCTION

Ian Papautsky, University of Cincinnati

• Inertial Microfluidics– Lift forces focus cells into

equilibrium positions– Dean drag disrupts

equilibrium– Size-dependant focusing

Cells, blood, particles, bacteria

• Separation, filtration, concentration• High-throughput

(~1 million cells/min)• Sheathless

flow cytometry

Bhagat et al., Lab Chip, 2008Bhagat et al., Microfluid. Nanofluid., 2009

Segre and Silberberg, Nature 1961

Input Downstream

0.3D

Bhagat et al., Lab Chip, 2008Bhagat et al., Microfluid. Nanofluid., 2009

Segre and Silberberg, Nature 1961

Input Downstream

0.3D

Rep = 0.692

50 µ

m

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

0 20 40 60 80 100 120 140 160 180 200

Side outlets

Center outlet

Microchannel width (µm)

Flu

ore

scen

ce in

ten

sity

Inlet

Outlet

590 nm

1.9 µm

Bhagat et. al., Lab Chip, 2008 Bhagat et. al., Microfluid. Nanofluid., 2009 Kuntaegowdanahalli et. al., Lab Chip, 2009 Bhagat et. al., Biomed. Microdev., 2010

2 1 0 -1 -2

Curr

ent

Potential (V)

Pt

Au

GC

BiFEMFE

-2 -1 0 1 2

BiFE

GC

Au

Pt

Potential (V)

Cur

rent

(µA

)

Ian Papautsky, University of Cincinnati

• Point-of-care electrochemical sensors– Anodic stripping voltammetry– Limits of detection below 1 nM– Focus on detection of highly

electronegative metals– Bismuth working electrode surface

• Zn supplementation(Cincinnati Children’s Hospital)

– Zn strips at approx. -1.3V– Range: 60~80 µg/dL and below

• Mn exposure

– Mn strips at approx. -1.6V– Range: 4-14 µg/L

a b

AE REWE

electrochem. cell

input

outputelectrode interface

Bi FE

Mn2+

Mn0

glass+-

+-

Bi FE

Mn2+

Mn0

Pre-concentration

Stripping

glass

Jothimuthu et. al., IEEE Sensors, 2008; 2009Jothimuthu et. al., Biomed. Microdev., 2010; Wilson et. al., Electroanalysis, 2010

26

Recommended Courses

(required) ECE 607  Introduction to Biomedical Microsystems (Fall)                                              (required) ECE 608 Fundamentals of MEMS (Fall)

ECE 618 Microfabrication Semicondutor (Fall)ECE 757 Semiconductor Physics (Fall)

(required) ECE 641 Silicon Semiconductor Microfabrication Lab for MEMS (Winter)(required) ECE 707 Biomedical MEMS (Winter)ECE 771 Application of MEMS (Winter)

ECE 678 Micro/Nano Biochips Lab (Spring)ECE 726 Biochip and Lab on a Chip (Spring)ECE 732 Biosensors and Bioelectronics (Spring)

6 hrs of 780 (Self Study Research)

Seminar series (701,702,703) in Fall, Winter, and Spring quarter, respectively.