UV Lamp SOPPage of

Revision 1-051511

UV Lamp SOP

Scope

This document describes the operating procedures for the UV lamp.

Table of Contents1.Scope12.Table of Contents13.Reference Documents13.1Referenced within this Document13.2External Documents14.Equipment and/or Materials15.Safety16.Setup Procedures27.UV Lamp Procedure27.3Set timer.27.4Place Wafer/Sample27.5Run Process27.6Shutdown38.Revision History3

Figure 1, Main Power Switch2

Figure 2, Instrument Panel3

Reference Documents

Referenced within this Document

None.

External Documents

Include any external documents referenced within this SOP.

Equipment and/or Materials

UV Lamp.

UV Tape.

Wafer/ Sample.

Frame.

Safety

Follow all Nanofab safety procedures.

Setup Procedures

UV Lamp Start Up

Turn the Main Power switch ON. See Figure 1, Main Power Switch.

(Figure 1, Main Power Switch)

UV Lamp Procedure

Check Power is on.

Power light will be lit, Figure 2, Instruments Panel.

Turn UV Lamp on.

Press the UV ON button. See Figure 2.

Wait approximately 5 minutes for UV lamp to warm.

Make sure you can see reflection of the bulb.

UV Lamp is ready once UV STB button is lit. See Figure 2.

Set timer.

1-4 minutes is optimal.

Place Wafer/Sample

Open lid.

Put wafer/sample on lamp face up (with UV tape on bottom).

Close lid.

Run Process

Push Start button. See Figure 2.

Wait for timer. See Figure 2.

Lift lid.

Remove Sample

Shutdown

Turn UV Lamp off. See Figure 2.

Turn Main Power Switch off.

(Power LightUV ON SwitchUV STB IndicatorUV OFF ButtonRemaining Process Time IndicatorStart ButtonTimer Set-up Figure 2, Instrument Panel)

Revision History

Rev

Date

Originator

Description of Changes

1

15 May 2011

Joe Passman