Verigy V93000Service Training

Module 11:Calibration Robot

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Calibration Robot

The Calibration Robot (short: Cal Robot) consists of two subunits:

XYZ Unit

Cart

Cal Robot (unwrapped)

XYZ Unit

Cart

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There are three electrical connections paths to the tester:

Powering the Cal RobotThe Cal Robot is connected to a switched power outlet in the Support Rack.

Controlling the Cal RobotThe Cal Robot receives the control commands from the system controller via the Utility line pogoblock 1.

Calibrating with the Cal RobotTo use the Cal Robot as calibration unit, the Cal Robot is connected to the testhead (-> “Master Clock board”) via a “Calibration cable”.

Connections to Tester

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Powering the Cal Robot

The Cal Robot is powered by the a switched socket inside the SupportRack.

Main socket on power

supply drawer

Switched power outlet

in Support Rack

Interface – Electrical Connection to Tester

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TH PanelCalibration cable

Calibrating with the Cal Robot

The connection between the Cal Robot and the testhead (-> “MasterClock Board”) is established with the “Calibration cable” thatConnects to the “Calibration Robot connector” on the testhead.

Connection Calibration cable to TH

Calibration

cable

Cal Robot connecto

r

ICU (ACU) Unit

connector

Interface – MCLK Connection to Tester

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Controlling the Cal Robot

The Cal Robot receives the control commands from the systemcontroller via the Utility line pogoblock 1.

Utility connect board (front side)

Connector to

Support board

Connector to

testhead

Utility connect board (rear side)

Connector to

Utility pogoblock 1 (TH)

Note: For the location of the “Utility connect board” within the Cal Robot is please see page 23

Interface - Utility Connection to Tester

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Motor Control Units

Utility Lines

Reference Edge

Probe Control

System controller

Support Board (within Cal Robot)

Overview of electrical connections

Cal

ibra

tion

cabl

e

Utility connect boardFibre

link

Communication path within Cal RobotCommunication path Cal Robot - TesterCommunication path Tester – S. Controller

Communication Connections to Tester

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The XYZ Unit contains:• Calibration Probe

(-> calibrates all digital pins on the tester by contacting the channel pogo pins)• Support Board

(-> features the system controller, controls the Robot) • Utility Line Interface

(-> connects the Support Board with the TH)• ON/OFF Board

(->push buttons that also serve as status LEDs)• Mechanical hardware to move the Cal Probe and contact the Pogopins

(Bridge, Drive belt, stepper motors, Linear guide, Pulleys)

System components: XYZ Unit

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Mechanical layout

XYZ Unit

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Mechanical layout (top cover removed from XYZ Unit)

Linear guides

Pulley

Drive belt

Bridge

Stepper motor 2

Stepper motor 1

Cal Probe

XYZ Unit

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Electrical layout (Block diagram)

XYZ Unit

M 1

Break 1

Encoder 1

M 2

Break 2

Encoder 2

Power Supply

24V

SW1..

.SW5,

Opt. S

enso

rSwitch 3(y-axis)

Switch 1(x-axis)

Switch 2(x-axis)

Switch 4(y-axis)

Switch 5(z-axis)

Switch 5

Support Board

Motor Control Unit 2

Motor Control Unit 1

Solenoid(z-axis)

TestheadFiber Link

System controller

Fiber-optic

Module

Seria

l Con

trol

24V

Optical Sensor

Cal-Probe

88 V - 264 VAC

from Support Rack

Serial Control

Reference Edge

Probe Measurement

+10V, -10V, +5V,+12V_FAN

Sync

hrono

us St

art

ON/OFF Board LEDs

Buttons

Cal Robot - XYZ Unit

Cal Robot - Cart

Testhead

System controller

Utilit

y Li

neIn

terfa

ceDi

gita

lPo

go P

insCa

l Rob

otCo

nnec

tor

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Electrical layout (top cover removed from XYZ Unit)

Location of Optical position indicators

Support Board ON/OFF Unit

Solenoid(plus end switch)

Location of micro switches (“end switches”)

Utility connect board

Fibre optic module

Cal Probe

XYZ Unit

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Calibration Probe (E8006-66611)– Physical Layout (Front side)

Cooling Fan (DRIC is located under fan)

Cal Probe board

Probe pin housing

Cal Probe

DRIC: Drive-Receive Intregrated Circuit (sampling circuitry)

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Calibration Probe – Block diagram

50

DAC

DVH

IDROOPA1

PIN2IDVL

16.2

16.2

16.2

Pogo pin

Channel 2

Logic, EEPROM

DRIC Temperature

Heatsink Temp.

