(330-210)충남천안시 서북구 두정동 774번지 테크피아빌딩 4층Techpia Building 4F, #774, Dujeong-dong, Seobuk-gu, Cheonan-si, Choongchongnam-do, korea

Tel. 041_556_7600, Fax : 041_556_7603 E-mail : rmstech@rmstech.co.kr

IntroductionTotal Engineering ServiceRMS Product ContentsP001P002P003P004P005P006P007P008P009P010P011P012P013P014P015

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07

09

11

13

15

17

19

21

23

25

27

29

31

33

35

37

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

Contents

RMS Technology Co., LTD was incorporated in Oct. 1999 by the principle of supporting with the sythetic Dynamic

Design Technologies for the vibration control, applicable to every structure and utility. The founders are all engineers who not

only are the holders of unique technologies about every test and interpretation but also have many years’on-site experi-

ences.'

RMS Technology Co., LTD holds a unique vibration control technology. ‘Semi-empirical Method”which is that combined with

the test and interpretation technologies. This unique technology enables if to control the sub-micro vibration in the semiconductor factory and

extremely precision industries and makes RMS Technology perform the completion of the structural designs for the semiconductor factory,

including whole, from the basement and up to the anti-vibration systems for the utilities at first in Korea, which asks very high level (Giga

Class) of vibration control technologies as satisfying the permitted vibration criteria for sub micro-vibration. By its enough experiences and

cumulated technologies. RMS has been able to diversify the applications of its technologies, like estimation and countermeasure against every

vibration arising from the tube, countermeasure against impact vibration for chip mount production line, designs of the buildings and tunnels

for the endurance against vibraions, dynamic safety estimation for the prevention from the explosion and able to pick-up its reliability much

more by the good results of its performanes.

RMS Technology Co., LTD and its all staffs promise you to make every effort to achieve the highest technologies dynamical designs and taking countermeasures for customers. And would appreciate so much for your paying ceaseless attention to us.

From all staffs of RMS Technology Co., Ltd

RMS shall step forward ceaselessly to the future of new and highest technologies.>>>

Introduction...

2001. 09 Registered as the certified company for

establishement of vibration & noise control facilities 1999. 10● Incorporated● Registered as the certified technical

office about vibration & noise control

2002. 04 Registered as new

utility model for “Defuser

silencer reducing the impact noise”

2002. 08 Registered as new utility model of

“Highly efficient and duplicate vibration

control system”for large sized “Air

handling Unit”

2002. 11Award “special prize”in the technology

field at the competition for Green Managemnet

held by “Korean Management Association”

2003. 05Award ”Superior Paper prize”

at the council for publication of scientific

treatise in spring seasonheld by “Korean

Society of Semiconductor & Display Equipment

Technologies”

2004. 05Award “Superior Paper Prize”at

the council for publication of scientific

treatise in spring season held by

“Korea Society of semiconductor &

display Equipment Technologies”

2004. 10 Patent registration for “Variable Dynamic

Force Control Exciter”

2005. 05 Registered as new utility model of

“Sustaining facilities measuring the

weight, which needs to contorl the

stiffness whil the structure is moving”

2005. 06 ‘Registered as new utility model of

“Highly efficient and composite rubber

mount for endurance against impact vibration”

2005. 08 ● Signed on M.O.U with Hanbat

University of Daejeon city for

industrial- educational cooperations

2005. 12● Establishment of subsidiaryResearch Institute

2006. 06● Acquire the certification for a venture company● Acquire the certification for INNO-BIZ(Technical Innovation company of the small & middle sized)

●

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Total Engineering Service

Total Engineering Service Field

01>> Nano-amplitude Sub-micro Vibration

(1)Design for endurance and isolation against vibrations for semiconductor & TFT-LCD FAB structure

A) Micro-vibration ControlDecision of the process for total engineering solution for dynamic design technology(Measurement, Analysis,

Estimation, Experiment and Interpretation)

Dynamical design of large sized structure for the development of environment

for micro-vibration control

● Decision and management of permitted

vibration criteria after the use of the building

● Dynamical designs for large sized structure

improvement for control of micro-vibration

Design and development of highly efficient

anti-vibration system

● Duplicate Isolation System

● Isolation System of Air-Spring

● Anti-vibration table (tuned mass) System

● Precision Isolating/Regulating System of active control type

● Control the limit of permissive vibration for precision equipments

B) Applications

Dynamical designs for the structure of Semiconductor factory

● Fixation of the structure concept and fundamental design

● Filing and fundamental structure design

● Sturctural design of clean room

● Isolation designs for facilities, duct and pipe lines

● Vibration control for highly precision solution facility room

Structural Imporvement and structure designs for clean

room and facility room

Vibration control for highly precision equipment（SEM, TEM, Aligners, Slepper,

Lithographic Exposure Tools, CD-Driver, HDD )

C) AchievementsCn-Project for LG construction Co., Ltd- Cheong-joo Semiconductor factory

LG display Co., Ltd- Gumi TFT-LCD module factory project

Hyundai Electronics & Industrial Co., Ltd- Icheon En-project and Rn-project

Hyundai Electronics & Industrial Co., Ltd- Icheon TFT-LCD module factory project

BOE Beijing & Chengdu TFT-LCD module project, etc.

(2)Vibration control for the nano-technology facilities, processing, inspection, test and analysis rooms.

A) Measuring, evaluating and controlling the vibration for nano-technology manufacturing equipments and processing facilities.

Decision of permissive Vibration Criteria measured by the Frequency

Response Function(FRF)

Dynamical interpretation by using the regular code

Evaluating the factors causing to be sensitive to the vibration and

setting the countermeasure.

Designing the micro-vibration control system and developing the applications of it.

B) ApplicationsVibration control for precision equipments (SMT, SEM, TEM, AFM, etc)

Vibration control for extremely precision processing equipments

Extremely precision equipment (AFM, Micro-beam Ion Gun, SEM, TEM, PHOTO, E-beam )

C) Achievements

LG Siltron Co., Ltd- Extremely precision analysis room of Gumi Laboratory

LG Semiconductor Manufacturing Co., Ltd- Extremely precision analysis room of Cheong-joo factory

Samsung Electric & Parts Co., Ltd- Extremely Precision analysis room of Jochiwon factory

Korea Data System Co., Ltd- SMT precision manufacturing lines

Samsung Electronics Co., Ltd- Visual Appliances Division, SMT precision manufacturing lines

Samsung Electronics Co., Ltd- HHD Appliances Division, CELL precision manufacturing lines

Korea Electric Power Co.,- Electric Power Plant, Regular Vibration control system, etc

01 | 02

N6991

N6902

Total Engineering Service

Total Engineering Service Field

02>> Vibrations of structures(1) Dynamical test/ interpretation for structures and design for optimization

A) Dynamical interpretation for large sized structures Dynamical interpretation by using Semi-empirical Method

Evaluating the dynamical property of structure and taking the

countermeasure through the test/ interpretation

B) ApplicationsDesigns for structural improvement(SDM) to improve structures dynamically

Designs for dynamical optimization for huge sized structures

C) AchievementsHanla Construction Co., Ltd- Design of the engine test bed for vessel

Korea Research Institute of Standards and Science-Dynamical design

for vibration table of 6 magnetism induction

Setting up the countermeasure against the noise and vibration caused by

the passing traffic through the tunnel near Seoul Art Palace

ASEM Convention Center- Subsidiary buildings

Pohang University of science and Technology- Setting up the

countermeasure against the vibration of the Radial Rays Accelerator

Samsung Electronics Co., Ltd- Visual Appliances Division factory

structures

Evaluating the dynamical safety for the tunnels on the Young-dong Railway and

setting up the countermeasure

Korea University-New building for Management Hall, Evaluating the effectiveness of

noise/ vibration arising from the tube

Interpretation of dynamic response from the structures at the site of explosion

in Daegoo ** district and design for the prevention from the explosion and others

(2) Dynamical Safety Estimation of structures and setting up the countermeasuresA) Dynamical property tests for structures and equipments

Testing the dynamical property of structures and equipments and evaluating the safety

Evaluating how much the structures and equipments to be damaged by the dynamical movements

Evaluating how much the vibration effects to the good shaped of concrete

Evaluating the dynamical property of structures by every Regulation for the Permissive Vibration Criteria

(ISO, DIN 4150, USBM)

B) ApplicationsLarge sized structures : natural frequency, mobility, mode shape, decision of any damages and setting up

the countermeasure

Machines/ Equipments or Facilities: Decision of permissive vibration criteria and setting up the countermeasure by desiging the

dynamically improved structure

C) AchievementsSamsung Electronic Co., Ltd- Washing machine factory

Hyundai Automobile Co., Ltd- The 4th factory for coating

Daewoo Automobile Co., Ltd- Kunsan factory

(3) Vibrations of structures and Ground-Measurement/ Analysis/ Experiment/ Interpretation/ Evaluation and setting up the countermea-sureA) Measuring the ground vibration and setting interpretation system for the vibraion control in the sensitive area

