the atlas semiconductor tracker abstract the atlas semiconductor tracker (sct) is presented. about...

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The ATLAS The ATLAS S S emi emi C C onductor onductor T T racker racker Abstract The ATLAS SemiConductor Tracker (SCT) is presented. About 16000 silicon micro-strip sensors with a total active surface of over 60 m 2 and with 6.3 million read-out channels are built into 4088 modules arranged into four barrel layers and nine disks covering each of the forward regions up to pseudo-rapidity of 2.5. Challenges are imposed by the hostile radiation environment with particle fluences up to 2x10 14 cm -2 1 MeV neutron NIEL equivalent and 100 kGy TID, the 25 ns LHC bunch crossing time and the need for a hermetic lightweight tracker. The solution adopted is carefully designed strip detectors operated at -7 o C, biased up to 500 V and read out by binary rad-hard fast BiCMOS electronics. A zero-CTE carbon fibre structure provides mechanical support. 30 kW of power are supplied on aluminium/Kapton tapes and cooled by C 3 F 8 evaporative cooling. Data and commands are transferred by optical links. Prototypes of detector modules have been built, irradiated to the maximum expected fluence and successfully tested. The detector is in full production now. This will be followed by integration starting in 2004 and installation in 2006 to match the LHC start-up in 2007. Marko Mikuž, University of Ljubljana & Jožef Stefan Institute, Ljubljana, Slovenia on behalf of the ATLAS SCT Collaboration Requirements provide precision space-points for robust particle tracking at intermediate inner detector radii back to back 40 mrad stereo angle 80 µm pitch strip sensors provide 16 µm x 500 µm resolution 4 barrel layers & 9 disks per end-cap hermetically cover solid angle up to η < 2.5 > 99 % single-plane efficiency for MIP’s detection stiff zero-CTE lightweight carbon fibre structure provides precision support for detector modules tight module building tolerances down to 5 µm frequency scanning interferometry on-line alignment system survive 10 years in LHC environment with up to 2x10 14 cm -2 NIEL and 100 kGy ionizing dose operation at -7ºC limits reverse bias current and suppresses reverse annealing detector reverse bias up to 500 V ensures full depletion and efficient charge collection detector and module irradiation to full dose as part of standard quality control Layout barrel: two daisy chained silicon sensors per module side with strips ~ in z-direction, tilted by 11º to the barrel, arranged by 12 on staves along z end-cap: three rings (inner, middle, outer) per fully populated disk, strips in r-direction, two sensors/side on outer & middle, one on inner Barrel # staves # modules 1 32 384 2 40 480 3 48 576 4 56 672 Total 2112 modules Disk 1 2 3 4 5 6 7 8 9 Rings M,O I,M, O I,M, O I,M, O I,M, O I,M, O M,O M,O O # modules 92 132 132 132 132 132 92 92 52 Total 2 x 988 = 1976 modules Detectors single-sided AC-coupled p + -n detectors with 768 strips processed on 285 µm thick high-resistivity 4” wafers > 99 % good strips spec, tested at manufacturer leakage current specs before and after full dose irradiations 6 detector types: 1 square – barrel, 5 wedge – end-cap ~ 20000 detectors procured from Hamamatsu (~ 85 %) and CiS (~ 15 %), all detectors in hand detector QA on every detector: visual inspection, I-V sample: C-V, full strip test, I stability excellent detector quality: 99.9 % good strips samples per batch irradiated to full dose I-V on all detectors S/N-V with β-source on sample QA: Detector current @ 350 V & number of strip defects I-V @ -18ºC after irradiation S/N-V after irradiation to 3x10 14 p/cm 2 ASIC’s ABCD – 128 R/O channels, bi-polar front-end & CMOS back-end, produced in biCMOS rad-hard DMILL process at ATMEL front-end with ~ 20 ns shaping, 50 ns double-pulse resolution, ~ 50 mV/fC gain discriminator with 8-bit programmable threshold and 4-bit per-channel adjustment in 4 selectable ranges 132 cell deep binary 40 MHz pipeline for L1 trigger latency, 24 cell derandomizing buffer storing 8 events R/O of compressed binary data via 40 MHz optical link radiation hardness tested with X-rays, protons, pions and neutrons meets specifications after full dose anomalous gain degradation observed with thermal neutrons – see N20-4 by I.Mandić procurement order placed under CERN-ATMEL frame contract with 26 % guaranteed yield acceptance testing at wafer level performed at CERN, UCSC and RAL yield problems in recent ATMEL runs ~ 85 % perfect chips in hand, CERN negotiating with ATMEL Log scale ! 9 w heels 9 w heels 5.6 m 1.04 m 1.53 m 9 w heels 9 w heels 5.6 m 1.04 m 1.53 m Barrel End-cap End-cap Modules building blocks 2 pairs of daisy-chained sensors glued to high thermal conductivity TPG substrate flexible circuit Cu/Kapton hybrid with 6 ASIC’s per side laminated on carbon-carbon substrate o barrel: wrap around over detector surface o end-cap: at detector edge, flex wrapped & laminated on substrate, see N44-4 by C. Ketterer glass pitch adapters for bonding from ASIC to detector barrel module assembly four production clusters: Japan, UK, US, Scandinavia, with 400-800 modules to produce per site ~ 750 modules produced up to date out of 2112 needed extensive mechanical & electrical QA very good quality: on average < 1 dead channel out of 1512 end-cap module assembly seven production clusters with distributed assembly / QA several clusters qualified for production problems with start-up due to delays in component delivery Barrel module End-cap module Performance binary – single bit digital – R/O electronics in experiment provides hit/no-hit information only figure of merit: MIP’s efficiency & noise occupancy vs. threshold specification: > 99 % efficiency & < 5 x10 -4 noise occupancy (NO) diagnostics: threshold scan and calibration charge injection: cumulative distributions – S-curves bench & system-test performance figures see N28-6 by R. Bates non-irradiated modules o gain ~ 55 mV/fC o noise ~ 1500 e ENC o noise occupancy @ 1 fC: ~ 10 -5 irradiated to 3 x 10 14 p/cm 2 > full dose in 10 years o gain ~ 30 mV/fC o noise ~ 1900-2100 e o operational threshold for 5 x 10 -4 NO: 1.0 – 1.2 fC test beam performance S-curve: 50 % point gives the gain, width the noise, both are extracted from erfc fit strip direction strip direction Exploded end-cap module view TPG spine silicon sensors pit c h adapter h y b r i d : 1 2 A S I C s o n w r a p p e d f l e x c i r c u i t a r o u n d C C s u b s t r a t e cooling points Noise occupancy SCT system-test: barrel (↑) & end-cap (↓) Schematic of SCT set-up in SPS H8 test beam Test beam efficiency & noise occupancy for non-irradiated (←) and irradiated (→) module operational range operational range Services & structures R/O, control and power 2 R/O & 1 clock/command fibre per module 1 power supply channel with cable/tape (17 leads) per module cooling ~ 30 kW of power, C 3 F 8 evaporative cooling @ ~ -20ºC active, thermally neutral thermal enclosure support structures carbon fibre barrels & cylinders with disks lots of small parts: inserts, brackets… (~40000 for barrel only) Two SCT barrels with module mounting parts (↑), end-cap cylinder with one out of nine disks(↓) Integration & schedule modules mounted on barrels @ Oxford & KEK barrels integrated & commissioned @ CERN modules mounted on disks and assembled into cylinders @ Liverpool & NIKHEF final end-cap commissioning @ CERN ATLAS integration schedule calls for SCT barrel available in December 2004 SCT end-caps available in March & May 2005 very tight schedule to meet ! SCT set-up in SPS H8 test beam in May 2003