Drive/ReceiveInvert

Reference Edge

+10V–10V

Fan SupplySerial interface

to support board

DRIC

+5V

Pogo pin

Channel 1

Cal Probe

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Calibration Probe – Cal Probe pins (explosion drawing)

Orientation ofCal Probe Pins

Groundpin

Groundpin

Digitalpin

Orientation of Pogo block Pin Scale 3600 Digital Card

Orientation of Pogo block Pin Scale 800 Digital Card

Orientation mark

Orientation mark

Pin 1

Pin 1

Fibre optic cable

Light beam entry point

Cal Probe Pins

Drive belt

Fan

Cal Probe Board (PCB)

Probe Pin housing

Cal Probe

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Support Board – Physical layout

Calibration cable

Connector P101 to Power supply drawer

Molex connector P103 to Fibre optic module

Molex connector P102 to solenoid

Data cable connector P401 to Motor control unit

Molex connector J701 to Cal Probe

DC/DC Conv. +12V

Ribbon cable connector J501 to Utility line interface board

Molex connector J101 to micro switches

Ribbon cable connector P201To ON/OFF board

DC/DC Conv. -12V

PLD

Support Board

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Support Board – Physical layout

Status LEDsDS 601 lits if +24V are presentDS 602 lits if +12V are presentDS 604 lits if +5V are presentDS 603 lits if –10V are presentDS 701 indicates that the PLD is not configured,

off after power onDS 702 indicates that PLD worksDS 703 currently not used

Support Board

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The drawer contains:

• Power supply (provides power to the XYZ Unit, the motor control units and the stepper motors)

• Power supply fuses (fuses protect the AC main input, the 24VDC output line to the support board and the two motor control units)

• Motor control units (control the operation of the stepper motors and breaks)

• Accessory drawer to store tools and Diag/Cal boards

Cart

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Mechanical layout

Power supply drawer

Accessory drawer

Wheels with breaks

Flexible cable trunk to XYZ Unit

Platform for XYZ Unit

Storage slots for board

Cart

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Physical layout

Cal Robot Cart

Cal Robot Cart(drawer pulled out)Accessory drawer

(incl. accessories)

Cal Robot Cart(board storage)

Cart

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Physical layout (top cover removed from drawer)

AC Mains fuses

Power supplyUnit (500W)

Motor Control Unit 2

Motor Control Unit 1

DC Output terminal

Cable trunk to XYZ Unit

Fuses

Power Supply Drawer

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Preventive Maintenance Schedule

* Note: There is a special torque wrench available to tighten the belt.

Activity Maintenance Frequency Time required

Cleaning the cabinet (Air inlets in side covers, Cal Probe cooling fan, Fibre optic indicators)

Once per year 5 min

Checking belt tension and condition * Once per year 10 min

Exchanging the Cal Probe SW gives notification(limit: 100,000 touchdowns)

15 min

Preventive Maintenance

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Start “Calibration Robot Test” (CROB)

Choose “Cal Robot”in the menu Select Tests

Click “Start” to start the Diagnostic test.

Diagnostic Test

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Testcoverage of the “Calibration Robot Test“ (CROB)

– Robot functional test (functional test with sub-tests):• Support board communiction test• Solenoid test• UART communication test• ECO stepper controller test• Probe power supply test

– Calibration probe test (functional test with sub-tests):• Fan speed test DDRIC test• EEPROM test Register dump test• Probe temperature test Probe DAC test

CROB test detects defective parts on FRU level

Diagnostic Test

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Di_log_file of “Calibration Robot Test” (extract)

T CROB (ADD):calibration robot test (100.00ns)Starting...

Probe EEPROM read failedReference Edge not foundPolarity of Reference Edge failed, DFF triggers on pos and neg edgesFinished...

FAILED

time: DI:13430 FW:18742 [msec]Diagnostic finished

### Diagnostic finished at: Fri Nov 19 16:23:45 2004

Diagnostic Logfile

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Di_value_file of „Calibration Robot Test“ (extract)

T CROB (ADD):calibration robot test T127: Testing for calrobotT127: Calibration robot: availableT127: NIOS communicationT127: cmd[000] Send=0x0000, Received=0x0000….T127: cmd[255] Send=0x00FF, Received=0x00FFT127: Support Board registerT127: FAN STATUS: 1T127: +10V : 1T127: -10V : 1T127: Probe down: 1T127: DTOK : 1T127: Red LED : 0T127: Orange LED: 0T127: Green LED : 1T127: UART loop backT127: RX[00] = 00….T127: RX[30] = 00 ***T127: SolenoidT127: Solenoid down: 0T127: Solenoid up: 1T127: EEPROM testT127: Support board EEPROM counter: 1289T127: Support board EEPROM write: OKT127: Probe EEPROM read: FAILED ***T127: Probe EEPROM counter: 1289 T127: probe power supply testT127: Probe supply voltage +10V software switch: ONT127: Probe supply voltage +10V: OKT127: Probe supply voltage -10V software switch: ONT127: Probe supply voltage -10V: OK