Highly sensitive system for vibration measurement/ analysis

Economical system for dynamical property test

B) ApplicationsControl the ground vibration

Foundation design for the structures sensitive to the vibraion

Control the spread of ground vibration raised by the traffic

Control the spread of ground vibration for the structures sensitive to the vibrations(Semiconductor factory struc-

tures, any other structures sensitive to the vibration)

C) AchievementsLG Siltron Co., Ltd- Control system for the structural vibration of single crystals imaging room

LG Electronics Co., Ltd- Gumi TFT-LCD module factory, Evaluating how much the impact of hammering effects

LG Semiconductor Co., Ltd- Cn-Project

Korea Railroad Research Institute, etc

03 | 04

Total Engineering Service

Total Engineering Service Field

03>> Vibrations of Machines/ Equipments(1) Measurement/Analysis/Evaluation and Decision for dynamic load and permissive vibration criteriaA) Measurement/Analysis/Evaluation and Decision for dynamic load

Applying the precise measurement/analysis system

Collecting the data of on-time vibration and dynamical property

B) ApplicationsUsed as the basic data for the dynamical designs of the structure

Decision of permissive vibration criteria for equipments

C) AchievementsMirae Industrial Co., Ltd- Determination of the dynamic load and

dynamical property of SMT equipments

Samsung Electronics Co., Ltd- Determination of the permissive vibration criteria and dynamical property for

the HDD S/W Test Cell

Korea Gas corporation-Decision of the dynamical

property for“Distributed and Cogeneration System”of

its new company building

(2) Dynamical Designs for the struc-tures of machines/equipments

A) Dynamical property for the structures of precise machines/equipments

Dynamical structure design made by the Interpretation Method

(FEM) and Semi-Empirical Method of dynamical experiment

Measuring the vibrations after setting the system and evaluating the efficiency

and effectiveness of the system

B) ApplicationsDesigns for the structures of precise equipmentsBy the evaluation of vibration sources, designing for the dynamical optimization of structures

C) AchievementSamsung Electronics Co., Ltd- Design for the frame of HDD S/W Test CellSamsung B.P Chemical Co., Ltd- Design for the Gasifier Feed Injector StructureKorea Oil Corporation Co., Ltd- Design for the dynamical structure of the Oil Pressure Exhaust Pipe LineKorea Railroad Research Institute- Design of the wall mass for the real sized tram collision test and some others

(3) Design and manufacture of special Isolating SystemA) Design and manufacture of special Isolating System

Highly efficient duplicated isolating system

Air-spring isolating system of high efficiency

Highly precise level controlling and load measuring isolation system

Isolation system of highly damping sustain

Active control type Isolating/Regulating system

B) ApplicationsActive type : Large sized Air Handling Unit, Pump, Motor

and Cooling Tower

Passive type : SEM, TEM, Highly Precise Equipments

Controller of Structure-borne Noise

C) AchievementsPohang University of Science and Technology- Duplicate Isolation

System for Air handling room for the radial accelerator

Hyundai Electronics and Industrial Co., Ltd- Duplicate Isolation System for E2-Porject air handling unit

LG Siltron Co., Ltd- Duplicate Isolation System for air handling unit of Single Crystals Imaging Room

Goryo Development Co., Ltd- Air spring isolation system for Parking Tower of Hyundai building

A) Interpretation of Sound wavelength and the designs for soundproofing/ Sound- blocking

Interpretation of sound sources, sound wavelength and design

for sound arresting by the test results and semi-empirical

method.

B) Applications Test of sound quality and interpretation of sound: Evaluating

the environment of noises by the interpretation of sound

wavelength and floor impact noise, echos properties

Design for special purposes indoor sound and construction:

Evaluating and controlling every noise for Echo Room,

Non-Echo Room, studio, Machines and Facilities Enviromen-

tal noises-Measurement/Analysis, Evaluations and control

Design and construction of every soundproof system, like

Sound arrester, Soundproofing wall, every material for

absorbing/blocking sound.

C) AchievementsNational Gwang-Joo Asian Palace

Seoul Subway construction, 915 section

Complex buildings for commercial and residential purposes and

skyscrapers(Haewoondae Woo-dong, Daelim Hansoup, Dongdaemoon

Design Park&Plaza, NHN New company building, Angola Interconti-

nental Hotel, Samsung Electroincs Co., Ltd R4 laboratory, Hanyang

Daelim Acro Tower, Lotte Gold Castle)

Soundproofing construction (Posco, Soundproofing construction for

military facilities)

05 | 06

04>> Works against Noises

RMS Product Contents

RMS Product Contents

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

07 | 08

Micro-MRAMP001 ● Vibraion control system for highly precise semiconductor and TFT-LCD production equipments(Smart Control Type)

Micro-AMP002 ● Vibration control system for highly precise(Nano size) Semiconductor and TFT-LCD production equipment

RSRM-XP003 ● Vibration control system applicable to highly precise measurement and

test equipments which can be used for extremely precise Semiconductor

and TFT-LCD production line

MR DamperP004 ● Damper using MR Fluid which has variable damping power against

VSD P005 ● The system to improve the dynamical property for structures and to assure the vertical safety of precise Semiconductor production facilities

ML-Micro FootP006 ● The variable level mount indicating the load of highly precise equipments

UTRMP007 ● Anti-vibraion rubber mount of high efficiency

HESISP009 ● Highly efficient vibration control system for the structures

HLRMP010 ● Anti-vibration rubber mount for high load

APVIBMP011 ● Vibration monitoring system controlled through on-line system established for

semiconductor and TFT-LCD factory

VDF Exiciter IIP012 ● Dynamical load accelerator for testing the dynamical properties of the large sized

IDSP013 ● IDS is the most effective system to reduce the shocking noise and vibration of the

rapid Exhaust Duct Line, which is caused from Vaccum Pump for the production line

of Semiconductor and TFT-LCD factory.

SVM-Infilling SystemP014 ● System to isolate the ground vibraion by using waste tires.

MR-FluidP015 ● MR Fluid is a liquid substance which compounds ferrite particles made by coating

the interface activators surrounding the magnetic powder into oil.

Improvement of dynamical propertyImprovement of dynamical property

Establishment of precise Isolation

and Control

Establishment of precise Isolation

and Control

Establishment of fundamental

regulating system for the place

of precise equipments.

Establishment of fundamental

regulating system for the place

of precise equipments.

Understanding the dynamical

properties for the structures

and bulidings.

Understanding the dynamical

properties for the structures

and bulidings.

Understanding dynamical properties

for the structures of constructions and

equipments. Setting the idea for impr-

ovement, countermeasure and design

Understanding dynamical properties

for the structures of constructions and

equipments. Setting the idea for impr-

ovement, countermeasure and design

Equipment

Precision granite surface plate

Base frame

Surface plate

StructureGirder

Access floor

StructureCloumn

Total engineering service

P001 P002 P003 P001 P002 P003

P005 P006P007 P009 P010

P004 P005 P006P007 P009 P010

Establishment of fundamental

level mount.

Establishment of fundamental

level mount.

P005 P006

P004

P011 P012

P014

TMD SystemP008 ● Passive type vibration control system to improve the dynamical energy for the structures

Isolating/Regulating products against the micro-vibration forTFT-LCD/Semiconductor production equipments

The products to control the stiffness of damping for the str-uctures of Constructions and Equipments

Isolating/Regulating products against vibration for common structures

Vibration monitoring, Vibration accelerator and Others

RMS’Product Application

Micro-MRAM

P001 Micro-MRAM

01>> Brief

Micro-MRAM can very effectively protect the manufacturing and testing

machines for Semiconductor and TFT-LCD factories from building

structures. This perfect ability for anti-vibration made it possible for its

size bigger and the accuracy as well as every performance related

with manufacturing and testing could be improved dramatically during

the last short period of time.

This not only can make this machine to be permitted by the severely complicated Regulation for Permissive Vibration

Criteria but also can very effectively control the dynamical the dynamic load made by the machine itself.

Micro-MRAM is the extremely precise vibration control system which can improve the productivity at maximum and

pick-up the efficiency for output of products by keeping the static balancing of micro level at the sustaining part of

the machine and assuring its dynamical safety as level of micro unit.

09 | 10

02 >> Characteristics

The structure of Micro-MRAM is that in the center axis, it has MR Damper of pendulum type which assures the enhancement

of dynamical safety for the equipments. This system enables the height of the stone plate to be controlled very precisely by using

the air pressure and so as to get quickly rid of the excessive vibration made by the power of accelerating the vibration raised

internally from the equipment itself, which is known as the problem of Air-spring. Because the damping power created by the

MR Damper placed inside the Micro-MRAM is increasing according to the increase of current power supplied from current driver

and supplied, while there is no excessive vibration, no current is this machine can keep high efficiency for anti-vibration. When

it is sensing excessive vibration, it supplies current again and get rid of it shortly.

