TXZ Gas CabinetProduct Enhancement

Spire

Watlow Temperature Controller

The current temperature controllers have been obsoleted from the OEM.

Spire has sourced a replacement Watlow controller that is the current release from Watlow.

The new Watlow has the same functionality of the original.

N2 Heater and Heated Gas line Temperature Controller

Watlow 965 series AMAT PN: 3930-01043

ObsoleteCurrent

Watlow EZ Zone PM series

Ampule Heater Temperature Controller

Obsolete Current

Watlow 988 series AMAT PN: 3930-01092

Watlow EZ Zone PM series

Improvements: The new Watlow controller offers greater temperature

control with True-Tune+ adaptive PID control.

Includes the time saving EZ Zone configurator software that allows for easier parameter setup.

Capable of transmitting temperature and all setup parameters via a serial data connection. Allows for greater process control by connecting to the fab’s constant monitoring equipment.

Conclusion:

The configuration settings on the Watlow will be setup to match the OEM requirement prior to shipping.

All new Watlow controllers will ship with the necessary hardware and instructions for installation in a TXZ cabinet with the obsolete unit.

Spire will be available to support this product via phone, email or in person.