Diagnostic Logfile

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Di_value_file of „Calibration Robot Test“ (extract)T CROB (ADD):calibration robot test (continued) T127: PLD software version = 3T127: Fan rotation speedT127: Fan counter: 235 T127: Fan counter: 238 T127: Fan counter: 230 T127: Fan counter: 241 T127: Fan counter: 241 T127: Fan counter: 238 T127: Fan counter: 239 T127: Fan counter: 235 T127: Fan counter: 238 T127: Fan counter: 237 T127: Fan counter: 012 T127: Fan counter: 016 T127: Fan counter: 024 T127: Fan counter: 031 T127: Fan counter: 034 T127: Probe DAC testT127: DAC last command: 0x0000T127: DAC send 0xA000, received 0xA000T127: DAC send 0x8000, received 0x8000T127: DAC send 0x00AA, received 0x00AAT127: DAC send 0x0055, received 0x0055T127: DAC send 0x00AA, received 0x00AAT127: DAC send 0x0055, received 0x0055T127: Probe temperatureT127: DDRIC temperature = 61.84 CT127: Probe temperature = 32.35 CT127: DDRIC reference edge testT127: Reference Edge: NOT FOUND ***T127: D-Flip-Flop: OKT127: Polarity of Reference Edge: FAIL, DFF TRIGGERS ON POS AND NEG EDGES ***

### Diagnostic finished at: Fri Nov 19 16:23:45 2004

Diagnostic Logfile

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The following tools are orderable:

• Torque wrench (incl. torque setter) to tighten the drive belt. (8710-2477)• Torx insert T20 (8710-2483)• Torx screw driver T10 long (8710-2486)

Torque wrench

Torx insert (T20)

Torque setter

Long torx screw driver (T10)

Repair Tools

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Defective FRU: The “Calibration Robot Test” in the Diagnostic is able to detect mostdefective FRUs (exception: Power supply; for more information please referto Service Guide Part 1 (E8001-91004)

Power problems: If the ON/OFF panel is inactive after power on (e.g. lights are dark) checkthe input and output voltages of the power supply with a DVM (for moredetails please refer to Service Guide Part 2 chapter Cal Robot (E8001-91010)

Problems during initialization: If the initialization of the Cal Robot fails (i.e. all lamps on the ON/OFF board

remain on) recyle power.

Communication problem between Tester and Cal Robot: Make sure to check the connection between the Utility Pogoblock 1 and the

Utility Connect Board with in the XYZ Unit (visual inspection, check of utility lines with Diagnostic test UTIL).

Docking problem: If you encounter problems when docking the Cal Robot to the testhead please refer to manual „Calibration Robot Installation and MaintenanceGuide“ (E8006-91002)

Troubleshooting Tips

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Troubleshooting Cal Robot with help of ON/OFF Board

The ON/OFF board works as control panel with 3 LEDs for status indication; two buttons (red + green) are used to control the Cal Robot.

Status of LEDs:

All 3 LEDs are ON: Initialization of Cal Robot.

Red + Green LED ON: Manual mode is entered if Red+Green LED are pressed at the same time -> Motor brakes are disengaged and Cal Probe can be moved manually.

Red LED ON: hardware defect

Green + Orange LED ON: Cal Robot is in operation (e.g. init; performs AC Skew Calibration)

Green LED ON: Cal Robot is ready

Troubleshooting Tips

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Overview of Firmware commands:

CRSC INIT Initializes global variables.

CRCA INIT Initializes the motor control units.

CRCA SLFT Performs coarse self calibration (moves probe to end switches, moves probe up/down)

CRCA RCAL Performs fine calibration (moves to reference light sources)

CRSC? MCNT Query the counter of the Support Board EEPROM

CRSC? CCNT Query the counter on the Cal Probe EEPROM

Firmware Commands

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Example: Perform coarse and fine calibration, then move Cal Probe to channel 10101 and then into “park” position.

• Start SmarTest• execute: /opt/hp93000/soc/fw/bin/hpt

1. command CRSC INIT

2. command CRCA INIT

3. command CRCA SLFT

4. command CRCA RCAL

5. command CRMV CHMV,10101 (->moves Cal Probe to channel 10101 and contacts pin)

6. command CRMV PARK (-> Cal Probe enter „park“ position)

Firmware Commands

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Example: Read out counter of Support Board and Cal Probe EEPROM:• Start SmarTest• execute: /opt/hp93000/soc/fw/bin/hpt

1. command CRSC INIT

2. command CRSC? MCNT (-> Query the counter of the Support Board EEPROM)

3. command CRSC? CCNT (-> Query the counter on the Cal Probe EEPROM)

Example: Read out temperature of Cal Probe:• - Start SmarTest• - execute: /opt/hp93000/soc/fw/bin/hpt

1. command CRSC INIT

2. command CRPD? TMPP (-> Reads out temperature of Cal Probe)

3. command CRPD? TMPA (-> Reads out ambient temperature)

Example results:• CRPD TMPP,336,395 -> Probe has a temperature of 336,395K (= 336,395-273,16 = 62,25

°C)• CRPD TMPA,308,034 -> Ambient temperature is 308,034K (= 336,395-273,16 = 34,8 °C)

Firmware Commands

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Calibration step with Cal Robot

Section/command Firmware Command / Step * HW and activity involed

INIT Cal Robot initialization

SPMC High Precision PMU

PDIC DPS Calibration

DC Calibration

BADC Board ADC

BTMP Board temperature

CDAC Channel DAC linearity

PPMU Pin PMU

Levels *

AC Calibration Skew cal using internal sources *

Skew cal using Cal Robot *

Cal probe TDR *

Cal Robot

Cal Robot

Tim

e

required

required

Calibration Steps