03>> Composition

Micro-MRAM consists of sensing part which senses the directions of any movements, control part which has the role to control

the whole system, and Isolator Part which has the role to react for isolation or regulation according to the order given by the

Control Part.

04>> Features

1) ApplicationsSemiconductor : S-9380 CD SEM, VX340 Surface profiler, etc

TFT-LCD : AFM, Thickness Guage, CD Guage, Exposure Machine, Imaging Machnie

MAC/MIC Array, Aoi-Standard alone array, etc

PDP : ID Marker_F, ITO PR Coarter, ITO PR Exposure, etc

2) Adoptions

Micro-MRAM

Intelligent vibration control and isolation system with MR damper

P001MR 댐퍼를

이용한 지능형 방진 장치

MR 댐퍼를 이용한 지능형 방진 장치

Patent No. 10-0811828(Support by MKE as a core technology project)

2) Control & Sensing Parts

05>> Applications & Adoptions

H(mm)

D01(mm)

D02(mm)

Ohm

A

Bar

kgf

Hz

%

Size

Core Resistivity

Current

Pressure

Applicable Load

Frequency of

appropriate load

Variable Damping Ratio

MRAM4000

MRAM3000

MRAM2000

MRAM500

below275

405

470

below275

405

470

below275

350

400

below275

285

340

350(h)×500(w)×400(depth)

220

ARM 7 Processor

PWM

12

12

4~8

below 1.2

4~8

mm

V

-

-

Bit

Bit

Ch

A

Ch

3~5.0

below 1.2

5~6.5

1,000~

2,000

500~

1,000

3,000~

4,000

2,000~

3,000

2.4~3.5 (including vertical, circulating modes)

8~80%

※OEM production is available. Please contact us for more details.

Size

Voltage

CPU

Type

A/D

D/A

No. of CH Current

No. of CH

DSP

CurrentOutput

Sensinginput

Classification UnitClassification Unit Specifications

Sensor

Current control Signal

Air line

Controller

Micro MRAM Automatic HightControl Valve

Base Frame

Stone Plate

Product Equipment

RIC- S- ch04

Sig. - Ch. 01

- Ch. 02

- Ch. 03

- Ch. 04

Reset

COM.

Prog.

Pwr. Stat.

This is LCD WindowMenu & FunctionSpeed level bar...

Integrated Controller

RIC- M- ch02

Acc.

M01

- M01

cw ccw

- M02

Reset

COM.

Prog.

Pwr. Stat.

M02cw ccw

RIC- M- ch02

Acc.

M01

- M01

cw ccw

- M02

Reset

COM.

Prog.

Pwr. Stat.

M02cw ccw

AC 220V

DC 12V

Sensing PartsSensing Parts

Isolator PartsIsolator PartsControl PartsControl Parts

Mobility measurement Signal

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

0 2 4 6 8 10 12 14-0.008

-0.006

-0.004

-0.002

0.000

0.002

0.004

0.006

0.008

Velocity [ m

/s ]

Time [ s ]

None ControlControl

0 2 4 6 8 10 12 14-0.003

-0.002

-0.001

0.000

0.001

0.002

0.003

Velocity [ m

/s ]

Time [ s ]

None ControlControl

0.1 1 10

1E-7

1E-6

1E-5

1E-4

Velocity [ m

/s ]

Frequency (Hz)

01 point : Control01 point : None Control

Vertical anti-vibration capability Horizontal anti-vibration acpability The range of frequency of anti-vibration

350

500

1) Isolator Part

Type

"D 01"

"H"

"D 02"

Micro-AM

P002 Micro-AM

01>> Brief

Micro-AM is vibro-isolating system with a built-in Air-spring

and it has been designed to improve the horizontal stability

remarkably by consisting of sustaining structure with pendu-

lum type Micro-AM is applicable stably to the extremely

precision(Nano size) Semiconductor and TFT-LCD module

production equipment for experiments and measurements.

An also it is the system to minimize the effectiveness of the

vibrations made by the structures of lower part and anti-

vibration table to the equipments of upper part.

11 | 12

02 >> Characteristics

Micro-AM can control the natural frequency of the system by the specific characters of the vibration of the system by the specific characters of the vibrations from outside and the dynamic load of the equipment, and its performance is remarkably surperior in anti-vibration moving vertically as well as horizontally. So as to assure the dynamical stability of equipment itself, it has been designed as the sustaining structure of pendulum type. And so even if it is designed for the natural frequency of under 3Hz, its stability is still superior.According to the permissive vibration criteria, dynamical property, static load and dynamic load, it can be designed for opimization for customer’s order by out own measurement/evaluation.

03>> Composition

Micro-AM consists of Air Isolator of pendulum type as following illustration and Air control unit which can

control the height automtically as well as air pressure.

04>> Specifications

1) ApplicationsMeasurement/Inspection equipments for extremely precise Semiconductor and TFT-LCD

factories

PS Inspection, Mac/Mic, TR/Seal Dispenser

Pitch/Height/Thickness Measurement System

AFM, Laser Measurement System

CVD Repair/Inspection

2) Adoptions

Micro-AM

high effective isolation equipment with air spring

P002에어스프링을 이용한 고효율

방진 장치

에어스프링을 이용한 고효율 방진 장치

1) Isolator Part 2) Control Part

05>> Applications & Adoptions

H(mm)

D01(mm)

D02(mm)

Bar

kgf

Hz

%

Size

Pressure

Applicable load

Frequency of

Appropriate load

Damping ratio

MRAM4000

Type

MRAM3000

MRAM2000

MRAM500

below 280

405

470

below 280

405

470

below 275

350

400

below 280

285

340

5~6.5 (0.5~0.65)

2.4~3.5 (including vertical, circulating modes)

8%

※OEM production is available. Please contact us for more details.

Classification Classification SpecificationUnit

Height Control tol.

Air Delivery Type

Port Fitting Size

Operating Temp. Range

Max. Pressure for operation

±0.13mm

Dual Port

6 mm

-20~+60(℃)

15 bar(1.5MPa)

500

200

Air lineAir Controller Unit

Micro AM(Air Mount) Micro AM(Air Mount)

HightControl Valve

Base Frame

Stone Plate

Product Equipment

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

1,000~

2,000

500~

1,000

3,000~

4,000

2,000~

3,000

Vertical natural frequency Vertical conductivity

(Height Control Valve)

"D 01"

"H"

"D 02"

Modal test (Vertical)

1 10

1E-7

1E-6

1E-5

1E-4

Velocity (m/s)

Frequency (Hz)

Stone Surface / Base Frame

1.0

1 101E-3

0.01

0.1

1

Mag

nitude

(m/s)/(m

/s)

Frequency (Hz)

RSRM-X

P003 RSRM-X

01>> Brief

RSRM-X is the system of isolating the vibration for which the Dynamic Damper Stopper(SMD) and highly efficient rubber isolator are connected in parallel. It can be applicable as the most stable facility to the highly precise measurement / inspection equipments for semicon-ductor and TFT-LCD module production lines which requires extremely precise control.

13 | 14

02 >> Characteristics

RSRM-X has been designed for forming to optimize the transformation caused by pressure and shearing induced by the load and is the highly efficient rubber mount which makes it possible to keep the Natural frequency of the equipment at the level of 6Hz. It is also designed to induce 10mm static strain(Natural frequency of 5 Hz) for the static load and because it has Linear Static Defelection of over 15mm, there is enough room for design. This, because the horizontal and vertical rigidity is balanced very well, is mainly applied to the extremely pecise Semiconductor and TFT-LCD module factories. When RSRM-X is designed for static load, the isolating rate against the vibration of 20Hz from outside is 97% and 99% for the vibration of 30Hz. RSRM-X is usually used by being combined with SMD, and because SMD has a built-in oil pressure device, it exerts as the Dynamic Damper. UV Exposuring Unit of large sized scanning type, if there is excessive response from the anti-vibration table by its own impact vibration, SMD would perform the role to make the transferred vibration come down.

03>> Composition

1) Body(Upper part cap, Isolating Rubber, Lower part Frame)Because the rubber composing the body is an elastic substance and has the regular number of springs, it has the function

to absorb the vibrations and impact. This rubber has the Linear Static Deflection of over 15mm under the static and if

calculating the Natural Frequency of used isolating system by using this characteristic as the standard, it will be under 6Hz.

The upper part cap and other assembled parts are manufactured with sus materials by considering its resistance to any

circumstances. And it has screw holes on its top part to fix it to others and on the buttom part to fix it to base plate. Some-

times there can be made hooks outside so as to prevent the circulating and to enhance the adhesive power to the rubb

er.

The lower part frame is made with Aluninium material,

and it performs the role to transmit the load transferred

from the rubber of cylindrical shape to the floor where

it is fixed, To this lower part frame, the bottom plate,

which is fixed to the floor, is combined mechanically.

2) SMDSMD of cylindrical structure has a built-in oil pressure device and prevents the transfer of vibrations

induced by the impact vibration sources, spreads the load, and executes simultaneously the role as the

stopper for the prevention of large displacement. And so it is usually fixed at the edge.