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Page 1: The ATLAS SemiConductor Tracker Abstract The ATLAS SemiConductor Tracker (SCT) is presented. About 16000 silicon micro-strip sensors with a total active

The ATLAS The ATLAS SSemiemiCConductoronductor TTrackerracker

The ATLAS The ATLAS SSemiemiCConductoronductor TTrackerracker

AbstractThe ATLAS SemiConductor Tracker (SCT) is presented. About 16000 silicon micro-strip sensors with a total active surface of over 60 m2 and with 6.3 million read-out channels are built into 4088 modules arranged into four barrel layers and nine disks covering each of the forward regions up to pseudo-rapidity of 2.5. Challenges are imposed by the hostile radiation environment with particle fluences up to 2x1014 cm-2 1 MeV neutron NIEL equivalent and 100 kGy TID, the 25 ns LHC bunch crossing time and the need for a hermetic lightweight tracker. The solution adopted is carefully designed strip detectors operated at -7oC, biased up

to 500 V and read out by binary rad-hard fast BiCMOS electronics. A zero-CTE carbon fibre structure provides mechanical support. 30 kW of power are supplied on aluminium/Kapton tapes and cooled by C3F8 evaporative cooling. Data and commands are transferred by optical links.

Prototypes of detector modules have been built, irradiated to the maximum expected fluence and successfully tested. The detector is in full production now. This will be followed by integration starting in 2004 and installation in 2006 to match the LHC start-up in 2007.

Marko Mikuž, University of Ljubljana & Jožef Stefan Institute, Ljubljana, Sloveniaon behalf of the ATLAS SCT Collaboration

Requirements provide precision space-points for robust particle tracking

at intermediate inner detector radii back to back 40 mrad stereo angle 80 µm pitch strip

sensors provide 16 µm x 500 µm resolution 4 barrel layers & 9 disks per end-cap hermetically cover

solid angle up to η < 2.5 > 99 % single-plane efficiency for MIP’s detection stiff zero-CTE lightweight carbon fibre structure

provides precision support for detector modules tight module building tolerances down to 5 µm frequency scanning interferometry on-line alignment

system survive 10 years in LHC environment with up to 2x1014 cm-2

NIEL and 100 kGy ionizing dose operation at -7ºC limits reverse bias current and

suppresses reverse annealing detector reverse bias up to 500 V ensures full depletion

and efficient charge collection detector and module irradiation to full dose as part of

standard quality control

Layout barrel: two daisy chained silicon sensors per module side

with strips ~ in z-direction, tilted by 11º to the barrel, arranged by 12 on staves along z

end-cap: three rings (inner, middle, outer) per fully populated disk, strips in r-direction, two sensors/side on outer & middle, one on inner

Barrel # staves#

modules

1 32 384

2 40 480

3 48 576

4 56 672

Total 2112 modules

Disk 1 2 3 4 5 6 7 8 9

Rings M,OI,M,O

I,M,O

I,M,O

I,M,O

I,M,O

M,O M,O O

# modules

92 132 132 132 132 132 92 92 52

Total 2 x 988 = 1976 modulesDetectors

single-sided AC-coupled p+-n detectors with 768 strips processed on 285 µm thick high-resistivity 4” wafers

> 99 % good strips spec, tested at manufacturer leakage current specs before and after full dose

irradiations 6 detector types: 1 square – barrel, 5 wedge – end-cap ~ 20000 detectors procured from Hamamatsu (~ 85 %) and

CiS (~ 15 %), all detectors in hand detector QA on

every detector: visual inspection, I-V sample: C-V, full strip test, I stability

excellent detector quality: 99.9 % good strips samples per batch irradiated to full dose

I-V on all detectors S/N-V with β-source on sample

QA: Detector current @ 350 V & number of strip defects

I-V @ -18ºC after irradiationS/N-V after irradiation to 3x1014 p/cm2

ASIC’s ABCD – 128 R/O channels, bi-polar front-end & CMOS back-end,

produced in biCMOS rad-hard DMILL process at ATMEL front-end with ~ 20 ns shaping, 50 ns double-pulse resolution,

~ 50 mV/fC gain discriminator with 8-bit programmable threshold and 4-bit per-

channel adjustment in 4 selectable ranges 132 cell deep binary 40 MHz pipeline for L1 trigger latency, 24

cell derandomizing buffer storing 8 events R/O of compressed binary data via 40 MHz optical link

radiation hardness tested with X-rays, protons, pions and neutrons meets specifications after full dose anomalous gain degradation observed with thermal neutrons –

see N20-4 by I.Mandić procurement

order placed under CERN-ATMEL frame contract with 26 % guaranteed yield

acceptance testing at wafer level performed at CERN, UCSC and RAL

yield problems in recent ATMEL runs ~ 85 % perfect chips in hand, CERN negotiating with ATMEL

Log scale !

