UNIVERSITÀ DEGLI STUDI DI CATANIAFACOLTÀ DI INGEGNERIA

DIPARTIMENTO DI INGEGNERIA ELETTRICA, ELETTRONICADIPARTIMENTO DI INGEGNERIA ELETTRICA, ELETTRONICA E DEI SISTEMI

Dottorato di Ricerca in Ingegneria Elettronica, Automatica e del Controllo di Sistemi Complessi

XXIV ciclo

XXI XXI Brain Storming Day Brain Storming Day –– 19 19 OttobreOttobre 2010 2010 AngelaAngela BeninatoBeninatoAngela Angela BeninatoBeninato

Research and education activities during Ph.D.

Integrated micro and nano sensors- Inductive microsensors with magnetic microbeads; - Microfluidic with ferrofluidic materials;- Nanotechnologies.

TutorTutorProf. Ing. Salvatore Baglio

CoordinatorCoordinatorProf. Ing. Luigi Fortuna

OUTLINE & RESEARCH ACTIVITY PLANNING1 Theoretical backgroundTheoretical background

INDUCTIVE MICROSENSORS FERROFLUIDIC DEVICES NANOTECHNOLOGIES

Y Theoretical background and state of the art.Characterization of existingdevices.

Theoretical background and state of the art.Design, simulations and layouts.

f

2 Theoretical background

Modelling of new devices.Design of suitableconditioning circuits.

Characterization of devices Development modellingY2 Theoretical background

and state of the art.Training on SEM-FIB equipments.

Characterization of devicesand tests.Design and fabrication ofmicrofluidic system.

Development, modellingand characterization ofnew devices.

Y 3

q py

Realization of Lab-on-chipdevice

Design and fabrication ofmicrofluidic devices for

Design and fabrication ofnanodevices for thedevice. microfluidic devices for

magnetic immuno-assay.nanodevices for the detection of weakmagnetic fields.

INDUCTIVE MICROSENSORS

M ti i

Magnetic immuno-assay

diLL

1'2

Δ

dtdi

LL

LL

LNNvout1

'2

2'2

1

221

12 ⎟⎟⎠

⎞⎜⎜⎝

⎛ Δ−ℜ+⎟⎟

⎠

⎞⎜⎜⎝

⎛ Δ−ℜ

=

dtdi

LL

LL

NNLLd

dvS out 12

'2

2'2

1

2121'

212

2)/(

⎥⎦

⎤⎢⎣

⎡⎟⎟⎠

⎞⎜⎜⎝

⎛ Δ−ℜ+⎟⎟

⎠

⎞⎜⎜⎝

⎛ Δ−ℜ

ℜ+ℜ=

Δ=

22 ⎦⎣ ⎠⎝⎠⎝

INDUCTIVE MICROSENSORSgold

~ 100 µm~ 1.0 µm~ 0.7 µm

metal2

goxide

oxide~ 0.7 µm

500 Å

5300 Å

1000 Å~ 0.6 µm

polysilicon

metal1oxide

oxide

1.9 µm

5300 Å600 Å

n- - 508 µm

substrate

polysilicon

1.9 µm

600 Å5300 Å

500 Å 1000 Å

Sensors

Thermal structures

INDUCTIVE MICROSENSORS

HeaterHeaterSpacing = 10 µmWidth = 8, 9, 10, 20 µmSeveral number of tracksSeveral number of tracksRh= 8.7, 10.3, 28.9, 30, 33.6, 40.6, 60 kΩ

ThermoresistanceThermoresistanceFixed in dimensionsRt ≈140 kΩ

HeaterThermoresistance

INDUCTIVE MICROSENSORS

THERMORESISTANCETHERMORESISTANCE

Thermoresistancein polysilicon:

R 130Ω

yLength= 280 µm

Width= 7µm

M l1 R= 130ΩV= 70 V

Metal1

Metal2

Thermometer DeltaOhm HD2107 1Thermometer DeltaOhm HD2107.1Accuracy ±0.01°C

Resolution 0.01°C

Probe TP49AC

Accuracy ±0.25°CV-I converter Non-inverting amplifier

INDUCTIVE MICROSENSORS

THERMORESISTANCETHERMORESISTANCE

Sensitivity= -484.24 Ω/°CResolution= 0.2167 °CUncertainly=±0.333 °C

INDUCTIVE MICROSENSORS

HEATERHEATERm m m m m m m m

= 28

5 µm

10 µ

m

= 34

5 µm

10 µ

m

= 40

5 µm

10 µ

m

= 22

5 µm

10 µ

m

= 16

5 µm

10 µ

m

= 28

3 µm

8 µm

= 28

5 µm

9 µm

= 29

5 µm

20 µ

m

Leng

th=

Wid

th=

Leng

th=

Wid

th=

Leng

th=

Wid

th=

Leng

th=

Wid

th=

Leng

th=

Wid

th=

Leng

th=

Wid

th=

Leng

th=

Wid

th=

Leng

th=

Wid

th=

INDUCTIVE MICROSENSORS

HEATERHEATER

Length = 285 µmWidth = 10 µm

Sensitivity= 0.6523 °C/VUncertainly=±1.9 °C

FERROFLUIDIC DEVICES

PATTERN

The device consist of:a glass plate with de ionized water in which•a glass plate with de-ionized water in which

there is a drop of ferrofluid;•a matrix of 16 electromagnets to move the drop;•16 permanent magnets located on the bottom•16 permanent magnets located on the bottom

of the electromagnets.