3) Lower Part PlateThe lower part plate has the screw holes at the places where the isolating device to be fixed and it is

fixed to the body mechanically by the press.

04>> Features

1) Applications Measuring/inspection equipments for extremely precise semiconductor and TFT-LCD module production lines

PS Inspection, Mac/Mic, TR/Seal Dispenser

Pitch/Height/Thickness Measurement System

AFM, Laser Measurement System

CVD Repair/Inspection

2) Adoptions

RSRM-X

High effective rubber mount assembly

P003고효율방진

고무마운트

고효율 방진 고무운트

05>> Applications & Adoptions

General Type

SMD combination Type

RSRM-6N

RSRM-4N

RSRM-S6N

RSRM-S4N

900Kgf

600Kgf

900Kgf

600Kgf

A

340

235

485

380

B

235

235

235

235

C

-

-

340

235

D

125

125

125

125

Application static

load

Dimension(mm)ClassificationNew150 3rd Sample

0 2 4 6 8 10 12 14 160

50

100

150

200

250

300

Force [ kg

f ]

Displacement [ mm ]

Change of load natural frequencyDrawing of load deflection

SMD(SMD)

Upper partcap

Lower partplate

Isolating Rubber

Lower partframe

"D"

"A"

"C"

"B"

"D"

"A"

"C"

"B"

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

Mass : 153.3kgf

Mass : 96.5kgf

Mass : 209.3kgf

1 10

1E-3

0.01

0.1

Mag

nitue [ (m

/s2 ) / N

]

Frequency [ Hz ]

MR-Damper

P004 MR-Damper

01>> Brief

This is the damper designed to reduce the vibrations induced by the impact dynamic load of the moving mass of working robots efficiently. When such vibrations are induced, the damping power is given to the damper and it can perform the role to remove the vibrations.This damping power that it can vary according to the vibration circumstances is given by the MR Fluid( Magnetro-Rheological Fluid) which is a kind of smart material. When it sens-ing any vibrations, there is magnetic field created from the core built-in inside and the combining power between the ferrite particles increases. This is the source of damping power given to MR damper. By using this characteristic, MR damper has big advantageous point to keep the isolating function as well as special character of regulating at the same time, which can make this device applied such SMD equipments, UV Exposuring unit, coaters, etc. As are creating the big impact dynamic load while performing the precise work-ing simultaneously.

15 | 16

02 >> Characteristics

MR Damper is the semi-active type damper to control the vibration by applying the characteristic of MR Fluid, combining the ferrite particles under magnetic field, and it enables any vibratios induced to be under control by its variable damping force. The typer of MR damper can be selected between the smart control type and passive type by the conditions of enviroments for using.This device consists of a damper and an electrical cotroller and according to the movements of the equipment to which this device is applied, it is designed that the damping force is applied, it is designed that the damping force of the damper can be varied suitably to control the movements. In the case of the using purpose to control the vibration for extremely precise equipments, the range of damping force of this device is designed to be in 30~500[N/piece]. Further more, because RMS Technology Co., Ltd has enough experiences and the technologies for designing to meet the various types of customers’orders satisfactorily and efficiently, this device can be applied to the various fields as well as improved for its quality more and more. The length of MR Damper is measured by adding the lengths of the piston and the stroke. OEM production is available.

Smart Control Type : When it needs to control the various damping force terminably according to the vibraion generated by the fixed equipments.

Passive Type : When it needs to keep the stable damping force up to the way of operating the fixed equipments.

03>> Composition

MR Damping system basically of MR Damper, Current Driver which supplies electric power to MR Damper,

and Electric Power Sourcing device. And its type can be selected between Passive Type and Smart

Control Type after the environments of the works. The composition of each type is as below.

The composition of Passive Type : Anti-vibration device (Isolating rubber (RSRM, UTRM), Air-mount,

etc), MR-Damper, Current Driver

The composition Smart Control Type : Anti-vibration device (Isolating rubber (RSRM, UTRM), Air-

mount, etc), MR-Damper, vibration measurement sensor, RMS synthetic controller

04>> Features

1) Applications Application to such equipments as are used for extremely precise

manufacture/inspection purpose and needs to be improved in its ability to control

the vibrations induced from the equipment itself and from the outside as well so

as to enhance the productivity and to keep the regularity of output.

Applicable suitably to such equipments as are required to keep both abilities for regulation as well as optimum effectiveness for isolation at the same time, like SMD placement system, UV Exposuring Unit, Chip Mount, Coater, Highly precise transformer and pressure, etc.

2) Adoptions

MR-Damper

Magneto-Rheological Damper

P004

MR 댐퍼

MR 댐퍼

05>> Applications & Adoptions

Drawing for establishment of Passive type Drawig for establishment of Smart Control type

1) MR-Damper

2) Current Driver

3) Integrate controller & Sensing part

※OEM production is available. Please contact us for more details.

150(h)×500(w)×400(depth)

220

ARM 7 Processor

PWM

12

12

4~8

0.0~1.2

4~8

mm

V

-

-

Bit

Bit

Ch

A

Ch

Size

Voltage

CPU

Type

A/D

D/A

No. of CH.

Current

No. of CH

DSP

CurrentOutput

Sensinginput

Classfication Unit Specification

Classification Unit Specification

PWM

0.00~1.20A

0.01A

1~6Ω

50mm

113mm

40mm

DC 12V

Ohm(Ω)

N

ms

mm

mm

mm

3~4.5

above 100~500

below 20

133

±15

100

Current control method

Electric power for working

Variable electric power

Core resistance for working

power

Core resistance

Variable damping force

Time for response

width

Height

Depth

Size

Height after the establishment

Stroke

Diameter

Size

113

50 40

350

500

0.2A0.4A0.6A0.8A1.0A1.2A

-2.0 -1.5 -1.0 -0.5 0.0 0.5 1.0 1.5 2.0-1000

-800

-600

-400

-200

0

200

400

600

800

1000

force [N]

Displacement [mm]

133

106

Ø98M10

M10

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

VSD

P005 VSD

01>> Brief

VSD is the device to enhance the dynamic stiffness for the

structures. It can reinforce or improve the dynamic stiffness of the

structures up to the required level by the built-in oil pressure

controller inside.

17 | 18

02 >> Characteristics

When constructing the factory structures which have to be

established with precise measurement/inspection equipments

(here and after“precise equipment ”), not only he permissive

vibration criteria but also the permissive dynamic stiffness criteria

should be determined at the beginning stage so that every

precise equipments for the production process can work

normally. So as to meet such criteria, when the structure for the

clean room(C/R) is designed, it is generally consider that at first,

the anti-vibration system for isolating the vibration from the

outside of equipments should be designed and secondly, the dynamical property of factory structures should be improved so as

to make the dynamic stiffness of the factory sturctures to be satisfactory against the dynamic load induced by the precise

equipments. VDS system is that device to be most effective when it is necessary for some part of factory structure to be improved

in its dynamical stiffness so as to be set with some precise equipments. It can adjust the stiffness quantitatively to the level required

by sensing the sustaining load through oil pressure indicator and controlling the oil pressure of the built-in oil pressure device.

03>> Composition & Features

04>> Applications & Adoptions

1) ApplicationsReinforcement design for the clean room structure of Semiconductor and TFT-LCD module production

line.

Reinforcement design for the dynamic stiffness of the sustaining structures for facilities in the factory.

2) How to adopt1. Fixing“upper part support”to the bottom surface of sustaining system directly or to the H-beam attached under the structure

girder by crossing it.

2. Fixing the“Lower part support”to the H-beam established for reinforcement of sustaining power.

3. When turning the“screw part”and making it operate, the upper and lower part is pressed by the load. (The pressing power

arising at this time presses the oil inflowed for oil pressure into the VSD of piston type working by oil pressure, and this

power that VSD is getting pressed is displayed by the oil pressure guage.)

VSD

Variable Stiffness Developer

P005동강성 보강 조절기

동강성 보강 조절기

Classfication Unit Specification

mm

mm

mm

mm

ton

MPa

175

250

40이하

215

30

70

Height(From the bottom surface)

Diameter(edge to edge)

Working stroke

Max. height

Max. working load

Max. working load

Size

3) Adoptions

175

Ø 250

Upper part support

1st Rock Nut

2nd Rock Nut

Hole for inflowof oil

Lower part support

Pressureguage

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

Before VSD InstallationAfter VSD Installation

10

Frequency [ Hz ]

105

106

107

108

109

Dyna

mic Stfiiness [ N/

m ]

VSD Mount LoadSensing Support

1st

B1

Foundation

VSD

H-Beam

BeamGirder

Column

A utility model No.20-0379867

ML-Micro Foot

P006 ML-Micro Foot

01>>

19 | 20

02 >> Characteristics

1. By the function of digital display, this device can be checked with its property of the performance to spread the load quantitatively and with its function to adjust the equivalently and with its function to adjust the equivalently spreaded load.2. Levelling of micro-grade is available by the function of moving up and down, being controlled minutely.3. Considering the on-site conditions for works, the way of fixation and levelling of the device can be chosen.

