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The top documents tagged [tokyo electron]
RF Modeling of Sub-100 nm CMOS S.Yoshizaki 1, M.Nakagawa 1, W.Y.Chong 1, Y.Nara 2, M.Yasuhira 2*, F.Ohtsuka 2, T.Arikado 2**, K.Nakamura 2, K.Kakushima
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Internship-based degrees in applied physics with microelectronics emphasis
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Dr. Pradeep Haldar Professor and Head, NanoEngineering Constellation Director, Energy & Environmental Technology Applications Center (E2TAC) Executive
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INVESTIGATIONS OF MAGNETICALLY ENHANCED RIE REACTORS WITH ROTATING (NON-UNIFORM) MAGNETIC FIELDS
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ELECTRON AND ION ENERGY DISTRIBUTIONS IN 2-FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS
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