vertex system
DESCRIPTION
The Vertex is a plasma characterisation instrument that measures the ion angular distribution of Ions arriving at a surface inside a plasma chamber. It can also measure ion energy, ion flux, negative ions, temperature and Vdc at a surface inside a plasma. The Vertex System is increasingly used in many applications in industry and research, such as plasma etching, ion beams, and plasma sputtering for plasma characterisation and plasma interaction analysis. The Vertex System saves the user valuable time in confirming models, developing new processes and in experiments that use plasma, plasma tool design and plasma research.TRANSCRIPT
“Ion angular distribution can now be measured at the substrate position”
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The Vertex Single Sensor is placed at any location inside a plasma reactor and measures
the ion angular distribution hitting a surface using a single
sensor.
The Vertex Multi Sensor also measures the uniformity of ion
angle distribution hitting a surface inside a plasma reactor
from multiple locations.
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Plasma ParametersIon Angle Distribution
Ion Energy Distribution • Ion FluxNegative Ions • Temperature
Bias Voltage (Vdc)
Measurement FunctionalityTime Averaged • Time Resolved • Time Trend
SolutionsThe Vertex measures the angular distribution
of ions hitting a surface inside a plasma chamber. These plasma diagnostics help with
common issues such as:
Feature damageBeam divergenceElastic scattering
The system also measures the ion energy distribution and ion flux at each angular
distribution
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Installation Setup
Vertex ElectronicsGenerator Match Plasma Reactor
Computer
Vertex Sensor
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How It Works
The first grid prevents the plasma entering the analyser
The second grid is biased with a negative potential to repel any electrons
A third grid is biased with a positive potential sweep. This creates a potential barrier for the
positive ions
An aperture is located directly below the third grid which allows through ions of a specific angle
A second aperture is biased with a potential to modify its ion acceptance angle
A collector plate collects the current of ions which cross the potential barrier set by the third grid
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Applications
The Vertex finds uses where ion angular distribution is of interest.
The Vertex System can be used in the following applications:Dusty Plasma
Plasma EtchingHiPIMS Plasma
Ion Beam PlasmaPECVD
Space PlasmaPlasma Sputtering
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Applications
For further information on the Vertex System visitimpedans.com/vertex-sensor
To request a quote visitwww.impedans.com/contact
Chase HouseCity Junction Business Park
Northern CrossMalahide Road
Dublin 17Ireland
Ph: +353 1 842 8826Fax: +353 1 891 6519
Web: www.impedans.comEmail: [email protected]