Static load 10 ton(ML-10)

Resolution of measured load(within 0.2% per static load)

Load sensor(strain-gauge type Load cell)

Load indicator(Auto Calibration, LCD Monitor, External power source) ※ Various types of devices per load can be produced by customer’s order.

03>> Composition & Features

05>> Applications & Adoptions

1) Applications This device is applicable to such equipments as are required to perform the improvement of the extremely precise inspection and manufacturing equipments for their static/dynamic unstability quantitatively, which can arise internally and externally. Semi-conductor Optical Instruments: Stepper, Scanner, Aligner, Lase processing equipments, etc. Highly precise measurement/inspection equipments: SEM, TEM, 3D Measurer, Surface Luminance Measure, etc. Precise equipments generating the impact vibration: SDM placement system, Chip Mount, Highly precise pressure and coaters.

2) Adoptions

ML-Micro Foot

Levelling foot with load indigator for high precision equipment

P006초정밀장비용하중지시 레벨

마운트

초정밀장비용 하중지시 레벨 마운트

分 类 单 位 内 容

Loadcellrange of Measure

Min. scale(Tolerance)

Max. load

Electric power

Worm gear ratio

Efficiency

Max. power

ton

kg

kN(ton)

v

H:L

H:L

kW

0.00~10.0

10(5)

120(12)

DC. 9

8:24

0.20:0.14

1.8

Load indicatingLCD

Height adjustment bolt

Horizontal locking plate

DC9V Power jack

Button

250

324 244Lock Nut

Cal Enter Mode

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

Load indicating variable level mount(ML-Micro Foot) is new

comcept of device for level mount, which can be applied to the

extremely precise inspection equipments used for measurement/

analysis and to the equipments used for semiconductor and TFT-LCD

module production lines, like optical instruments as Laser, UV

Exposuring Unit, Coaters for their static/dynamic stability

to be found quantitatively. Especially, this device can improve

remarkably the performances for the isolation and endurance

against the vibration of the precise production equipments which should carry out the roles to absorb the

big impact dynamic load as well as to perform precise works simultaneously. This device has a built-in

sensor, sensing the load and inducing the load to be spreaded equivalently. Additionally by its function

of moving up and down for adjusting the level minutely, this makes it available easily to adjust the level

by micro-grade. So as to minimize the horizontal movement of it, Horizontal Locking Plate is sometimes

attached to a side of the device.

02 >> Characteristics 02 >> Characteristics

Brief

UTRM

P007 UTRM

01>> Brief

21 | 22

02 >> Characteristics

Highly efficient rubber mount whose natural frequency

is under 6Hz.

Reliable durability same level as that for automobile.

Applicable to each of various loads flexibly,

which is possible for this device to be composed

of several 150kgf units of anti-vibration materials.

Keeping the function to be effective for anti-structural noise.

03>> Composition

04>> Features

05>> 응Applications & Adoptions

1) ApplicationsFor pumping(Multi-volute, Multi-volute & Turbin )

For air handling unit(Horizontal type, Vertical type, Complex type, all in one type, etc)

For blower(Siroco, Air foil, Turbo-Inhalation from both side)

For the room of statues, duplicate floors and every kindness of duct line

UTRM

Utility Rubber Isolation Mount

P007고 효율 고무 방진 마운트

고 효율 고무 방진 마운트

Anti-vibration design is a part of vibration control in the

broad sense, but in the narrow sense, it is meaning to

islolate the unwanted vibration by using such isolator as

is more flexible in its stiffness. As for the decision of

anti-vibration devices in anti-vibration design, following

are very important factors.

Checking how much it transforms by its elasticity, which is

needed for the downward adjustment of system natural

frequency.

Various kindnesses of capacity and flexibility of anti-vibration

system.

Considering these factors, UTRM has been designed as it can be composed with various anti-vibration equipments different each

other in its capacity, which is possible to be combined with highly efficient isolating mount whose natural frequency is set under

6 Hz.

UTRM has the composition that the anti-vibration rubber is

interlaid between the upper part plate and the base plate.

Because anti-vibration rubber is the elastic material and has the

invariable spring value, it has the function to absorb the vibrations

and impacts. This kind rubber has a property of linear static

deflection to induce static strain of over 20mm under the stable

load. On the base of this condition, when measuring the natural

frequency of the used anti-vibration system, it is near under 6Hz.

Upper part plate of this device is made of steel plate on which

there are upper part cap bolts and adjusting nut. By using

these bolts and nut, this device can be fixed to the purposed

equipment for anti-vibration, and also the height is adjustable in a limitation. The base plate is made of steel plate, too. And on

the right middle of edge lines by each side, there are half ellipse type holes which have been made to fix the device to the floor

of the construction or to the anchores and bolts fixed to the structures firmly.

2) UTRM Process for establishment

① UTRM-200 before establishment

⑤ Finished setting up the mould ⑥ Coating the mould ⑦ Setting reimforcing bar before

pouring concrete

⑧ completion after pouring concrete

② UTRM-200 after establishment ③ Assembling of mould ④ Setting up the mould

L1

170

290

290

410

10±2

10±2

10±2

10±2

150

300

600

900

1N

2N

4N

6N

L2

140

260

260

380

L3

-

235

235

340

W

Φ114.3

125

225

225

W1

-

130

235

235

D

Φ12

Φ14

Φ14

Φ20

H

80

84

84

84

H1

93

100

103

103

Adjusting Bolt

M16×30L

M20×30L

M24×30L

M24×30L

Cap Bolt

M10×35L

M12×40L

M12×40L

M12×40L

TYPEDIMENSION (mm)RATE

CAP(Kg)

RATEDEF(mm)

HERM-1NHERM-6N

0 250 500 750 1000 1250 1500 1750 2000 2250 25000

2

4

6

8

10

12

14

16

18

20

Diap

lace

men

t [m

m]

Load [Kg]

W W1

L3L2

L1

HH1

Cap BoltAdjustingBolt

D

105

SGP 100A(Ø114.3)

2250

255t

FOOT and JIGof equipment

HERM-1N

D

Cap BoltAdjustingBolt

W

FOOT and JIG of equipment

W1

L3L2

L1

HH1

Cap BoltAdujstingBolt

D

Example of establishment Example of establishment

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

TMD

P008 TMD

01>> Brief

23 | 24

02 >> Principle

03>> Design & process for adoption

05>> Applications & Adoptions

1) Applications Isolating device for building Role as the isolating device for the bridge Isolating device for vessel

2) Adoptions

TMD

Tuned mass damper

P008동조질량감쇠기

동조질량감쇠기

Because the structure of the building consists entirely of continuous structure, there can be vibrations arising by the continuous structural vibration mode caused by the load of its own weight, earthquake and wind. There are two ways how to control this kind structural vibration as the way of structural improvement by transforming the cross section of the structure and other way of mechanically controlling the vibration, like forcing the vibrations come down by using any vibration isolating devices. When adopting the way of mechanical control it is possible to estimate the effectiveness accurately and to guarantee the effectiveness that the vibration is compeletely controlled by only finding the properties of isolating devices and structures. TMD is the device to let the vibration come down by absorbing the energy transferred to the structure from the external load and make the structure stable dynamically. In other words, it is such device as improves the structure’s capability of endurance against the earthquakes and wind by absorbing the structural vibrating energy compulsorily through its isolating function and reducing the vibration by making it spreaded, as well as by reducing the movement of top area and relative displacement of each floor.

1) Finding correctly the dynamical properties, natural period, natural frequency, damping rate and the

dynamical response per mode, it has to be designed to spread the energy appropriately.

2) Finding the 1st mode of the structure, so as to diminish the transformed energies arising from the

mode, TMD is used or it can be replaced with the design for structural improvement to spread the

energies.

3) The structure is not shaking when TMD absorbs the vibration energy and it absorbs the other

energy from outside by itself. This is the principle that TMD controls all structural vibrations.

04>> Composition

TMD has free size and the size of the shape is up to the on-site environmental conditions. That is why there are no standardized features and this device is principle made by OEM features of customer’s orders.It consists of ①Structure ②Mass ③Spring ④Damper and it performs its role to reduce the vibration by absorbing the structural energy through the use of damper and the spring which connects the mass and mass.

358

492.3

MR-DAMPER

SPRING

LM GUIDE

OIL

SPRING

TMD COVER

1000kg

(a) The example of ceiling mount type (b) Production of 3D Induction TMD

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

y/yst

n=Ω/ωH

Strcturalvibration withoutTMD

y/yst

n=Ω/ωH

Limitedvibrationamplitudes withTMD

yH

F

yH

Without TMDWithout TMD With TMDWith TMD

Dynamical property of the structure

( , )sς sω

Designload( )

(wind, earthquake,irregular load)

1Γ

Dynamical property of the structure( , )maxy maxµ

Decision of the effective damping per SDOP ( )eqς

max1 ),( yS ssy =Γ ςωfiguring the rate per mass( )µ

2)8.0(16 seq ςςµ −=Optimum TMD design rate of frequency

( ), damping ratio( )α aς

Inspection of measures

Design, Manufacture, Test

Establishment & Adjustment

Completion

YesNo

HESIS

P009 HESIS

01>> Brief

25 | 26

02 >> Characteristics

03>> Features

05>> Applications & Adoptions

1) ApplicationsFundamental anti-vibration and absorption of structural noise design for structures, which is arising fromsubway and other traffics.