9 wheels

9 wheels

5.6 m

1.04

m

1.53 m9 wheels

9 wheels

5.6 m

1.04

m

1.53 m

Barrel End-capEnd-cap

Modules building blocks

2 pairs of daisy-chained sensors glued to high thermal conductivity TPG substrate

flexible circuit Cu/Kapton hybrid with 6 ASIC’s per side laminated on carbon-carbon substrateo barrel: wrap around over detector surfaceo end-cap: at detector edge, flex wrapped & laminated

on substrate, see N44-4 by C. Ketterer glass pitch adapters for bonding from ASIC to detector

barrel module assembly four production clusters: Japan, UK, US, Scandinavia,

with 400-800 modules to produce per site ~ 750 modules produced up to date out of 2112 needed extensive mechanical & electrical QA very good quality: on average < 1 dead channel out of

1512 end-cap module assembly

seven production clusters with distributed assembly / QA

several clusters qualified for production problems with start-up due to delays in component

delivery

Barr

el m

od

ule

En

d-c

ap

mod

ule

Performance binary – single bit digital – R/O electronics

in experiment provides hit/no-hit information only figure of merit: MIP’s efficiency & noise occupancy vs.

threshold specification: > 99 % efficiency & < 5 x10-4 noise

occupancy (NO) diagnostics: threshold scan and calibration charge

injection: cumulative distributions – S-curves

bench & system-test performance figures see N28-6 by R. Bates

non-irradiated moduleso gain ~ 55 mV/fCo noise ~ 1500 e ENCo noise occupancy @ 1 fC: ~ 10-5

irradiated to 3 x 1014 p/cm2 > full dose in 10 yearso gain ~ 30 mV/fCo noise ~ 1900-2100 e o operational threshold for 5 x 10-4 NO: 1.0 – 1.2 fC

test beam performance

S-curve: 50 % pointgives the gain, widththe noise, both are extracted from erfc fit

strip direction

strip direction

Exp

lod

ed

en

d-c

ap

m

od

ule

vie

wTPG spine

silicon sensors

pitc

h ad

apte

r

hyb

rid: 1

2 A

SIC

’s o

nw

rap

ped

flex c

ircu

it aro

un

d C

C s

ub

stra

te

cooling points

Nois

e o

ccu

pan

cy

SCT system-test:barrel (↑) & end-cap (↓)

Schematic of SCT set-up in SPS H8 test beam

Test beam efficiency & noise occupancy for non-irradiated (←) and irradiated (→)

module

operationalrange

operationalrange

Services & structures R/O, control and power

2 R/O & 1 clock/command fibre per module 1 power supply channel with cable/tape (17 leads) per

module cooling

~ 30 kW of power, C3F8 evaporative cooling @ ~ -20ºC active, thermally neutral thermal enclosure

support structures carbon fibre barrels & cylinders with disks lots of small parts: inserts, brackets… (~40000 for

barrel only)

Two SCT barrels with module mounting parts (↑), end-cap cylinder with one out of nine disks(↓)

Integration & schedule modules mounted on barrels @ Oxford & KEK barrels integrated & commissioned @ CERN modules mounted on disks and assembled into

cylinders @ Liverpool & NIKHEF final end-cap commissioning @ CERN ATLAS integration schedule calls for

SCT barrel available in December 2004 SCT end-caps available in March & May 2005

very tight schedule to meet !

SCT set-up in SPS H8 test beam in May 2003