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THIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 1 Tom Metzger TRUMPF Scientific Lasers 05.-07.11.2018 Source Workshop Talk S35 ULTRAFAST THIN-DISK AMPLIFIERS

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Page 1: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018 1

Tom Metzger

TRUMPF Scientific Lasers

05.-07.11.2018

Source Workshop

Talk S35

ULTRAFAST THIN-DISK AMPLIFIERS

Page 2: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.201823.07.2018THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential

1. Introduction

2. Thin-Disk Laser Technology

3. Thin-Disk Regenerative Amplifiers

4. Nonlinear Compression

5. Multipass Amplifiers

6. Summary

2

Content

Page 3: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.201823.07.2018THIN-DISK AMPLIFIERS, Tom Metzger

THIN-DISK AMPLIFIERS

■ Confidential

1. INTRODUCTION

3

Page 4: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Applications & Motivation

Applications for High Average Power Ultrafast Amplifiers

• Inverse Compton Scattering (X-Ray Generation)

Graves et al., “Compact x-ray source based on

burst-mode inverse Compton scattering at 100 kHz”,

Phys. Rev. ST Accel. Beams 17, 120701 (2014)

• Optical Parametric Chirped Pulse Amplification

Prinz et al., “Thin-disk pumped optical parametric chirped pulse

amplifier delivering CEP-stable multi-mJ few-cycle pulses at 6 kHz”,

Opt. Express 26, 1108 (2018)

• HHG, EUV and X-Ray Generation

Rousse et al., “Efficient K x-ray source from femtosecond laser-produced plasmas“,

Phys. Rev. E 50, 2200 (1994) – Reagen et al., "High-average-power, 100-Hz-rep.-rate,

tabletop soft-x-ray lasers at sub-15-nm wavelengths, “Phys. Rev A 89, 053820 (2014)

Page 5: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.201823.07.2018THIN-DISK AMPLIFIERS, Tom Metzger

THIN-DISK AMPLIFIERS

■ Confidential

2. THIN-DISK LASER TECHNOLOGY

5

Page 6: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Disk Laser Principles (Prof. Giesen 1994)

6

Diameter of pumped area >> disk thickness

+ uniaxial heat flux: Low thermal lensing High brightness

+ Low brightness constraints for pump diodes

+ High gain saturation: Insensitive to back reflections

+ Scalability by increase of beam cross section

+ Negligible nonlinearities at high peak powers

Front Side:

Pumping

Back Side:

Cooling

r

T

Brilliant

Output

disk

diamond

Page 7: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Optical setup of cw disk laser (>10kW, Yb:YAG, 1030 nm)

Pump Unit

„Cavity“

for efficient pump

light absorption

OC Mirror

Resonator

Laser Disk

„Cooling Finger“

HR Mirror

Page 8: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Typical Ultrafast Amplifier Schematic

Regenerative thin-disk amplifier:1030 nm; 1ps

Energy + Power (200mJ, 1kW)

Low Energy (2mJ, 200W)

Medium Energy (50mJ, 200W)

Page 9: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.201823.07.2018THIN-DISK AMPLIFIERS, Tom Metzger

THIN-DISK AMPLIFIERS

■ Confidential

3. THIN-DISK REGEN AMPLIFIERS

9

Page 10: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Dira 500-10 (600W; 70mJ; <1ps; M² < 1.4)

10

seed laser amplifier cavitythin-disk laser head compressorelectronics

Picture of the System at TSL

Page 11: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Dira 500-10 (600W; 70mJ; <1ps; M² < 1.4)

11

Measurements M² = 1.2

Page 12: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Dira 500-10 (600W; 70mJ; <1ps; M² < 1.4)

12

Measurements

Page 13: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

High Power Amplifier >1kW (200mJ; 5kHz; 800fs; M² = 1.3)

13

Page 14: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018 14

• M. Schultze, C. Wandt, S. Klingebiel, C. Teisset, M. Häfner, R. Bessing, T. Herzig, S. Prinz, S. Stark, K. Michel, and T. Metzger,

“Toward Kilowatt-Level Ultrafast Regenerative Thin-Disk Amplifiers,” in Lasers Congress 2016 (ASSL, LSC, LAC), OSA Technical

Digest (online) (Optical Society of America, 2016), paper ATu4A.4.