Anti-vibration for structure column and absorption of structural noise

Anti-vibration for large sized facilities and absorption of structural noise

2) Adoptions

HESIS

High Efficiency structural lsolation system

P009고효율 건물 방진장치

고효율 건물 방진장치

This is the equipment that ruduces or isolates such vibrations as being transferred through the interme-diate, like structures and the ground from the subway, railway and the traffics of the road. And it is the most effective system to diminish the structural noise and the vibrations transferred to the building by being established on the basement of building structures, cultural as sets and for the buildings ofsemiconductor factory, precise test room as well.

Sustaining power per unit load is bigger and it is not corrosive.Easy establishment and maintenance.Sustaining power per load is possible for 1 ton~ 200 ton.It is rustless, and not heated even if it is exposed to the bad environmental conditions of outside.

02 >> Composition

1) Steel Reinforcing Plates

2) Cover Rubber

3) Internal Rubber Layers

4) Bottom Mounting Plate

Table of physical properties(Our own special figures)

33444446666677766666778

22222223333333333333334

33333333333333344444444

8888888888888881212121212121212

2424323232323248484848485555557272727272848496

1616161616161624242424242424243636363636363648

414152525252527474747474858585105105105105105121121137

3030303030303041414141414141415757575757575773

HESIS 100 X 150 HESIS 100 X 200 HESIS 150 X 200 HESIS ø 200 HESIS 150 X 250 HESIS 150 X 300 HESIS ø 250 HESIS 200 X 250 HESIS 200 X 300 HESIS 200 X 350 HESIS ø 300 HESIS 200 X 400 HESIS 250 X 300 HESIS ø 350 HESIS 250 X 400HESIS 300 X 400 HESIS ø 400 HESIS 300 X 500 HESIS ø 450 HESIS 300 X 600 HESIS 350 X 450 HESIS ø 500 HESIS 400 X 500 

Max.Min.Max.Min.Max.Min.

stiffening

plateInner rubber layerElastic rubber layer

Thickness (mm) No. of layersHeightModel

KSM6518

KSM6518

KSM6518

KSM6518

KSM6518

KSM6518

KSM6518

KSM6518

9±15

60±5

above 550

above 220

7±15

5±5

above 600

above 180

kgf/㎠

HS

%

kgf/㎠

%

%

%

%

Static shear modulus of elasticity

Hardness

Extension ratio

Hardness against pulling

25% stretching strain

Transforming ratio against

extension power

Rate of permanent transform by pressure(70℃×22hr)

O zone proofing(100pphm×30%elongation×40℃×96hr)

cold proofing

water proofing (normal temperature×168hr)

Exhausting test

(70℃×70hr)

-10~+50

above -50

above 15

No cracks

assurance of -40℃

below 2

Test Items Unit Guidance of the quality Test method

Establishment of Column Establishment for base

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

HLRM

P011 HLRM

01>> Brief

03>> Composition

27 | 28

05>> Applications & Adoptions

05>> Features

1) ApplicationsAnti-vibration systems for the buildings and structures which are placed in such area as the environmental

issues by the vibration are raised.

(Near to railway station, Densely built-up area, Anti-vibration system for the railway slab running through

near theprecise manufacturing factory) Anti-vibraiton system for the equipments of heavy load(Vessel

Engines, etc)

2) Adoptions

2) 적용사례

HLRM

Rubber Mount for high capacity and performance

P010고하중용 방진고무 마운트

고하중용 방진고무 마운트

HLRM is an anti-vibration device of big capability for load and combined with the function of oil pressure jack and isolating rubber. This device enables the height of the heavy weight equipments to be adjusted minutely by using the only Oil Pressure Jack and Load Sustaining Bolt, but without any additional instrucments and supplementary jack-up system. Because it spreads the load by the function of built-in cone type isolating rubber, this device has superior efficiency for its performance about anti-vibration horizontally as well as vertically.

HLRM is basically composed of “Lower Part Bracket”, “Cone type Isolating Rubber”, “Upper Part Bracket” and there can be 2

types of HLRM as one called “SJ type”to which jack-up device is built-in for the function of anti-vibration as well as adjustment

of the structure’s own height, such as for floating slab for rail and the other callled “N type”which has been designed for such

case, when it needs the functions to sustain the load and to isolate the vibrations at the same time, such as for the engines of large

vesseles.

Anti-vibration system for the railway slab Anti-vibration system for Vessel Engines

02 >> Characterics

1) Fundamental capability for anti-vibration

10.3±1(1050±120)

12

15

7200kgf

4.0~12.0

1.4

above 10

kN/mm(kgf/mm)

mm

mm

kgf

ton

%

Static spring coefficient

Max. displacement(Linear range)

Max. displacement(nonlinear range)

Load rating (Natural frequency 6Hz)

Practical load range

동배율

Loss coefficient

SpecificationUnitClassification

2) Physical characteristics of Isolating Rubber

21.8

470

MPa

%

Tensile strenght

Tensile stretch

Ageing test

After

Ageing

Test

Change rate of strenght

Change rate of tensile strenght

Tensile stretch

- Temperature: 100±1℃- Time : 70 hours

- Temperature : 100±1℃- Time : 20 hours- Unit : %

- viscosity : 50pphm,- Temperature : 40℃- Time : 72 hours

- Temperature : 35±1℃- Time : 1 hours - Test result unit : MPa

below 40

No cracks

28.5

compression permanent drape rate

O-zone cracking test

Change of low temperature tensile strength

-

MPa

%

2

21.3

420

ResultClassification Unit/Test Method ResultClassification Unit/Test Method

Lower Part Bracket

Isolating Rubber

Upper part Bracket

Stopper

Upper part Cap Bolt & Adjusting Nut

Lower Part Bracket

Isolating Rubber

Upper part Bracket

Load Sustaining Plate

Oil Pressure Jack

Load Sustain Lock Bolts

HLRM-SJ HLRM-N

HLRM-SJ Shape HLRM-N Shape

227.98

Ø345

Ø310

120.8161.83

317.98

230 이

상40

Ø315

Ø365

Bottom

115

Ø315

Ø365

The basic features of the slab for establishment of HLRM-SJ(Height and width for the Load Sustaining Block)

Load Sustaining Block

182.98

Ø310

247.98

Ø310

M30 Bolt

Adjusting Nut

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

BallastedTrackHLRMFloatingSlab

0 10 20 30 40 50 60 70 80 90 100 1101E-3

0.01

0.1

1

Veloc

ity [mm /s]

Frequency [Hz]

InsertionLossInsertionLoss

APVIBM

P012 APVIBM

01>> Brief

29 | 30

05>> Applications & Adoptions

03>> Characteristics

APVIBM

On-line Vibration Monitoring System for Semi-Conductor and TFT LCD production line

P011반도체 및 TFT-LCD

공장 전용 On-line 진동 모니터링

시스템

반도체 및 TFT-LCD 공장 전용 On-line 진동 모니터링 시스템

On-line Monitoring System used exclusively for semi-conductor and TFT-LCD module factory has the purpose of establishment for watching ususlly the vibra-tions arising from every environmental factor and how those affect the structures for precise equipments. Additionally it is for monitoring how much the precise equipments get mal-functions normally through check-ing the time and surces of the vibrations and how the enviromental vibrations affect the regular working of the precise equipments. Main functions of monitoring system are as below.1) Watching usually arising vibrations of the structures for precise equipments monitoring them and reserving the timely data.2) Reviving and analyzing the reserved data.

1) ApplicationsReal time vibration monitoring for precise equipments and the structures.

Real time vibration monitoring for atomic power plant and other dangerous facilities.

Monitoring the stability of the structures affected by the big impact dynamical load, like explosion and

hammering.

2) Adoptions

02 >> Composition of the system

Sensing Part

C o n t r o l P a r t

Monitoring Server

Analysis Program

Monitoring Progran

Monitoring Data Sever

Sensing Part Control Part(SPU-2406)

Monitroing Server(RMS-2406)

Network

Analysis PGM(RMS-Analysis)

Function to transform the vibration accelerating degree to measured by vibration accelero-meter.

Sampling the signal transmitted by the vibration sensor in digital method and reforming it as the data of formal protocol. And then transmitting the data to the Monitoring Server for the real time reservation at the Buffer.

Monitoring the vibration signal of protocol method transmitted through network, for the arising time and place of each vibration, and analyzing the real time frequency conversion and its octave. Through the analysis of vibrations, it shows the comparison with the permissive vibration criteria and the currently arising vibraions of the structues and then resverves the signals at hardware in real time.

