thermal vapor deposition integrated glove box/vapor deposition systems
TRANSCRIPT
Thermal Vapor Deposition
• Integrated Glove Box/Vapor Deposition Systems
Integrated Glove Box/Vapor Deposition Systems
• Multi source system with glass bell jar
Integrated Glove Box/Vapor Deposition Systems
Multi source system with glass bell jar. Another view.
Integrated Glove Box/
Vapor DepositionSystems
View with Bell Jar removed showing:• Baseplate and sources • Substrate holder• Source shutter (open)• Rate monitor sensor
Integrated Glove Box/Vapor DepositionSystems
Integrated Glove Box/Vapor DepositionSystems
Front view, integration of control console to glove box.
Integrated Glove Box/Vapor DepositionSystems
Rear view, integration of control console to glove box.