ultra ion implanters · 2016. 4. 20. · 3 82726 phps vented 6-32 x 1/4”, sst no oem reference 8...

G-30-011AH12 Rev 02

PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

A Resource for Semiconductor ManufacturersIllustrated Parts Guide for

Axcelis Ultra Ion Implanters

mailto:[email protected] http://www.glemco.com

G-30-011AH12 Rev 02

A Resource for Semiconductor Manufacturers

2 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598

* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.

Item P/N Description OEM QTY1 82415 6-32 x 1/2” SHCS, SST 4400100 82 83353V O-Ring -453, Viton® 3500179 13 99697 GSD Ultra Source Mesh, Small, Tungsten 170008470 14 99698 GSD Ultra Source Mesh, Large, Tungsten 170008480 75 99723 Shield Ultra 4.5/5.5, Graphite 17008490 1

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Components for Ultra Source Mounting Flange


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 99035A Spring, Inconel 4001167 / E40000001 42 99401B Insulator Mounting Block Set, includes block & 4 SHCS, 6-32 X 1/2”, SST 172878703 99403 Repeller Screw, Molybdenum 17121770 14 99405 Repeller Set Screw, Molybdenum 17121760 15 99406 Repeller, Molybdenum 17121740 16 99409AW85 Cathode Repeller, Low Energy, Tungsten 17355290 17 99412 Repeller Insulator 17121850 / 17E158 28 99477A GSD ELS Filament , .40 17287850 19 99564 Arc Chamber, 50mm, Non-Vap, Keyed 17386180 110 99569 LE Arc Slit Face Plate, 1 Pc, Molybdenum 17355280 111 99574 Repeller Mounting Plate, LE, Graphite 17E4169 112 99699 Retainer Pin, Ultra, Molybdenum 17D6403 413 99729 Spacer, Eterna, Molybdenum 17357050 114 99730 Filament Clamp Eterna, Molybdenum 17390200 215 99731 Cathode, Ultra - Tungsten 17355270 116 99732 Insulator Cover, Molybdenum 17D8110 217 99734 Filament Feed Strap, Eterna 17356020 218 99739 Top Mount, Arc Chamber, Ultra, Molybdenum 170008950 219 99740 Mtg. Plate, Cathode Keyed Repeller, Graphite 170014140 120 B99401B Insulator Mounting Block Only - Screws not included 17287870 1

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Components for Ultra Source, 50mm System


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 8A928 Knurled Thumb Screw No OEM Reference 22 82414 SHCS 6-32 X 7/16”, SST No OEM Reference 23 99176 Ball Joint, Graphite 17021591 14 99177 SKT Joint 17033150 15 99401B Insulator Mounting Block Set, includes block & 4 SHCS, 6-32 X 1/2”, SST 172878706 99409AW85 Cathode Repeller, LE, Ultra, HE3, HC3, 85% Dense Tungsten 17355290 17 99412 Repeller Insulator 17121850 28 99477A GSD ELS Filament, .040 17287850 REV.A 19 99702 Repeller, Ultra, Tungsten 17334410 110 99703 Repeller Mounting Plate 17362990 111 99723A Shield, Ultra 60mm 170008490 112 99730 Clamp, Filament, Eterna 17390200 213 99731 Cathode, Ultra 17355270 114 99732 Insulator Cover 17D8110 215 99740 Mounting Plate, Cathode Keyed Repeller 170014140 REV.B 116 99787 Arc Chamber, Non-Vaporizer, Keyed Ultra 60mm, Molybdenum 17383970 117 99787W Arc Chamber Non-Vaporizer, Keyed, Ultra 60mm, Tungsten 17383980 18 99788 Arc Slit, Ultra, 60mm, Molybdenum 17369050,REV.C 119 99788W Arc Slit, Ultra, 60mm, Tungsten 17369050,REV.C20 B99401B Insulator Mounting Block Only - Screws not included 17287870 1

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60mm Liner System


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 99724 Suppression Electrode Ultra 4.5” / 5.5” 170007090 12 99726 Ground Electrode, Ultra 4.5” / 5.5” 170007140 13 99727 Suppression Plate, Ultra, Graphite 170007100 14 99733 Insulator, Aluminum Oxide 170007110 25 99735 Tungsten Mesh, Ultra, Left 17007190 16 99736 Tungsten Mesh, Ultra, Right 170007170 17 99745 Ground Electrode Carrier, Ultra 17007150 18 99884-1 Mesh Cover, Ultra, Right 170007200 19 99884-2 Mesh Cover, Ultra, Left 170007210 1

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Components for Electrode Manipulator Assembly


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 30712G Cup Shield, Graphite 170012790 12 83741 Ceramic Stand-off 2 Long x 1/2 DIA 8-32 3/8 Deep 5002280 13 99744 Liner, Outer Strike Plate, Graphite 17394850 14 99746 Liner, Ultra Beam Guide, Graphite 17394890 15 99749 Liner 2, Beam Guide, Ultra, Graphite 17394880 16 99750 Liner, Beam Guide, Ultra, Graphite 17395170 17 99761 Slide Plate,beam Tunnel Ultra, Graphite 17384620 28 99762 Center-line Beam Guide, Ultra, Graphite 170039120 29 99772 Liner Exit, Beam Guide, Graphite 17395160 210 99773 Top And Bottom Liner, Beam Guide Entrance, Graphite 17395140 211 99798 Extended Graphite Shield, Top and Bottom* 17320550 2