Performing the analysis with the frequency and octave of the vibration selected

by its arising place and time, which been reserved at hardware.

Flexibility for setting additional channels

Capability to analyze the vibration with its recorded arising time , frequency spectrum and octave band.

Functions of setting Permissive Vibration Criteria, Alarm and Performing the events.

Capability to reserve the big capacity of raw data by its own built-in hard disk and extermally equipment memory device.

Function of monitoring vibration in distance by the connection to internet.

04>> Features

Sinal Processing Unit(VS_2601)

Monitoring Progran

Monitoring Data Sever

Sinal Processing Unit(VS_2601)

Item Specification Unit

Max. input channels : 6 channels

Sampling Frequency : 64, 128, 256 sample selected.

Input Level : +-5volt

Linearity Level Digital Filter is built-in

Input impedance : 10kohm

Dynamic range : 127db@10hz

Transmission port : 10base-T

Storage Memory : 32MB

Input Power : DC 12V/1AMP

Outer Frame : 19INCH RACKMOUNT

RMS-3221

No. of Channnel : 3 channels

Sensitivity : 5V/g(X,Y,Z)

Frequency range : 1~400HZ

dynamic range : 110db @ 10hz

Signal

analyzing

module

SET

Vibration

Sensor

Item Specification Unit

Monitoring

server

S e n s o r

c a b l e

SET

SET

ea

Signal analyzing

Program

RMS-2406(including RMS View)

HP Pentium Serve

OS : Micro-Window Sever 3.0

Time Domain Monitoring(Max, 6ch)

Spectrum Monitoring

Octave Band Monitoring

Alarm Event Monitroing

RMS-Analysis

Visual_C++ Base

Time Donain Review Function

Spectrum Analysis

Octave band Analysis

Average, overlap function

Signal Shield Cable

SET

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

VDF Exciter II

P013 VDF Exciter II

01>> Brief

31 | 32

05>> Applications & Adoptions

VDF Exciter II

Exciting System for the Large structure

P012대형 구조물

동특성실험용 가변동하중 가진기

대형 구조물 동특성 실험용 가변 동하중 가진기

This device is an excitation system designed to extract

structural dynamic properties in the form of transfer

formular, by using the Experimental Mode Analysis

Method, through which they can measure the exciting

force and the vibration response by exciting directly the

large structures for which it is difficult to acquire the

reliable dynamical properties, under the principle of

harmonizing force by the centrifugal force of the revolv-

ing mass.

This exciting system has been designed so that the dynamic designers can perform the on-site modal test in a wide range 1) for the accurate diagnosis about dynamical properties of large structures and for securing the technologies to establish the countermeasures for the control of enviromental vibrations and 2) not only for being able to vary the exciting force in the experimental frequency range given according to the dynamical properties of the purposed structures so as to perform reliably and in any frequency range the modal test which can be the fundamental data to evaluate the earth proof design and the dynamical stability of the large structures to be built in the future 3) but also for being able to measure the exciting force affecting real struc-tures. This device can be modified as being smaller in the size, lighter in its weight, being portable and can be improved in the way of attachment and by the adjustment of facing direction.

1) ApplicationsUsed for dynamic characteristic test for Bridges, Buildings and Vessels, etc

Structure’s anti-vibration capability and stability test/evaluation

Appropriate the dynamic design for structure

Evaluation the stability of the sturctures

Improved the structural dynamic analysis module

2) AdoptionsTest condition● rpm range : 200–1500 rpm ● Air Pressure range : 0–5 bar ● Condition : Test Bed ● Control Type : PC Sweeping Control

Results

02 >> Characteristics

1) Vibration Generating Part: As the device generating directly the vibration by using an unbalanced mass, it is composed of motor, unbalanced mass and power delivery device.

2) Vibration Transmitting Part: This is the part to transmit the exciting force generated by the Vibration Generating Part to the outer Frame and composed of Coil Spring, Air Mount and Damper. This can adjust the vibration transmitting force by controlling the rigidity for supporting and the damping power.

3) Outer Frame : This part has the role to protect the Vibration Generating Part and the Vibration Transmit-ting Part and to release the transmitted exciting force to the structure. When the horizontal excitation is required, it makes the body of excitor revolving,

4) The system for measurement of

Transmitting Force : As the system mea-suring the directly the dynamical load transmit-ted to the structure from the Dynamical Prop-erties Identification Test.

5) Control Panel : This is the part to adjust the number of motor rotation and composed of PC Control Part, Inverter Voltage Converter, RPM Indicator and so on.

03 >> Composition

04>> Excitor’s Characteristics & Specifications

Items

Exciting Frequency Range

Resonance Frequency Boundary

Max. Vibration Generating power

Max. Vibration Transmitting power

Frequencyproperties

Specifications Items Specifications

0.5Hz ~ 25.0Hz

0.5Hz ~ 25.0Hz

15ton at 25Hz

abt. 1.0 ~ 3.1ton

Direction of exciting force

Measurement of exciting force

Controlling the exciting force

Exciting force

properties

Vertically, Horizontally

Supporting at one point of bottom for the frame and measuring the exciting forceControlling the unbalanced mass(Revolving Type)

Controlling the supporting rigidity

Controlling the damping power

Weight abt. 1.2ton

Length

Width

Height

Measurements 1400mm (840mm : body only)

1100mm (840mm : body only)

900mm

Self Movement Movable horizontally by the attached wheels.

How to establish

Maintenance

Local Control

UsabilityEstablishment of fixed type(Welding, Bolting)

Establishment of movable type(Magnetic)

Assembled structure.

The motor is controlled directly by the power Distribution Board.

PC Control

(PGM Control)

Operating method Sweeping Test Mode

Step Test Mode

Exciting LoadSetting

Location

Angle

Diminishing rate of vibration Generating Force

0

0 degree

100%

1

16 degree

91%

2

46 degree

74%

3

103 degree

45%

4

133 degree

27%

▶Variation table for vibration Generating Force according to the rotation of unbalanced mass.

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

Case 1Case 2

200 400 600 800 1000 1200 1400

400

600

800

1000

1200

1400

1600

1800

Exciting Force[kg]

RPM

Case2Case3Case4

200 400 600 800 1000 1200 14000

500

1000

1500

2000

2500

3000

Exciting Force[kg]

RPM

Patent No.10-0456136

The place for estalishment(Example)

IDS

P014 IDS

01>> Brief

33 | 34

05>> Applications & Adoptions

IDS

Impuse diffuser silencer

P013급배기

덕트라인의 충격성 소음,진동 저감 시스템

급배기 덕트라인의 충격성 소음,진동 저감 시스템

This device has been developed and registered as a patent article to diminish the Noise/Vibration arising from the Rapid Exhausting Duct Line under Clean Room environments of vacuum pump and so on, which are used for semiconductor and TFT-LCD module produc-tions process.It is specially more effective for diminishing the impluse factors.

This device is made of special porous diffuser(open cell type Metal Foam) and designed to minimize the back pressure of

vacuum pump and to maximize the diminishing ability for Noise and Vibration. It can be designed individually and suitably to

specialty of every kind vacuum pump, considering the capacity and frequency properties of each vacuum pump, so that it

can work with optimum conditions.

1) Metal foam METAL FOAM is a porous metal which has numerous bubbles inside the metal material. And it can be devided widly into Open

Cell type (OC), and Closed cell type (CC). As for closed Cell type, every bubble in side the metal materical is not connected

each other and locating independently. In other hand, the open cell type has the bubbles connected each other inside the

metal material and because air and fluid can flow through that path of connected bubbles, the use of it is more various rather

than the Closed Cell type.

There are 3 models of this device

as IDS-100(100Φ), IDS-200(200Φ),

IDS-300(300Φ) which are divided

by the caliber size. And the others

can be designed and manufactured

individually according to end

user’s order.

2) Characteristics of Open cell metal foamSurface size per unit bulk is extremely large (790∼2740m2/m3)

Extremely light weight(The rate of bubble for material: 90∼95%) High rigidity

Superiority for mechanically processing.(Possible for vaccum or dip brazing, Heat treatment, Coating, Cutting, etc)

Superiority for impact absorbility Superiority for noise absorbility This has the characteristic of block-

ing the electro-wave and absorbing the sound.

1) ApplicationsFor diminishing the impact noise and vibration of Rapid Exhausting Duct Line caused by vacuum pump for

Semiconductor and TFT-LCD module production process.

2) Adoptions A/F lower part duct noise of 63Hz is caused by the vibration of duct panel. It is a kind emission noise caused by the reason of Air Impluse Induced Vibration, and so as to recuedc it, it is necessary to get rid of the Vibration source which excites the vibration of duct. This phenomina can be happened at almost all Exhausting Duct Lines being connected to the pipe lines of the first basement, ground level and 1st floor and not only the low frequency of 63Hz contaminates whole C/R, but also this kind low frequency noise can cause secondary vibratio problems. As the counterstep against this kind noise, rather than the establishment of acoustical silencer, it will be more effective to use the Diffuser Type Acoustic Silencer which diminishes the Air Impulse.