• T. Nubbemeyer, M. Kaumanns, M. Ueffing, M. Gorjan, A. Alismail, H. Fattahi, J. Brons, O. Pronin, H. Barros, Z. Major, T. Metzger,

D. Sutter, and F. Krausz, “1kW, 200mJ picosecond thin-disk laser system,” Opt. Lett. 42, 1381-1384 (2017).

Dira 750/1000-200 (1kw, 200mJ, <1ps)

Page 15: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.201823.07.2018THIN-DISK AMPLIFIERS, Tom Metzger

THIN-DISK AMPLIFIERS

■ Confidential

4. NONLINEAR COMPRESSION IN A HERRIOTT CELL

15

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THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Nonlinear Pulse Compression of ~1ps output of thin-disk lasers

16

Spectral broadening via SPM in a Herriott-Cell

0.9ps 115fs

300W, 40MHz, 7.5µJ

0.9ps 170fs

375W, 10MHz, 37.5µJ

Opt. Lett. 41, 4511 (2016)

Opt. Expr. 25, 20502 (2017)

Idea:

Consecutively foci inside a gas filled cell to

increase nonlinearities & to broaden the

spectrum via self phase modulation (SPM). Final

compression with chirped mirrors or gratings

Page 17: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018 17

Simulation Results for 200mJ; 750fs

Neon

100 mbar

200mJ

750fs

21

input

output

input

output

Temporal pulse shape Spectral distribution

Page 18: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

21 Round Trips

18

Simulation Results for 200mJ; 750fs

21

Typical spectrum for SPM, very clean

Spectral phase of very good nature

Straight forward to compress

Compressed pulse duration (65fs) a little too long

Neon

100 mbar

200mJ

750fs

Page 19: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.201823.07.2018THIN-DISK AMPLIFIERS, Tom Metzger

THIN-DISK AMPLIFIERS

■ Confidential

5. MULTIPASS AMPLIFIER

19

Page 20: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Multipass Cell

20

Pumphead

Disk

Mirror Array 1m

Page 21: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Multipass Cell

21

>1.3kW

> 4mJ (CPA-free)

Beam Quality:

M² = 1.4

Seed Source with 100W (TruMicro 5000)

TruMicro 5000

100W, 300 kHz, 330µJ, 1ps

/4

Multipass Cell

18 passes

HRTFP

Output

Page 22: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

TruMicro 7000

1kW, 10 kHz, 100mJ, 10ns

Multipass Cell

22

Seeding with 1kW of average power (TruMicro 7000)

OutputMultipass Cell

18 passes

3kW output power @ 10kHz

Pulse duration ~10ns

Beam quality M² ~ 11

Extr

acte

d

7kW Seed:

20kW output power in cw

Multimode

Page 23: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

Nonlinear compression experiments: scaling the energy

23

Combine Regen (1kW, 200mJ, 500fs) with multipass cell

Shorten the pulse duration to ~50fs (200mJ, 5kHz, ongoing)

Scale to 400mJ; 3kW; 1ps <50fs (end of 2020)

Coherent combining or further Multipass Amplifiers towards

1J; <50fs; 7-8kW seem feasible

Multipass amplifier

Page 24: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.201823.07.2018THIN-DISK AMPLIFIERS, Tom Metzger

THIN-DISK AMPLIFIERS

■ Confidential

6. SUMMARY

24

Page 25: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018 25

Summary

▪ Regen. amplifier: 200 mJ; 1kHz (standard)

500W ; 6-100 kHz (standard)

1kW; 5-100 kHz (standard – new goal 500fs)

▪ Nonlin. Compression: first ideas for 200mJ (project has started)

▪ Multipass amplifier: 1 kHz; 1 J; ~2 ps (development - project towards multi-kW)

▪ OPCPA: µJ energies (standard)

mJ energies (custom design possible)

Page 26: ULTRAFAST THIN-DISK AMPLIFIERS - EUV LithoTHIN-DISK AMPLIFIERS, Tom Metzger Confidential 23.07.2018 Nonlinear Pulse Compression of ~1ps output of thin-disk lasers 16 Spectral broadening

THIN-DISK AMPLIFIERS, Tom Metzger ■ Confidential 23.07.2018

TRUMPF Scientific Lasers GmbH + Co. KG

Thomas MetzgerCTO

Contact

■ ConfidentialTHIN-DISK AMPLIFIERS, Tom Metzger 23.07.2018

[email protected]

+49 89 9622888 0960

Feringastr. 10a

85774 Unterföhring

Germany

Contact

TRUMPF Scientific Lasers GmbH + Co. KG

Dr. Thomas Metzger

CTO