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Components for Ultra Beamline


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 99712 Aperture, Resolving, 8,14, +22, Graphite 17384500 12 99722 Shield, 4.5 / 5.5, Graphite 17384490 13 99742 Insulator, Variable Aperture Ultra, Aluminum Oxide 17E4902 3

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Components for Ultra Resolving Aperture Assembly


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 83271 O-Ring -371, Buna-N 3500006 12 99054 Ceramic Standoff Grade L5 5000132 33 99087 Standoff Insulator, Alumina 1744570 44 99716 Liner Flag Cup W/ Extension, Graphite 170021180 15 99741 Ultra Faraday M8 Carbon Screw 17349970 16 99748 Strike Plate, Serrated, Ultra, Graphite 17362740 17 99763 Upper Cover, Graphite 17358800 18 99764 Lower Cover, Graphite 17334460 19 99774 Rear Cover, Bias, Graphite 170012680 1

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Components for Ultra Faraday Flag


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 8A347 4-40 x 1/4, VSHCS, Vented, 18-8 SST 4400601 122 82717 4-40 X 5/16, VSHCS, Vented, 18-8 SST E47000247 83 82726 PHPS Vented 6-32 X 1/4”, SST No OEM Reference 84 99054 Ceramic Standoff, 3/8” Dia X 3/8” Long X 6-32 Thread 5000132 45 99671 Serrated Plate, Graphite 17306390 26 99672 Arc Chamber Cover, PEF-XE, Graphite 17329170 17 99673 Shower Tube Aperture, Graphite 17304670 18 99717 PEF Shower Tube Base, Graphite 17394570 19 99718 Shower Tube Plate, PEF-XE 200mm, Graphite 17394560 1

10 99728 Strike Plate, PEF-XE, Graphite 170010550 111 99743 Shower Tube Aperture, II PEF-XE, Graphite 170010540 1

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Components for Ultra PEF-XE Metric


G-30-011AH12 Rev 02




Item P/N Description OEM QTY1 8A347 4-40 x 1/4, VSHCS, Vented, 18-8 SST 4400601 122 82717 4-40 X 5/16, VSHCS, Vented, 18-8 SST E47000247 83 99671 Serrated Plate, Graphite 17306390 24 99672 Arc Chamber Cover PEF-XE, Graphite 17329170 15 99673 Shower Tube Aperture - Graphite 17304670 16 99677 Shower Tube Aperture II, Graphite 17304680 17 99677A Shower Tube Aperture II, Glemco Modified Design, Graphite 173046808 99717 PEF Shower Tube Base, Graphite 17394570 19 99718 Shower Tube Plate, PEF-XE 200mm, Graphite 17394560 1

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Components for Ultra PEF-XE Assembly


G-30-011AH12 Rev 02




Item P/N Description OEM1 99761 Side Plate, Beam Tunnel, Ultra, Graphite No OEM Reference2 99798A Extended Graphite Shield, Top and Bottom, Glemco Design No OEM Reference

Item P/N Description OEM1 8A892 Shoulder Screw, 1/4 X 3/16, 10-32 THD No OEM Reference2 99844A Suppression Wire Spring Assembly 1100138703 99846 Electrode Carrier Mounting Block 17006100

Glemco redesigned the spring of P/N 99844A for improved conductivity and longer use.

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Alternate Components for Axcelis Ultra Ion Implanters

Electrode Carrier Plate Alignment Upgrade

Ultra Beamline


G-30-011AH12 Rev 02




Item P/N Description OEM1 99716A-1 Replaceable Liner Flag Cup Extension No OEM Reference2 99716A-2 Liner Flag Cup with Extension No OEM Reference3 99716A-3 Liner Flag Cup with Extension No OEM Reference

Item P/N Description OEM1 99712A Modified Aperture, Resolving, 8, 14, +22 173845002 99722A Suppression Aperture Roughened Sufaces To Prevent Flaking 17384490

Surface Finish

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Ultra Faraday Flag

P/N 99716A3PC Liner Flag Cup with ExtensionGlemco’s improved design reduces flaking and shorting, while lowering replacement cost.

Ultra Resolving Aperture Assembly


G-30-011AH12 Rev 02




Item P/N Description OEM1 99671A Side Plate, Graphite No OEM Reference2 99717A Shower Tube Base, PEF, Graphite No OEM Reference3 99718A Shower Tube Base, PEF, Graphite No OEM Reference

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Ultra PEF-XE Shower Tube Assembly Upgrade


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ultra ion implanters · 2016. 4. 20. · 3 82726 phps vented 6-32 x 1/4”, sst no oem reference 8...

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