ELECTROMAGNETS

PERMANENT MAGNETSPERMANENT MAGNETS

FERROFLUIDIC DEVICES

PATTERN

Q1 on, Q2 off +I,Q1 off, Q2 on -IQ1 off, Q2 off I=0

FERROFLUIDIC DEVICES

PATTERN

C1, C2 H1C3 H2

C1 H1C2, C3 H2

C1 H1C2 H2C3 H3

FERROFLUIDIC DEVICES

PATTERN

FERROFLUIDIC DEVICES

PATTERN

4

5

2

3

mbe

r of m

easures

1

Nu

0

50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 100010501100115012001250130013501400145015001550160016501700175018002000

Minimum time step between the input signals for two consecutive electromagnets [ms]

78

e34567

r of m

easure

0123

numbe

r

5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85

time of permanence in a electromagnet [s]

CCONTINUING EDUCATION PROGRAM:

Fotonica e Nanotecnologie (Priolo-Romano)IMU 2009, Trento ,First Biosensing Conference, 9-16 Novembre 2009Training on SEM-FIB equipment, TESCAN, Brno, Czech RepublicSeminars offered for the PhD School

RESEARCH ACTIVITY:

IC prototypes realization at ST Microelectronics (Catania);IC prototypes realization at ST Microelectronics (Catania);Characterization of devices;

Modelling simulation and characterization of new ferrofluidic devices;Modelling, simulation and characterization of new ferrofluidic devices;Design and fabrication of microfluidic devices for magnetic immuno-assay;

Training on SEM-FIB equipments;g q p ;Design and fabrication of nanodevices for the detection of weak magnetic

fields.

LIST OF PUBLICATIONS

BOOKSBOOKS

1. B. Andò, S. Baglio, A. Beninato, Magnetic fluids for bio‐medical application, in “Advances in Biomedical Sensing, Measurements, Instrumentation and Systems” Springer – Verlag Publisher.

JOURNALS

2. B. Andò, S. Baglio, A. Beninato, S. La Malfa, N. Pitrone, Advanced Educational Tools in Measurement and Sensors: f t it i t t ti fl id I t J l f Ed ti d I f ti T h l i Ifrom remote monitoring systems to magnetic fluids, Inter. Journal of Education and Information Technologies, Issue 1, Volume 3, 75‐84, 2009

3. B. Andò, A. Ascia, S. Baglio, A. Beninato, The “One drop" FERROFLUIDIC PUMP with Analog control: "FP1_A", Sensors & Actuators: A. Physical, Volume 156, Issue 1, November 2009, Pages 251‐256.

4 B A dò A A i S B li A B i t A F fl idi I ti l S l iti th R i ff t4. B. Andò, A. Ascia, S. Baglio, A. Beninato, A Ferrofluidic Inertial Sensor exploiting the Rosensweig effect, Instrumentation and Measurement, IEEE Transactions on , vol.59, no.5, pp.1471‐1476, May 2010

5. B. Andò, S. Baglio, A. Beninato, G. Fallica, V. Marletta, Development of an integrated inductive sensor for magnetic immunoassay in “lab on chip” device, Word Scientific 2010

6 B A dò S B li A B i t B h i A l i f F fl idi G P f t d f th6. B. Andò, S. Baglio, A. Beninato, Behavior Analysis of Ferrofluidic Gyroscope Performances, accepted for the publication on Sensors & Actuators: A. Physical, 2010

7. B. Andò, S. Baglio, A. Beninato, An IR methodology to assess the behavior of Ferrofluidic transducers. Case of study: a contact‐less driven pump, accepted for the publication on IEEE sensors, 2010

CONFERENCES

8. B. Ando’, A. Beninato, S. La Malfa, N. Pitrone, Didactic tool assisting visually impaired students during laboratory sessions, the 7th WSEAS International Conference on Education and Educational Technology, EDU’08, pp. 190‐193, 2008.

9. B. Ando’, A. Ascia, S. Baglio, A. Beninato, S. La Malfa, N. Pitrone, Sensing a physical movement with a ferrofluidic device, the 4th WSEAS International Conference on Remote Sensing (Remote’08), pp. 99‐102, 2008.

10. B. Ando’, S. Baglio, A. Beninato, A Novel Non‐invasive Implementation of Pumping Mechanism in PreexistingCapillary, IEEE sensors 2009, pp. 1349 ‐ 1353, 2009

11. B. Andò, S. Baglio, A. Beninato, Behavior Analysis of a Ferrofluidic Gyroscope Performances, Proceedings of theEurosensors XXIII conference, Volume 1, Issue 1, September 2009, Pages 116‐119.

12. B. andò, S. Baglio, A. Beninato, G. Fallica, V. Marletta, N. Pitrone, Analysis and design of inductive biosensors formagnetic immuno assay, XIX IMEKO World Congress Fundamental and Applied Metrology, 2009, pp.1729‐1733.

13. B. Andò, A. Ascia, S. Baglio, A. Beninato, Innovative Ferrofluidic Inertial Sensor exploiting the Rosensweig effect,IEEE, IMTC2009, pp. 1419‐1422, 2009.

14. B. Andò, S. Baglio, A. Beninato, G. Fallica, C. Galati, V. Marletta, L. Renna, Development of an integrated inductivesensor for magnetic immunoassay in lab on chip device, Physcon 2009, pp. 189, 2009

15. B. Andò, S. Baglio, A. Beninato, V. Marletta, An integrated differential inductive sensor implementing bio‐immunoassay, IEEE ‐ Biosensing 2009

16. B. Andò, S. Baglio, A. Beninato, A spike‐like ferrofluidic inertial sensor, I2MTC 2011 (submitted)