02 >> Characteristics

03 >> Composition

04>> Features

Primarily washing room of first basement Access Floor low part space

before adopting the counterstep(63Hz : 118.2dB, max : 92.5dB)

Primarily washing room of first basement Access Floor

after adopting the counterstep(63Hz : 100.5dB, max : 83.5dB)

Fluid of flow　

Kind of nozzle

Nozzle size

Flow rate

S/V Operating pressure

S/V Operating temp.

Connection type

Flange type

Flange material

Pipe material

Pipe wall th'k

Mech. design pressure

Mech. design temp.

Corrosion allowance

Joint efficiency

Support type

Installation type

INLET

DN(B)

kg/hr

kg/m2.g

˚C

Flange

ANSI

ASTM

ASTM

SCH NO.

kg/m2.g

˚C

mm

％

ASTM

ASTM

ASTM

ASTM

1st coat

2nd coat

6t

6t

9t

1.5t

A283 GR.C OR EQ.

A283 GR.C OR EQ.

A283 GR.C OR EQ.

Glass wool

A240 GR.304 RO EQ.

SSPC-SP-10

Inoganic zinc rich 25㎛ X 3 coat

Silicon resin 20㎛ X 2 coat

Silver

12"

32,500

42.0

355

SORF

#150

A105

A106 GR.B　

SCH40

3

370

1.5

80

1"

SORF

#150

DRAIN

STEAM

Shell

Head

Diffuser Shell/Head

Inner sound absorbing Material

Surface sound absorbing Material

Surface preparation

Painting

Finish color

  SURFACE PREPARATION &PAINTING

MATERIAL

ACOUSTIC &MECHANICAL DESIGN CONDITION

■ Bracket Saddle Skirt Leg

■ Vertical □ Horizontal

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

Spring Hanger

Diffuser SilencerDiffuser Silencer

Flexible JointFlexible Joint

DiffuserDiffuser

DuctDuct

Damping Sheet(5mm) + coated material Damping Sheet(5mm) + coated material

1

2

3

16 31.5 63 125 250 500 1k 2k 4k 8k 16k Lmax0

20

40

60

80

100

120

SPL(d

B)

1/3 Octave Band Center Frequency[Hz]

16 31.5 63 125 250 500 1k 2k 4k 8k 16k Lmax0

20

40

60

80

100

120

SPL(d

B)

1/3 Octave Band Center Frequency[Hz]

실용신안 제20-0273729호

SVM-Inflling system

P016 SVM-Inflling system

01>> Brief

35 | 36

05>> Applications & Adoptions

04>> How to construct

SVM-Inflling system

Ground vibration Isolation System using Waste Tire

P014페타이어를 이용한 지반진동 차단장치

페타이어를 이용한 지반진동 차단장치

This is the device to block or diminish the vibration transmitted through the

ground as the intermediator. It is the most effective system to diminish the

vibrations caused by subway trams, railway trains traffics, hammerings, any

constructions and explosions by being buryed under the ground surrounding

the vibration source or the basement for the construction structures near to

vibration source, like cultural assets, semiconductor & TFT-LCD factories, and

the building for laboratory.

This device has the characteristics to control the capability of blocking the vibration effectively by being buryed parllelly for each

as well as buryed in series. While the existing other similar products are made with the powdered and transformed waste tires,

because SVM-Infilling System is made of the waste tires as they are, as pollution-free synthetic resin, without any processes

and without any transforms, it is environment-friendly and is not causing pollution problems.

1) ApplicationsFor diminishing the structural vibration and noise for the structures near to subway and traffice area

Anti-vibration for health club and machinery room placed in the middle class of residential and commercial

building

02 >> Characteristics

03 >> Composition & Features

SVM Damping material against earth vibrations

Round shaped tire

Elastic reinforcing

substance

Externally filling material

Section of reinforcing

Performance Testing Graph

-10 -8 -6 -4 -2 0 2 4 6 8 100

500

1000

1500

2000

2500

3000

3500

4000

4500

5000

Displacement(mm)

Loa

d(kg

f)

Stiffness : 235724.0gf/mLoss factor : 15.7%

2) Adoptions

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS

1) Round shaped waste tire : This performs the role same as elastic substance to diminish or block the earth vibrations.

2) Elastic reinforcing substance: This has the role to spread the load of earth equivalently and prevent the

diminution of the effectiveness for anti-vibration, which can

cause by the inflow of the earth and under-ground water into

the open space of central area of the tire.

3) Externally filling material: This has the role to prevent the inflow of the earth and can make the waste tire close

tightly to the reinforcing substance by the force of earth

pressure.

4) Product(Filling material): The basic type is as the

illustration. For easy establishment of it, it can be packaged

as 4×2 rows, 3×2 rows and etc.

Product size : 720 mm × 720 mm × 210 mm

Floor on the ground

Floor under the ground

Putting concrete withoutreinforcing bar

Floor on the ground

Floor under the ground

Filling material

Sand

Wall for blocking

earth

Wall for blocking

earth

Floor on the ground

Floor under the ground

Filling mateial

Ram with the sand

Putting concrete withoutreinforcing bar

Wall for blocking

earth

Wall for blocking

earth

Floor on the groundFilling material

Floor under the groud

Fixing withClamper

Fixing withClamper

Reclamation earthReclamation earth

MR-Fluid

P016 SVM-Inflling system

01>> MR-Fluid

02>> MR Fluid and ER Fluid

37 | 38

MR-Fluid

Magneto Rheological Fluid

P015자기점성가변유체

자기점성가변유체

Functional Fluid for damping was designed in 1950 at first by

Mr. Winslow. Since that time, most of development has been

intended by using ER Fluid. In the case of ER Fluid, it has

comparatively low power for yield stress, and so it has to be

limited in its function for damping as well as its damping power

can be diminished by any contaminating substances. Further

more, because it needs very strong electric waves for working,

it always stands for the risk of electric shock and high cost for

energy by being supplied with high voltage electric power. As

for MR Fluid, the material is composed with oil and magnetized

floating matters of micron size(10-6). MR Fluid has been

developed and improved to be able to control the solidity rate

of oil very precisely by using magnetic waves.

Reacting quickly by the magnetic power.

Dynamic Yield Stress is comparatively high.

Not to be effected by an contaminating substances.

It has strong power of endurance against erosion.

Being workable under the wide range of working

temprature( - 40℃- 150℃).

Considering the common characteristics of MR Fluid and ER Fluid, we can comment that both have the ability of yield stress

made by magnetic or Electric waves, quickly reacting to such waves, and changing their forms from the liquidity to the solidity.

Considering the advantageous and dis-advantageous points of each; as for ER Fluid, it has such advantageous points as

reacting more quickly to the electric waves rather than MR Fluid, and for its energy, the electric waves can be made simply.

In the other hand it has such dis-advantageous points as its viscosity is comparatively low, it is workable at very limited range

of working temperature, it mal-functions easily under high temperature circumstances and it can mal-function fatally when it is

effected by the water or any impurities which can generally be created in the production process. Further more, ER Fluid needs

any high voltage electric power generator which can generate several thousand voltage electric power momentarily.

03>> RMS MR Fluid

High technology for scattering the particles of RMS Technology enables MR Fluid manufactured by it to have wide scattered range of particles and by selecting the most suitable Base Oil according to buyer’s needs, its MR Fluid can be made as the ordered specifications as the buyer wants.

04>> Applications

Composition of MR Damper System : MR damper System can be composed case by case, according to-

for which purpose it will be used and what kind special characteristic it should have, etc.

Classifiction MR Fluid ER Fluid

50 ~ 100 KPa

Iron

- 50 ~ 150 ℃

To be little effected by impurities

ms (milliseconds)

2 ~ 4 g / ㎤

2~25 V, 1~2 A, 2~25W

2 ~ 5 KPa

Particles of electric conductor

10 ~ 90 ℃

To be much effected by impurities

ms (milliseconds)

1 ~ 2 g / ㎤

2~5 KV, 1~2 mA, 2~50W

Maximum Yield Stress

Object

Range of working temperature

Stability

Response Time

Density

Electric Power

Classification REF T3-300

Fe

Paraffine Base Oil

1.7

300 cP

0.3 T

Magmetic

Base Oil

Specific Gravity

Viscosity

50rpm @25℃

Density of the fuild at the point when the

magnetization starts to be saturated

REF T5-500

Fe

Paraffine Base Oil

2.6

500 cP

0.5 T

REF T6-1000

Fe

Paraffine Base Oil

2.7

1000 cP

0.6 T

P001

P002

P003

P004

P005

P006

P007

P008

P009

P010

P011

P012

P013

P014

P015

Micro-MRAM

Micro-AM

RSRM-X

MR Damper

VSD

ML-Micro Foot

TMD System

HLRM

APVIBM

VDF Exiciter II

IDS

SVM-Infilling System

MR-Fluid

UTRM

HESIS