valve selection criteria for cmp...

Asahi/America, Inc.

www.asahi-america.com

Valve Selection Criteria for CMP SlurryAdam Herbert

Asahi/America, Inc.

Asahi/America, Inc.


Factors in Selecting a Slurry ValveDurability in Slurry

How long of a cycle life is required?

Effect on Slurry Chemistry

How much particle generation can be tolerated?

Valve Function

What function will the valve serve?

Cost vs Performance

How Critical is the Valve?

Asahi/America, Inc.


Pinch ValvesDurability in Slurry

Highest Cycle Life and Durability


No Slurry Cohesion

Valve Function

On/Off, Flow Control

Cost vs Performance

Higher Cost, Optimum Performance

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Compressor Shaft (PVDF)

End Connector (PTFE)

Tube (PTFE Blend)

Straight Flow Path:High Cv No Dead SpaceAbility to Fully Flush

Pinch Valves

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Pinch Valves

What Type of Tube Material?PTFE Blend vs PFA / PTFE

PTFE Blend:

Higher Durability

Full Seal

Complete Restoration

High Vacuum Resistance

Low Particle Generation

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Stress on Diaphragm

Cohesion in Dead Space

Slurry Cohesion Break off

Pinch Valves

Failure of Diaphragm Valves in Slurry

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Pinch Valves

Pinch Valve Durability Test in Slurry

Diaphragm

Valves

Pinch

Valves

Slurry Type: Cabot SS-25

Test Cycles: 2 Million

Cycle Time: 4 sec

Asahi/America, Inc.


020406080

100120140

DV 1 DV 2 DV 3 PV

Pres

sure

Rat

ing

(psi

)

Initial Rating

Rating AfterCycle Test

Pinch Valves

Pinch Valve Durability Test in SlurryDiaphragm valves lose pressure rating or fail!

Asahi/America, Inc.


020406080

100120140

DV 1 DV 2 DV 3 PV

Pres

sure

Rat

ing

(psi

)

Initial Rating

Rating AfterCycle Test

Pinch Valves

Pinch Valve Durability Test in SlurryPinch Valves show no signs of wear!

Asahi/America, Inc.


-

200,000

400,000

600,000

800,000

0 1 2 3 4 5 6 7 8 Day

Part

icle

s >

1.04

μm

Dia Valve 1

Dia Valve 2

Pinch Valve

PFA Tube

Slurry Type: Cabot SS-25

Pinch Valves

Pinch Valve Slurry Cohesion TestPinch Valve demonstrates same effect on cohesion generation as blank piece of tube.

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Cycles [times]

Part

icle

Cou

nt [P

cs./1

0mL]

0

50

100

150

200

250

300

350

400

450

500

PVDV 1

0～350 700～1050 1000000 2000000

0.1μm filter

Test sample

Pure Water

Particle Counter

DV 2

Pinch Valves

Pinch Valve HP Particle Generation TestPinch Valve demonstrates low particle generation

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Ability to Fully FlushHigh DurabilityFlow Control tested toover 1 Million cycles

Pinch Valves

Electric Pinch Valve for Flow Control

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Pinch Valves


0100200300400500600700800900

1000

0 20 40 60 80 100Valve Travel (%)

Flow

Rat

e (m

L/m

in)

Accurate Linear Performance

Asahi/America, Inc.


Pinch Valves


0

100

200

300

400

500

600

0 50 100 150 200 250 300 350 400Time (sec)

Flow

Rat

e (m

L/m

in) Actual Flow

Target Flow

Fast response time and high repeatability

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Pinch Valves

Pinch Valve for Back Pressure ControlControls back pressure from equipment loop with the ability to fully flush

Slurry

CMP CMP CMP

Pinch Valve

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Diaphragm ValvesDurability in Slurry

Low – Medium Lifespan

Varies Greatly by Manufacturer


Causes Cohesion

Valve Function

On/Off, Throttling

Cost vs Performance

Lower Cost, Performance Based on Cycle Life

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Multiport ValvesDurability in Slurry

Low – Medium Lifespan

Varies Greatly by Manufacturer


Small Effect on Cohesion

Valve Function

Combo Valves, Manifolds, Zero-Dead Leg Valves

Cost vs Performance

Good Cost and Performance

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OPEN CLOSE

Multiport Valves

Ability to Fully FlushNo Dead Leg

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Slurry Close Open Close

Polishing Flushing OFF

CMP

DIW

Deadleg

Multiport Valve Application

Multiport Valves

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Multiport Valves

Multiport Combo ValvesIncorporates shutoff valve for DI rinse

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Multiport Valves

Multiport Combo ValvesAbility to Fully FlushEliminates Fittings and Dead SpaceAllows Media to Continually Recirculate

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Multiport Valves

Compact DesignEliminates Fittings and TubingAbility to Fully FlushCompact Design

Multiport Combo Valves

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Final AdviceAsk the valve manufacturer for slurry test data

Discuss your application with the manufacturer for optimum product selection

Ask the manufacturer if they can provide a product customized to your application

Slurry Valves

Asahi/America, Inc.


Valve Selection Criteria for CMP SlurryAdam Herbert

Asahi/America, Inc.

Thank you for your time!

valve selection criteria for cmp...

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